201123489 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種可防止基板之端部之熱點現象、及因 熱點現象引起之基板斷裂之太陽電池模組。 【先前技術】 就有效利用能量之觀點而言，近年來，太陽電池正曰益 廣泛地普遍加以利用。特別是，利用矽單晶之太陽電池之 每單位面積之能量轉換效率優異。然而，另一方面，利用 矽單晶之太陽電池係使用將矽單晶錠切片而成之矽晶圓， 故於錠製造上消耗大量能量，製造成本較高。特別是，於 實現設置於室外等之大面積之太陽電池之情形時，若利用 矽單晶製造太陽電池，則於現狀下會花費相當大的成本。 因此，利用可更廉價地製造之非晶質（am〇rph〇us)矽薄膜之 太陽電池作為低成本之太陽電池正在普及。 非晶矽太陽電池係使用pin接面之層結構之半導體膜， 所謂pin接面’係指一經受光則產生電子與電洞之非晶矽 膜（i型）被P型及η型之矽膜夾持者。於該半導體膜之兩面分 別形成有電極。藉由太陽光所產生之電子與電洞因ρ型、η 型半導體之電位差而活躍地移動，藉由連續地重複該動 作’而於兩面之電極產生電位差。 作為此類非晶石夕太陽電池之具體構成，例如採用有如下 構成：於玻璃基板上將TC0(Transparent Conduce OxW ’透明導電氧化物）等透明電極作為下部電極進行成 膜且於其上形成有包含非晶石夕之半導體膜、與成為上部 150614.doc 201123489 電極之Ag薄膜等。 於此種具備包含上下電極與半導體膜之光電轉換體之非 晶石夕太陽電池中，存在若僅於基板上將各層以較大面積均 勻地成膜，則電位差會減小、電阻值會增大之問題。因 此，例如形成將光電轉換體以特定尺寸逐一電性區劃之太 %电池並將彼此鄰接之各太陽電池電性連接，藉此構成 非晶石夕太陽電池。 具體而言，採用如下結構：對以較大面積均勻地形成於 基板上之光電轉換體使用雷射光等形成稱為劃線⑽加 line)之槽’獲知多個帶狀之太陽電池，並將該太陽電池彼 此電性地串聯連接。 然而，於將複數個太陽電池串聯連接之薄膜系矽太陽電 池中’若因於光之入射面載有灰塵或入射面被陰影覆蓋而 導，複數個太陽電池中之-部分之輸出下降，㈣膜系石夕 太陽電池模組整體之輸出會顯著下降。 進而’輸出下降之太陽電池會成為包含複數個太陽電池 之串聯電路中之電阻，於該太陽電池之兩端被反方向地施 加電壓(偏壓電壓)，產生局部加熱之現象(熱點現象)。 特別是’若於基板之端部產生熱點現象，則存在基板易 於產生斷裂之問題。 先前，已知有以下技術：為回避輸出之下降與熱點現 象’於每個薄财太陽電池模組設置旁路二極體。此種技 術例如於日本專利特開2〇〇1_〇68696號公報中有揭示。 又’已知有局部地設置與劃線平行之劃線之技術。此種技 150614.doc 201123489 術例如於日本專利特開2002-076402號公報中有揭示。 然而，於此種先前技術中，存在因製造步驟數增加、連 接複數個旁路二極體而引起成本上升等問題。 【發明内容】 本發明係為解決上述之先前問題而完成者，其目的在於 提供一種無需複雜之結構、便可防止基板之端部中之熱點 現象及由熱點現象引起之基板斯裂、且可靠性優異的太陽 電池模組。 、本發月之第1怨樣之太陽電池模組包括：基板；發電區 域，其係由具有依序積層於上述基板上之第一電極層、發 電層及第二電極層之積層體所構成，且具有2個電池端 ，複數個太陽電池，其係藉由利用劃線對上述發電區域 區劃而形成，且電性地串聯連接；複數個槽，其於與上述 劃線交又之方向延伸，且至少將上述發電層及上述第二電 極層除去；第一區域，其自上述電池端部起朝向上述發電 區域之中央延伸，並具有與上述劃線平行之方向上之上述 發電區域之長度之1/4的寬度；及第二區域，其係位於上 述第一區域之間即上述發電區域之中央；於該構成中，上 述複數個槽包括形成於上述第一區域且鄰接於上述2個電 池i»而部之2個第1槽，上述電池端部與上述第丨槽之間隔小 於上述2個第1槽之間隔。 於本發明之第1態樣之太陽電池模組令，上述複數個槽 包括形成於上述第一區域且形成於上述2個第丨槽之間之2 個第2槽，上述電池端部與上述第丨槽之間隔或上述第^曹 150614.doc 201123489 與上述第2槽之間隔較佳為小於上述2個第2槽之間隔。 於本發明之第!態樣之太陽電池模組中，上述複：個样 包括形成於上述第二區域之第3槽，上述電池端部與上述 第1槽之間隔或上述第i槽與上述第2槽之間隔較佳為小於 上述第2槽與上述第3槽之間隔。 於本發明之第1態樣之太陽電池模組中，上述複數個槽BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solar cell module capable of preventing a hot spot phenomenon at an end portion of a substrate and a substrate breakage due to a hot spot phenomenon. [Prior Art] In terms of efficient use of energy, solar cells have been widely used in recent years. In particular, the energy conversion efficiency per unit area of a solar cell using a single crystal is excellent. On the other hand, in the case of a solar cell using a single crystal, a silicon wafer obtained by slicing a single crystal ingot is used, so that a large amount of energy is consumed in the production of the ingot, and the manufacturing cost is high. In particular, when a solar cell is installed in a large area such as an outdoor unit, when a solar cell is manufactured using a single crystal, a considerable cost is required in the current situation. Therefore, a solar cell using an amorphous (am〇rph〇us) film which can be manufactured more inexpensively is being popular as a low-cost solar cell. The amorphous germanium solar cell uses a semiconductor film of a layer structure of a pin junction, and the so-called pin junction is an amorphous germanium film (i type) which is subjected to light to generate electrons and holes, and is a p-type and an n-type tantalum film. Holder. Electrodes are formed on both sides of the semiconductor film. The electrons and holes generated by the sunlight are actively moved by the potential difference between the p-type and n-type semiconductors, and the potential difference is generated at the electrodes on both sides by continuously repeating the operation. For example, a transparent electrode such as TC0 (Transparent Conduce OxW 'transparent conductive oxide) is formed as a lower electrode on the glass substrate, and a specific structure of the amorphous silicon solar cell is formed thereon. A semiconductor film containing amorphous Aussie and an Ag film which is an electrode of the upper 150614.doc 201123489. In such an amorphous solar cell including the photoelectric conversion body including the upper and lower electrodes and the semiconductor film, if the layers are formed uniformly over a large area on the substrate, the potential difference is reduced and the resistance value is increased. Big problem. Therefore, for example, a solar cell in which the photoelectric conversion body is electrically divided by a specific size is electrically connected, and the solar cells adjacent to each other are electrically connected, thereby constituting an amorphous solar cell. Specifically, a structure is adopted in which a plurality of strip-shaped solar cells are known by forming a groove called a scribe line (10) plus a line of a photoelectric conversion body uniformly formed on a substrate with a large area, and using laser light or the like The solar cells are electrically connected to each other in series. However, in a thin film system in which a plurality of solar cells are connected in series, if the incident surface of the light carries dust or the incident surface is covered by the shadow, the output of the portion of the plurality of solar cells decreases, (4) The overall output of the membrane system Shi Xi solar cell module will drop significantly. Further, the solar cell whose output is lowered will become a resistor in a series circuit including a plurality of solar cells, and a voltage (bias voltage) is applied in the opposite direction to both ends of the solar cell to cause local heating (hot spot phenomenon). In particular, if a hot spot phenomenon occurs at the end portion of the substrate, there is a problem that the substrate is liable to be broken. Previously, there have been known techniques for setting a bypass diode for each thin solar cell module in order to avoid the fall of the output and the hot spot phenomenon. Such a technique is disclosed, for example, in Japanese Laid-Open Patent Publication No. Hei. No. Hei. Further, a technique of locally providing a scribe line parallel to a scribe line is known. Such a technique is disclosed in Japanese Laid-Open Patent Publication No. 2002-076402. However, in such prior art, there are problems such as an increase in the number of manufacturing steps and an increase in cost due to the connection of a plurality of bypass diodes. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a substrate that can prevent a hot spot phenomenon in an end portion of a substrate and a substrate caused by a hot spot phenomenon without requiring a complicated structure. Excellent solar cell module. The solar cell module of the first complaint of the present month includes: a substrate; a power generation region, which is composed of a laminate having a first electrode layer, a power generation layer, and a second electrode layer sequentially stacked on the substrate. And having two battery terminals, a plurality of solar cells formed by dividing the power generation region by scribe lines, and electrically connected in series; a plurality of slots extending in a direction opposite to the above-mentioned scribe lines And removing at least the power generating layer and the second electrode layer; the first region extending from the battery end toward the center of the power generating region and having a length of the power generating region in a direction parallel to the scribe line a width of 1/4; and a second region located between the first regions, that is, the center of the power generation region; in the configuration, the plurality of grooves are formed in the first region and adjacent to the two In the two first slots of the battery i», the distance between the battery end and the second groove is smaller than the interval between the two first grooves. In a solar battery module according to a first aspect of the present invention, the plurality of grooves include two second grooves formed in the first region and formed between the two second grooves, and the battery end portion and the above The interval between the second troughs or the interval between the above-mentioned second cavities 150614.doc 201123489 and the second troughs is preferably smaller than the interval between the two second troughs. In the solar battery module of the aspect of the invention, the plurality of samples include a third groove formed in the second region, a distance between the battery end portion and the first groove, or the i-th groove and the The interval between the second grooves is preferably smaller than the interval between the second grooves and the third grooves. In the solar cell module of the first aspect of the present invention, the plurality of slots
包括形成於上述第二區域且鄰接於上述第3槽之第4槽，I 述電池端部與上述第丨槽之間隔或上述第丨槽與上述第2槽 之間隔較佳為小於上述第3槽與上述第4槽之間隔。 日 於本發明之第1態樣之太陽電池模組中，上述複數個柃 包括形成於上述第二區域之第3槽，上述電池端部與上‘ 第1槽之間隔較佳為小於上述第1槽與上述第3槽之間隔。 於本發明之第i態樣之太陽電池模，组中，±述複數個槽 包括形成於上述第二區域且鄰接於第3槽之第4槽，上述^ 池端部與上述第】槽之間隔較佳為小於上述第3槽與上述: 4槽之間隔。 於本發明之第1態樣之太陽電池模組中，上述複數個槽 包括形成於上述第一區域之第2槽、與形成於上述第二區 域之第3槽及第4槽，上述第丨槽與上述第㈣之間隔或上述 電池端部與上述第"曹之間隔較佳為上述第3槽與上述第4 槽之間隔的70%以下。 ,於本發明之第1態樣之太陽電池模組中，上述第丨槽與上 述第2槽之間隔或上述電池端部與上述第丨槽之間隔較佳為 上述第3槽與上述第4槽之間隔的50%以下。 150614.doc 201123489 ^本發明之第】態樣之太陽電池模組中’上述複數個样 二以大於上述㈣與上述電池端部之距離的距離遠離 述電池端部而形成之第5槽及鄰接於上述第5 才曹’形成於上述第-區域之複數個槽之中，上述第㈠ 0於最靠近上述電池端部之位置處，上述第1槽與上述電 池端部之間隔較佳為小於上述第5槽與上述第6槽之間隔。 ::發明之第1態樣之太陽電池模組中，上述複數個 較佳為藉由將上述第-電極層、上述發電層、及上述第二 電極層除去而形成。 一 本發明之第2態樣之太陽電池模組包括：基板；發電區 域，其係由具有依序積層於上述基板上之第—電極層 電層及第二電極層之積層體所構成，且具有電池端：」 數個太陽電池’其係藉由利用劃線對上述發電區域區刳而 形成，且電性地率聯連接；複數個槽，其於與上述則線交 又之方向延伸，並至少將上述發電層及上述第二電極層除 ::於該構成中’上述複數個槽包括上述複數個槽之中： 罪近上述電池端部之2個端部槽，上述2個端部槽與上 池端部之間隔小於上述2個端部槽之間隔。 本發明之第2態樣之太陽電池模組包括：基板；發電區 域’其係由具有依序積層於上述基板上之第一電極層、發 電層及第二電極層之積層體所構成，且具有電池端：；複 數個太陽電池，其係藉由利用劃線對上述發電區域㈣而 形成，並電性地串聯連接；複數個槽，其於與上述^ 又之方向延伸，且至少將上述發電層及上述第二電極^ 1506l4.doc 201123489 ;構成中，上述複數個槽包括上述複數個槽中最靠 近上述電池端部之端部槽、與於較上述端部槽更靠上述基 ，之中央之位置形成之内側槽，上述端部槽與上述電池端 P之間iw小於上述端部槽與上述内側槽之間隔及複數個上 述内側槽之間隔中的任一者。 於本發明之第2能样&哲 心樣成弟3態樣之太陽電池模組中，上述 端部槽與上述電池 一 卩之間隔車父佳為於上述複數個槽之間 隔之中最小。 於本發明之第2態樣或第3態樣之太陽電池模組中，上述 複數個槽較佳為藉由將上述第一電極層、上述發電層、及 上述第二電極層除去而形成。 於本發明之第1態樣之太陽電池模組中，形成有至少將 發：：與第二電極層除去之複數個槽，並於槽之底面形成 第—電極層’第-電極層設於位於槽之兩側之區域。因 此’第-電極層將位於槽之兩側之一方之區域與另一方之 區域電f生連接。因第二電極層藉由槽而被分離，故即便於 一個太陽電池内之第-電極層與第二電極層之間存在電阻 較低之部分（以下亦稱為低電阻部）之情形時，流經該太陽 電’也之整個電流亦不會集中於低電阻部，#而可抑制熱點 產生》 進而，因上述電池端部與上述第丨槽之間隔或上述第1槽 與上述第2槽之間隔小於上述槽之間隔，故於 電阻部之情形時，集中流經太陽電池之-部分之電 會進-步減小’從而可顯著抑制基板之端部中之熱點現象 150614.doc 201123489 之產生。藉此可防止由熱點現象引起之基板斷裂。 其結果為，本發明中，無需複雜之結構便可提供可靠性 優異之太陽電池模組。 又’於本發明之第2態樣之太陽電池模組中，上述複數 個槽包括±述複數㈣中最#近上述電池端部之2個端部 槽，上述2個端部槽與上述電池端部之間隔小於上述2個端 部槽之間㉟。因此’可獲得與第丨態樣之太陽電池模組同 樣之效果。 又，於本發明之第3態樣之太陽電池模組t，複數個槽 包括複數個槽之十最靠近電池端部之端部槽、與於較端‘ 槽更靠基板之中央之位置形成之内側槽，端部槽與電池端 部之間隔小於端部槽與内側才曹之間⑮、及複數個内侧槽: 間隔中的任一者。因此，可獲得與第1態樣之太陽電池模 組同樣之效果。 【實施方式】And including a fourth groove formed in the second region adjacent to the third groove, wherein a distance between the battery end portion and the second groove or an interval between the second groove and the second groove is preferably smaller than the third portion The groove is spaced from the fourth groove described above. In a solar battery module according to a first aspect of the present invention, the plurality of turns include a third groove formed in the second region, and an interval between the battery end portion and the upper portion of the first groove is preferably smaller than the first portion. The interval between the 1 slot and the third slot described above. In the solar cell module according to the first aspect of the present invention, the plurality of grooves includes a fourth groove formed in the second region and adjacent to the third groove, and the end of the cell is spaced from the first groove. Preferably, it is smaller than the interval between the third groove and the above: 4 grooves. In the solar battery module according to the first aspect of the present invention, the plurality of grooves include a second groove formed in the first region, and a third groove and a fourth groove formed in the second region, the third groove The interval between the groove and the above (4) or the interval between the battery end portion and the first portion is preferably 70% or less of the interval between the third groove and the fourth groove. In the solar battery module according to the first aspect of the present invention, the distance between the second groove and the second groove or the distance between the battery end portion and the second groove is preferably the third groove and the fourth portion. 50% or less of the interval between the grooves. 150614.doc 201123489 ^In the solar cell module of the first aspect of the invention, the plurality of samples 2 are larger than the distance between the (4) and the end of the battery, and are separated from the end of the battery by the fifth groove and the adjacent The fifth hole is formed in the plurality of grooves of the first region, wherein the first (one) 0 is at a position closest to the battery end portion, and the interval between the first groove and the battery end portion is preferably smaller than The interval between the fifth groove and the sixth groove. In the solar cell module according to the first aspect of the invention, the plurality of the plurality of solar cell modules are preferably formed by removing the first electrode layer, the power generating layer, and the second electrode layer. A solar cell module according to a second aspect of the present invention includes: a substrate; a power generation region formed by a laminate having a first electrode layer and a second electrode layer sequentially laminated on the substrate, and Having a battery end: a plurality of solar cells are formed by snagging the power generation region by a scribe line and electrically connected in series; a plurality of slots extending in a direction intersecting with the above-mentioned line, And dividing at least the power generation layer and the second electrode layer: in the configuration, the plurality of grooves include the plurality of grooves: sin is adjacent to two end grooves of the battery end portion, and the two end portions The spacing between the slot and the upper end of the pool is less than the spacing between the two end slots. A solar cell module according to a second aspect of the present invention includes: a substrate; the power generation region ' is composed of a laminate having a first electrode layer, a power generation layer, and a second electrode layer sequentially laminated on the substrate, and a battery terminal: a plurality of solar cells formed by using the scribe lines to the power generation region (4) and electrically connected in series; a plurality of slots extending in the direction of the above, and at least The power generation layer and the second electrode are configured to include an end groove closest to the battery end portion of the plurality of grooves and a base portion closer to the end groove. The inner groove formed at the center position, the iw between the end groove and the battery end P is smaller than the interval between the end groove and the inner groove, and the interval between the plurality of inner grooves. In the solar cell module of the second aspect of the present invention, the end slot and the battery are separated by a minimum of the interval among the plurality of slots. . In the solar cell module according to the second aspect or the third aspect of the invention, the plurality of grooves are preferably formed by removing the first electrode layer, the power generating layer, and the second electrode layer. In the solar cell module according to the first aspect of the present invention, at least a plurality of grooves which are removed from the second electrode layer are formed, and a first electrode layer is formed on the bottom surface of the groove. The area on either side of the slot. Therefore, the 'electrode layer' electrically connects one of the sides of the groove to the other of the areas. Since the second electrode layer is separated by the groove, even in the case where a portion having a low electric resistance (hereinafter also referred to as a low-resistance portion) exists between the first electrode layer and the second electrode layer in one solar cell, The entire current flowing through the solar power is also not concentrated in the low-resistance portion, and # can suppress the generation of hot spots. Further, due to the interval between the battery end portion and the first groove, or the first groove and the second groove The interval is smaller than the interval between the grooves, so in the case of the resistor portion, the electricity flowing through the portion of the solar cell will be further reduced, thereby significantly suppressing the hot spot phenomenon in the end portion of the substrate. 150614.doc 201123489 produce. Thereby, the substrate breakage caused by the hot spot phenomenon can be prevented. As a result, in the present invention, a solar cell module excellent in reliability can be provided without a complicated structure. Further, in the solar battery module according to the second aspect of the present invention, the plurality of grooves include two end grooves of the end portion of the plurality of cells (four), and the two end grooves and the battery. The spacing between the ends is less than 35 between the two end slots. Therefore, the same effect as the solar cell module of the first aspect can be obtained. Further, in the solar battery module t of the third aspect of the present invention, the plurality of grooves include an end groove of the plurality of grooves closest to the end of the battery, and a position closer to the center of the substrate at the end of the groove. The inner groove, the distance between the end groove and the end of the battery is less than 15 between the end groove and the inner groove, and a plurality of inner grooves: the interval. Therefore, the same effect as the solar cell module of the first aspect can be obtained. [Embodiment]
以下基於圖式對本發明之太陽電池模組之最佳形態進行 說明。 〜 T 又，用於以下之說明之各圖式中，為將各構件作成可識 別之大小’對各構件之比例尺進行適當的變更。 本發明之技術範圍並不限定於以下所述之實施形態，可 於不脫離本發明之精神之範圍内加以各種變更。 (太陽電池模組之第丨實施形態） 圖1係表示本發明之第i實施形態即非晶矽太陽電池模組 10A之平面圖。圖2A係表示圖1之太陽電池模組丨〇A之層構 I50614.doc 201123489 成之剖面圖’即圖1中X1-X2線之剖面圖。圖2B係表示圖 2 A之符號Z所示之部分之放大剖面圖。 第1實施形態之太陽電池模組10A包括基板11、及形成於 基板11上之發電區域A。發電區域a係由積層體12所構 成’並藉由劃線20分割為複數個太陽電池21、21(區劃元 件）。 積層.體12包括依序積層於基板11之第一面1丨3上之第一 電極層13、發電層14、及第二電極層15。又，發電層14及 第二電極層1 5藉由劃線20而被除去’亦即，形成藉由劃線 20區劃成複數個之太陽電池2 1、2 1。又，彼此鄰接之太陽 電池21、21於圖1之符號C所示之方向電性地串聯連接。藉 由如上所述般形成之複數個太陽電池21，構成太陽電池模 組 10 A。 又’於太陽電池模組10A之發電區域A中，形成有於與 形成於太陽電池21、21…之兩側之劃線2〇交又之方向（與 符號c所示之方向平行之方向）延伸的複數個槽22、22..。 於複數個槽22、22中，至少將發電層14及第二電極層匕除 去。 發電區域A包含與符號c所示之方向平行之電池端部 30(30a、30b)。換言之，該電池端部3〇(3〇a、3〇b)係發電 區域A之兩邊’並於與劃線2〇正交之方向延伸。 太陽電池模組10A之發電區域a如圖！所示，包括第—區 域A1及第二區域A2。第一區域八丨係於與劃線“延伸之方 向平行之方向，自各電池端部3〇(3〇a、狗起朝向發電區 J50614.doc 201123489 域A之中央延伸之區域，並具有相當於發電區域A之長度 1 /4之寬度。又，第二區域A2係形成於2個第一區域a丨之間 之區域。亦即，第二區域A2具有相當於發電區域A之長度 2/4之寬度。 複數個槽22、22包括形成於第一區域A1之第Uf22a、位 於第1槽22a旁邊（鄰接）之第2槽22b、形成於第二區域a〗之 第3槽22c、及位於第3槽22c旁邊（鄰接）之第4槽22d。又， 於第1實施形態中’位於2個電池端部3〇(30a、30b)旁邊（鄰 接）之槽為第1槽22a。亦即，於發電區域a中，形成有2個 第1槽22a。又，於2個第1槽22a之間形成有2個第2槽22b。 又，電池端部30a、與靠近電池端部3〇a之第1槽22a之間 隔小於2個第1槽22a之間隔。同樣，電池端部3〇b、與靠近 電池端部30b之第1槽22a之間隔小於2個第1槽22a之間隔。 又’電池端部30a、與靠近電池端部3〇a之第1槽22a之間 隔小於2個第2槽22b之間隔。同樣地，電池端部3〇b、與靠 近電池端部30b之第1槽22a之間隔小於2個第2槽22b之間 隔。又’第1槽22a與第2槽22b之間隔小於2個第2槽22b之 間隔。 又’電池端部30a、與靠近電池端部30a之第1槽22a之間 隔小於第2槽22b與第3槽22c之間隔。同樣地，電池端部 3〇b、與靠近電池端部3〇b之第1槽22a之間隔小於第2槽22b 與第3槽22c之間隔。又，第1槽22a與第2槽22b之間隔小於 第2槽22b與第3槽22c之間隔。 又，電池端部30a、與靠近電池端部30a之第1槽22a之間 150614.doc 12 201123489 隔小於第3槽22c與第4槽22d之間隔。同樣地，電池端部 30b、與靠近電池端部3〇b之第1槽22a之間隔小於第3槽2〗c 與第4槽22d之間隔。又，第1槽22a與第2槽22b之間隔小於 第3槽22c與第4槽22d之間隔。 又’電池端部30a、與靠近電池端部30a之第1槽22a之間 隔小於第1槽22a與第3槽22c之間隔。同樣地，電池端部 3 0b、與靠近電池端部3〇b之第1槽22a之間隔小於第1槽22a 與第3槽22c之間隔。 又’電池端部30a、與靠近電池端部30a之第1槽22a之間 隔小於第3槽22c與第4槽22d之間隔。同樣地，電池端部 3〇b、與靠近電池端部3〇b之第1槽22a之間隔小於第3槽22c 與第4槽2；2d之間隔。 於第1貫施形態中，如圖1所示’於第一區域A1形成有2 個槽（22a、22b) ’但本發明並不限定於該結構，亦可於第 一區域A1形成3個以上之槽。於此情形時，形成於第一區 域A1之複數個槽之中任意選擇之槽（第丨槽）、以及與所選 擇之槽鄰接的槽（第2槽）之間隔小於形成於第二區域人2之 第3槽22c、與位於第3槽22(；旁邊之第4槽22d的間隔。 又，於第1實施形態t，於第二區域A2形成有第3槽2。 及第4槽22d，第3槽22c係形成於第二區域A2之複數個槽之 中任意選擇之槽，第4槽22d係與所選擇之槽鄰接的槽。 於具有此種構成之第一區域A1及第二區域入2中，如圖 2A所示，槽22(第1槽、第2槽、第3槽、第4槽）係藉由僅將 發電層14及第二電極層15除去而形成之槽。於槽22之底面 150614.doc 13 201123489 配置有第一電極層13，第一電極層13露出於槽22内之空 間。該第一電極層13係形成於位於槽22之兩側之區域。換 吕之’第一電極層13不僅位於發電層μ之下方，而且設為 於藉由槽22隔開之第1電池區域41及第2電池區域42中，自 气1電池區域4 1起朝向第2電池區域42延伸。即，第一電極 層1 3將位於槽2 2之兩側之區域41、4 2電性連接。 又’第1電池區域及第2電池區域係指由槽2 2所分割之2 個區域。例如，於圖2A中，於符號42為第ί電池區域之情 形時，符號43相當於第2電池區域。 於此種構成中’第二電極層15藉由槽22被分離。因此， 例如，即便於一個太陽電池21内之第一電極層13與第二電 極層15之間存在低電阻部（電阻較低之部分）之情形時，流 經一個太陽電池之整個電流亦不會集中於低電阻部，從而 可抑制因電流集中而產生熱點。 又，於太陽電池21内，於藉由槽22分割而成之第】電池 區域及第2電池區域中，形成於第丨電池區域之第一電極層 與形成於第2電池區域之第一電極層13電性地相連接。 因此，例如即便於太陽電池21之入射面局部地被陰影覆蓋 之情形，亦即於太陽電池2 1内之彼此鄰接之槽22、22之間 之區域中將第一電極層13與第二電極層15之間絕緣之情形 時’亦可使藉由光電轉換而產生之電流自第1電池區域流 至鄰接於槽22之第2電池區域。具體而言，於複數個太陽 電池2 1電性地串聯連接之結構中，可使位於電流方向之上 游或下游之太陽電池21(第1電池區域）中產生之電流經由槽 I50614.doc 201123489 22而傳導至鄰接於第i電池區域的第2電池區域。 進而’基板之端部區域（第一區域Α1)中之彼此鄰接之槽 22、22之間隔或電池端部3〇(3〇a、3〇b)與鄰接於電池端部 30之槽22之間隔小於中央區域（第二區域A2)中之彼此鄰接 之槽22、22之間隔。換言之，第一區域A1中之電池區域 (第1電池區域及第2電池區域）之寬度小於第二區域A2中之 電池區域（第1電池區域及第2電池區域）之寬度。又，第一 區域A1中’形成有鄰接於電池端部3〇之電池區域23、與形 成於電池區域23與第二區域A2之間之電池區域24，電池區 域23之寬度小於電池區域24之寬度。又，第二區域A2中， 形成有具有大於電池區域23的寬度之寬度的電池區域25。 因此’即便於太陽電池2 1存在低電阻部之情形時，集中 流經太陽電池21之一部分之電流量亦會進一步減小，從而 可顯著抑制靠近基板之電池端部3〇(3〇a、3〇b)之位置中之 熱點現象的產生。 因此’具有上述構成之太陽電池模組丨〇A可防止由熱點 現象引起之基板斷裂。 其結果’本發明中，無需複雜之結構便可提供可靠性優 異之太陽電池模組。 於上述構成中，第1槽22a與第2槽22b之間隔或電池端部 30(30a、30b)與第㈠曹22£1之間隔較佳為第3槽22c與第4槽 22d之間隔的70%以下。 藉由滿足該條件，集中流經太陽電池2丨之一部分之電流 量會進一步減小’故可提昇防止由上述熱點現象引起之基 150614.doc 15 201123489 板斷裂的效果。 又，第1槽22a與第2槽22b之間隔或電池端部3〇(3〇a、 3〇b)與第1槽22a之間隔較佳為第3槽22c與第4槽22d之間隔 之50°/。以下。於此情形時，可進一步提昇防止由上述熱點 現象引起之基板斷裂的效果。 但是，增加槽22之個數會導致發電面積之下降或製造步 驟數之增加。因此，增加槽22之個數，使全部之槽22、22 之間隔變小並不佳。 於上述構成中’複數個槽22、22…包括以大於第1槽22a 與電池端部30(3(^、3 01?)之距離（電池區域23之寬度）之距 離遠離電池端部30(30a、30b)而形成之第5槽22§、與鄰接 於第5槽22g之第4槽22d(第6槽於該構成中，形成於第一 區域Ai之複數個槽之中，第ut22ae成於最靠近電池端部 3〇(30a、30b)之位置處，第丨槽22a與電池端部3〇(3〇a、 30b)之間隔小於第5槽22g與第4槽22(1之間隔。 藉由滿足該條件，可進一步提昇防止由上述熱點現象引 起之基板斷裂的效果。 再者，於第1實施形態中，第4槽22d與第6槽一致，但於 形成於第二區域A2之槽之個數多於圖丨所示之槽的個數之 情形時，有時第4槽22d與第6槽並不一致。 基板11例如由玻璃或透明樹脂等、太陽光之透射性優 異、且具有耐久性之絕緣材料而構成。 於該太陽電池模組10A中，太陽光8入射至基板u之與第 一面11 a為相反側之第二面11 b。 150614.doc •16· 201123489 第一電極層13(下部電極）係由透明導電材料、例如 TCO、IT〇(indium_Tin 〇xide，銦錫氧化物）等光透射性之 金屬氧化物而形成。 發電層14(半導體層）例如如圖2B所示般，構成於p型非 . 晶矽膜1外與n型非晶矽膜14n之間夾持有丨型非晶矽膜Μ〗之 pin接面結構。 繼而，若太陽光入射至該發電層14，則產生電子及電 洞，藉由p型非晶矽膜1415與11型非晶矽膜l4n之電位差電 子及電洞會活躍地移動’藉由連續地重複該動作而於第一 電極層（下部電極）13與第二電極層（上部電極）15之間產生 電位差（光電轉換）。 又，於本發明中，亦可採用於發電層14、與配置於該發 電層14上之第二電極層15之間配置有緩衝層（未圖示）之構 成。藉由發電層14與第二電極層15之間配置緩衝層（未圖 示），可抑制秒自發電層14向第二電極層15擴散，可抑制 矽發生反應。此種緩衝層（未圖示）例如包含以〇等。 第二電極層（上部電極）15例如包含“(銀）_(紹）等導 電性光反射膜。該第二電極層15例如可利用㈣法等形 成。 於由此種積層體12構成之發電區域A中，發電層14及第 二電極層15藉由劃線2〇(scribe iine)部分地被除去。藉此， 發電區域A例如分割為具有帶狀外形之多個太陽電池21、 21".。 該太陽電池21、21·.·彼此電性區劃。彼此鄰接之太陽電 1506l4.doc -17· 201123489 池21電性地串聯連接。 藉此’於由積層體12構成之發電區域A中，太陽電池 21、21…全部電性地串聯連接，可產生較高之電位差之電 流。 例如於基板11之第一面i la均勻地形成積層體12後，利 用雷射光線等以特定間隔於發電層i 4及第二電極層i 5形成 槽’藉此形成劃線20。 將太陽電池2 1、2 1...全部電性地串聯排列、且形成有劃 線20之結構之例示於圖3。 再者，圖3係表示相當於圖i所示之γι_γ2線之位置之剖 面圖。 如圖3所示，於太陽電池21、21 ••中，例如有時會出現 因發電層14中混入污染物而產生結構缺陷B1、或因發電層 1 4中產生細小針孔而產生結構缺陷B2等故障。 此類結構缺陷B1、B2使第一電極層13與第二電極層15 之間局部地短路（漏電），發電效率降低。 又，於劃線20之形成步驟中，如圖3所示，有時亦會出 現結構缺陷B3等之故障，該結構缺陷B3係由於照射雷射 之位置自期望位置偏離等而導致構成第二電極層15之金屬 熔融，因經熔融之金屬流入至劃線2〇之槽内而產生。 此類結構缺陷B3使第一電極層13與第二電極層15之間局 部地短路（漏電）’使發電效率降低。 進而，因陰影等覆蓋第二面llb而導致輸出下降之太陽 電池21成為包含複數個太陽電池21之串聯電路中之電阻。 150614.doc 201123489 因此，於太陽電池21之兩端被反方向施加電壓（偏壓電 壓）’電壓集中於上述缺陷等電阻較低之部位，產生局部 加熱之現象（熱點現象）。 特別是，於先前之太陽電池中，存在若於靠近配置有寬 度較小之太1%電池21之基板Π的端部之區域產生熱點現 象’則會引起基板11斷裂之問題。 與此對應，於第1實施形態之太陽電池模組1〇A中，於與 太陽電池21、21...之劃線20交叉之方向形成有至少將發電 層14及第二電極層15除去之複數個槽22、22...。進而，太 陽電池模組10A之發電區域A如上所述，包括第一區域幻 及第二區域A2。又，於第一區域A1中之任意選擇之槽22 與鄰接於所選擇之槽之槽22之間隔、及電池端部3〇與鄰接 於電池端部30之槽22之間隔中的至少一者，小於形成於第 二區域A2之任意選擇之槽22與鄰接於所選擇之槽22的槽22 之間隔。 第1實施形態之太陽電池模組丨0A因具有上述構成，故可 降低電流集中流經基板丨丨之端部區域之故障，從而抑制熱 點現象之產生。 藉此’可防止由熱點現象引起之基板丨丨斷裂。因此，根 據本發明，無需複雜之結構便可獲得可靠性優異之太陽電 池模組。 (太陽電池模組之第1實施形態之變形例） 於上述第1貫施形態中，如圖1所示，對配置有鄰接於基 板11之電池端部3〇之電池區域23(太陽電池21之寬度較小 J50614.doc -19- 201123489 Εΐ域）之結構進行了 ^日日 仃了說明，但本發明並不限定於該結構。 例如，如圖4辦；雨、， ^ '、，電池區域24之寬度亦可小於電池區域 見度。亦gp，认曾 ;第一區域A1内，亦可採用太陽電池21 又交小區域遠離電池端部30之結構。 _。第一電極層(上部電極)15之上亦可形成保護層(未圖 示）作為此種保護層（未圖示），例如可舉出Ti等。 (太陽電池模組之製造方法） 其次’對製造具有如上所述之構成之太陽電池模組i〇A 之方法進行說明。 首先’準備形成有透明導電膜作為第—電極層13之絕緣 性透明基板11 '繼而’ h圖3所示，形成分離第一電極層 13之第一電極分離槽。繼而，於電漿CVD(chemical vapour deposmon，化學氣相沈積）反應室内於第一電極層u 上，形成p型非晶矽膜14p、丨型非晶矽膜14i、及η型非晶矽 膜14η之發電層14之各個。 Ρ型非晶矽膜14ρ係於個別之反應室内使用電漿CVD法而 形成。作為形成非晶矽O-Si)之p層之條件，例如可使用以 下之條件：將基板11之溫度設定為180〜200°C ;將電源頻 率设定為13.56 MHz;將反應室内壓力設定為7〇〜12〇 pa; 關於反應氣體流量係將甲矽烷（SiHU)設定為300 sccm、氣 (HO設定為2300 seem、以氫作為稀釋氣體之二爛燒 (B2H6/H2)設定為 180 seem、甲炫（CH4)設定為 500 seem。 又’ i型非晶石夕膜14i係於個別之反應室内使用電漿cvd 法而形成。作為形成非晶矽（a-Si)之i層之條件，例如使用 I50614.doc -20- 201123489 以下條件··將基板11之溫度設定為180〜200°c ;將電源頻 率設定為13.56 MHz ;關於反應氣體流量係將反應室内壓 力設定為70〜120 Pa ;將甲矽烷（SiH4)設定為1200 seem。 進而，η型非晶矽膜14η係於個別之反應室内使用電漿 CVD法而形成。作為形成非晶矽（a-Si)之η層之條件，例如 使用以下條件：將基板11之溫度設定為1 80〜200°C ;將電 源頻率設定為13.56 MHz ;關於反應氣體流量係將反應室 内壓力設定為70〜120 Pa ;將以氫作為稀釋氣體之膦 (PH3/H2)設定為 200 seem。 其次’如圖3所示般，對發電層14例如照射雷射光線 等，形成發電層分離槽。 繼而，於發電層14上形成第二電極層15。將第二電極層 15之材料填充於發電層分離槽，將第一電極層13連接於第 二電極層1 5。 第二電極層1 5係例如使用連續式濺鑛裝置而形成（成 膜）。其後，對發電層14及第二電極層15例如照射雷射光 線等，形成劃線20。 藉此，形成帶狀之多個太陽電池21、21...。 該太陽電池2 1、2 1…彼此電性區劃，彼此鄰接之太陽電 池21例如電性串聯連接。 進而，如圖1所示，於與劃線20垂直之方向，對發電層 14及第二電極層1 5例如照射雷射光線等形成槽22 ^藉此， 如圖2A所示，形成電池區域41、42、43(第1電池區域及第 2電池區域）。 150614.doc 21 201123489 其結果’於各個太陽電池21中，未形成發電層14及第二 電極層15’藉由露出有第一電極層13之槽部，分割為電性 連接之複數個電池區域。 藉此’獲得如圖1、圖2A、及圖2B所示之太陽電池模組 10A。 根據上述製造方法’可容易且穩定地製造太陽電池模組 10 A ’其係具有可降低電流集中流經基板丨丨之端部區域中 之故障、可抑制熱點現象之產生之構成。 因此’上述製造方法有助於製造可防止由熱點現象引起 之基板11斷裂之太陽電池模組。 又’於上述第1實施形態中，藉由將發電層14及第二電 極層1 5除去而形成複數個槽2 2、2 2。本發明並不限定此種 槽之結構’亦可藉由將第一電極層1 3、發電層丨4、及第二 電極層1 5除去而形成複數個槽22、22❻於此之情形時，分 離第一電極層1 3之第一電極分離槽係沿複數個槽22 ' 22之 圖案而形成。 (太陽電池模組之第2實施形態） 圖5係表示本發明之第2實施形態即非晶矽型太陽電池模 組10C之平面圖。 於圖5中’對與第丨實施形態相同之構件附以相同之符 號，並省略或簡化其說明。 於太陽電池模組10C之發電區域A中，形成有於與形成 於太陽電池21、21…之兩側之劃線2 0交叉之方向匚延伸之 複數個端部槽22e、22e(22)。於端部槽22e、22e中，至，卜 150614.doc -22- 201123489 將發電層14及第二電極層15除去。於端部槽22e與電池端 部30(30a、30b)之間沿方向C排列有複數個端部陣列5〇。 複數個端部陣列50之各個構成太陽電池2 1之一部分，又， 於靠近電池端部30a之端部陣列50與靠近電池端部3〇b之端 部陣列50之間，以位於基板11之中央之方式沿方向c排列 有複數個内側陣列5 1。複數個内側陣列5 1之各個構成太陽 電池2 1之一部分。 又’與劃線20延伸之方向平行之方向上之端部陣列5〇之 寬度小於内側陣列51之寬度。換言之，端部槽22e與電池 端部30(3 0a、30b)之間隔小於2個端部槽22e、22e之間隔。 又，端部槽22e與電池端部30(30a、30b)之間隔於複數個槽 22之間隔之中最小。 於此種第2實施形態中’亦可獲得與上述第1實施形態相 同之效果。 (太陽電池模組之第3實施形態） 圖6係表示本發明之第3實施形態即非晶矽型太陽電池模 組10D之平面圖。 於圖6中，對與第丨實施形態及第2實施形態相同之構件 附以相同之符號，並省略或簡化其說明。 於太陽電池模組l〇D之發電區域中，於靠近電池端部3〇a 之端部陣列50與靠近電池端部30b之端部陣列50之間，以 位於基板11之中央之方式沿方向C排列有複數個内側陣列 51a、51b。複數個内側陣列51a、51b之各個構成太陽電池 21之一部分。 150614.doc •23 · 201123489 又，於内側陣列51a與内側陣列51b之間形成有内側槽 22f(22) ’内側槽22f將一個内側陣列5丨分割為2個内側陣列 51a、51b。亦即，於太陽電池模組中，形成_内側样 22f。 9 又，與劃線20延伸之方向平行之方向上之端部陣列“之 寬度小於内側陣列51a、51b之寬度。換言之，端部槽2^ 與電池端部30(3〇a、30b)之間隔小於端部槽22e與内側槽 22f的間隔。又，端部槽22e與電池端部3〇(3〇a、3此）之間 隔於複數個槽22之間隔之中最小。 於此種第3實施形態中，亦可獲得與上述第丨實施形態相 同之效果。 (太陽電池模組之第4實施形態） 圖7係表示本發明之第4實施形態即非晶矽型太陽電池模 組10E之平面圖。 &於圖7中，第❻施形態、第2實施形態及第3實施形 態相同之構件附以相同之符號，並省略或簡化其說明。 於太陽電池模組10Ε之發電區域Α中’於靠近電池端部 3〇a之端部陣列5〇與靠近電池端部3〇b之端部陣列之間， 以位於基板11之中央之方式沿方向c排列有複數個内側陣 列51C' 50c^複數個内側陣列51。5〇d之各個構成太陽電 池21之—部分。 又，於靠近電池端部30a之内側陣列51d與内側陣列51c 之間形成有内側槽22f(22)，又，於靠近電池端部3〇b之内 側陣列51d與内側陣列51c之間形成有内側槽22£(22卜内側 150614.doc -24· 201123489 槽22f將一個内側陣列51分割為3個内側陣列51c、51d。亦 即，於太陽電池模組10E中，形成有2個内側槽22f。 又’與劃線20延伸之方向平行之方向上之端部陣列5 〇之 寬度小於内側陣列5 1 c之寬度。換言之，端部槽22e與電池 端部30(30a、30b)之間隔小於2個内側槽22f之間隔。又， 端部槽22e與電池端部30(30a、30b)之間隔於複數個槽22之 間隔之中最小。 於此種第4實施形態中，亦可獲得與上述第1實施形態相 同之效果。 以上對本發明之太陽電池模組之實施形態進行了說明， 但本發明並不限定於上述例’可於不脫離發明之主旨之範 圍内進行適當地變更。 於上述第2實施形態、第3實施形態、及第4實施形態 中，係藉由將發電層14及第二電極層15除去而形成複數個 槽22、22。本發明並不限定此種槽之結構，亦可藉由將第 一电極層13、發電層14、及第二電極層15除去而形成複數 個槽22、22。 本發明可廣泛適用於太陽電池模組。 亦即，於上述實施形態中，對將本發明適用於太陽電池 包含矽系薄膜之太陽電池模組之例進行了詳細說明，但本 發明並不限定包含矽系薄膜之太陽電池，例如可將本發明 適用於包含化合物系薄膜、有機薄膜、或結晶矽之太陽電 池。 【圖式簡單說明】 150614.doc -25- 201123489 圖1係表示本發明之第1實施形態之太陽電池模組之平面 圖； 圖2A係表示本發明之第1實施形態之太陽電池模組即圖】 所示之太陽電池模組之主要部分之剖面圖； 圖2B係表示本發明之第1實施形態之太陽電池模組之圖 2 A的符號Z所示之部分之放大剖面圖； 圖3係表示本發明之第1實施形態之太陽電池模組中之存 在結構缺陷之積層體之剖面圖； 圖4係表示本發明之第1實施形態之太陽電池模組之變形 例的平面圖； 圖5係表示本發明之第2實施形態之太陽電池模組之平面 圖； 圖6係表示本發明之第3實施形態之太陽電池模組之半面 圖；及 圖7係表示本發明之第4實施形態之太陽電池模組之平面 圖。 【主要元件符號說明】 10 ' 10A > 10B ' 10C ' l〇D ' 10E 太陽電池模組 11 基板 11a 基板之第一面 lib 基板之第二面 12 積層體 13 第一電極層 14 發電層 150614.doc * 26 - 201123489 14i i型非晶矽膜 14η n型非晶$夕膜 14ρ ρ型非晶碎膜 15 第二電極層 20 劃線 21 太陽電池 22 槽 22a 第1槽 22b 第2槽 22c 第3槽 22d 第4槽 22e 端部槽 22f 内側槽 22g 第5槽 23 、 24 、 25 、 41 、 42 、 43 電池區域 30、30a、30b 電池端部 50 端部陣列 51 、 51a 、 51b 、 51c 、 51d 内側陣列 A 發電區域 A1 第一區域 A2 第二區域 B1、B2、B3 結構缺陷 150614.doc -27·The best mode of the solar cell module of the present invention will be described below based on the drawings. Further, in the drawings for the following description, the scale of each member is appropriately changed in order to make each member identifiable. The technical scope of the present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit and scope of the invention. (Embodiment of the solar cell module) Fig. 1 is a plan view showing an amorphous germanium solar cell module 10A according to the i-th embodiment of the present invention. Fig. 2A is a cross-sectional view showing the layer structure of the solar cell module 丨〇A of Fig. 1 I50614.doc 201123489, which is a cross-sectional view taken along the line X1-X2 in Fig. 1. Fig. 2B is an enlarged cross-sectional view showing a portion indicated by a symbol Z of Fig. 2A. The solar cell module 10A of the first embodiment includes a substrate 11 and a power generation region A formed on the substrate 11. The power generation area a is composed of the laminated body 12 and is divided into a plurality of solar cells 21 and 21 (zoning elements) by the scribe lines 20. The laminated body 12 includes a first electrode layer 13, a power generating layer 14, and a second electrode layer 15 which are sequentially laminated on the first surface 1?3 of the substrate 11. Further, the power generation layer 14 and the second electrode layer 15 are removed by the scribe line 20, i.e., a plurality of solar cells 2 1 and 2 1 are formed by scribe lines 20 . Further, the solar cells 21, 21 adjacent to each other are electrically connected in series in the direction indicated by the symbol C in Fig. 1. The solar cell module 10 A is constructed by a plurality of solar cells 21 formed as described above. Further, in the power generation region A of the solar battery module 10A, the direction of the scribe line 2 formed on both sides of the solar cells 21, 21, ... is formed (the direction parallel to the direction indicated by the symbol c). Extending a plurality of slots 22, 22... At least a plurality of the grooves 22 and 22 are removed from the power generation layer 14 and the second electrode layer. The power generation area A includes battery end portions 30 (30a, 30b) parallel to the direction indicated by the symbol c. In other words, the battery end portion 3〇(3〇a, 3〇b) is both sides of the power generation region A and extends in a direction orthogonal to the scribe line 2〇. The power generation area a of the solar cell module 10A is as shown in the figure! As shown, the first area A1 and the second area A2 are included. The first region of the gossip is in a direction parallel to the direction in which the scribe line extends, from the end of each battery 3〇 (3〇a, the dog to the area of the power generation area J50614.doc 201123489 domain A, and has the equivalent The length of the power generation area A is 1/4. Further, the second area A2 is formed in a region between the two first areas a. That is, the second area A2 has a length 2/4 corresponding to the power generation area A. The plurality of grooves 22 and 22 includes a Uf 22a formed in the first area A1, a second groove 22b located adjacent to the first groove 22a (adjacent), a third groove 22c formed in the second area a, and located at In the first embodiment, the groove located next to (adjacent to) the two battery end portions 3A (30a, 30b) is the first groove 22a. In the power generation area a, two first grooves 22a are formed. Further, two second grooves 22b are formed between the two first grooves 22a. Further, the battery end portion 30a and the battery end portion are adjacent to each other. The interval between the first grooves 22a of a is smaller than the interval between the two first grooves 22a. Similarly, the distance between the battery end portion 3b and the first groove 22a near the battery end portion 30b is less than 2 The distance between the first groove 22a and the first groove 22a close to the battery end portion 3a is smaller than the interval between the two second grooves 22b. Similarly, the battery end portion 3b, The distance from the first groove 22a near the battery end portion 30b is smaller than the interval between the two second grooves 22b. Further, the interval between the first groove 22a and the second groove 22b is smaller than the interval between the two second grooves 22b. The distance between the portion 30a and the first groove 22a close to the battery end portion 30a is smaller than the interval between the second groove 22b and the third groove 22c. Similarly, the battery end portion 3b and the first end adjacent to the battery end portion 3b The interval between the grooves 22a is smaller than the interval between the second groove 22b and the third groove 22c. Further, the distance between the first groove 22a and the second groove 22b is smaller than the distance between the second groove 22b and the third groove 22c. Further, the battery end portion 30a, 150614.doc 12 201123489 is spaced apart from the first groove 22a adjacent to the battery end portion 30a by a distance smaller than the interval between the third groove 22c and the fourth groove 22d. Similarly, the battery end portion 30b and the battery end portion 3b are adjacent to the battery. The interval between the one groove 22a is smaller than the interval between the third groove 2c and the fourth groove 22d. Further, the interval between the first groove 22a and the second groove 22b is smaller than the interval between the third groove 22c and the fourth groove 22d. Department 30a, and The interval between the first groove 22a of the battery end portion 30a is smaller than the interval between the first groove 22a and the third groove 22c. Similarly, the distance between the battery end portion 30b and the first groove 22a close to the battery end portion 3b is smaller than The distance between the first groove 22a and the third groove 22c is different. The distance between the battery end portion 30a and the first groove 22a close to the battery end portion 30a is smaller than the distance between the third groove 22c and the fourth groove 22d. Similarly, the distance between the battery end portion 3'b and the first groove 22a near the battery end portion 3b is smaller than the interval between the third groove 22c and the fourth groove 2; 2d. In the first embodiment, as shown in FIG. 1, 'two grooves (22a, 22b) are formed in the first region A1. However, the present invention is not limited to this configuration, and three may be formed in the first region A1. The above slot. In this case, the interval between the arbitrarily selected ones of the plurality of grooves formed in the first region A1 (the second groove) and the groove adjacent to the selected groove (the second groove) is smaller than that formed in the second region. The third groove 22c of the second groove 22c is spaced apart from the fourth groove 22d of the third groove 22; (in the first embodiment t, the third groove 2 is formed in the second region A2.) The third groove 22c is an arbitrarily selected one of a plurality of grooves formed in the second region A2, and the fourth groove 22d is a groove adjacent to the selected groove. The first region A1 and the second having such a configuration In the region 2, as shown in FIG. 2A, the grooves 22 (the first groove, the second groove, the third groove, and the fourth groove) are grooves formed by removing only the power generation layer 14 and the second electrode layer 15. The first electrode layer 13 is disposed on the bottom surface of the groove 22, 150614.doc 13 201123489, and the first electrode layer 13 is exposed in a space in the groove 22. The first electrode layer 13 is formed in a region on both sides of the groove 22. The first electrode layer 13 of the "Lv" is located not only below the power generation layer μ but also in the first battery region 41 and the second battery region 42 separated by the slots 22, 1 The battery region 41 extends toward the second battery region 42. That is, the first electrode layer 13 electrically connects the regions 41 and 4 2 on both sides of the slot 22. The first battery region and the second battery The area refers to two areas divided by the slot 22. For example, in Fig. 2A, when the symbol 42 is the ί battery area, the symbol 43 corresponds to the second battery area. The electrode layer 15 is separated by the groove 22. Therefore, for example, even if there is a low resistance portion (a portion having a low resistance) between the first electrode layer 13 and the second electrode layer 15 in one solar cell 21, The entire current flowing through one solar cell is not concentrated in the low-resistance portion, thereby suppressing the generation of hot spots due to current concentration. Further, in the solar cell 21, the battery region and the first battery segment are divided by the groove 22 In the battery region, the first electrode layer formed in the second battery region is electrically connected to the first electrode layer 13 formed in the second battery region. Therefore, for example, even if the incident surface of the solar cell 21 is partially shadowed Coverage, that is, within the solar cell 2 1 When the first electrode layer 13 and the second electrode layer 15 are insulated from each other in the region between the grooves 22 and 22 adjacent to each other, 'the current generated by photoelectric conversion can also flow from the first battery region to the adjacent portion. In the second battery region of the slot 22, specifically, in a configuration in which a plurality of solar cells 21 are electrically connected in series, the solar cell 21 (first battery region) located upstream or downstream of the current direction can be generated. The current is conducted to the second battery region adjacent to the i-th battery region via the slot I50614.doc 201123489 22. Further, the interval between the slots 22, 22 adjacent to each other in the end region (first region Α1) of the substrate or the battery The spacing between the end portions 3〇 (3〇a, 3〇b) and the grooves 22 adjacent to the battery end portion 30 is smaller than the spacing between the mutually adjacent grooves 22, 22 in the central portion (second region A2). In other words, the width of the battery area (the first battery area and the second battery area) in the first area A1 is smaller than the width of the battery area (the first battery area and the second battery area) in the second area A2. Further, in the first region A1, a battery region 23 adjacent to the battery end portion 3 and a battery region 24 formed between the battery region 23 and the second region A2 are formed, and the width of the battery region 23 is smaller than that of the battery region 24. width. Further, in the second region A2, a battery region 25 having a width larger than the width of the battery region 23 is formed. Therefore, even in the case where the solar cell 21 has a low resistance portion, the amount of current that flows through a portion of the solar cell 21 is further reduced, so that the battery end portion 3 near the substrate can be remarkably suppressed (3〇a, The occurrence of hot spots in the position of 3〇b). Therefore, the solar cell module 丨〇A having the above configuration can prevent the substrate from being broken due to the hot spot phenomenon. As a result, in the present invention, a solar cell module excellent in reliability can be provided without a complicated structure. In the above configuration, the interval between the first groove 22a and the second groove 22b or the interval between the battery end portion 30 (30a, 30b) and the first (one) Ca 22 is preferably the interval between the third groove 22c and the fourth groove 22d. 70% or less. By satisfying this condition, the amount of current flowing through a portion of the solar cell 2 会 is further reduced, so that the effect of preventing the breakage of the substrate caused by the above-mentioned hot spot phenomenon can be enhanced. Further, the interval between the first groove 22a and the second groove 22b or the distance between the battery end portion 3A (3〇a, 3〇b) and the first groove 22a is preferably a gap between the third groove 22c and the fourth groove 22d. 50°/. the following. In this case, the effect of preventing the substrate from being broken by the above-mentioned hot spot phenomenon can be further enhanced. However, increasing the number of slots 22 results in a decrease in the area of power generation or an increase in the number of manufacturing steps. Therefore, it is not preferable to increase the number of the grooves 22 to make the interval between all the grooves 22 and 22 small. In the above configuration, the plurality of grooves 22, 22, ... are separated from the battery end portion 30 by a distance greater than the distance between the first groove 22a and the battery end portion 30 (3 (^, 3 01?) (the width of the battery region 23) ( The fifth groove 22 § formed by 30a and 30b) and the fourth groove 22d adjacent to the fifth groove 22g (the sixth groove is formed in the plurality of grooves of the first region Ai in this configuration, and the ut22ae becomes At a position closest to the battery end portion 3〇 (30a, 30b), the interval between the second groove 22a and the battery end portion 3〇 (3〇a, 30b) is smaller than the interval between the fifth groove 22g and the fourth groove 22 (1) By satisfying this condition, the effect of preventing the substrate from being broken by the above-described hot spot phenomenon can be further enhanced. Further, in the first embodiment, the fourth groove 22d coincides with the sixth groove, but is formed in the second region A2. When the number of the grooves is larger than the number of the grooves shown in the figure, the fourth groove 22d does not coincide with the sixth groove. The substrate 11 is excellent in transparency of sunlight, for example, by glass or a transparent resin. The solar cell module 10A is configured such that the sunlight 8 is incident on the opposite side of the substrate u from the first surface 11 a. Surface 11 b. 150614.doc •16· 201123489 The first electrode layer 13 (lower electrode) is made of a transparent conductive material, such as TCO, IT〇 (indium_Tin idexide, indium tin oxide), etc. The power generation layer 14 (semiconductor layer) is formed, for example, as shown in FIG. 2B, and is sandwiched between a p-type non-crystalline germanium film 1 and an n-type amorphous germanium film 14n. Pin junction structure. Then, if sunlight enters the power generation layer 14, electrons and holes are generated, and the potential difference electrons and holes of the p-type amorphous germanium film 1415 and the 11-type amorphous germanium film l4n are actively activated. The movement 'produces a potential difference (photoelectric conversion) between the first electrode layer (lower electrode) 13 and the second electrode layer (upper electrode) 15 by continuously repeating the operation. Further, in the present invention, it may be employed in A buffer layer (not shown) is disposed between the power generation layer 14 and the second electrode layer 15 disposed on the power generation layer 14. A buffer layer is disposed between the power generation layer 14 and the second electrode layer 15 (not As shown in the figure, it is possible to suppress the diffusion of the second self-generated layer 14 to the second electrode layer 15 and suppress The buffer layer (not shown) includes, for example, ruthenium or the like. The second electrode layer (upper electrode) 15 includes, for example, a conductive light-reflecting film such as "(silver)". The second electrode layer 15 For example, it can be formed by the (four) method or the like. In the power generation region A composed of the laminate 12, the power generation layer 14 and the second electrode layer 15 are partially removed by a scribe line, thereby generating electricity. The area A is divided, for example, into a plurality of solar cells 21, 21 ". having a strip shape. The solar cells 21, 21, . . . are electrically segmented with each other. Solar power adjacent to each other 1506l4.doc -17· 201123489 The pool 21 is electrically connected in series. Thereby, in the power generation area A composed of the laminated body 12, all of the solar cells 21, 21, ... are electrically connected in series, and a current having a high potential difference can be generated. For example, after the laminated body 12 is uniformly formed on the first surface i la of the substrate 11, a groove θ is formed by forming a groove at a specific interval between the power generating layer i 4 and the second electrode layer i 5 by using a laser beam or the like. An example in which the solar cells 2 1 and 2 1 are electrically connected in series and the structure of the scribe lines 20 is formed is shown in Fig. 3 . Further, Fig. 3 is a cross-sectional view showing a position corresponding to the γι_γ2 line shown in Fig. i. As shown in FIG. 3, in the solar cells 21, 21, for example, structural defects B1 may occur due to contamination of the power generation layer 14 or structural defects may occur due to generation of fine pinholes in the power generation layer 14. B2 and other faults. Such structural defects B1 and B2 partially short-circuit (leakage) between the first electrode layer 13 and the second electrode layer 15, and the power generation efficiency is lowered. Further, in the step of forming the scribe line 20, as shown in FIG. 3, a failure of the structural defect B3 or the like may occur, and the structural defect B3 is caused to be caused by the position of the irradiation laser being deviated from the desired position or the like. The metal of the electrode layer 15 is melted and is generated by the molten metal flowing into the groove of the scribe line 2〇. Such a structural defect B3 causes a local short circuit (leakage) between the first electrode layer 13 and the second electrode layer 15 to lower the power generation efficiency. Further, the solar cell 21 which is caused by the shadow or the like covering the second surface 11b and causing the output to fall is a resistor in the series circuit including the plurality of solar cells 21. Therefore, a voltage (bias voltage) applied to the opposite ends of the solar cell 21 is concentrated in a portion where the electric resistance such as the above-mentioned defect is low, and a local heating phenomenon (hot spot phenomenon) occurs. In particular, in the prior solar cell, there is a problem that the substrate 11 is broken if a hot spot phenomenon occurs in a region close to the end portion of the substrate which is disposed with a 1% cell 21 having a small width. In the solar battery module 1A of the first embodiment, at least the power generation layer 14 and the second electrode layer 15 are formed in a direction intersecting the scribe lines 20 of the solar cells 21, 21, .... A plurality of slots 22, 22... Further, as described above, the power generation area A of the solar battery module 10A includes the first area illusion and the second area A2. Further, at least one of the groove 22 of the arbitrarily selected one in the first region A1 and the groove 22 adjacent to the selected groove, and the space between the battery end portion 3 and the groove 22 adjacent to the battery end portion 30 It is smaller than the interval between the groove 22 of any selection formed in the second region A2 and the groove 22 adjacent to the selected groove 22. Since the solar battery module 丨0A of the first embodiment has the above configuration, it is possible to reduce the occurrence of a concentration of current flowing through the end portion of the substrate ,, thereby suppressing the occurrence of a hot spot phenomenon. Thereby, the substrate crucible fracture caused by the hot spot phenomenon can be prevented. Therefore, according to the present invention, a solar cell module excellent in reliability can be obtained without a complicated structure. (Modification of the first embodiment of the solar battery module) In the first embodiment, as shown in FIG. 1, the battery region 23 (the solar battery 21) is disposed adjacent to the battery end portion 3 of the substrate 11. The structure of the smaller width J50614.doc -19-201123489 has been described, but the present invention is not limited to this structure. For example, as shown in Figure 4; rain, ^ ', the width of the battery area 24 can also be less than the battery area visibility. Also, in the first area A1, the structure in which the solar cell 21 and the small area are separated from the battery end 30 can also be used. _. A protective layer (not shown) may be formed on the first electrode layer (upper electrode) 15 as such a protective layer (not shown), and examples thereof include Ti. (Manufacturing Method of Solar Cell Module) Next, a method of manufacturing the solar cell module i〇A having the above configuration will be described. First, an insulating transparent substrate 11 which is formed with a transparent conductive film as the first electrode layer 13 is prepared. Then, as shown in Fig. 3, a first electrode separation trench for separating the first electrode layer 13 is formed. Then, a p-type amorphous germanium film 14p, a germanium-type amorphous germanium film 14i, and an n-type amorphous germanium film are formed on the first electrode layer u in a plasma CVD (chemical vapor deposition) reaction chamber. Each of the 14 η power generation layers 14 . The ruthenium-type amorphous ruthenium film 14p is formed by a plasma CVD method in an individual reaction chamber. As a condition for forming the p-layer of the amorphous germanium O-Si), for example, the following conditions can be used: the temperature of the substrate 11 is set to 180 to 200 ° C; the power supply frequency is set to 13.56 MHz; and the pressure in the reaction chamber is set to 7〇~12〇pa; About the reaction gas flow rate, the methotane (SiHU) is set to 300 sccm, the gas (HO is set to 2300 seem, and the second roasting (B2H6/H2) using hydrogen as the diluent gas is set to 180 seem, The genus (CH4) is set to 500 seem. The 'i-type amorphous lithium film 14i is formed by a plasma cvd method in a separate reaction chamber. As a condition for forming an i-layer of amorphous yttrium (a-Si), For example, I50614.doc -20-201123489 is used. The temperature of the substrate 11 is set to 180 to 200 ° C; the power frequency is set to 13.56 MHz; and the reaction gas flow rate is set to 70 to 120 Pa in the reaction chamber; Further, the y-type amorphous ruthenium film 14 η is formed by a plasma CVD method in an individual reaction chamber. As a condition for forming an η layer of amorphous yttrium (a-Si), For example, the following conditions are used: the temperature of the substrate 11 is set to 1 80 to 200 ° C; The frequency is set to 13.56 MHz; the reaction gas flow rate is set to 70~120 Pa in the reaction chamber; the phosphine (PH3/H2) using hydrogen as the diluent gas is set to 200 seem. Next, as shown in Fig. 3, The power generation layer 14 is irradiated with, for example, a laser beam to form a power generation layer separation groove. Then, the second electrode layer 15 is formed on the power generation layer 14. The material of the second electrode layer 15 is filled in the power generation layer separation groove, and the first electrode layer is formed. 13 is connected to the second electrode layer 15. The second electrode layer 15 is formed, for example, by using a continuous sputtering apparatus (film formation). Thereafter, the power generation layer 14 and the second electrode layer 15 are irradiated with, for example, laser light or the like. The scribe line 20 is formed. Thereby, a plurality of solar cells 21, 21 are formed in a strip shape. The solar cells 2 1 , 2 1 ... are electrically segmented with each other, and the solar cells 21 adjacent to each other are electrically connected in series, for example. Further, as shown in FIG. 1, in the direction perpendicular to the scribe line 20, the power generation layer 14 and the second electrode layer 15 are irradiated with, for example, laser light or the like to form a groove 22. Thereby, as shown in FIG. 2A, a battery region is formed. 41, 42, 43 (first battery area and second battery area) 15061 4.doc 21 201123489 As a result, in each of the solar cells 21, the power generation layer 14 and the second electrode layer 15' are not formed by exposing the groove portion of the first electrode layer 13, and are divided into a plurality of battery regions electrically connected. Thereby, the solar cell module 10A shown in FIG. 1, FIG. 2A, and FIG. 2B is obtained. According to the above-described manufacturing method, the solar cell module 10 A ' can be easily and stably manufactured, and has a configuration capable of reducing the occurrence of current concentration in the end portion of the substrate 丨丨 and suppressing the occurrence of a hot spot phenomenon. Therefore, the above manufacturing method contributes to the manufacture of a solar cell module which can prevent the substrate 11 from being broken by a hot spot phenomenon. Further, in the first embodiment described above, a plurality of grooves 2 2, 2 2 are formed by removing the power generation layer 14 and the second electrode layer 15 . The present invention is not limited to the structure of the groove. When the first electrode layer 13 , the power generation layer 丨 4 , and the second electrode layer 15 are removed to form a plurality of grooves 22 and 22, The first electrode separation trench separating the first electrode layer 13 is formed along a pattern of a plurality of trenches 22'22. (Second Embodiment of Solar Cell Module) Fig. 5 is a plan view showing an amorphous germanium solar cell module 10C according to a second embodiment of the present invention. In Fig. 5, members which are the same as those of the embodiment of the third embodiment are denoted by the same reference numerals, and their description is omitted or simplified. In the power generation region A of the solar battery module 10C, a plurality of end grooves 22e and 22e (22) extending in a direction intersecting with the scribe lines 20 formed on both sides of the solar cells 21, 21, ... are formed. The power generation layer 14 and the second electrode layer 15 are removed from the end grooves 22e and 22e to pp 150614.doc -22-201123489. A plurality of end arrays 5 are arranged in the direction C between the end grooves 22e and the battery end portions 30 (30a, 30b). Each of the plurality of end arrays 50 forms part of the solar cell 21, and is further disposed between the end array 50 adjacent to the battery end 30a and the end array 50 adjacent to the battery end 3B to be located on the substrate 11. The central mode has a plurality of inner arrays 5 1 arranged along the direction c. Each of the plurality of inner arrays 5 1 constitutes a part of the solar cell 2 1 . Further, the width of the end array 5' in the direction parallel to the direction in which the scribe lines 20 extend is smaller than the width of the inner array 51. In other words, the distance between the end groove 22e and the battery end portion 30 (30a, 30b) is smaller than the interval between the two end grooves 22e, 22e. Further, the end groove 22e and the battery end portion 30 (30a, 30b) are the smallest among the intervals of the plurality of grooves 22. In the second embodiment, the same effects as those of the first embodiment described above can be obtained. (Third Embodiment of Solar Cell Module) Fig. 6 is a plan view showing an amorphous germanium solar cell module 10D according to a third embodiment of the present invention. In Fig. 6, the same members as those in the second embodiment and the second embodiment are denoted by the same reference numerals, and their description is omitted or simplified. In the power generating region of the solar cell module 10D, between the end array 50 near the battery end 3〇a and the end array 50 near the battery end 30b, in the direction of the center of the substrate 11 C is arranged with a plurality of inner arrays 51a, 51b. Each of the plurality of inner arrays 51a, 51b constitutes a part of the solar cell 21. 150614.doc • 23 · 201123489 Further, an inner groove 22f (22) is formed between the inner array 51a and the inner array 51b. The inner groove 22f divides one inner array 5丨 into two inner arrays 51a and 51b. That is, in the solar cell module, the inner side 22f is formed. Further, the width of the end array "in the direction parallel to the direction in which the scribe lines 20 extend" is smaller than the width of the inner arrays 51a, 51b. In other words, the end grooves 2^ and the battery end portions 30 (3A, 30b) The interval is smaller than the interval between the end groove 22e and the inner groove 22f. Further, the end groove 22e and the battery end portion 3 (3〇a, 3) are spaced apart from each other by a minimum of the interval between the plurality of grooves 22. In the third embodiment, the same effect as the above-described third embodiment is obtained. (Fourth embodiment of the solar battery module) Fig. 7 shows an amorphous germanium solar cell module 10E according to the fourth embodiment of the present invention. In the seventh embodiment, members in the second embodiment, the second embodiment, and the third embodiment are denoted by the same reference numerals, and the description thereof will be omitted or simplified. Between the end array 5 靠近 near the battery end 3 〇 a and the end array near the battery end 3 〇 b, a plurality of inner arrays 51 C ′ are arranged in the direction c so as to be located at the center of the substrate 11 . 50c^ a plurality of inner arrays 51. 5〇d each constitute a solar cell 21- Further, an inner groove 22f (22) is formed between the inner array 51d and the inner array 51c near the battery end portion 30a, and is formed between the inner array 51d and the inner array 51c near the battery end portion 3b. There is an inner groove 22 (22 inner side 150614.doc -24·201123489 groove 22f divides one inner array 51 into three inner arrays 51c, 51d. That is, in the solar cell module 10E, two inner grooves are formed. 22f. Further, the width of the end array 5 〇 in the direction parallel to the direction in which the scribe line 20 extends is smaller than the width of the inner array 5 1 c. In other words, the end groove 22e is spaced from the battery end 30 (30a, 30b). The interval between the end grooves 22e and the battery end portions 30 (30a, 30b) is the smallest among the plurality of grooves 22. In the fourth embodiment, In the above, the embodiment of the solar cell module of the present invention has been described. However, the present invention is not limited to the above-described example, and can be appropriately changed without departing from the gist of the invention. In the second embodiment and the third embodiment described above In the fourth embodiment, the plurality of grooves 22 and 22 are formed by removing the power generation layer 14 and the second electrode layer 15. The present invention is not limited to the structure of the groove, and may be The electrode layer 13, the power generation layer 14, and the second electrode layer 15 are removed to form a plurality of grooves 22 and 22. The present invention can be widely applied to a solar cell module. That is, in the above embodiment, the present invention is applied. Although the solar cell module including the lanthanide film of the solar cell has been described in detail, the present invention is not limited to the solar cell including the lanthanide film. For example, the present invention can be applied to a compound film, an organic film, or a crystal. The solar battery. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing a solar battery module according to a first embodiment of the present invention; FIG. 2A is a view showing a solar battery module according to a first embodiment of the present invention. Fig. 2B is an enlarged cross-sectional view showing a portion of the solar cell module of the first embodiment of the present invention, taken along the symbol Z of Fig. 2A; Fig. 3 is a cross-sectional view showing a portion of the solar cell module of the first embodiment of the present invention; FIG. 4 is a plan view showing a modification of the solar battery module according to the first embodiment of the present invention; FIG. 5 is a plan view showing a modification of the solar battery module according to the first embodiment of the present invention; Fig. 6 is a plan view showing a solar battery module according to a third embodiment of the present invention; Fig. 6 is a half view showing a solar battery module according to a third embodiment of the present invention; and Fig. 7 is a view showing a sun according to a fourth embodiment of the present invention. Plan view of the battery module. [Main component symbol description] 10 ' 10A > 10B ' 10C ' l〇D ' 10E solar cell module 11 substrate 11a first surface of substrate lib substrate second surface 12 laminate body 13 first electrode layer 14 power generation layer 150614 .doc * 26 - 201123489 14i i-type amorphous germanium film 14η n-type amorphous film 14ρ ρ-type amorphous chip 15 second electrode layer 20 scribe line 21 solar cell 22 groove 22a first groove 22b second groove 22c 3rd groove 22d 4th groove 22e End groove 22f Inner groove 22g 5th groove 23, 24, 25, 41, 42 , 43 Battery area 30, 30a, 30b Battery end 50 End array 51, 51a, 51b, 51c , 51d inner array A power generation area A1 first area A2 second area B1, B2, B3 structural defects 150614.doc -27·