TW201121696A - Ultra-precision piezoelectric positioning platform - Google Patents

Abstract

The invention relates to an ultra-precision piezoelectric positioning platform, wherein a first fine motion module, a second fine motion module and a third fine motion module are incorporated. The first fine motion module, the second fine motion module and the third fine motion module generate displacement through a plurality of piezoelectric components so that the ultra-precision piezoelectric positioning platform can perform fine motion regulation function in multi-axial direction, nonequivalent circle and non-linear direction, and the effect of high precision positioning can be achieved. In addition, the fine motion module, the second fine motion module and the third fine motion module are combined by means of inversed lamination assembly. The ultra-precision piezoelectric positioning platform can be extremely flatted. Therefore, the volume and the height of the ultra-precision piezoelectric positioning platform is effectively simplified. Further, with the design of the modulation, the assembly parts of the ultra-precision piezoelectric positioning platform are less and can be conveniently detached and easily repaired.

Description

201121696 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a positioning platform, which is lacking in detail, and relates to an ultra-precision piezoelectric positioning platform. [Prior Art] Referring to the Republic of China Patent Publication No. 589240, which discloses a non-linear rotary fine adjustment device having a nano/micro-rotation function, the conventional non-linear rotary fine adjustment device includes a curved or circular rotation a table, at least one assembly of displacement drive elements disposed inside the rotary table, and a curved abutment or pivot that guides or supports the rotary table to cause a corresponding base or pivot to cause micro-motion, thereby In order to make the circular or curved rotating table a non-linear nano/micron displacement. Referring to the Republic of China Patent Publication No. 567122, which discloses a universal rolling fine adjustment device having a nano/micro-rotation function, the conventional universal rolling fine adjustment device comprising a support seat formed with a spherical alcove and a spherical shape having a spherical surface The rotating table and at least six sets of displacement driving elements disposed in the spherical rotating rib. Wherein the spherical rotating table is loaded with the displacement driving element in the three plane directions of γ, χζ, 丫2, and the spherical rotating billiard surface is placed in the concave chamber of the supporting seat, so that the spherical rotating floor is supported by the branch The nano/micron movement occurs on the target. The fine-tuning of the patents of the temples and the non-linear micro-actuators. In addition, "know technology"::: =; patent = know fine-tuning device, township degree of freedom ultra-precision positioning platform not only takes up space '4 is also very expensive # ' and has many assembled parts, complex structure, disassembly is not 144499.doc IS1 201121696 is not easy to repair. Therefore, it is necessary to provide an innovative and progressive ultra-precision piezoelectric clamping platform to solve the above problems. [Invention] The present invention provides an ultra-precision pressure. The electric positioning platform comprises: a first micro-motion module, a second micro-motion module, a music-moving module and a carrier. The first micro-motion module has two first--------------------- The first first micro-motion unit provides a first-axis displacement, and each of the first micro-motion units has a first fixing portion, a first-moving portion, two first links, and at least one first piezoelectric element, one of which The first fixing portion and the first movable portion of the first micro-motion unit are respectively disposed opposite to the first fixing portion and the first movable portion of the first micro-motion unit, and the first connecting rod is connected to the first fixing portion and the first The active part, the first fixed part and the first The movable portion is parallel, and the at least one first piezoelectric element is disposed between the first fixed portion and the first movable portion. The second micro-motion module has two second micro-motion units, and each second micro-motion unit Providing a first axis 6 displacement, the δ first axis is perpendicular to the first axis, and each second micro-motion unit has a second fixing portion, a second movable portion, two second links, and at least a second The second fixing portions of the piezoelectric elements are vertically connected to opposite ends of the first movable portions to form a carrier setting region, and the first movable portions are adjacent to the first fixing portions, each second The second connecting rods of the micro-motion unit are connected to the second fixing portion and the second movable portion, so that the second fixing portion and the second movable portion are parallel to the at least one second of each of the two micro-motion units The piezoelectric element is disposed between the second fixing portion and the second movable portion. The third micro-motion module has two third fixing portions, at least three-dimensional flexible 144499.doc.4-201121696 components, and is disposed thereon At least three third piezoelectric elements of a universal flexible element, such The three fixed portions are respectively perpendicularly connected to the opposite ends of the second movable portions, and the universal joint elements are respectively disposed at the third fixed portions, and the universal flexible members face the carrier a third region, each of the third piezoelectric elements provides a third axial displacement, the third axis is perpendicular to the first axial direction and the second axial direction. The carrier is disposed in the carrier setting region and connects the tens of thousands The flexible element is coupled to the first micro-motion module, the second micro-motion module and the third micro-motion module to enable multi-axial, non-equal and nonlinear The micro-motion adjustment function achieves the effect of high-precision positioning, and the first micro-motion module, the second micro-motion module and the third micro-group are combined in a reverse stacking manner to flatten the ultra-precision pressure. The electric clamping platform effectively simplifies the volume and the degree of the ultra-precision piezoelectric positioning platform. Moreover, the modular design makes the ultra-precision piezoelectric positioning platform door assembly parts less, easy to disassemble and easy to maintain. [Embodiment] FIG. 1 is a perspective exploded view showing an ultra-precision piezoelectric positioning platform according to a preferred embodiment of the present invention; FIG. 2 shows the first of the first-micro-motion module of the positioning platform of the preferred embodiment of the present invention. Side view of the micro-motion unit; = side view of the second micro-motion unit of the ultra-precision piezoelectric positioning platform of the preferred embodiment of the present invention; FIG. 4 shows a preferred embodiment of the present invention: the third micro-motion of the mode ultra-precision piezoelectric positioning platform 3D exploded view of the module. Fig. 5 shows an ultra-precision pressure, schematic view of a preferred embodiment of the present invention. Ding's combination

Si 144499.doc 201121696 With reference to FIG. 1 and FIG. 2, the ultra-precision piezoelectric positioning platform includes a first micro-motion module 10, a second micro-motion module 2〇, a third micro-motion module 3〇, and a carrier. 40. The first micro-motion module 1 has two first micro-motion units 11, and each of the first micro-motion units 11 provides a first axial direction (the axial direction in the figure). In this embodiment, each of the first micro-motion units has a first fixing portion ill, a first movable portion 112, two first links 113', at least one first piezoelectric element 114, and a first elastic element.丨15 and two first adjustment components 116 (refer to FIG. 2). In this embodiment, the first fixing portion 111 and the first movable portion 112 of one of the first micro-motion units are respectively opposite to the first fixing portion 111 and the first movable portion 丨12 of the other first micro-motion unit u. Settings. The first fixing portions 111 of the first micro-motion units 11 are parallel and oppositely disposed, and the first movable portions 112 are parallel and oppositely disposed. In this embodiment, each of the first fixed portions 1n includes a first fixed portion body nil and two first fixed portion protrusions η 12 , and each of the first movable portions 112 includes a first movable portion body 1121 and a first portion A movable portion bump 1122 has a notch 1123 at each end of each of the first movable portion bodies 1121. The first fixing portion protrusions 1112 and the first movable portion protrusions 1122 are located between the S) first fixing portion body 1111 and the first movable portion body ii 2丨, and the first movable portion protrusions 1122 are disposed. Between the first fixing portion bumps 丨1丨2. In the embodiment, the first first fixing portion protrusions 1112 of each of the first fixing portions 111 are respectively screwed on the first fixing portion body 丨丨丨丨, and the first movable portion of each of the first movable portions Π2 The bump 丨 122 is also screwed to the first movable portion body 1121. In other applications, the first fixed portion m of each of the first fixed portions m 144499.doc 201121696 fixed portion bumps 111 2 are respectively screwed on the first fixed portion body 丨丨u, the first movable portion 112 A movable portion body 1121 and a first movable portion bump 1122 may be integrally formed. Each of the first fixing portion protrusions 1112 of each of the first fixing portions lu has a first insertion hole 13 , and the first movable portion protrusion 1122 of each first movable portion 112 has two first grooves 1124 . The first grooves 11 24 are respectively disposed opposite to the first holes 3 . The first connecting rod 113 of each of the first micro-motion units 11 is connected to the first fixing portion 111 and the first movable portion 丨12 such that the first fixed portion 丨丨丨 and the first movable portion 112 are parallel. . In this embodiment, each of the first links ιΐ3 is connected to the first fixing portion! And the first movable portion 12 has a first neck portion 1131. The first links 113 ensure the relative relationship (e.g., the degree of parallelness) between the first fixed portion 111 and the first movable portion 12 of each first micro-motion unit 11 to achieve precise displacement and positioning. The at least one first piezoelectric element 丨 14 is disposed between the first fixed portion 丨11 and the first movable portion 112. In this embodiment, the at least one first piezoelectric element 114 is disposed on the first mounting hole 1312 of the first fixing portion protrusion 1112 (the first fixing portion protrusion 1112 on the left side in FIG. 2) Between the corresponding first grooves 1124 of the first movable portion bumps 1122. When a voltage is applied to the at least one first piezoelectric element 114, the at least one first piezoelectric element 114 generates a first axial deformation, and the corresponding first movable portion protrusion U22 is pushed to move, so that A movable portion 112 performs a displacement of the first axial direction. Wherein, when the voltage applied to the first piezoelectric element 114 of each of the first micro-motion units is the same, each of the first piezoelectric elements generates the same first axial shape, so the first push is correspondingly The movable portion bump 112 2 is located at the same level as I44499.doc 201121696, so that the ultra-precision piezoelectric positioning platform 1 can perform the displacement of the first axial direction when the first piezoelectric element is applied to each of the first micro-motion units 11. When the voltages of the components 114 are different, each of the discarded electrical components 114 will have a different first axial deformation amount, so the displacement of the corresponding first movable portion bumps 1122 is different, so that the ultra-precision piezoelectric positioning is performed. The platform 1 can perform a rotation of the first angular direction θ (parallel to the rotation of the χ-y plane in Fig. 1).

The first elastic member 11S is disposed on the first first fixing portion protrusion 1112 (the first fixing portion protrusion 1112 on the right side in FIG. 2) and the first corresponding hole 1113 and the first movable portion convex portion 1122 are correspondingly first. Between the grooves 1124, and relative to the first > a first piezoelectric element 丨14. Preferably, the first elastic member 丨丨5 is a spring. The first adjusting components 116 are respectively fixed to the opposite first fixing portion bumps 1112 on the side opposite to the first setting holes 1 " 3 and respectively contact the μ to the piezoelectric element 114 and the first elastic member 丨丨5. Preferably, the first adjustment assemblies 116 are internal multi-angle screws, such as hexagon socket screws. Preferably, a coffin 117 is disposed between the at least one first piezoelectric element 114 and the corresponding first adjustment component 116 to ensure that the corresponding first adjustment component 116 is in contact with the at least one first piezoelectric component 丨14. The uniformity and tightness of the mat 117 are preferably copper. The first adjusting component 116 is configured to resist the fixing of the corresponding first piezoelectric device, and adjust and control the force between the at least first piezoelectric element 114 and the corresponding first slot U24 to maintain contact with Tightness, and ensuring the precision of the ultra-mild piezoelectric positioning platform 1; and the first adjusting components are slid into the corresponding first elastic member 115 in 16 months for adjusting the control applied to the 丨 第The rest force ' of the movable portion bump 1122' is restored to the first 144499.doc 201121696 moving unit 11. The deformation of each of the first piezoelectric elements 丨 14 is greater than (>) the corresponding first-elastic elements by the adjustment of the first elastic a member 115 and the first adjustment members ι 6; The restoring force of 15 is greater than (>) the deformation resistance of the corresponding two first links 113. Thus, each of the first piezoelectric elements "4 can push the corresponding first movable portion 112, and each of the first elastic members 15 can return the corresponding first movable portion 112 to the position when it is not deformed. With reference to FIG. 1 and FIG. 3, the second micro-motion module 20 has two second micro-motion units 21, and each of the second micro-motion units 21 provides a second axial direction (y-axis in FIG. 1). The first axis is perpendicular to the first axis. In this embodiment, the second micro-motion unit 21 has a second fixing portion 211, a second movable portion 212, two second links 213, at least one second piezoelectric element 214, and a second elastic member 215. And two second adjustment components 216 (refer to FIG. 3). The second fixing portions 211 are perpendicularly connected to the opposite ends of the first movable portions 112 to form a carrier setting region 5 (refer to FIG. 5), and the first φ second movable portions 212 are close to the first The fixing portion 111. The second link 213 of each second micro-motion unit 21 is connected to the second fixing portion 211 and the second movable portion 212 such that the second fixing portion 211 and the second movable portion 212 are parallel to each other. In the embodiment, each second fixing portion 211 includes a second fixing portion body 2111 and two second fixing portion protrusions 2112'. The second fixing portion 211 of each second micro-motion unit 21 has a length greater than the second movable portion. The length of 212. The two ends of each of the second fixing portions 211 are respectively disposed at the opposite two corners 1123 (refer to FIG. 2) between the first movable portions 112, so that the second micro-motion module 2〇 and the 144499.doc 201121696 A micro-motion module 1 is combined as a reverse stack to reduce the volume and height of the ultra-precision piezoelectric positioning platform 1. Each of the second movable portions 212 includes a second movable portion body 2121 and a second movable portion convex portion 2122. The second fixed portion convex portions 2112 and the second movable portion convex portion 2122 are located at the second fixed portion body. Between the 2111 and the second movable portion body 2121, the second movable portion protrusion 2 1 22 is disposed between the second fixed portion bumps 2丨丨2. In this embodiment, the second fixing portion protrusions 2112 of each of the second fixing portions 211 are respectively screwed on the second fixing portion body 2111, and the second movable portion protrusions of each second movable portion 212 are respectively 2122 is also screwed to the second movable part body 2121. In other applications, the second fixing portion protrusions 2 112 of each of the second fixing portions 211 can be respectively screwed on the second fixing portion body 2丨丨丨, and the second activity of each second movable portion 212. The body portion 212 and the second movable portion bump 2122 are integrally formed. Each of the second fixing portions 2b of the second fixing portion 211 has a second setting hole 2113, and the second movable portion 2122 of each second movable portion 212 has two second grooves. The first grooves 2 12 3 are respectively opposite to the second setting holes 2 11 3 . The second links 213 of each of the second micro-motion units 21 are connected to the second fixing portion 211 and the second movable portion 212 such that the second fixing portion 2 and the second movable portion 212 are parallel. In this embodiment, each of the second links 213 has a necking at a position where the second fixing portion 2 and the second movable portion 212 are connected. The second link 213 such as 玄2131.6 can ensure the relative relationship (such as parallelism) between the second fixed portion 211 and the second movable portion 212 of each second micro-motion single=21 to achieve precise displacement and positioning. . The at least one second piezoelectric element 214 is disposed between the second fixing portion 211 and the second movable portion 212 of the 144499.doc -10·201121696. In this embodiment, the at least one second piezoelectric element 214 is disposed on the second mounting hole 2112 of the second fixing portion protrusion 2112 (the second fixing portion protrusion 2112 on the left side in FIG. 3) and the second portion Between the corresponding second grooves 2123 of the two movable portion bumps 2122. When a voltage is applied to the at least one second piezoelectric element 214, 'the at least one second piezoelectric element 214 generates a second axial deformation' and pushing the corresponding second movable portion bump 2丨22 to move The first movable portion 2 12 performs displacement of the second axial direction. Wherein, when the voltage applied to the second piezoelectric element 214 of each of the second micro-motion units 21 is the same, each of the second piezoelectric elements 214 generates the same amount of deformation of the second axial direction, so the push-up corresponding second The displacement of the movable portion bumps 2122 is the same, so that the ultra-precision piezoelectric positioning platform can perform the displacement of the second axial direction; when the voltage applied to the second piezoelectric element 214 of each of the second micro-motion units 21 is different, Each of the second piezoelectric elements 214 generates a different amount of deformation of the second axial direction, and thus the displacement of the corresponding second movable portion bumps 2122 is different, so that the ultra-precision piezoelectric positioning platform 1 can perform the first Rotation of the angular direction 平行 (parallel to the rotation of the x_y plane in Figure 1). The second elastic member 215 is disposed on the second second fixing portion protrusion 2ii2 (the second fixing portion protrusion 2 n 2 on the right side in FIG. 3) and the second movable portion protrusion 2122 Corresponding to the second recess 2123 and relative to the at least: second piezoelectric element 214. Preferably, the second elastic member 215 is a spring, and the second adjusting component 216 is respectively fixed to the second fixing portion protrusion 2丨丨2 and is respectively contacted with respect to the second fixing hole 2113. The first piezoelectric element 214 and the second elastic element 2 15 are formed. Preferably, the second adjustment components 216 are internal multi-angle screws, such as hexagon socket screws. I44499.doc 201121696 Preferably, a coffin 217 is disposed between the at least-second piezoelectric element 214 and the corresponding second adjustment component 216 to ensure the corresponding second adjustment component 216 and the at least one second pressure The electrical component 214 is in contact with the mean and _ tightness, preferably the material of the mat 217 is copper. The second adjusting component 216 is configured to fix the corresponding second piezoelectric component 214, and adjust the force between the at least the second piezoelectric component 214 and the corresponding second recess 2123 to ensure the tightness of the contact. And ensure the ultra-precision piezoelectric positioning platform! Precision. The second adjusting component 216 abuts against the corresponding second elastic component 215 for adjusting the restoring force applied to the corresponding second movable portion bump 2122 to recover the deformed second micro-motion unit 21 The second elastic member 215 and the second adjusting member 216 are matched and adjusted so that the deformation thrust of each of the second piezoelectric members 214 is greater than (>) the restoring force of the corresponding second elastic member 215 is greater than ( >) deformation resistance of the corresponding two second links 213. Thus, each of the second piezoelectric elements 214 can push the respective second movable portions 212, and each of the second elastic members 215 can return the corresponding second movable portions 2 12 to the undeformed position. Referring to Figures 1, 4 and 5, the third micro-motion module 3 has two apertures.卩 31, at least 20,000 flexible elements 32, and at least three third piezoelectric elements 33 disposed in the universal flexible elements 32. The third fixing portions are respectively perpendicularly connected to the opposite ends of the second movable portions 212, and one ends of the universal flexible members 32 are respectively disposed on the third fixing portions 3丨, and the universal joints The flexible member 32 faces the carrier setting region 5A. In the present embodiment, the universal flexible members 32 are disposed between the third fixed portion 3 and the 144499.doc 201121696 carrier 40 and have a triangular distribution. Each of the third piezoelectric elements 33 provides a second axial direction (z-axis in Figure 1) in which the third axis is perpendicular to the first axis and the second axis. Each of the piezoelectric elements 33 has an arcuate top surface 3 3 1 '. The isolated top surface 3 3 1 protrudes out of the opening 321 through one of the corresponding universal flexible elements 32 and is substantially in point contact manner The carrier 40 is connected to the carrier 4, and the carrier 40 is coupled to the fixing holes 322 of the universal flexible members 32 by fasteners (not shown) to be fixed to the universal flexible members 32. Yu Shishi

By way of example, the universal flexible elements 32 are flexible couplings. In this embodiment, the two ends of each of the third fixing portions 31 have a notch 311, and the two ends of each of the second movable portions 212 are respectively disposed opposite to each other between the third solids 43 1 The corner 3丨丨 combines the third micro-motion module and the second micro-motion module 20 to reduce the volume and height of the ultra-precision piezoelectric positioning platform 1. - when the voltage phase of the third piezoelectric element of the third micro-motion module 3" is $, each third piezoelectric element "generates the same amount of deformation of the third axial direction" so that each third-third electrical component 33 Pushing the carrier 4 () to the same amount of displacement, so that the ultra-precision piezoelectric positioning platform can perform the displacement of the third pumping direction, when the third piezoelectric element is applied to the third micro-motion module 3 When the voltage is not =, each third piezoelectric element 33 generates a different amount of deformation of the third pumping direction 'so that each third piezoelectric element 33 pushes the displacement amount of the carrier 40 not = by controlling the first The amount of deformation of the tri-piezoelectric element 33 allows the super-precision piezoelectric clamping platform 1 to perform a rotation in a second angular direction (rotation of the parallel plane) and a rotation of the third angular direction β ( Parallel map] the rotation of the yz plane).

144499.doc LSI 201121696 The carrier 40 is disposed in the carrier setting area 5 and connects the gimbal flexible members 32. Preferably, a gap is formed between the periphery of the carrier 4 and the first micro-motion module and the second micro-motion module 20 to provide an active space for positioning and positioning the carrier buckle. In this embodiment, the carrier 4 includes a frame Μ and a substrate 42. The frame 41 connects the universal flexible members 32, and the substrate 42 is fixed in the frame 41. The substrate 42 can be a transparent substrate according to the processing or manufacturing requirements of the substrate 42. The ultra-precision piezoelectric positioning platform of the present invention can be applied to the automation industry, the semiconductor industry (for example, microelectromechanical systems (MEMS), small fabs or LED insect crystal plants), and the photovoltaic industry. For example, the ultra-precision piezoelectric positioning platform of the present invention is applied to a reticle system in an exposure lithography process, which can greatly reduce the accuracy error and adjustment problems that occur when the reticle is replaced. Since how to reduce the delay caused by the switching of product types is equivalent to improving the competitiveness of the industry, in addition to improving the speed of product replacement, the accuracy of the alignment can be greatly improved. Through the cooperation of the first micro-motion module 10, the second micro-motion module 2〇 and the third micro-motion module 30, the ultra-precision piezoelectric positioning platform can perform the first axial direction and the second axial direction. The third axial direction, the first angular direction is one. The first angular direction (X, the axial direction of the third angular direction P, non-equal and non-linear (six degrees of freedom) micro-motion adjustment function, and achieve the effect of high-precision positioning. And, the first fretting The module 丨〇, the second micro-motion module 汕 and the third micro-motion module 30 are combined in a reverse stacking manner to flatten the ultra-precision piezoelectric positioning platform 1 , thereby effectively simplifying the ultra-precision piezoelectric positioning platform丨体体144499.doc 14 201121696 Product. Furthermore, the modular design makes the ultra-precision m-position platform less assembled, easy to disassemble and easy to maintain. The above embodiments are only for explaining the principle of the present invention and The effects of the present invention are not limited thereto. Therefore, those skilled in the art will be able to modify and modify the above embodiments without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims. Brief description

1 is a perspective exploded view of an ultra-precision piezoelectric positioning platform according to a preferred embodiment of the present invention; FIG. 2 is a side view showing a first micro-motion unit of a first micro-motion module of an ultra-precision piezoelectric positioning platform according to a preferred embodiment of the present invention; 3 is a side view of a second micro-motion unit of a second micro-motion module of an ultra-precision piezoelectric positioning platform according to a preferred embodiment of the present invention; FIG. 4 is a view showing an ultra-precision piezoelectric positioning platform of a preferred embodiment of the present invention. A schematic exploded view of a second micro-motion module; and FIG. 5 shows a combined schematic diagram of an ultra-precision piezoelectric positioning platform in accordance with a preferred embodiment of the present invention. [Main component symbol description] 1 Ultra-precision piezoelectric positioning platform of the invention 10 First micro-motion module 11 First micro-motion unit 20 Second micro-motion module 21 Second micro-motion unit 30 Third micro-motion module 144499.doc IS1 201121696

31 third fixing portion 32 universal flexible member 33 third piezoelectric element 40 carrier 41 frame 42 substrate 50 carrier setting region 111 first fixing portion 112 first movable portion 113 first link 114 piezoelectric element 115 first elasticity Element 116 first adjustment component 117 pad 211 second fixing portion 212 second movable portion 213 second link 214 second piezoelectric element 215 second elastic element 216 second adjustment component 217 pad 311 notch 321 opening 322 Fixator L 144499.doc -16- 201121696

331 arc-shaped top surface 1111 first fixing portion body 1112 first fixing portion protrusion 1113 first setting hole 1121 first movable portion 1122 first movable portion bump 1123 notch 1124 first groove 1131 first neck portion 2111 Second fixing portion body 2112 Second fixing portion protrusion 2113 Second setting hole 2121 Second movable portion body 2122 Second movable portion convex portion 2123 Second concave groove 2131 Second necking portion 144499.doc -17-

Claims (1)

201121696 VII. Application for Patent Park: L An ultra-precision piezoelectric positioning platform, comprising: a first micro-motion module - having two first micro-moving units, each of which provides a first axial direction Displacement, each first micro-motion unit has a first fixing portion, a first movable portion, two first-links and at least one first piezoelectric element, wherein the first fixed portion of the first micro-motion unit and the first activity The first fixed part and the first part of the other first micro-motion unit The first connecting rod is connected to the first fixing portion and the first movable portion, so that the first fixing portion and the first movable portion are tied, and the at least one first piezoelectric element is disposed on Between the first fixed portion and the first movable portion; the second micro-motion module has two second micro-motion units, each of which provides a second axial displacement, the second axial direction The first axial 'per-second micro-motion unit has a second second portion, a second movable portion, two second links, and at least a second piezoelectric element, and the second fixed portions are vertically connected to the first Waiting at the opposite ends of the first movable portion to form a carrier-providing region, and the second movable portion of the first movable portion is adjacent to the second connecting portion of the second movable portion The second movable portion is configured such that the whispering-stationary-fixing portion and the second movable portion are parallel, and each of the second micro-motion units 7 is at least one second piezoelectric element placed in the second fixed portion Between the Ministry and the second activity department; "the first - the micro-motion module has two a fixing portion, at least three components, and the universal flexible yoke members, wherein the third fixing portions are respectively connected to the second movable portion 144499.doc I.S1 201121696 The end of the plurality of flexible members are respectively disposed on the third fixing portions and the gimbal flexible members face the carrier setting region, and each of the third piezoelectric members provides a third axial displacement The third axial direction is perpendicular to the first axial direction and the second axial direction; and a carrier is disposed on the 齑艚 罢 , , , , , , , , , , , , , , , , , , , , , , , , , , The positioning platform of the first aspect of the present invention includes: a first fixed portion body and two first fixed portion convex portions, each of the first movable portion includes a first movable portion body and a flute basket and a first a movable portion bump, the first fixing portion protrusion and the first French adding JL & the second movable portion convex portion being located between the first fixed portion main body and the first movable portion main body - the first activity a portion of the bump is disposed between the first fixing portion bumps, the at least - the first piezoelectric The component is disposed between the first fixing portion protrusion and the first movable portion protrusion; each of the second fixing portions includes a second fixing portion body and two second fixing portion protrusions, and the female first moving portion The first movable portion and the second movable portion of the second movable portion and the second movable portion are located between the first body and the second movable portion The second movable portion bump is disposed between the second (four) partial bumps, and the at least piezoelectric element is disposed between one of the bumps, and the first port "bump and the second movable portion" 3. The positioning platform of item 2, wherein each of the first-fixed parts is the first. The P-bumps are respectively screwed on the first part of each movement of the first fixed part body, and the middle part of the body is the U1 144499.doc 201121696. The positioning platform of claim 2, wherein each of the first fixing portions of the first fixing portion is screwed to the first fixing portion body, and the second movable portion of each second movable portion is screwed The second movable portion body is inserted into the positioning platform of the request item 2, wherein each of the first-micro-motion units further includes a -first elastic member, the first elastic member is disposed on the other first convex portion and the first portion Between the movable portion bumps and with respect to the at least first piezoelectric element; each of the second micro motion units further includes a second elastic element, the second elastic element being disposed on the other second second convex portion and the first 6. The movable portion between the two movable portions and relative to the at least second piezoelectric element. 6. The positioning platform of claim 5, wherein each of the first fixing portions has a first setting a hole, each movable portion of the first movable portion has two first grooves, and the first groove is divided into The at least the mth member and the first elastic member are respectively disposed between the opposite first installation holes and the first groove, and the second fixing portion of each of the second fixing portions is convex. The blocks respectively have a first: a set hole, and the second movable portion protrusion of each second movable portion has two second grooves, and the first concave groove is opposite to the second set holes, respectively, at least: the second piezoelectric The component and the second elastic component are respectively disposed between the first set hole and the second groove of the phase: 1', as in the positioning platform of claim 6, the one of the ten ports is installed, and the first one is the first micro-moving unit. Including a first adjustment component, the [adjustment component is respectively opposite to the first at least one first piezoelectric component and the οβ 忑 first elastic component; each of the first dynamic components further includes two second adjustment components, and the like The side of the first hole is fixed to the opposite first-fixing portion and respectively contacts the micro-adjusting component 144499.doc 201121696, and is not fixed to the opposite second fixing portion by the side opposite to the second setting hole Contacting the at least two second piezoelectric elements and the first The armor. ~ - u 8. The positioning platform of claim 7, further comprising a plurality of mats disposed at: the first - between the first piezoelectric element and the corresponding first-adjusting component and the second to the second Between the piezoelectric element and the corresponding second adjustment component. 9. If the positioning platform of the request item ,, the two ends of the second/partial movement part are separated by another corner, and each of the second _ a solid 鳊The opposite corners are set between the first active parts of the temple. 10. If the positioning platform of the request item is located, ^ each of the first links has a connection between the third and the first active part. a neck portion, each of which: the connecting rod has a second neck portion at a position connecting the second fixing portion and the second movable portion. For example, the positioning platform of the item 1 of the month, wherein the 10,000 θ μ w wheel. ^Universal flexible S-pieces are 徺 12. As requested by the positioning platform, each of the third curved top surfaces, the curved top surface contacts the carrier. 8: The positioning platform of claim 1, wherein the periphery of the carrier has a gap between the first micro-turn group and the second micro-motion module. " 14_ The positioning platform of the broadening item 1, wherein the carrier comprises: the frame is connected to the universal flexible elements, and the substrate is fixed on the positioning platform of the pure moon item 14 wherein the substrate is transparent Substrate. 144499.doc i SJ