201108567 六、發明說明： 【發明所屬之技術領域】 本發明，是關於可使用在半導體製造裝置平台驅動或 工作機平台搬運的同時，需要線性馬達表面和電樞繞組的 溫度上昇降低、提昇絕緣可靠性、輕型/高剛性化、黏性 制動力降低的密封式線性馬達電樞及密封式線性馬達。 【先前技術】 先前，做爲使用在半導體製造裝置平台驅動或工作機 平台搬運的同時，需要線性馬達表面和電樞繞組的溫度上 昇降低、提昇絕緣可靠性、輕型化、黏性制動力降低的密 封式線性馬達，是以：由形成爲平板狀的線圈構成的電樞 繞組；以包圍上述電樞繞組的狀態形成框緣狀的金屬製框 體；及可密封上述框體開口部的碳纖強化樹脂製密封容器 所構成，在密閉空間設有形成在內部的冷媒流路。（例如 參照專利文獻1 ' 2、3 )。 第5圖、第6圖中，100爲定子、101爲框體、1〇2 爲密封容器、103爲密封容器固定用螺絲、104爲密封容 器壓板、105爲端子台、106爲冷媒供應口、107爲冷媒 排出口、108爲電樞繞組、109爲繞組固定框、11〇爲冷 媒流路、200爲活動元件、201爲磁軛支撐構件、202爲 磁軛、2 0 3爲永久磁鐵。 活動元件200，是構成爲以磁軛支撐構件201長度的 間隔距離在上下具備有磁轭202，在磁轭202的四角落配 -5- 201108567 置有磁軛支撐構件201，在磁軛202彼此相向面分別安 有永久磁鐵203。接著’活動元件200的中空空間內是 入有定子1〇〇，永久磁鐵203是和定子100的電樞108 著磁性空隙配置成相向。活動元件2〇〇’是由未圖示的 性導件等支撐著。 上述構成中，當指定的電流流動至電樞繞組1 〇 8時 永久磁鐵203形成之磁場的作用會對活動元件200產生 力，使活動元件2 00朝箭頭符號所示前進方向移動。另 冷媒是由設置在框體101的冷媒供應口 106供應，從冷 排出口 1 07排出。於該期間，冷媒是流動在電樞繞組1 和密封容器102之間的冷媒流路110，使發熱的電樞繞 1 0 8冷卻。 如上述，先前的密封式線性馬達，是以採用碳纖強 樹脂製密封容器來實現黏性制動力降低、輕型/高剛性 [先行技術文獻] [專利文獻] [專利文獻1]日本專利第3539493號 [專利文獻2]日本特開2007-312470 [專利文獻3]日本特開200 0-4572 【發明內容】 [發明欲解決之課題] 裝 插 隔 線 與 推 ， 媒 08 組 化 化 -6- 201108567 然而，先前的密封式線性馬達中，以包圍電樞繞組的 狀態形成框緣狀的框體，若是從以前的不銹鋼製改成鈦製 或鋁製，是可實現輕型化，但無法實現高剛性化，此外框 體的材質爲陶瓷製時，是可實現輕型/高剛性化，但因材 料脆所以爲了避免陶瓷製框體的內螺紋孔加工部及金屬襯 套埋入部產生龜裂等在設計上是有較多的限制，有密封式 線性馬達電樞尺寸變大的課題。 本發明是有鑑於上述問題點而爲的發明，目的是提供 一種針對電樞尺寸、線性馬達表面和電樞繞組的溫度上昇 、絕緣可靠性、黏性制動力能夠維持先前線性馬達性能的 同時，能夠比先前線性馬達更爲輕型/高剛性化的密封式 線性馬達。 [用以解決課題之手段] 爲了解決上述問題，本發明是構成如下述。 申請專利範圍第1項記載的發明，具備：由形成爲平 板狀的線圏構成的電樞繞組；以包圍電樞繞組的狀態形成 爲框緣狀的框體；及可密閉框體開口部，並且內部設有複 數冷媒流路的密封容器之密封式線性馬達電樞中，框體爲 陶瓷製的同時，上述密封容器爲碳纖強化樹脂製。 申請專利範圍第2項記載的發明，是於申請專利範圍 第1項記載的密封式線性馬達電樞中，其特徵爲，對上述 陶瓷製框體不施以內螺紋孔加工及金屬襯套埋入，而是利 用螺絲使上述密封容器和上述框體一起鎖緊。 201108567 申請專利範圍第3項記載的發明，是於申請專利範圍 第1項或第2項記載的密封式線性馬達電樞中，其特徵爲 ’上述密封容器是利用螺絲使從外側壓住上述密封容器的 密封容器壓板和上述框體一起鎖緊。 申請專利範圍第4項記載的發明，是於申請專利範圍 第1項記載的密封式線性馬達電樞中，其特徵爲，利用螺 絲使上述框體和將密封式線性馬達電樞固定在外部裝置側 用的固定用座一起鎖緊。 申請專利範圍第5項記載的發明，是於申請專利範圍 第1項記載的密封式線性馬達電樞中，其特徵爲，利用螺 絲使上述框體和將冷媒送入上述密封容器內部冷媒流路用 的冷卻埠一起鎖緊。 申請專利範圍第6項記載的發明，其特徵爲，具備： 申請專利範圍第1項至第5項任一項記載的密封式線性馬 達電樞；及與密封式線性馬達電樞隔著磁性空隙配置成相 向的同時與極性交替不同的複數永久磁鐵相鄰排列配置的 場磁，構成爲將密封式線性馬達電樞和場磁的任一方爲定 子，另一方爲活動元件，使場磁和上述密封式線性馬達電 樞成相對性行走。 [發明效果] 根據申請專利範圍第1項至第6項任一項記載的發明 時，對於陶瓷製的框體，是完全不施以內螺紋孔加工及金 屬襯套埋入等，而是利用螺絲及螺帽等使密封容器密封容 -8- 201108567 器壓板固定用底座冷卻埠等和框體一起鎖緊，因此能夠減 少爲了避免陶瓷製框體的內螺紋孔加工部及金屬襯套埋入 部產生龜裂的設計上限制，能夠提供更爲輕型/高剛性化 的密封式線性馬達。 【實施方式】 [發明之最佳實施形態] 以下’是參照圖面對本發明的實施形態進行說明。 [實施例1 ] 以下’是使用第1圖至第4圖說明本發明的實施例。 第1圖爲表示本發明實施例的密封式線性馬達電樞平 面圖’第2圖爲正面圖’第3圖爲側剖面圖（固定用底座 部位），第4圖爲側剖面圖（冷卻埠部位）。 圖中，1〇〇爲定子、101爲框體、102爲密封容器、 1〇3爲密封容器固定用螺絲、104爲密封容器壓板、ι〇5 爲端子台、106爲冷媒供應口、1〇7爲冷媒排出口、1〇8 爲電樞繞組、110爲冷媒流路、150爲固定用底座A、151 爲固定用底座B、160爲冷卻埠A、161爲冷卻埠B、162 爲冷卻埠C，此外，第5圖、第6圖的先前密封式線性馬 達圖中，200爲活動元件、201爲磁軛支撐構件、202爲 磁軛、203爲永久磁鐵。活動元件200，是構成爲以磁軛 支撐構件201長度的間隔距離在上下具備有磁軛202，在 磁軛202的四角落配置有磁軛支撐構件201，在磁軛202 [S] -9 - 201108567 彼此相向面分別安裝有永久磁鐵203，活動元件 成是和先前完全相同。 接著，活動元件200的中空空間內是插入有 ，於該狀況時，永久磁鐵203是和定子1〇〇的電 置成相向。活動元件200，是由未圖示的線性導 著。於是，當指定的電流流動至電樞繞組108時 鐵203形成之磁場的作用會對活動元件200產生 活動元件200朝箭頭符號所示前進方向移動。 定子1〇〇，是由下述構件構成：內部爲中空 (框緣狀）陶瓷製框體101;爲了覆蓋該口字形 形成爲和框體1 0 1外形相似，內部設有複數冷媒 的密封容器102;密封容器102要固定在框體10 封容器固定用螺絲103;具有密封容器固定用螺》 通孔要以均等載重壓住密封容器用的密封容器壓 配置在框體1 0 1中空內以固定用螺絲或黏接固定 封容器102內側的3相電樞繞組108 ;爲了對 108供應電力執行與外部電連接的端子台105; 要固定在外部裝置本體用的固定用底座A 150、 座B151:可通過密封容器102內的冷媒流路110 媒使發熱的電樞繞組108冷卻的冷媒供應口 106 出用的冷媒排出口 107;及可使冷媒供應口 106 出口 107固定在框體1〇1的冷卻埠A160、冷卻i! 冷卻埠C162。 框體1〇1，是先前技術爲不銹鋼製，但爲了 200的構 定子100 樞1 0 8配 件等支撐 與永久磁 推力，使 的口字形 框體101 流路1 1 〇 1用的密 ί糸103穿 板 104 ; 排列在密 電樞繞組 定子 100 固定用底 ，供應冷 ;冷媒排 和冷媒排 I Β 1 6 1、 實現更加 -10- 201108567 輕型/高剛性化是採用陶瓷製，此外，因陶瓷與其他的材 料相比是較脆，所以對於框體是完全不進行內螺紋孔加工 或金屬襯套埋入，極力排除爲了避免該等加工部產生龜裂 等的設計上限制。 密封容器102，是碳纖強化樹脂製，內部設有複數冷 媒流路1 1 0。 密封容器1 02和密封容器壓板1 04，與完全沒有內螺 紋孔加工或金屬襯套埋入的框體101是使用密封容器固定 用螺絲103或未圖示螺帽一起鎖緊固定。構成上，有時是 沒有密封容器壓板104。 固定用底座A 150、固定用底座B151，與完全沒有內 螺紋孔加工或金屬襯套埋入的框體101是使用密封容器固 定用螺絲或螺帽（未圖示）一起鎖緊固定。構成上，有時 是不使用螺帽，而是對固定用底座A 150、固定用底座 B 1 5 1的任一方或雙方施以內螺紋孔加工。 冷卻埠 A160、冷卻埠B161、冷卻淳C162，與完全 沒有內螺紋孔加工或金屬襯套埋入的框體1 〇 1是使用密封 容器固定用螺絲或螺帽（未圖示）一起鎖緊固定。構成上 ’有時是不使用螺帽，而是對冷卻埠A160、冷卻埠B161 、冷卻埠C 1 62的其中一方或二方或三方施以內螺紋孔加 工。 另一方面’活動元件200從前進方向看的剖面形狀， 如第6圖所示’是以夾入有定子100的電樞部的狀態形成 口字形（活動元件200的構成是和先前完全相同，因此是 -11 - 201108567 參照第5圖、第6圖）》 活動元件200，是由下述構件構成：隔 置在定子100之密封容器102兩側的永久磁 讓永久磁鐵203形成的磁通量通過的磁性 202 ;及永久磁鐵203和磁軛202支撐用I 201。此外，永久磁鐵203，是沿著活動元 ，以極間距配置複數交替成異極。 如上述構成的密封式線性馬達，是透過 元件200和定子100之電性相對位置的指定 繞組1 08，使電樞繞組1 08和可成爲活動元 磁鐵203的磁場形成作用對活動元件200產 ，因銅耗造成發熱的電樞繞組108是由流 110的冷媒冷卻，因此與先前技術相同，是 容器102表面的溫度上昇。 與先前技術不同的實施例效果，是藉由 製的框緣狀框體爲陶瓷製，就能夠提供一種 、線性馬達表面和電樞繞組的溫度上昇、絕 性制動力能夠與先前密封式線性馬達性能同 型/高剛性化的密封式線性馬達。 若只是將框緣狀框體的材質陶瓷化，則 了避免陶瓷製框體的內螺紋孔加工部及金屬 生龜裂等在設計上有較多的限制，導致密封 樞尺寸變大。本實施例是可解決該等問題。 著磁性空隙配 鐵203 ;以可 體製成的磁軛 的磁軛支撐部 件的移動方向 將對應著活動 電流流至電樞 件2 0 0之永久 生推力。此時 動在冷媒流路 能夠抑制密封 將先前不銹鋼 針對電樞尺寸 緣可靠性、黏 等，又更爲輕 會因材料脆爲 襯套埋入部產 式線性馬達電 -12- 201108567 【圖式簡單說明】 第1圖爲表示本發明實施例的密封式線性馬達電樞平 面圖。 第2圖爲表示本發明實施例的密封式線性馬達電樞正 面圖。 第3圖爲表示本發明實施例的密封式線性馬達電樞側 剖面圖（固定用底座部位）。 第4圖爲表示本發明實施例的密封式線性馬達電樞側 剖面圖（冷卻埠部位）。 第5圖爲先前密封式線性馬達的全體透視圖。 第6圖爲沿著第5圖a - A剖線的密封式線性馬達正 剖面圖。 【主要元件符號說明】 100 :定子 101 :框體 102 :密封容器 103 :密封容器固定用螺絲 104 :密封容器壓板 105 :端子台 1 0 6 :冷媒供應口 107 :冷媒排出口 1 0 8 :電樞繞組 1 0 9 :繞組固定框 -13- 201108567 1 1 0 :冷媒流路201108567 VI. Description of the Invention: [Technical Field] The present invention relates to a semiconductor drive device platform drive or a work machine platform, which requires a linear motor surface and an armature winding to have a lower temperature rise and a reliable insulation. Sealed linear motor armature and sealed linear motor with reduced performance, light weight, high rigidity and reduced viscous braking force. [Prior Art] Previously, it was required to reduce the temperature rise of the linear motor surface and the armature winding, improve the insulation reliability, reduce the weight, and reduce the viscous braking force while using the semiconductor manufacturing equipment platform drive or the work machine platform. The sealed linear motor is an armature winding formed of a coil formed in a flat plate shape, a metal frame body formed in a frame shape in a state of surrounding the armature winding, and a carbon fiber reinforced which can seal the opening of the frame body. The resin sealed container is configured to have a refrigerant flow path formed inside the sealed space. (For example, refer to Patent Document 1 '2, 3). In Fig. 5 and Fig. 6, 100 is a stator, 101 is a frame, 1〇2 is a sealed container, 103 is a sealed container fixing screw, 104 is a sealed container pressure plate, 105 is a terminal block, and 106 is a refrigerant supply port. 107 is a refrigerant discharge port, 108 is an armature winding, 109 is a winding fixing frame, 11 is a refrigerant flow path, 200 is a movable element, 201 is a yoke supporting member, 202 is a yoke, and 203 is a permanent magnet. The movable element 200 is configured such that the yoke 202 is provided on the upper and lower sides at a distance of the length of the yoke support member 201, and the yoke support member 201 is disposed at the four corners of the yoke 202. The yoke 202 is placed on the yoke 202. The opposing faces are respectively provided with permanent magnets 203. Next, the stator 1 is inserted into the hollow space of the movable element 200, and the permanent magnet 203 is disposed to face the armature 108 of the stator 100 with a magnetic gap therebetween. The movable element 2'' is supported by a sexual guide or the like (not shown). In the above configuration, when a predetermined current flows to the armature winding 1 〇 8, the action of the magnetic field formed by the permanent magnet 203 generates a force on the movable element 200, causing the movable element 200 to move in the forward direction indicated by the arrow symbol. Further, the refrigerant is supplied from the refrigerant supply port 106 provided in the casing 101, and is discharged from the cold discharge port 107. During this period, the refrigerant is a refrigerant flow path 110 flowing between the armature winding 1 and the sealed container 102, so that the heat generating armature is cooled around 108. As described above, the conventional sealed linear motor is a sealed container made of a carbon fiber-reinforced resin to achieve a viscous braking force reduction, and a light/high rigidity. [Patent Literature] [Patent Document 1] Japanese Patent No. 3349493 [Patent Document 2] Japanese Patent Laid-Open No. 2007-312470 [Patent Document 3] Japanese Patent Laid-Open No. 200 0-4572 [Summary of the Invention] [Problems to be Solved by the Invention] Plugging and Pushing, Media 08 Grouping-6-201108567 However, in the conventional sealed linear motor, the frame body is formed in a state of surrounding the armature winding, and if it is changed from the conventional stainless steel to titanium or aluminum, the weight can be reduced, but high rigidity cannot be achieved. In addition, when the material of the frame is made of ceramics, it is lighter and more rigid, but the material is brittle, so in order to avoid cracks in the internally threaded hole processing part and the metal bushing part of the ceramic frame, There are many restrictions on the above, and there is a problem that the size of the sealed linear motor armature becomes large. The present invention has been made in view of the above problems, and an object thereof is to provide a temperature rise, an insulation reliability, and a viscous braking force for an armature size, a linear motor surface, and an armature winding, while maintaining the performance of a prior linear motor. A sealed linear motor that is lighter/higher rigid than previous linear motors. [Means for Solving the Problem] In order to solve the above problems, the present invention is constituted as follows. The invention according to claim 1 includes an armature winding formed of a wire formed in a flat plate shape, a frame body formed in a frame shape in a state of surrounding the armature winding, and a sealable frame opening portion. Further, in the sealed linear motor armature in which a sealed container having a plurality of refrigerant flow paths is provided, the casing is made of ceramics, and the sealed container is made of carbon fiber reinforced resin. According to the invention of the invention, in the sealed linear motor armature according to the first aspect of the invention, the ceramic frame body is not subjected to internal thread hole machining and metal bushing embedding. Instead, the sealed container and the frame are locked together by screws. In the sealed linear motor armature according to the first or second aspect of the invention, the sealed container is characterized in that the sealed container is pressed against the seal from the outside by a screw. The sealed container platen of the container is locked together with the above-mentioned frame. The invention of claim 4 is the sealed linear motor armature according to claim 1, wherein the frame body and the sealed linear motor armature are fixed to the external device by screws. The side fixing seats are locked together. The sealed linear motor armature according to claim 1, wherein the frame body and the refrigerant are supplied to the inside of the sealed container by a screw. The cooling crucible used is locked together. The invention according to claim 6 is characterized in that the sealed linear motor armature according to any one of claims 1 to 5, and the magnetic gap between the sealed linear motor armature and the sealed linear motor armature The field magnets arranged adjacent to each other in a plurality of permanent magnets having opposite polarities are configured such that one of the sealed linear motor armature and the field magnet is a stator, and the other is a movable element, so that the field magnet and the above The sealed linear motor armature travels in a relative manner. [Effect of the Invention] According to the invention of any one of the first to sixth aspects of the invention, the frame made of ceramic is not subjected to the internal thread hole processing and the metal bushing, but the screw is used. Sealing container seals with nuts, etc. -8- 201108567 The base plate for cooling the platen is cooled and locked together with the frame. Therefore, it is possible to reduce the number of internal threaded holes and the metal bushings in the ceramic frame. The design of the crack is limited to provide a lighter/highly rigid sealed linear motor. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [Embodiment 1] Hereinafter, an embodiment of the present invention will be described using Figs. 1 to 4 . Fig. 1 is a plan view showing a sealed linear motor armature according to an embodiment of the present invention. Fig. 2 is a front view. Fig. 3 is a side sectional view (fixing base portion), and Fig. 4 is a side sectional view (cooling portion) ). In the figure, 1 is a stator, 101 is a frame, 102 is a sealed container, 1〇3 is a sealed container fixing screw, 104 is a sealed container pressure plate, ι〇5 is a terminal block, and 106 is a refrigerant supply port, 1〇 7 is a refrigerant discharge port, 1〇8 is an armature winding, 110 is a refrigerant flow path, 150 is a fixing base A, 151 is a fixed base B, 160 is cooling 埠A, 161 is cooling 埠B, 162 is cooling 埠C. Further, in the previously sealed linear motor diagrams of Figs. 5 and 6, 200 is a movable element, 201 is a yoke supporting member, 202 is a yoke, and 203 is a permanent magnet. The movable element 200 is configured such that the yoke 202 is provided on the upper and lower sides with a distance between the lengths of the yoke support members 201, and the yoke support member 201 is disposed at four corners of the yoke 202 at the yoke 202 [S] -9 - 201108567 A permanent magnet 203 is mounted on each other facing each other, and the movable element is exactly the same as before. Next, the movable element 200 is inserted into the hollow space. In this case, the permanent magnet 203 is opposed to the electric motor of the stator 1?. The movable element 200 is guided by a linearity (not shown). Thus, the action of the magnetic field formed by the iron 203 when the specified current flows to the armature winding 108 causes the movable element 200 to move in the forward direction indicated by the arrow symbol. The stator 1 is composed of a member having a hollow (frame-like) ceramic frame 101 inside; and a sealed container having a plurality of refrigerants in the inside in order to cover the shape of the frame. 102; the sealed container 102 is fixed to the frame 10, and the container fixing screw 103 is provided; and the sealed container fixing screw is used. The through hole is pressed in the sealed container for pressing the sealed container with an equal load, and is placed in the hollow of the casing 1 0 1 Fixing screws or adhesively fixing the 3-phase armature winding 108 inside the sealed container 102; performing a terminal block 105 electrically connected to the outside for supplying electric power to 108; fixing base A 150 and seat B151 for fixing the external device body : a refrigerant discharge port 107 through which the refrigerant supply port 106 cooled by the heat generating armature winding 108 can be passed through the refrigerant flow path 110 in the sealed container 102; and the outlet 107 of the refrigerant supply port 106 can be fixed to the frame 1〇1 Cool 埠A160, cool i! Cool 埠C162. The frame body 1〇1 is made of stainless steel, but the structure of the stator 100 is used to support the permanent magnetic thrust of the stator 100, and the density of the flow path 1 1 〇1 of the square-shaped frame 101 is made. 103 through plate 104; arranged in the fixed bottom of the fixed armature winding stator 100, supply cold; refrigerant row and refrigerant row I Β 1 6 1 , to achieve more -10- 201108567 light / high rigidity is made of ceramic, in addition, because Ceramics are more brittle than other materials. Therefore, the frame body is completely free of internal thread hole machining or metal bushing, and design restrictions for avoiding cracks in the processed portions are excluded as much as possible. The sealed container 102 is made of a carbon fiber reinforced resin, and a plurality of refrigerant flow paths 1 10 are provided inside. The sealed container 102 and the sealed container platen 104 are locked and fixed together with the sealed container fixing screw 103 or a nut not shown, with the frame 101 which is completely free of the internal thread hole or the metal bush. In construction, sometimes the container pressure plate 104 is not sealed. The fixing base A 150 and the fixing base B151 are locked and fixed together with a sealed container fixing screw or a nut (not shown), and the housing 101 in which the female screw hole is not formed or the metal bushing is completely embedded. In the configuration, the nut may be machined by either or both of the fixing base A 150 and the fixing base B 1 5 1 without using a nut. Cooling crucible A160, cooling crucible B161, cooling crucible C162, and housing 1 〇1 which is completely free of internal thread hole machining or metal bushing is locked and fixed together with a sealing container fixing screw or nut (not shown) . In the configuration, the nut is not used, but one or both of the cooling crucible A160, the cooling crucible B161, and the cooling crucible C1 62 are machined with internal tapped holes. On the other hand, the cross-sectional shape of the movable element 200 as viewed from the advancing direction, as shown in Fig. 6, is formed in a zigzag shape in a state in which the armature portion of the stator 100 is sandwiched (the configuration of the movable element 200 is exactly the same as before, Therefore, the movable element 200 is constituted by the following members: the permanent magnets which are placed on both sides of the sealed container 102 of the stator 100 allow the magnetic flux formed by the permanent magnet 203 to pass therethrough. Magnetic 202; and permanent magnet 203 and yoke 202 support I 201. Further, the permanent magnets 203 are alternately formed into different poles along the movable elements at a plurality of pitches. The sealed linear motor constructed as described above is a designated winding 108 that transmits the electrical relative position of the element 200 and the stator 100, and the armature winding 108 and the magnetic field that can become the movable element magnet 203 form a function for the movable element 200. The armature winding 108 which generates heat due to copper consumption is cooled by the refrigerant of the stream 110, and therefore, as in the prior art, the temperature of the surface of the container 102 rises. The effect of the embodiment different from the prior art is that by making the frame-like frame body made of ceramic, it is possible to provide a temperature rise of the linear motor surface and the armature winding, and the absolute braking force can be combined with the previously sealed linear motor. Sealed linear motor with the same performance/high rigidity. When the material of the frame-like frame body is ceramized, there is a limit in the design of avoiding the internal thread hole processing portion and the metal crack of the ceramic frame body, and the seal pivot size is increased. This embodiment solves these problems. The magnetic gap is provided with iron 203; the moving direction of the yoke supporting member of the yoke made of the body is corresponding to the permanent current of the active current flowing to the armature member 200. At this time, the refrigerant flow path can suppress the sealing. The previous stainless steel is reliable for the size of the armature, and the viscosity is lighter. The material is brittle and the bushing is embedded in the linear motor. -12- 201108567 [Simple diagram Description of the Drawings Fig. 1 is a plan view showing a sealed linear motor armature according to an embodiment of the present invention. Fig. 2 is a front elevational view showing the armature of the sealed linear motor according to the embodiment of the present invention. Fig. 3 is a side sectional view showing the armature side of the sealed linear motor according to the embodiment of the present invention (fixing base portion). Fig. 4 is a side sectional view (cooling weir portion) showing the armature side of the sealed linear motor according to the embodiment of the present invention. Figure 5 is an overall perspective view of a previously sealed linear motor. Fig. 6 is a front sectional view of the sealed linear motor taken along line a - A of Fig. 5. [Description of main component symbols] 100: Stator 101: Frame 102: Sealed container 103: Sealed container fixing screw 104: Sealed container pressure plate 105: Terminal block 1 0 6 : Refrigerant supply port 107: Refrigerant discharge port 1 0 8 : Electricity Pivot winding 1 0 9 : Winding fixing frame-13- 201108567 1 1 0 : refrigerant flow path
150 :固定用底座A150 : Fixing base A
151 :固定用底座B 1 6 0 :冷卻埠A151 : Fixing base B 1 6 0 : Cooling 埠A
1 6 1 :冷卻埠B1 6 1 : Cooling 埠B
1 6 2 :冷卻埠C 200 :活動元件 201 :磁軛支撐構件 2 0 2 :磁轭 2 0 3 :永久磁鐵1 6 2 : Cooling 埠 C 200 : moving element 201 : yoke supporting member 2 0 2 : yoke 2 0 3 : permanent magnet