JP2004312877A - Canned linear motor armature and canned linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a canned linear motor armature that enables cooling by using water having extremely high cooling performance achieved by improving the insulation resistance reliability of an armature winding with respect to cooling, and further can suppress the amount of can deformation to a magnetic clearance between a moving member and a stator, and to provide a canned linear motor. <P>SOLUTION: In the canned linear motor armature, both side faces of the armature winding 18 are fixed so as to be sandwiched by two winding fixing frames 4 in the longitudinal direction, and a cooling medium path 5 is formed in a space formed between a can 3 and the winding fixing frame 4. A sealing material 24 is arranged in a gap between a box 2 and the winding fixing frame 4 so that a cooling medium flowing to the cooling medium path 5 does not leak out to the armature winding 18 sandwiched by the two winding fixing frames 4, and the armature winding 18 is not immersed in the cooling medium. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a canned linear motor armature and a canned linear motor which are used for a table feed of a semiconductor manufacturing apparatus or a machine tool and require a low temperature rise of a linear motor body.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, canned linear motors which are used for feeding a table of a semiconductor manufacturing apparatus or a machine tool and require a low temperature rise of a linear motor body are disclosed in, for example, Patent Documents 1 and 2. The linear motor disclosed in Patent Document 1 will be described below with reference to the drawings.
[0003]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 2002-27730 [Patent Document 2]
Japanese Patent Application Laid-Open No. 2000-4572
FIG. 5 is an overall perspective view of a canned linear motor showing the prior art. In FIG. 5, 10 is a stator, 11 is a housing, 12 is a can, 13 is a bolt screw, 14 is a holding plate, 15 is a terminal block, 16 is a refrigerant supply port, 17 is a refrigerant discharge port, 25 is a mover, 26 is a field yoke support member, 27 is a field yoke, and 28 is a permanent magnet. One mover 25 is inserted between the two field yokes 27 and two field yokes 27, two permanent magnets 28 attached to the surface of each field yoke 27, and a total of four And has a hollow space with both ends open. The permanent magnet 28 has a plurality of magnets arranged side by side on the field yoke 27 so that the polarities thereof are alternately different. Note that the mover 25 is supported by a linear guide or the like (not shown) including a slider and a guide rail.
The armature of the other stator 10 is disposed in the hollow space of the mover 25 so as to face the permanent magnet 28 of the mover 25 via a magnetic gap. State.
FIG. 6 is a front sectional view of the canned linear motor according to the present invention, taken along line AA of FIG. FIG. 7 shows the internal structure of the stator excluding the can 12 of FIG. 6 and 7, the stator 10 has a framed metal housing 11 having a hollow inside, and an outer shape of the housing 11 for covering a hollow portion of the housing 11. A plate-shaped can 12, a bolt screw 13 for fixing the can 12 to the housing 11, and a holding plate 14 having a through hole for the bolt screw 13 for holding the can 12 with an even load. A three-phase armature winding 18 constituting an armature disposed in the hollow of the housing 11, a winding fixing frame 19 for fixing the armature winding 18, and the housing 11 and the can 12. It comprises an O-ring 21 slightly larger than the edge, and a bolt screw 23 for fixing the winding fixing frame 19 and the housing 11. The material of the can 12 and the winding fixing frame 19 is made of resin. Here, for example, a thermosetting resin such as an epoxy resin or a thermoplastic resin such as polyphenylene sulfide (PPS) is used. The shape of the hollow portion of the housing 11 is formed so as to surround the outer periphery of the armature winding 18. The armature windings 18 are arranged on both sides of a winding fixing frame 19 formed in a flat shape. The winding fixing frame 19 integrated with the armature winding 18 is disposed in the hollow of the housing 11 and is fixed to the housing 11 with a bolt screw 23. A circumferential groove is provided at the front and back edges of the housing 11, and the O-ring 21 is disposed therein. The can 12 is arranged on the front and back of the housing 11 so as to cover the housing 11. A holding plate 14 is laid from above the can 12 along the edge of the housing 11, and is tightened with the bolt screw 13, so that the can 12 and the housing 11 are fixed. The armature winding 18 is composed of a plurality of coil groups prepared for three phases of concentrated winding coils, and is attached to both left and right sides of the winding fixing frame 19. Power is supplied to the armature winding 18 from a terminal block 15 attached to the housing 11. The terminal block 15 and the armature winding 18 are electrically connected by lead wires (not shown). The refrigerant is supplied from a refrigerant supply port 16 provided in the housing 11 and discharged from a refrigerant discharge port 17. In the meantime, the refrigerant flows through the refrigerant passage 20 between the armature winding 18 and the can 12 to cool the heat generating armature winding 18.
The canned linear motor configured as described above acts on the magnetic field generated by the permanent magnet 28 by flowing a predetermined current according to the electrical relative position of the mover 25 and the stator 10 to the armature winding 18. As a result, a thrust is generated in the mover 25, and the mover 10 moves in the traveling direction indicated by the arrow in FIG. At this time, the armature winding 18 that has generated heat due to the copper loss is cooled by the refrigerant flowing through the refrigerant passage 20, so that the surface temperature of the can 12 can be suppressed from rising.
[0005]
[Problems to be solved by the invention]
However, in the canned linear motor according to the related art, the following problem occurs because the refrigerant passing through the refrigerant passage 20 flows on the surface of the armature winding 18.
(1) In general, an enameled wire having a coating layer for insulation is used for the conductive wire constituting the armature winding 18. However, contact between the conductive wire and another object which occurs at the time of winding work or fixing of the armature winding is performed. As a result, fine scratches (pinholes) occur in the coating layer of the conductor. When a refrigerant having a high conductivity, for example, pure water or water having a conductivity of more than 1 (μS / m) was used, dielectric breakdown occurred from a large pinhole. Furthermore, even if the diameter and depth of the pinhole are very small, the pinhole is advanced so that the pinhole becomes large due to external stress such as reaction of thrust applied to the armature winding 18 and temperature rise. Destruction has occurred.
(2) When a refrigerant having a small electric conductivity (for example, hydrofluorether (HFE) manufactured by Sumitomo 3M: electric conductivity 2 × 13 (μS / m)) is used, the problem (1) can be prevented. The cooling capacity was lower than that of water, which is a refrigerant having a high rate, and the temperature rise on the surface of the can 12 could not be reduced. The thermal conductivity of HFE is 0.07 (W / (mk)), while that of water is about 8 times (0.6 (W / (mk))). The kinematic viscosity coefficient of HFE is 4 × 17 (m ² / sec), while that of water is about twice that of 1 × 16 (m ² / sec). HFE has a smaller kinematic viscosity coefficient than water, and therefore can increase the Reynolds number indicating the degree of turbulence of the refrigerant, but has a significantly lower thermal conductivity. As a result, the heat transfer coefficient between the armature winding of the HFE and the refrigerant is smaller than that of water. In HFE, the amount of heat transferred from the armature windings to the refrigerant with respect to water is small, the amount of heat transferred to the surface of the can 12 is large, and the temperature rise of the can surface is high.
(3) In order to increase the cross-sectional area of the coolant passage 20 by reducing the thickness of the can 12 in order to secure a cooling capacity comparable to water after using a coolant (HFE) having a small conductivity, Due to the pressure of the refrigerant passing through the passage 20, the deformation of the can 12 (the amount of expansion of the can into the gap) increases, and the flow rate of the refrigerant has to be reduced. As a result, the rise in temperature of the can 12 could not be reduced.
The present invention has been made in order to solve the above-described problem, and enables cooling with extremely high cooling capacity water by increasing the insulation resistance of the armature winding with respect to the refrigerant. An object of the present invention is to provide a canned linear motor armature and a canned linear motor that can suppress the amount of can deformation of a stator into a magnetic gap.
[0006]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention according to claim 1 provides an armature winding composed of a plurality of coil groups formed in a flat plate shape, and a metal housing provided so as to surround the armature winding in a frame shape. In a canned linear motor armature having a body and a can for sealing both openings of the housing, both side surfaces of the armature winding are sandwiched between two winding fixing frames in the longitudinal direction. Wherein a coolant passage is provided in a space formed between the can and the winding fixing frame, and a sealant is provided in a gap between the housing and the winding fixing frame. It is.
By the above means, contact between the armature winding and the refrigerant can be completely eliminated. In other words, when using water, which is a low-conductivity refrigerant, or even if a pinhole is formed in the conductor of the armature winding, the armature winding is isolated from the water by the winding fixing frame, Insulation breakdown due to water can be prevented. Then, since the cooling capacity is increased by changing the coolant to water, the rise in the temperature of the can surface can be reduced.
According to a second aspect of the invention, in the canned linear motor armature according to the first aspect, the can is curved in advance, and the curved convex surfaces of the can are arranged so as to face each other to the winding fixing frame. It was done.
According to the above-mentioned means, since the amount of expansion of the can into the gap facing the mover due to the pressure of the refrigerant is reduced, the flow rate of the refrigerant can be increased, and the temperature of the can surface can be further increased as compared with the configuration according to claim 1. Can be reduced.
According to a third aspect of the present invention, there is provided a canned linear motor, wherein the armature of the canned linear motor according to the first or second aspect is opposed to the armature via a magnetic gap. And a field yoke in which a plurality of permanent magnets having different polarities are alternately arranged side by side, and one of the armature and the field yoke is used as a stator, and the other is used as a mover. The yoke and the armature run relatively.
By the above means, an armature having a high insulation resistance against the refrigerant of the armature winding and a high cooling capacity is used as the refrigerant to obtain an armature with a small rise in the can surface temperature, and the field yoke is arranged facing the armature. As a result, a canned linear motor that does not generate heat can be obtained.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a perspective view of a canned linear motor showing a first embodiment of the present invention, FIG. 2 is a front sectional view of the canned linear motor of the present invention along the line AA in FIG. 1, and FIG. It is a side view which shows the internal structure of the stator except the can. The components of the present invention that are the same as those of the prior art are denoted by the same reference numerals, description thereof will be omitted, and only different points will be described. The structure of the mover 25 is exactly the same as that of the prior art.
In the figure, 1 is a stator, 2 is a housing, 3 is a can, 4 is a winding fixing frame, 5 is a refrigerant passage, 6 is a bolt screw, 22 is a winding fixing frame support member, and 24 is a sealing material.
The features of the present invention are as follows.
That is, both side surfaces of the armature winding 18 are fixed so as to be sandwiched between the two winding fixing frames 4 in the longitudinal direction, and are provided in a space formed between the can 3 and the winding fixing frame 4. This is the point where the refrigerant passage 5 is provided.
In the gap between the housing 2 and the winding fixed frame 4, the refrigerant flowing through the refrigerant passage 5 leaks to the armature winding 18 sandwiched between the two winding fixed frames 4, and the armature winding 18 is flooded. The sealing member 24 is provided so as not to be disturbed.
Further, a winding fixing frame supporting member 22 for supporting and fixing the upper and lower ends of the two winding fixing frames 4 and the inner peripheral side of the housing 2 is inserted into the upper and lower portions of the armature winding 18. . The housing 2 and the winding fixing frame support member 22 are fixed by passing the bolt screw 6 through a through hole provided in the housing 2 and then screwing into the female screw of the winding fixing frame supporting member 22. The can 3 and the housing 2 are fixed by passing a bolt screw 13 through a through hole provided in the can 3 and then screwing into a female screw of the housing 2. The through holes and the internal threads are not shown in the arrows.
In such a configuration, since the coil configuration of the armature winding 18 is the same as that of the prior art, the canned linear motor of the present invention also corresponds to the electrical relative position of the mover 25 and the stator 1 as in the prior art. When a predetermined current is passed through the armature winding 18, it acts on the magnetic field generated by the permanent magnet 28 to generate thrust on the mover. At this time, the refrigerant flows through the refrigerant passage 5 provided between the can 3 and the winding fixing frame 4 to cool the armature winding 18 that generates heat.
Therefore, in the first embodiment of the present invention, both side surfaces of the armature winding 18 are fixed in such a manner as to be sandwiched between the two winding fixing frames 4 in the longitudinal direction. And the seal member 24 is provided in the gap between the housing 2 and the winding fixing frame 4. The contact of the armature winding 18 can be eliminated. That is, even if water, which is a refrigerant having a low conductivity, is used, the armature winding 18 is isolated from the water by the winding fixing frame 4 and the sealing material 24, so that the dielectric breakdown of the armature winding 18 is prevented. Can be. Since the cooling capacity is increased by changing the coolant to water, the rise in the temperature of the surface of the can 3 can be reduced.
[0008]
(Second embodiment)
Next, a second embodiment of the present invention will be described.
FIG. 4 is a front sectional view of a stator of a canned linear motor according to a second embodiment of the present invention.
The difference between the second embodiment and the first embodiment is that, while the can 3 of the first embodiment is a straight plate, the can is curved in advance, and the curved convex surfaces of the can are wound around each other. It is arranged so as to face the line fixing frame 4. In FIG. 4, reference numeral 3a denotes a pre-curved can, and 5a denotes a refrigerant passage formed in a space between the curved can 3a and the winding fixing frame 4. That is, when the refrigerant is not flowing through the refrigerant passage 5a, the can 3a is formed in a curved shape such that the central portion thereof does not slightly contact the winding fixing frame 4 side. When the refrigerant flows through the refrigerant passage 5a, the can 3a is deformed by the pressure of the refrigerant so that the central portion projects outward (opposite to the winding fixing frame 4).
Therefore, since the can 3a is formed into a curved shape in advance, it is possible to suppress the deformation of the can 3a to the gap facing the mover due to the flow rate of the refrigerant, as an effect exceeding the first embodiment. Further, the flow rate of the refrigerant can be increased as compared with the first embodiment, and the temperature rise can be further reduced.
[0009]
In the above embodiment, the structure in which the stator has the armature winding and the mover has the permanent magnet as the magnetic field has been described, but the stator has the permanent magnet and the mover has the armature winding. It is good also as a structure.
Further, although the shape of the mover is a mouth shape, it goes without saying that the present invention is also applicable to a concave shape or a structure in which permanent magnets are simply arranged on one side.
[0010]
【The invention's effect】
The following effects are obtained by the canned linear motor according to the embodiment of the present invention described above.
(1) In the first embodiment of the present invention, both side surfaces of the armature winding are fixed so as to be sandwiched between two winding fixing frames in the longitudinal direction, and are formed between the can and the winding fixing frame. The structure in which the refrigerant passage is provided in the space that is provided, and the structure in which the sealing material is provided in the gap between the housing and the winding fixing frame eliminates the contact between the refrigerant and the armature winding, which has been a problem in the prior art. be able to. In other words, even if water, which is a refrigerant having low conductivity, is used, the armature winding is isolated from the water by the winding fixing frame and the sealing material, so that the dielectric breakdown of the armature winding can be prevented. Since the cooling capacity is increased by changing the coolant to water, a rise in the temperature of the surface of the can can be reduced.
(2) In the second embodiment of the present invention, since the can 3a has a curved shape in advance, as an effect exceeding the first embodiment, it is possible to suppress the can deformation into the gap facing the mover due to the flow rate of the refrigerant. it can. Further, the flow rate of the refrigerant can be increased as compared with the first embodiment, and the temperature rise can be further reduced.
[Brief description of the drawings]
FIG. 1 is an overall perspective view of a canned linear motor showing a first embodiment of the present invention; FIG. 2 is a front sectional view of the canned linear motor taken along the line AA in FIG. 1 FIG. FIG. 4 is a side view showing the internal structure of the stator from which the stator is removed. FIG. 4 is a front sectional view of the stator of the canned linear motor according to the second embodiment of the present invention. FIG. FIG. 6 is a front sectional view of the canned linear motor taken along the line AA in FIG. 5. FIG. 7 is a side view showing the internal structure of the stator with the can removed from FIG.
1, 10 Stator 2, 11 Housing 3, 3a, 12 Can 4, 19 Winding fixing frame 5, 5a, 20 Refrigerant passage 6, 23 Bolt screw 13 Bolt screw 14 Holding plate 15 Terminal block 16 Refrigerant supply port 17 Refrigerant Discharge port 18 Armature winding 21 O-ring 22 Winding fixed frame support member 24 Seal material 25 Movable element 26 Field yoke support member 27 Field yoke 28 Permanent magnet

Claims (3)

An armature winding composed of a plurality of coil groups formed in a flat plate shape, a metal housing provided to surround the armature winding in a frame shape, and a canister for sealing both openings of the housing. And a canned linear motor armature comprising:
It is fixed so that both side surfaces of the armature winding are sandwiched between two winding fixing frames in the longitudinal direction,
A refrigerant passage is provided in a space formed between the can and the winding fixing frame,
A canned linear motor armature, wherein a seal member is provided in a gap between the housing and the winding fixing frame. The armature according to claim 1, wherein the can is curved in advance, and the curved convex surfaces of the can are arranged so as to face each other to the winding fixing frame. A canned linear motor armature according to claim 1 or 2, and a field yoke which is arranged opposite to the armature via a magnetic gap and in which a plurality of permanent magnets having different polarities are arranged side by side. Wherein one of the armature and the field yoke serves as a stator and the other serves as a mover, and the field yoke and the armature run relatively to each other. Linear motor.

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