201219024 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種視網膜刺激裝置及其製造方 法’特収有關於-種恢復因黃斑症所導致的^明之視 網膜刺激裝置及其製造方法。 【先前技術】 目前，常見的針對視網膜進行刺激的裝 利船，风836所揭露之裝置，係將多個電極單^言^ 於-支樓平面上，在利用接腳（pin)直接將此支樓平面 固定於鞏膜之上。而由於此習知技術由於纽完全貼合 眼球的曲度，造成不均勾刺激臨界值及部份電極需要: 相當^的電流對視網膜進行刺激，無法達到高解析 列’高效率’低功率之要求。 另外，習知的視網膜進行刺激裝置如美國 US7,035,692，也缺乏㈣光元件（CMQS )、軸裳 刺激電極整合的特點，造成刺激視網膜的效果不佳\ _因此，提供一個能夠符合眼球曲度，並又能整合 元件的視網膜刺激裴置，就顯的相當重要了。 σ 201219024 【發明内容】 有鑑於上述習知技藝之問題，本發明之目的就是在 提供-種視_刺激裝置料製造方法， 的曲度並整合各元件於可撓性封裝上，以解決習：= 膜刺激裝置耗能過大以致於損傷其他細胞的問題。 根據本發明之目的，提出—種視網膜刺激裝置， 含複數個晝素單元及一可撓性封裝。可撓性封裝係用以201219024 VI. Description of the Invention: [Technical Field] The present invention relates to a retinal stimulating device and a method of manufacturing the same relating to a retinal stimulator for recovering macular degeneration and a method of manufacturing the same. [Prior Art] At present, the common device for stimulating the retina, the device disclosed by Wind 836, is to use a plurality of electrodes on the plane of the branch, and directly use this pin. The flat floor is fixed above the sclera. Because this technique is completely suitable for the curvature of the eyeball, the threshold value of the uneven hook and the partial electrode need to be: The current of the ^ is stimulated by the current, and the high-resolution column 'high efficiency' and low power cannot be achieved. Claim. In addition, the conventional retinal stimulation device, such as US 7,035,692, also lacks the characteristics of (4) optical components (CMQS) and axial stimulation electrodes, resulting in poor stimulation of the retina. _ Therefore, providing an eye curvature It is also very important to integrate the retinal stimuli of the component. σ 201219024 SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, the object of the present invention is to provide a curvature of the method of manufacturing a ray-stimulation device and integrate the components on the flexible package to solve the problem: = The membrane stimulator consumes too much energy to damage other cells. In accordance with the purpose of the present invention, a retinal stimulating device comprising a plurality of halogen units and a flexible package is provided. Flexible package
承載晝素單元及電源模組，。各晝素單元係包含二光感 測器、-訊號處理及電驅動單元及—刺激電極。其中"; 光感測益係感應入射光並產生一感測訊號，冑號處理及 電驅動單元係接收並處理感測訊號而對應產生—電刺激 波形，而刺激電極係接收電刺激波形而 電流，用以刺激一視網膜細胞。 產生刺激 其中，視網膜刺激裝置係設置在一神經節細胞 (ganglion ceii)上，且光感測器與訊號處理及電驅動單 元係與刺激電極設置在一中間層之不同側。 其中，視網膜刺激裝置係設置在一神經節細胞 f ganglion cell)上，且光感測器與訊號處理及電驅動單 元係與刺激電極設置在一中間層之同一侧。 其中，視網膜刺激裝置係設置在一雙極細胞（bipolar cell )與一桿和視錐細胞（rods and cones )之間，且光 感測器與訊號處理及電驅動單元係與刺激電極設置在一 中間層之不同侧。 其中’視網膜刺激裝置係設置在一雙極細胞（bipolar 201219024 cell)與一桿和視錐細胞（r〇ds and cones)之間，且光 感測Is與§fl7虎處理及電驅動早元係與刺激電極設置在·一 中間層之同一側。 其中，視網膜刺激裝置更包含一電源模組連接該晝 素單元，而電源模組係經由無線充電後提供晝素單元電 力。 其中，各晝素單元之間係設有一交換孔（perf〇rati〇n hole )’用以在視網膜刺激裝置的上下兩側流通氣體或組 織液。 其t，各訊號處理及電驅動單元係以一導線彼此電 性連接用以父換各感測訊號以進行背景光強度調整。 其中，各刺激電極係具有一防護環（guardring)設 於各刺激電極下，用以區域性刺激視網膜細胞。 其中，各訊5虎處理及電驅動單元更包含一感測電 路’感測，路係偵測視網膜細胞的型態，且各訊號處理 及電驅動單兀係根據視網膜細胞的型態控制刺激電極刺 激視網膜細胞。 其中’刺激電極係為凸出的傘狀。 凸出部係不 其中，各凸出傘狀的刺激電極之複數個 在同一平面上。 其中’視網膜刺激裝置更包含—遙控裝置，遙控裝 ^無線通訊的方式連接畫素單元，並對 仃延距控制。 201219024 其中，遙控裝置以無線通訊的方式連 ^光通訊、射頻通訊或無線電通訊的方 /、中，可撓性封裝係為一生物相容材料。 其中，生物相容材料係包含聚酰亞胺、 聚二甲基錢院（PDMS)或對二甲苯（pa咖〇。 ，、根據本發明之目的’另提出一種視網膜刺激裝置之 製造方法’其包含提供—基板，並於基板上整合複數個 汛唬處理及電驅動單元、複數個光感測器以及複數個刺 激電極以形成複數個畫素單元。接著於刺激電極上設置 -導電層’並於晝素單元上的其他區域設置一第一障礙 層再於帛障礙層上設置一第一生物相容材料層，並 設置-第-握持基板於第—障礙層上。之後去除基板， 並露出訊號處理及電驅動單元及光感測器，再設置一第 二障礙，於露出的訊號處理及電驅動單元及光感測器 上。接著於各畫素單元間設置複數個交換孔後，設置一 第二生物相容材料層於第二障礙層上，且第一生物相容 材料層與第二生物相容材料層係包覆各晝素單元。之後 便设置一第二握持基板於第二生物相容材料層上，並去 除部分的第一生物相容材料層以露出刺激電極上的導電 層’最後則去除第二握持基板。 其中，本方法更包含於各訊號處理及電驅動單元間 設置一導線以彼此電性連接，用以交換各感測訊號以進 行背景光強度調整。 201219024 其中，本方法更包含設置一電源模組連接晝素單 元，用以充電後提供晝素單元電力。 其中’光感測器係感應入射光並產生一感測訊號， 訊號處理及電驅動單元係接收並處理感測訊號而對應產 生一電刺激波形’而刺激電極係接收電刺激波形而對應 產生一刺激電流，用以刺激一視網膜細胞。 其中，本方法更包含於各刺激電極下設置一防護環 (guard ring )’用以區域性刺激各視網膜細胞。 其中，本方法更包含於各訊號處理及電驅動單元中 设置一感測電路，用以偵測視網膜細胞的型態，且各訊 號處理及電驅動單元係根據視網膜細胞的型態控制刺激 電極刺激視網膜細胞。 其中，刺激電極係為凸出的傘狀。 其中，各凸出傘狀的刺激電極之複數個凸出部係不 在同一平面上。 其中，本方法更包含設置一遙控裝置以無線通訊的 式連接晝素單元’並對晝素單元進行遠距控制。 其中，遙控裝置以無線通訊的方式連接該晝素單元 :::以光通訊、射頻通訊或無線電通訊的方式進行無 & 中第一生物相容材料層及第二生物相容材料 係為一可撓性材料。 付層 其中’可撓性材料係包含聚酰亞胺（p〇lyimide) _ 201219024 曱基矽氧烷（PDMS)或對二曱苯（parylene)。 其中，第一障礙層及第二障礙層係為碳化矽（siC) 或類鑽碳薄膜（DLC Film)。 承上所述，依本發明之視網膜刺激裴置及其製造方 法，其可具有一或多個下述優點： (1) 此視網膜刺激裝置及其製造方法可藉由在可撓式 基板上浮貼眼球，藉此可降低刺激視網膜的電流，避免 Φ 細胞之毀損。 (2) 此視網膜刺激裝置及其製造方法可藉由整合光感 測器、驅動裝置與刺激電極於一個晝素單元，藉二可解 決感測及刺激效果不佳的問題。 【實施方式】 凊參閱第1圖，其係為本發明之視網膜刺激裝置之 製造方法之流程圖。如第1圖所示，本發明之視網膜刺 # 激裝置之製造方法包含下列步驟： (510) 提供一基板，並於基板上整合複數個訊號處 理及電驅動單元、複數個光感測器以及複數個刺激電極 以形成複數個晝素單元； (511) 於刺激電極上設置一導電層，並於畫素單元 上的其他區域设置一第一障礙層，再於第一障礙層上設 置一第一生物相容材料層； (512) 設置一第一握持基板於第一障礙層上； 201219024 (513) 去除基板，並露出訊號處理及電驅動單元及 光感測器； (514) 5又置一第二障礙層於露出的訊號處理及電驅 動單元及光感測器上； (515) 於各晝素單元間設置複數個交換孔； (516) D又置一第二生物相容材料層於第二障礙層 上，且第一生物相容材料層與第二生物相容材料層係包 覆各畫素單元； (517) δ又置一第二握持基板於第二生物相容材料層 上； (s 18 )去除部分的第一生物相容材料層以露出刺激 電極上的導電層；以及 (S19)去除第二握持基板。 請同時參閱第2A〜2E圖，其係為本發明之視網膜 刺激裝置之製造方法之實施示意圖。如圖所示，在步驟 (I10)中，係於基板1〇上整合複數個訊號處理及電驅 動單元201複數個光感測器200以及複數個刺激電極 2〇2以形成複數個晝素單元2〇。本步驟係可在矽晶圓（基 板ίο)上，以標準的或是些微修改的半導體CM〇s製程 製作，或以CMOS影像感測器（CIS)的製程進行:在 —些較佳的實施例中，光感測器係可為但不限於pN Junction或是適度的進行掺雜製程。其中，該些刺激電 極202上係可但不限於進一步覆蓋一鈦鎳合金，且該些 刺激電極202最後是暴露在外的。 - 201219024 在步驟（S11)中，於刺激電極2〇2上 # 2或氧化鐵（Fe〇X)等，用以提供較佳的刺激電 ^ 〃第一生物相容材料層30之間的介面關係。其Carrying a halogen unit and a power module. Each element unit includes a dimming sensor, a signal processing and an electric driving unit, and a stimulating electrode. Wherein, the light sensing unit senses the incident light and generates a sensing signal, and the nickname processing and the electric driving unit receive and process the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode receives the electrical stimulation waveform. Current to stimulate a retinal cell. Stimulation is generated wherein the retinal stimulator is placed on a ganglion cell, and the photosensor and signal processing and electro-driving unit and stimulation electrodes are disposed on different sides of the intermediate layer. Wherein, the retinal stimulating device is disposed on a ganglion cell, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed on the same side of the intermediate layer. Wherein, the retinal stimulating device is disposed between a bipolar cell and a rod and a cones, and the photo sensor and the signal processing and electric driving unit are connected to the stimulating electrode. Different sides of the middle layer. The 'retinal stimulation device is set between a bipolar 201219024 cell and a rod and cones and cones, and the light sensing Is and §fl7 tiger treatment and electric drive early system The stimulation electrode is disposed on the same side of the intermediate layer. The retinal stimulating device further includes a power module connected to the pixel unit, and the power module provides power to the unit by wireless charging. Here, a perforation unit (perf〇rati〇n hole) is provided between the respective element units for circulating gas or tissue liquid on the upper and lower sides of the retinal stimulating device. The signal processing and the electric drive unit are electrically connected to each other by a wire for the father to change the sensing signals for background light intensity adjustment. Wherein, each of the stimulation electrodes has a guard ring disposed under each of the stimulation electrodes for regional stimulation of the retinal cells. Among them, each of the 5 tiger processing and electric drive units further includes a sensing circuit 'sensing, the road system detects the type of retinal cells, and each signal processing and electric driving single scorpion system controls the stimulating electrode according to the type of retinal cells. Stimulate retinal cells. Among them, the stimulating electrode is a convex umbrella shape. The bulging portion is not included, and the plurality of spur-like stimulating electrodes are on the same plane. Among them, the retinal stimulation device further includes a remote control device, a remote control device, a wireless communication method for connecting the pixel unit, and a 仃 extension control. 201219024 Among them, the remote control device is connected to the optical communication, radio frequency communication or radio communication in a wireless communication manner, and the flexible package is a biocompatible material. Wherein, the biocompatible material comprises polyimide, polydimethyl ketone (PDMS) or p-xylene (pa 〇., according to the object of the present invention, another method for producing a retinal stimulating device] A substrate is provided, and a plurality of 汛唬 processing and electric driving units, a plurality of photo sensors, and a plurality of stimulating electrodes are formed on the substrate to form a plurality of pixel units. Then, a conductive layer is disposed on the stimulating electrode Providing a first barrier layer on another region on the pixel unit and then providing a first layer of biocompatible material on the barrier layer and setting a first-grip substrate on the first barrier layer. Thereafter, the substrate is removed, and Exposing the signal processing and the electric driving unit and the photo sensor, and then setting a second obstacle on the exposed signal processing and the electric driving unit and the photo sensor. Then, after setting a plurality of switching holes between the pixel units, A second layer of biocompatible material is disposed on the second barrier layer, and the first biocompatible material layer and the second biocompatible material layer are coated on each of the halogen units. Thereafter, a second holding substrate is disposed a second layer of biocompatible material is removed, and a portion of the first layer of biocompatible material is removed to expose the conductive layer on the stimulating electrode. Finally, the second holding substrate is removed. The method is further included in each signal processing and electricity. A wire is disposed between the driving units to electrically connect with each other for exchanging the sensing signals for background light intensity adjustment. 201219024 wherein the method further comprises: setting a power module to connect the pixel unit to provide a halogen after charging Unit power. Wherein the 'light sensor senses incident light and generates a sensing signal, the signal processing and electric driving unit receives and processes the sensing signal to generate an electrical stimulation waveform' and the stimulation electrode receives the electrical stimulation waveform. Corresponding to generate a stimulation current for stimulating a retinal cell. The method further includes providing a guard ring under each stimulation electrode to regionally stimulate each retinal cell. The method is further included in each A sensing circuit is disposed in the signal processing and electric driving unit for detecting the type of retinal cells, and each signal processing and The driving unit controls the stimulation electrode to stimulate the retinal cells according to the type of the retinal cells, wherein the stimulation electrode is a convex umbrella shape, wherein the plurality of protruding portions of each of the protruding umbrella-shaped stimulation electrodes are not in the same plane. Wherein, the method further comprises: setting a remote control device to wirelessly communicate with the pixel unit and performing remote control on the pixel unit. wherein the remote control device is connected to the pixel unit by wireless communication::: optical communication , the method of radio frequency communication or radio communication, the first biocompatible material layer and the second biocompatible material are a flexible material. The layer of the flexible material comprises polyimide ( P〇lyimide) _ 201219024 曱 矽 矽 PD (PDMS) or para phenyl (parylene), wherein the first barrier layer and the second barrier layer are tantalum carbide (siC) or diamond-like carbon film (DLC Film) . According to the present invention, the retinal stimulating device and the method of manufacturing the same can have one or more of the following advantages: (1) The retinal stimulating device and the method of manufacturing the same can be floated on a flexible substrate The eyeball, thereby reducing the current that stimulates the retina and avoiding damage to the Φ cells. (2) The retinal stimulating device and the manufacturing method thereof can solve the problem of poor sensing and stimulating effect by integrating the photo sensor, the driving device and the stimulating electrode in a single pixel unit. [Embodiment] FIG. 1 is a flow chart showing a method of manufacturing a retinal stimulating device of the present invention. As shown in FIG. 1, the manufacturing method of the retinal lance device of the present invention comprises the following steps: (510) providing a substrate, and integrating a plurality of signal processing and electric driving units, a plurality of photo sensors on the substrate, and a plurality of stimulation electrodes to form a plurality of halogen units; (511) providing a conductive layer on the stimulation electrode, and providing a first barrier layer on other regions on the pixel unit, and then setting a first layer on the first barrier layer a biocompatible material layer; (512) providing a first holding substrate on the first barrier layer; 201219024 (513) removing the substrate and exposing the signal processing and electric driving unit and the photo sensor; (514) 5 A second barrier layer is disposed on the exposed signal processing and electric driving unit and the photo sensor; (515) a plurality of switching holes are disposed between each of the pixel units; (516) D is further provided with a second biocompatible material Layered on the second barrier layer, and the first biocompatible material layer and the second biocompatible material layer coat each pixel unit; (517) δ is further disposed with a second holding substrate for the second biocompatible On the material layer; (s 18) removing part of the first creature a layer of compatible material to expose the conductive layer on the stimulating electrode; and (S19) removing the second holding substrate. Please also refer to Figs. 2A to 2E, which are schematic views showing the implementation of the method for manufacturing the retinal stimulating device of the present invention. As shown in the figure, in step (I10), a plurality of signal processing and electric driving units 201 and a plurality of photosensors 200 and a plurality of stimulation electrodes 2〇2 are integrated on the substrate 1 to form a plurality of pixel units. 2〇. This step can be performed on a germanium wafer (substrate ίο) in a standard or slightly modified semiconductor CM〇s process, or in a CMOS image sensor (CIS) process: in some preferred implementations In an example, the photosensor can be, but is not limited to, pN Junction or a moderate doping process. Wherein, the stimulation electrodes 202 can be, but are not limited to, further covered with a titanium-nickel alloy, and the stimulation electrodes 202 are finally exposed. - 201219024 In step (S11), #2 or iron oxide (Fe〇X) or the like is applied to the stimulating electrode 2〇2 to provide a better interface between the first biocompatible material layer 30 of the stimulating electrode. relationship. its
^第生物相容材料層3〇及第二生物相容材料層31 係可為但不限於聚酰亞胺（p〇lyimide)、聚二曱基矽氧烷 一(PDMS )或是對二甲苯（州咖⑽）等。另外，晝素單 το 20上的其他區域所設置的第一障礙層32以及第二障 礙層33得、可為但不限於碳化石夕（沉）或類鑽碳薄膜 (DLC Film)等，而刺激電極2〇2的上方則可以半導體 微影蝕刻製程開洞後進行覆蓋導電層2〇3。 於步驟（S12)中所設置的第一握持基板n係用於 在^驟（S13)時’供手持或機台夾持以進行基板1〇的 減薄及去除，該些減薄及去除的製程係可結合研磨製程 及蝕刻製程，但不限於此。其中，基板1〇也可以不進行 去除，而僅僅是減薄到光感測器2〇〇可以感受到光的程 度的厚度即可，這大約是幾十個微米，而在這個厚度下， 整個基板10便是可撓曲的狀態。 在設置第二障礙層33於露出的訊號處理及電驅動 單元201及光感測器202上之後，隨即在各晝素單元2〇 間設置複數個交換孔205，該些交換孔205係用以使人 體中的組織液能夠流通視網膜刺激裝置的兩側，其製作 方法係可以微影蝕刻等製程進行開孔。在第二生物相容 材料層31覆蓋上去之後，也同樣進行開通交換孔2〇5 的製程’如此一來，整個晝素單元2〇便會被包覆在第一 201219024 及第二生物相容材料層之中，僅留下交換孔205暴露在 外以交換組織液。 另外，在步驟（S17)中，於第二生物相容材料層 3,1上所β又置的第一握持基板12係用於在步驟（$ 18 )中 當去除部分的第一生物相容材料層3〇時，供手持貨機台 夾持整個視網臈刺激裝置使用，以露出刺激電極2〇2上 的導電層203，如此才能對視網膜細胞進行刺激。由於 最後的第一生物相容材料層30及第二生物相容材料層 31的總和厚度極低，故整體的視網膜刺激裝置的厚度也 _ 相當的低（約30μιη )，故可以穿透光線。 凊參閱第3 Α圖’其係為本發明之視網膜刺激裝置之 示意圖。如圖所示，本發明之視網膜刺激裝置5包含一晝 素陣列2、一電源模組50及一可撓性封裝51。可撓性封 裝51 ’其厚度較佳但不限於3〇μηι，係用以承載及覆蓋 畫素陣列2及電源模組50，電源模組50則經由無線充 電後提供晝素陣列2電力。晝素陣列2係包含複數個晝 素單元20，其厚度較佳但不限於ι〇μιη，而各晝素單元 _ 20包含一光感測器200、一訊號處理及電驅動單元2〇1 及一刺激電極202。其中，光感測器200係感應入射光 並產生一感測訊號，訊號處理及電驅動單元201係接收 並處理感測訊號而對應產生一電刺激波形，而刺激電極 202係接收電刺激波形而對應產生一刺激電流，用以刺 激一視網膜細胞。 其中，如第3Β圖所示，訊號處理及電驅動單元201 12 201219024 中更可包含一感測電路2010，感測電路2〇1〇較佳可連 結至該刺激電極202或可單獨偵測視網膜細胞的型態， 且各訊號處理及電驅動單元201係根據視網膜細胞的型 態控制刺激電極202刺激視網膜細胞。在較佳的實施例 中，感測電路2010係於一校正模式中感測視網膜細胞的 反應時間，以決定該視網膜細胞是為開細胞（〇Nc：ell) ，是關細胞（0FF Cell)的型態。而訊號處理及電驅動 單元201更根據前述的視網膜細胞的反應時間，來決定 其所對應的特定之刺激電極202對該視網膜細胞的刺激 模式。 另外，如第4A圖及第4B圖所示，各刺激電極下方 周圍更可设置有一防護環（guard ring )2〇2〇，防護環2020 係為一個區域參考電極，用以提供做為電流回流路徑（在 電流驅動模式下）’或做為電場返回路徑（在電壓驅動模 式下）。該些防護環2020係用以提供刺激電流或電場之 通路，使得該些刺激電流不會刺激到離刺激電極較遠的 細胞，進而達到區域性地刺激眼睛細胞，保護其餘細胞 的目的。 請參閱第5A圖及第5B圖，其係為本發明之上視網 膜之視網膜刺激裝置之第一實施例及第二實施例之示意 圖。如圖所示，本實施例係為本發明之視網膜刺激裝置5 之其中一種態樣，稱為上視網膜（epi_retina)之視網膜 刺激裝置，其係以刺激電極202連接視網膜之神經節細 胞ό ( ganglion cell )，且光感測器200及訊號處理及電 驅動單元201與刺激電極202係位於中間層1之相對面 13 201219024 或同-面上’此中間層i較佳可為—氧化層如氧化石夕 (si〇2)等。在第一實施例中’中間層i之一面上依序 設有刺激電極202、導電層203 (較佳為鋁）以及選擇性 地可以設有組織膠204,❿另一面則設有光感測器· 及訊號處理及電驅動單元201 ;而在第二實施例中，中 間層1上則設有光感測器200、訊號處理及電驅動單元 201及刺激電極202 ’刺激電極202上更選擇性的可設有 組織膠204 ’中間層1旁則設置有導電層2〇3(較佳為鋁） 以及交換孔205。如此配置的好處在於，可以從視網膜刺 激裝置5的背側面以較大的面積（全面積）接收光線。光感 測器200可以設置在刺激電極202之下，但是不能覆蓋 過訊號處理及電驅動單元201。 另請參閱第5C圖及第5D圖，其係為本發明之下視 網膜之視網膜刺激裝置之第一實施例及第二實施例之示意 圖。如圖所示，本貫施例係為本發明之視網膜刺激裝置5 之另外種態樣，稱為下視網膜（sub-retina )之視網膜 刺激裝置，其係以刺激電極202連接視網膜之雙極細胞 7 (bipolar cell)。本下視網臈之視網膜刺激裝置之態樣 與上視網膜之態樣的不同處係在於下視網膜之態樣的視 網膜刺激裝置係设置在雙極細胞（bip〇iar ceii ) 7與桿和 視錐細胞（rods and cones) 9之間，其光感測器200及 訊號處理及電驅動單元2〇1與刺激電極202係可位於中 間層1之同側面或不同面上，與上視網膜（epi_retina) 之視網膜刺激裝置相同。另外，防護環係以不阻擋光線 入射光感測器200的方式設置，此交換孔2〇5係用以提 201219024 i、個通道供人體的體液或氣體如氧氣等，^:曰H # 網膜刺激裝置的兩侧之間产㉟4在曰日片或視 网側i間〃,L通，增加人體對本裝置之適 應性。 夕明參考第6圖’其係為本發明之視網膜刺激裝置以 夕片組裝之示意圖。如圖所示，當眼球的曲率太大超過 可撓性封裝的f曲度時’則可以適當劃分多個晝素單元 成為一六角型的視網膜刺激裝置，並將多個六角型的視 網膜刺激裝置組合，以符合眼球的曲度。以多個六角型 的視網膜刺激裝置組合的另一個好處更在於，六角型的 視網膜刺激裝置接合的邊界即產生體液的交換通道，即 交換孔205,有利於體液或氣體如氧氣等的流動與交換。 再凊參考第7圖，其係為本發明之視網膜刺激裝置 之刺激電流對視網膜刺激裝置與視網膜之距離的關係 圖。如圖所示，橫軸係為視網膜刺激裝置與視網膜之距 離，而縱軸則為視網膜刺激裝置之刺激電流。由於本發 明採用可撓式基板，故其可以服貼於眼球表面，進而有 效減少視網膜刺激裝置與視網膜之間的距離。因此，本 發明之視網膜刺激裝置即可以有效的降低刺激電流，進 而保護各細胞。 請參考第8A圖，其係為本發明之上視網膜之視網 膜刺激裝置之第二實施例之第一示意圖。如圖所示，本 發明之上視網膜之視網膜刺激裝置5包含可撓性封裴 51、晝素單元20、中間層1、第一生物相容材料層3〇、 I1早礙層32以及刺激電極202。如圖所示，本實施例之特 15 201219024 點在於，晝素單元20的同平面中並不包含刺激電極 202」而刺激電極2〇2係呈現豐立的傘狀用以刺激各個神 經節細胞6，該些傘狀的刺激電極2〇2包含一凸起部 2021因此，在刺激電極202下所拉的訊號導線便不會 直^神經節細胞6接觸而產生輕合或誤刺激的情況。 =月參考第8B ’其係為本發明之上視網膜之視網膜 刺激裝置之第三實施例之第二示意圖。如圖所示，本實 ==8A圖所揭露的實施例的差異在於，各個刺激 ，極202的凸起部則可在不同的平面上。本實施例因 = = 刺激局部甚至單個神經節細胞6，達到精 確還原所感測到的光訊號而產生正確晝面的效果。 電驅^ :考^ 9A及9B圖，其係為本發明之訊號處理及 第，^^ 景光線亮度調整之示意及電路圖。如 = 係示意畫素陣列中的-部份，包含 各個書二::广21、22、23、24。在本實施例中， 交換t可以進行資料交換的，其資料 乂換的方式係以導線206 4接不 接，如第9Γϋΐώί·_ ^ 町直常早兀進灯連 罝-1 圖所不。以中央的畫素單元20為例，佥音 早凡2〇可以接受其他畫素單元2 為^旦素 資料，並進行如第9B圖的處理而2炎2的感光 膜細胞，而丨咎& h ώ 向輸出電流來刺激視網 〜24的平均值與 二係以：素 度的绸整=提二=號進行流通以進行背景亮 注意的是，：析度以及辨識率，导 U早㈣安排並不限於方形的，也可 201219024 以是六角形或是其他緊密相鄰的晝素單元的圖樣。 。月參考第10 A圖，其係為本發明之上視網膜之視網 膜刺激裝置之第四實施例之示意圖。如圖所示，本發明 之上視網膜之視網膜刺激裝置5包含了畫素單元2〇及刺 激電極202。其中刺激電極202係面對神經節細胞6 (ganglion cell )用以刺激該細胞。在神經節細胞6下尚 有神經網路8( neural networks)以及桿和視錐細胞9( r〇ds and cones)等。其中神經網路8包含了各種細胞如雙極 參細胞等。在正常的人眼結構中，光入射後即一路通過上 述的神經節細胞6、神經網路8以及桿和視錐細胞9並 獲得感應後回傳至神經節細胞6 ;然而，某些視網膜退 化的病患其神經網路8可能已產生衰退，桿和視錐細胞 9可能已經壞死，因此本發明之上視網膜之視網膜刺激 裝置5便是在接收到入射光之後隨即產生刺激訊號刺激 神經節細胞6來產生視覺，而又因為本發明採用非常輕 薄的軟性基板，故可以完整的服貼在神經節細胞6上， • 有效的降低產生刺激訊號所需要的功率，而又因為非常 輕薄的關係，光線是可以穿透視網膜刺激裝置5的，也 因此可以設置在神經節細胞6上，而不用侷限僅只能設 置在桿和視錐細胞9下方。另外，如第10B圖所示，本 發明另外可包含一個遙控裝置52用以接收由人體的大 腦皮質層13所發出的回饋控制訊號，並根據此些回饋遙 控或調整各個晝素單元20，以精確地微調各個刺激電極 202刺激視網膜的功率（即亮度的調整），達到更正確的 顯示效果。另外，遙控裝置52係可以但不限於光通訊、 17 201219024 射頻通訊或無線電通訊的方式與畫素單元20及人體的 大腦皮質層13進行無線連接。 本發明之視網膜刺激裝置藉由可撓式基板配合眼球 的曲度，進而降低刺激視網膜的電流，避免細胞之毁損. 且成功整合光感測器、驅動裝置與刺激電極於一個佥、 單元，解決感測及刺激效果不佳的問題。 一’、 以上所述僅為舉例性’而非為限制性者。 離本發明之精神與範疇，而對其進行之等:任何未脫 更，均應包含於後附之申請專利範圍中。效修改或變 201219024 【圖式簡單說明】 第1圖係為本發明之視網膜刺激裝置之製造方法之流 程圖； 第2A〜2E圖係為本發明之視網膜刺激裝置之製造方法 之實施示意圖； 第3A圖係為本發明之視網膜刺激裝置之示意圖； 第3B圖係為本發明之晝素單元之實施例示意圖； • 第4A圖係為本發明之視網膜刺激裝置之防護環之示意 圖； 第4B圖係為本發明之視網膜刺激裝置之防護環之戴面 示意圖； 第5A圖係為本發明之上視網膜之視網膜刺激裝置之第 一實施例之示意圖； 第5B圖係為本發明之上視網膜之視網膜刺激裝置之第 二實施例之示意圖； 第5C圖係為本發明之下視網膜之視網膜刺激裝置之第 一實施例之示意圖； 第5D圖係為本發明之下視網膜之視網膜刺激裝置之第 二實施例之示意圖； 第6圖係為本發明之視網膜刺激裝置以多片組裝之示 意圖；以及 第7圖係為本發明之視網膜刺激裝置之刺激電流對視 網膜刺激裝置與視網膜之距離的關係圖； 201219024 第8A圖係、為本發明之上視網膜之視網關激裝置之第 二實施例之第一示意圖； 第8B圖係為本發明之上視賴之視網關激裝置之第 二貫施例之第二示意圖，· 第9A圖係為本發明之訊號處理及電驅動單元進行背景 光線党度調整之示意圖； 第9B圖係為本發明之訊號處理及電驅動單元進行背景 光線亮度調整之電路圖； 第9C圖係為本發明之訊號處理及電驅動單元進行背景 減噪之實施例示意圖； 第10A圖係為本發明之上視網膜之視網膜刺激裝置之 第四實施例之示意圖；以及 第10B圖係為本發明之上視網膜之視網膜刺激裝置之 第五實施例之示意圖。The first biocompatible material layer 3 and the second biocompatible material layer 31 may be, but not limited to, polyimide (p〇lyimide), polydidecyloxane- (PDMS) or para-xylene. (State coffee (10)) and so on. In addition, the first barrier layer 32 and the second barrier layer 33 disposed in other regions on the monolithic sheet το20 may be, but are not limited to, carbon stone (sink) or diamond-like carbon film (DLC Film), and the like. Above the stimulating electrode 2〇2, the conductive layer 2〇3 can be covered after the semiconductor lithography process is opened. The first holding substrate n disposed in the step (S12) is used for holding or clamping the substrate for performing thinning and removal of the substrate 1〇 during the step (S13), and the thinning and removing are performed. The process can be combined with a polishing process and an etching process, but is not limited thereto. Wherein, the substrate 1〇 may not be removed, but only the thickness of the light sensor 2 can be perceived as light, which is about several tens of micrometers, and at this thickness, the whole The substrate 10 is in a flexible state. After the second barrier layer 33 is disposed on the exposed signal processing and the electric driving unit 201 and the photo sensor 202, a plurality of switching holes 205 are disposed between the respective pixel units 2, and the switching holes 205 are used. The tissue fluid in the human body can be circulated on both sides of the retinal stimulating device, and the manufacturing method can be performed by a process such as micro-etching. After the second biocompatible material layer 31 is covered, the process of opening the exchange hole 2〇5 is also performed. Thus, the entire halogen unit 2 is coated on the first 201219024 and the second biocompatible. Of the material layers, only the exchange holes 205 are left exposed to exchange the tissue fluid. Further, in the step (S17), the first holding substrate 12 which is further disposed on the second biocompatible material layer 3, 1 is used to remove a portion of the first biological phase in the step ($18). When the material layer is 3 ,, the handheld cargo machine table is used to clamp the entire screen stimulator to expose the conductive layer 203 on the stimulating electrode 2〇2, so as to stimulate the retinal cells. Since the total thickness of the last first biocompatible material layer 30 and the second biocompatible material layer 31 is extremely low, the thickness of the overall retinal stimulating device is also relatively low (about 30 μm), so that light can be transmitted.第 Refer to Fig. 3, which is a schematic view of the retinal stimulating device of the present invention. As shown, the retinal stimulating device 5 of the present invention comprises a quartz array 2, a power module 50 and a flexible package 51. The flexible package 51' has a thickness of preferably but not limited to 3 〇μηι for carrying and covering the pixel array 2 and the power module 50, and the power module 50 supplies power to the pixel array 2 via wireless charging. The halogen array 2 includes a plurality of halogen elements 20, the thickness of which is preferably but not limited to ι〇μηη, and each of the pixel units -20 includes a photo sensor 200, a signal processing and an electric driving unit 2〇1 and A stimulating electrode 202. The photo sensor 200 senses incident light and generates a sensing signal. The signal processing and electric driving unit 201 receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode 202 receives the electrical stimulation waveform. Corresponding to generate a stimulation current to stimulate a retinal cell. The signal processing and electric driving unit 201 12 201219024 further includes a sensing circuit 2010, and the sensing circuit 2〇1〇 is preferably connected to the stimulation electrode 202 or the retina can be separately detected, as shown in FIG. The type of the cells, and each of the signal processing and electric drive units 201 controls the stimulation electrodes 202 to stimulate the retinal cells according to the type of retinal cells. In a preferred embodiment, the sensing circuit 2010 senses the reaction time of the retinal cells in a calibration mode to determine that the retinal cells are open cells (〇Nc:ell) and are closed cells (0FF cells). Type. The signal processing and electric driving unit 201 further determines the stimulation mode of the retina cells corresponding to the specific stimulation electrode 202 according to the reaction time of the retinal cells. In addition, as shown in FIG. 4A and FIG. 4B, a guard ring 2 〇 2 更 may be disposed around each of the stimulating electrodes, and the guard ring 2020 is a regional reference electrode for providing current reflow. Path (in current drive mode) ' or as an electric field return path (in voltage drive mode). The guard rings 2020 are used to provide a path for stimulating current or electric field so that the stimulating currents do not stimulate cells farther from the stimulating electrodes, thereby achieving regional stimulation of the eye cells and protecting the remaining cells. Referring to Figures 5A and 5B, which are schematic views of a first embodiment and a second embodiment of a retinal stimulating device for a retinal membrane of the present invention. As shown in the figure, this embodiment is one of the aspects of the retinal stimulating device 5 of the present invention, which is called an epiretinal retina stimulation device, which is connected to the ganglion cell of the retina by the stimulating electrode 202 (ganglion). Cell, and the photo sensor 200 and the signal processing and electric driving unit 201 and the stimulating electrode 202 are located on the opposite surface 13 of the intermediate layer 1 2012 201224 or the same surface. The intermediate layer i may preferably be an oxide layer such as oxidation. Shi Xi (si〇2) and so on. In the first embodiment, the stimulating electrode 202, the conductive layer 203 (preferably aluminum) and the tissue adhesive 204 may be selectively disposed on one side of the intermediate layer i, and the light sensing is provided on the other side. And the signal processing and electric driving unit 201; in the second embodiment, the intermediate layer 1 is provided with a photo sensor 200, a signal processing and electric driving unit 201, and a stimulating electrode 202. The adhesive layer 204' may be provided with a conductive layer 2〇3 (preferably aluminum) and an exchange hole 205. The advantage of such a configuration is that light can be received from a large area (full area) from the back side of the retinal stimulating device 5. The photo sensor 200 can be disposed below the stimulation electrode 202, but cannot cover the signal processing and electrical drive unit 201. Referring to Figures 5C and 5D, which are schematic views of a first embodiment and a second embodiment of a retinal stimulating device for a retinal membrane of the present invention. As shown in the figure, the present embodiment is another aspect of the retinal stimulating device 5 of the present invention, which is called a sub-retina retinal stimulating device which is connected to the bipolar cells of the retina by the stimulating electrode 202. 7 (bipolar cell). The retinal stimulating device of the lower retina is different from the retinal aspect in that the retinal stimulating device of the lower retina is set in the bipolar cell (bip〇iar ceii) 7 with the rod and the cone Between the rods and cones 9, the photo sensor 200 and the signal processing and electric driving unit 2〇1 and the stimulating electrode 202 may be located on the same side or different sides of the intermediate layer 1, and the upper retina (epi_retina) The retinal stimulator is the same. In addition, the guard ring is disposed in such a manner as not to block the light from entering the photo sensor 200. The exchange hole 2〇5 is used to provide 201219024 i, a channel for human body fluid or gas such as oxygen, etc. ^:曰H #膜膜Between the two sides of the stimulation device, 354 is produced between the day of the day or the side of the screen, and the L-pass increases the adaptability of the human body to the device. Ximing is referred to in Fig. 6 which is a schematic view of the retinal stimulating device of the present invention assembled in the form of a tablet. As shown in the figure, when the curvature of the eyeball is too large to exceed the curvature of the flexible package, then a plurality of halogen elements can be appropriately divided into a hexagonal retinal stimulating device, and multiple hexagonal retinal stimuli are stimulated. The device is combined to match the curvature of the eye. Another advantage of combining multiple hexagonal retinal stimulating devices is that the boundary of the hexagonal retinal stimulating device is the exchange channel of the body fluid, that is, the exchange hole 205, which facilitates the flow and exchange of body fluids or gases such as oxygen. . Referring again to Fig. 7, it is a graph showing the relationship between the stimulation current of the retinal stimulation device of the present invention and the distance between the retinal stimulation device and the retina. As shown, the horizontal axis is the distance between the retinal stimulator and the retina, and the vertical axis is the stimulating current of the retinal stimulator. Since the present invention employs a flexible substrate, it can be applied to the surface of the eyeball, thereby effectively reducing the distance between the retinal stimulating device and the retina. Therefore, the retinal stimulating device of the present invention can effectively reduce the stimulating current and thereby protect each cell. Please refer to Fig. 8A, which is a first schematic view of a second embodiment of the retinal retina membrane stimulation device of the present invention. As shown, the retinal stimulating device 5 of the retina of the present invention comprises a flexible capsule 51, a halogen unit 20, an intermediate layer 1, a first layer of biocompatible material 3, an I1 early layer 32, and a stimulating electrode. 202. As shown in the figure, the point 15 201219024 of the present embodiment is that the stimulating electrode 202 is not included in the same plane of the halogen element 20 and the stimulating electrode 2 〇 2 is in the form of a umbrella to stimulate the ganglion cells. 6. The umbrella-like stimulating electrodes 2〇2 include a raised portion 2021. Therefore, the signal wires pulled under the stimulating electrode 202 do not directly contact the ganglion cells 6 to cause a light or false stimuli. = month reference to Fig. 8B' is a second schematic view of a third embodiment of the retinal stimulating device of the retina of the present invention. As shown, the difference in the embodiment disclosed in the actual == 8A diagram is that the stimuli of the poles 202 can be on different planes. In this embodiment, the == stimulating local or even a single ganglion cell 6, achieving the effect of accurately reducing the sensed light signal to produce the correct facet. Electric drive ^: test ^ 9A and 9B diagram, which is the signal processing of the invention and the schematic and circuit diagram of the brightness adjustment of the scene. For example, = is the - part of the pixel array, including each book 2:: 21, 22, 23, 24. In this embodiment, the exchange t can be exchanged for data, and the data exchange mode is not connected by the wire 206 4 , for example, the 9th · · _ ^ machi straight into the light 连 图 图 图 图 图. Taking the central pixel unit 20 as an example, the sound of the two elements can be accepted as the other elemental unit 2, and the photosensitive film cells of the 2 inflammatory 2 are processed as in the case of Fig. 9B, and 丨咎& ; h ώ To the output current to stimulate the average value of the visual network ~24 and the second line to: the prime degree of the silk = the second = the number of circulation for background bright attention:: resolution and identification rate, lead U early (4) The arrangement is not limited to a square shape, but it can also be 201219024. It is a hexagonal or other closely adjacent element of the element. . Reference is made to Fig. 10A, which is a schematic view of a fourth embodiment of a retinal retina membrane stimulation device of the present invention. As shown, the retinal stimulating device 5 of the retina of the present invention comprises a pixel unit 2 and a stimulating electrode 202. The stimulating electrode 202 faces the ganglion cell 6 to stimulate the cell. Under the ganglion cells 6, there are neural networks 8 and rods and cones 9 (r〇ds and cones). The neural network 8 contains various cells such as bipolar cells. In the normal human eye structure, after the light is incident, all the way through the above-mentioned ganglion cells 6, neural network 8 and rods and cones 9 are induced and then transmitted back to the ganglion cells 6; however, some retinal degeneration The patient's neural network 8 may have degenerated, and the rod and cone 9 may have been necrotic. Therefore, the retinal stimulating device 5 on the retina of the present invention generates a stimulation signal to stimulate the ganglion cells immediately after receiving the incident light. 6 to produce vision, and because the invention uses a very thin and soft substrate, it can be completely applied to the ganglion cells 6, effectively reducing the power required to generate the stimulation signal, and because of the very thin and light relationship, Light can penetrate the retinal stimulator 5 and can therefore be placed on the ganglion cells 6, without limitation, but only under the rods and cones 9. In addition, as shown in FIG. 10B, the present invention may further include a remote control device 52 for receiving a feedback control signal sent by the cerebral cortex 13 of the human body, and remotely adjusting or adjusting each of the individual elements 20 according to the feedback. The power of each of the stimulation electrodes 202 to stimulate the retina (ie, the adjustment of the brightness) is precisely fine-tuned to achieve a more accurate display effect. In addition, the remote control device 52 can be wirelessly connected to the pixel unit 20 and the cerebral cortex layer 13 of the human body in a manner that can be, but is not limited to, optical communication, 17201219024 radio frequency communication or radio communication. The retinal stimulating device of the present invention reduces the current that stimulates the retina by the flexible substrate and the curvature of the eyeball, thereby avoiding damage of the cells. And successfully integrating the photo sensor, the driving device and the stimulating electrode in a 佥, unit, and solving The problem of poor sensing and stimulation. The above description is by way of example only and not as a limitation. The spirit and scope of the present invention, and the like: any unremoved, should be included in the scope of the appended claims. Modification or change 201219024 [Simplified description of the drawings] Fig. 1 is a flowchart of a method for manufacturing a retinal stimulating device of the present invention; and Figs. 2A to 2E are views showing a method for manufacturing a retinal stimulating device of the present invention; 3A is a schematic view of a retinal stimulating device of the present invention; FIG. 3B is a schematic view of an embodiment of a morphogen unit of the present invention; • FIG. 4A is a schematic view of a protective ring of the retinal stimulating device of the present invention; Is a schematic view of the protective ring of the retinal stimulating device of the present invention; FIG. 5A is a schematic view of the first embodiment of the retinal stimulating device of the retina of the present invention; FIG. 5B is a retina of the retina above the present invention A schematic diagram of a second embodiment of a stimulation device; FIG. 5C is a schematic view of a first embodiment of a retinal stimulation device for a retina of the present invention; and FIG. 5D is a second embodiment of a retinal stimulation device for a retina under the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 6 is a schematic view showing a multi-piece assembly of the retinal stimulating device of the present invention; and FIG. A diagram showing the relationship between the stimulation current of the retinal stimulating device and the distance between the retinal stimulating device and the retina; 201219024 Fig. 8A is a first schematic view of the second embodiment of the retinal visual gateway device of the present invention; The second schematic diagram of the second embodiment of the gateway device according to the present invention is a schematic diagram of the signal processing and the electric drive unit for background light party degree adjustment according to the invention; FIG. 9B The circuit diagram of the background signal brightness adjustment of the signal processing and the electric drive unit of the present invention; FIG. 9C is a schematic diagram of the embodiment of the signal processing and the electric drive unit performing background noise reduction according to the present invention; FIG. 10A is a view of the present invention. A schematic view of a fourth embodiment of a retinal stimulating device of the upper retina; and a 10B view is a schematic view of a fifth embodiment of a retinal stimulating device for retina of the present invention.
20 201219024 【主要元件符號說明】 1 :中間層； 10 :基板； 11 :第一握持基板； 12 :第二握持基板； 2 :晝素陣列； 20〜24 :晝素單元； 200 :光感測器； • 201 :訊號處理及電驅動單元； 2010 :感測電路； 202 :刺激電極； 2020 :防護環； 2021 :凸起部； 203 :導電層； 204 :組織膠； 205 :交換孔； • 206 :導線； 30 :第一生物相容材料層； 31 :第二生物相容材料層； 32 :第一障礙層； 33 :第二障礙層； 5:視網膜刺激裝置； 50 :電源模組； 51 :可撓性封裝； 52 :遙控裝置； 21 201219024 6 :神經節細胞； 7 :雙極細胞； 8 :神經網路； 9:桿和視錐細胞； 13 :大腦皮質層；以及 S10〜S19 :步驟。20 201219024 [Description of main components] 1 : Intermediate layer; 10: Substrate; 11: First holding substrate; 12: Second holding substrate; 2: Alizarin array; 20~24: Alizarin unit; Sensor; • 201: signal processing and electric drive unit; 2010: sensing circuit; 202: stimulating electrode; 2020: guard ring; 2021: boss; 203: conductive layer; 204: tissue glue; 205: exchange hole • 206: wire; 30: first biocompatible material layer; 31: second biocompatible material layer; 32: first barrier layer; 33: second barrier layer; 5: retinal stimulator; Group; 51: flexible package; 52: remote control; 21 201219024 6: ganglion cells; 7: bipolar cells; 8: neural network; 9: rods and cones; 13: cerebral cortex; ~S19: Steps.
22twenty two