201042340 六、發明說明: 【發明所屬之技術領域】 本發明係有關於面板、液晶顯示器及面板的形成方 法,且特別是有關於可減少靜電放電(electrostatic discharge)之傷害的面板形成方法。 【先前技術】 面板(例如是顯示面板或觸控面板)中包括許多彼此交 〇 錯之導電線路或信號線,這些導電線路彼此交錯並透過夾 置於彼此間的絕緣層而電性絕緣。以顯示面板為例,這些 導電線路例如是定義出晝京區之持描線(scan line)與貢料 線(data line)或非晝素區中之各種走線,例如電源線、測 試線路、或與驅動積體電路相連之線路等。 由於需在面板中形成諸多導電線路,為於有限的基底 面積布局上述線路,需使部分線路彼此交錯跨接。然而, 在形成面板的製程過程中(例如,顯示面板中之陣列製 程),易因製程設備之放電(例如乾蝕刻腔體),而使電荷累 〇 積於面板中。當面板與其他機械接觸時,電荷會由高電位 往低電位移動而造成靜電放電(ESD)現象。靜電放電可高 達數千伏特,並容易於彼此交錯跨接之導電線路間之跨接 處(cross-over)發生,其將導致用以電性隔離兩交錯導線之 絕緣層受靜電放電之破壞而使兩交錯跨接導線發生短路。 因此,業界亟需能避免或減少靜電放電對面板中之元 件的傷害。 【發明内容】 3 201042340 本發明一實施例提供一種面板的形成方法,包括提供 基底;於基底上形成第一導線,第一導線具有第一部分及 第二部分,第一部分與第二部分彼此電性絕緣;於第一導 線上形成第一絕緣層;於第一絕緣層上形成至少一第二導 線,與第一導線之第二部分彼此交錯且電性絕緣;於第二 導線上形成第二絕緣層;以及於第二絕緣層上形成第一導 電結構,第一導電結構電性連接第一部分與第二部分。 本發明一實施例提供一種面板,包括基底;第一導 Ο 線,位於基底上,第一導線具有第一部分、第一開口及第 二部分,第一部分與第二部分之間隔有第一開口而彼此電 性絕緣,其中第一開口位於非晝素區中;第一絕緣層,位 於第一導線上;至少一第二導線,位於第一絕緣層上,與 第一導線之第二部分彼此交錯且電性絕緣;第二絕緣層, 位於第二導線上;以及第一導電結構,位於第二絕緣層上 且電性連接第一部分與第二部分。 本發明另一實施例提供一種面板,包括基底;第一導 線,位於基底上,且朝第一方向延伸,第一導線具有第一 〇 部分、第一開口及第二部分,第一部分與第二部分之間隔 有第一開口而彼此電性絕緣;第一絕緣層,位於第一導線 上;複數個第二導線,位於第一絕緣層上,且大抵皆朝第 二方向延伸,每一第二導線皆分別與第一導線之第二部分 彼此交錯且電性絕緣;第二絕緣層,位於第二導線上;以 及導電結構,位於基底上且電性連接第一部分與第二部 分;其中,第一導線之第一部分之正上方不具有大抵朝第 二方向延伸之導線。 本發明又一實施例提供一種面板,包括基底;第一導 4 201042340 線’位於基底上, 二部分,第-部分與;二:;:: ::分、第-開口及第 性絕緣;第-絕緣層,位於第—導日:上有乐—開口而彼此電 位於第一絕緣層上,與第 之Ί 一第二導線, 性絕緣;中間導電結構,位於、第她皮此交錯且電 彼此電性絕緣;第_ 、弟、,·巴緣層上且與第二導線 導電結構,位c上::第二導線上;以及第〜 第一部分、及第二部分Ί 9 电丨生連接中間導電結構、 Ο 本發明又—實施例提供一 卜— 板之一。 、種/夜日日嫋不器,包括上述面 【實施方式] ㈣本發明實施例之製作與使用方式。铁 "以,王W的疋’本發明提供 、…、 以多種特定型式實施。文^ ϋ用的發明概念,其可 『與,用本發明之特定方式,非用以 :j 圍。此外,在不同實施例中可能 =之乾 〇這些重複僅為了簡單清楚地教、十、士 ☆叙的知琥或“不。 及—第-材料層位於性。士再者,當述 層直接接觸或間隔有-或更多其二 僅用來顯示發明人所發現的問題二 、 、°兄月 一#第1A圖顯示一面板之局部上視圖,第ΐβ圖顯示沿 者第1A圖中之切、線a-a,的面板剖面圖。面板包括基底_ 5 201042340 及形成於基底100上之諸客' 、 數條大抵縱向延伸且彼此、線。這些導電線路包括 乂欠士把β A 2 / 电性絕緣之導線G1-G6,以万缸 = 且彼此電性絕緣之導線⑽。= G1-G6與導線S1_S6之間 ¥線 透過導線G1上方之絕繚思、巴緣曰102其中,導線S1 ri 4 巴、,表層1〇2中的接觸孔10而盥導續 式分別與相應的上層導線餘:層¥線G2_G6亦以相同方 續㈣、首Γ S6電性連接。如圖所示,導201042340 VI. Description of the Invention: [Technical Field] The present invention relates to a method of forming a panel, a liquid crystal display, and a panel, and more particularly to a panel forming method capable of reducing damage from electrostatic discharge. [Prior Art] A panel (e.g., a display panel or a touch panel) includes a plurality of conductive or signal lines that are misaligned with each other, and the conductive lines are staggered with each other and electrically insulated by an insulating layer sandwiched between each other. Taking the display panel as an example, these conductive lines are, for example, defining a scan line and a data line in the Tokyo area or various traces in a non-alloy region, such as a power line, a test line, or A line connected to the drive integrated circuit, and the like. Since a plurality of conductive lines are required to be formed in the panel, in order to lay out the above-mentioned lines for a limited substrate area, it is necessary to cross-connect some of the lines. However, during the process of forming the panel (e.g., the array process in the display panel), the charge is accumulated in the panel due to discharge of the process device (e.g., dry etching of the cavity). When the panel is in contact with other machines, the charge moves from a high potential to a low potential, causing an electrostatic discharge (ESD) phenomenon. Electrostatic discharge can be as high as several thousand volts, and is easy to occur across the cross-over between the conductive lines that are staggered across each other, which will cause the insulating layer used to electrically isolate the two staggered wires to be damaged by electrostatic discharge. Short circuit the two staggered jumper wires. Therefore, there is an urgent need in the industry to avoid or reduce the damage of electrostatic discharge to components in the panel. SUMMARY OF THE INVENTION An embodiment of the present invention provides a method for forming a panel, comprising: providing a substrate; forming a first wire on the substrate, the first wire having a first portion and a second portion, wherein the first portion and the second portion are electrically connected to each other Insulating; forming a first insulating layer on the first wire; forming at least one second wire on the first insulating layer, and the second portion of the first wire is staggered and electrically insulated from each other; forming a second insulation on the second wire And forming a first conductive structure on the second insulating layer, the first conductive structure electrically connecting the first portion and the second portion. An embodiment of the present invention provides a panel including a substrate, and a first guiding wire disposed on the substrate, the first wire having a first portion, a first opening, and a second portion, wherein the first portion and the second portion are separated by a first opening Electrically insulated from each other, wherein the first opening is located in the non-alloy region; the first insulating layer is located on the first wire; the at least one second wire is located on the first insulating layer, and the second portion of the first wire is interlaced with each other And electrically insulated; a second insulating layer on the second wire; and a first conductive structure on the second insulating layer and electrically connecting the first portion and the second portion. Another embodiment of the present invention provides a panel including a substrate, a first wire disposed on the substrate and extending in a first direction, the first wire having a first turn portion, a first opening, and a second portion, the first portion and the second portion The portions are electrically insulated from each other by a first opening; the first insulating layer is located on the first wire; the plurality of second wires are located on the first insulating layer, and all of them extend in a second direction, each second The wires are respectively staggered and electrically insulated from the second portion of the first wire; the second insulating layer is located on the second wire; and the conductive structure is located on the substrate and electrically connected to the first portion and the second portion; wherein There is no wire directly above the first portion of a wire that extends substantially in the second direction. A further embodiment of the present invention provides a panel comprising a substrate; the first guide 4 201042340 line 'on the substrate, two parts, the first part and the second part; the second:;::::, the first opening and the first insulation; - Insulation layer, located on the first day: there is a music-opening and electrically located on the first insulating layer, and the second wire is electrically insulated from the first wire; the intermediate conductive structure is located at the first and the second skin Electrically insulated from each other; on the _th, the younger, the slat layer and on the second conductor conductive structure, on the c:: on the second conductor; and the first to the first part, and the second part Ί 9 Intermediate Conductive Structure, Ο The present invention provides an embodiment of a baffle. , the type of the day/night, including the above-mentioned surface [Embodiment] (4) The manner of making and using the embodiment of the present invention. Iron "Yes, Wang W's 疋' The present invention provides, ..., implemented in a variety of specific types. The invention concept of the invention can be used in conjunction with the specific mode of the invention. In addition, in different embodiments, it may be that the repetitions are only simple and clear, ten, and the syllabus of the syllabus or "no. And - the - material layer is located in the sex. The contact or interval has - or more, the second is only used to show the problem discovered by the inventor. Second, the "Hey's Moon 1" Figure 1A shows a partial top view of a panel, and the ΐβ map shows the edge of Figure 1A. Cut-away, line aa, panel cross-section. The panel includes a substrate _ 5 201042340 and a plurality of customers formed on the substrate 100, a plurality of longitudinally extending and mutually, lines. These conductive lines include 乂 士 把 β β A 2 / electric Conductive insulated wires G1-G6, with thousands of cylinders = and electrically insulated from each other (10). = Between G1-G6 and wire S1_S6, the wire is transmitted through the wire above G1, and the edge of the wire is 102. The wire S1 ri 4 bar, the contact hole 10 in the surface layer 1〇2 and the continuation type and the corresponding upper layer wire respectively: the layer ¥ line G2_G6 is also electrically connected in the same direction (4), the first Γ S6. As shown in the figure,
線S2-S6 %越導線G1, V 〇 C1_C5。 ,、彼此閩具嚆稷數個跨接處 在面板製程期間,可能合Line S2-S6 % is the wire G1, V 〇 C1_C5. , and each of them has several spans. During the panel manufacturing process, it may be
生電荷可能沿著導線〇Γ::產生靜電放電現象,放電所 ,處之絕緣層K)2因靜電放電 J 線32、…或S6,影響如為編1以及導 例提之靜電放電問題,本發明實施 ❹ 生。以下,將配合第2A ^ 了避免靜電放電於跨接處發 板的形成方法。 部圖說明本發明一實施例之面 請參照第2 Α圖,苴麵;π』、,+ 中間步驟上視圖。如第^ =成此f施例^面板時的一 其具有第-部分§1、第^斤^此面板包括導線⑴, , ^ , S 弟一 σ卩分以、及第三部分g3。面板 S1、S2、及S3 ’其中導線S1_S3與導線G1 孔1曰〇1盘絕Λ層(未顯示)。導線Sl透過絕緣層中之接觸 G1電性連接。至於導線S2、S3則與導線 S2 ^ 彼此電性絕緣。類似於第1圖所示,導線 ^導線G1間分別具有跨接處〇及C2,其為易受 6 201042340 =放;電,破壞之區域。在此實施例中,第— :::二因:ΐ第一開口 12而彼此電性絕緣, 而分士兩 口戸分§3之間亦因隔有第二開口 12, 而彼此电性絕緣。本發明破始你丨田立认、蓄ώ 跨接處的兩二飽“"例因先於導線G1中之預定 生之端形成開口’可使後續製種期間所 电放電破開口隔絕而不至於傳導 ο ===象於跨接處發生,而心: 系驗=圖祕圖式詳細說明此實施例之面板的- 列穿==圖顯示相應於第2Α圖之切線W處的-李 底二圖所示’首先提供基底_。基 ⑽上形成第朗基底。接著,於基底 £2。第一導嗜〇 ',泉 /、具旁弟一部分gl及第二部分 料,並將之圖宰成包^於基底1〇0上先形成導電材 同時於第4:=:!^;;可於圖案化製程時, ❹ 中,亦可gl與第二部分&在—實施例 開口 U,,t進製程時’於第—導線中形成第二 部分錄第2A圖㈣。生,之第三 中的其他線路於同—道擊^線⑴之形成可與面板 可與面板中之掃描線同時,〜成:例如,第一導線G1 係由同一導電層圖案化而;二第—導線G1與掃描線 一導線G1本身、 于或者,在其他實施例中,第 :身即為其中一條掃描線。 矛 接者,如第2C圖所示,於第、首占 絕緣層W2,絕緣 於,導線Gi上形成第一 象層102可進一步填入 7 201042340 邛分gl與第二部分g2之間的〜 製程中,將於第一絕緣層1〇 開口 12中。在後續 施例中,第-導線G1可與第条導線。在部分實 之—電性連接(然非必須)。此時,可預;_上之數條導線 中預留接觸孔10。接觸孔、先於第一絕緣層1〇2 案化製程。 之形成可例如採用一般的圖 如第2D圖所示,接著於第— Ο 材料’並將之圖案化。在此上形成導電 導線sb第二導線S2、及 ^ ’可分別圖案化形成 !S1透過接觸孔1〇而與第—導線:、=广。其中、’導 第—導線之延伸。第二導錄s?之=包生連接,可視為 不同而彼此跨接交錯,例如是^方向與第—導線⑴ r第二導線幻與第-導線第斤二之此垂 弟一絕緣層102而彼此雪把 弟—/刀以之間隔有 S2時,可選擇性同時於第 了在®木化形成第二導線 上形成中間導電結構,近的絕緣層102 ❹ 與第二導線S2為同—層形成^ = 2導電結構104 如第二導線S 2般朝某 曰’導K構10 4可不需 形導電區塊。在—實於:方向延伸’其例如可為一麵 導線G1及第二導線S2^’弟—絕緣層⑽分別與第— ,可與面板中的其:二導線S2之 弟二導線S2可鱼面“11道製W形成。例如, S2與資料線係由、同=同時形成,即第二導線 實施例中,第-m _圖木化而得。或者,在复 接著,如第一=本身即為其卜條資料線 綠層咖。在此實施::示第於;二,上形成第二絕 弟一,、、ε緣層i〇6亦覆蓋導線幻 8 201042340 及中間導電結構104。 如第2F圖所示,接著將第一絕緣層102及第二絕緣 層106圖案化以形成至少一第一穿孔120a及至少一第二 穿孔120b以分別暴露出第一部分gl以及第二部分g2, 如第2F圖所例,第一穿孔120a露出第一導線G1之第一 部分gl,而第二穿孔120b露出第一導線G1之第二部分 g2。在此實施例中,更包括將中間導電結構104上方之第 二絕緣層106圖案化以至少形成一第三穿孔122a (或 0 122b),第三穿孔之底部露出中間導電結構104。在此實施 例係形成了兩個第三穿孔,分別為122a及122b。 由第2B-2F圖之說明可知,面板的形成過程中,經歷 許多沉積與圖案化之製程。靜電放電現象很容易於進行這 些製程期間產生。由於本發明實施例預先於第一導線G1 中形成開口,例如是第一開口 12及第二開口 12’(請參照 第2Α圖)。因此,來自面板其他部分所產生之靜電放電電 荷僅能傳導至第一部分gl或第三部分g3,之後靜電放電 電荷將受到開口之隔絕而無法傳導至第二部分g2。自然 ❹ 可大幅降低第二部分g2與第二導線S2之間的跨接處C1 發生靜電放電的機會,可大幅提升製程品質。雖然,第 2A圖所示之開口 12及12’係形成於第一導線G1中之所 有與其他導線跨接處(如Cl、C2)之兩端,然本發明實施 例不限於此。在其他實施例中,可多形成開口於跨接處之 間,不限於形成於所有跨接處之兩端,可更進一步降低靜 電放電發生於導線間之跨接處的機率。 接著,如第2G圖所示,於第二絕緣層106上形成導 電材料並將之圖案化以形成電性連接第一部分gl與第二 9 201042340 部分g2之導電結構108。在此實施例中,導電結構108 係分作左右兩部分,其分別填入穿孔120a、122a與穿孔 120b、122b。在此實施例中,中間導電結構104係作為中 間導電橋樑,並進一步透過於穿孔中之導電結構108而將 第一部分gl與第二部分g2電性連接。經導電結構108電 性連接後,可使電性訊號得以於第一部分gl與第二部分 g2之間傳遞。請參照第2A圖,亦可於第二開口 12’的位 置’形成類似於第2 G圖中之導電結構’使電性訊號得以 U 於第二部分g2與第三部分g3之間傳遞。此外,導電結構 108之形成可與面板中的其他線路於同一道製程中形成。 例如,導電結構108可與面板中之晝素電極同時形成,即 導電結構108與晝素電極係由同一導電層圖案化而得。 本發明實施例透過先於導線中形成開口於跨接處之 一端或兩端,以將導線分為數個彼此電性絕緣之部分,可 使後續各種製程中所產生之靜電放電電荷無法傳導至跨 接處,有效避免或降低靜電放電現象於跨接處發生。在數 道易生靜電放電電荷之製程完成後5才形成導電結構使導 © 線之各部分電性連接,使電性訊號得以傳遞。 本發明實施例中,用以電性連接導線G1之第一部分 gl與第二部分g2(或第二部分g2與第三部分g3)之導電結 構108及/或中間導電結構104可有各種不同的樣態。第 3A-3C圖舉出部分的樣態。 如第3A圖所示之局部面板剖面圖,其與第2G圖之 結構相似,差異在於第3A圖實施例中,僅具一第三穿孔 122a,且導電結構108未分為左右兩部分。第3B與3C 圖顯示另兩種可能的導電結構樣態。在第3B圖之結構 10 201042340The generated charge may be along the wire:: an electrostatic discharge phenomenon occurs, and the insulation layer K) 2 is affected by the electrostatic discharge J line 32, ... or S6, which affects the electrostatic discharge problem as described in the first and the first examples. The present invention is practiced. Hereinafter, a method of forming the hair plate to prevent electrostatic discharge at the bridging portion will be incorporated in the second aspect. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a side view of an embodiment of the present invention. Referring to FIG. 2, the front side; π′′, + For example, when the ^^ is the embodiment of the panel, it has the first part §1, the second part of the panel, and the panel includes the wires (1), ^, S, and the third portion g3. The panels S1, S2, and S3' have a wire S1_S3 and a hole 1曰〇1 of the wire G1 (not shown). The wire S1 is electrically connected through the contact G1 in the insulating layer. As for the wires S2, S3, the wires S2^ are electrically insulated from each other. Similar to Fig. 1, the wire ^ wire G1 has a bridging point C and C2, respectively, which are susceptible to 6 201042340 = discharge; electric, damaged area. In this embodiment, the -::2 is electrically insulated from each other by the first opening 12, and the two divisions §3 are also electrically insulated from each other by the second opening 12. The invention breaks the two or two fullness of the 丨田立立, ώ ώ 跨 “ 例 例 例 例 例 例 例 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先 先As for the conduction ο === as it occurs at the bridge, and the heart: the system = the schematic diagram details the panel of this embodiment - the column wear == the figure shows the tangent W corresponding to the second figure - Li The bottom two figures show 'the first base. _. The base (10) forms the slanting base. Then, on the base of £2. The first guide 〇 ', spring /, with a part of the gl and the second part, and Figure 7 is formed into a package to form a conductive material on the substrate 1〇0 at the same time as the 4:=:!^;; during the patterning process, ❹, gl and the second part & U,, in the t-digit range, the second part of the first conductor is formed in Figure 2A (4). The other lines in the third, the other line in the same line can be formed with the panel and the panel. At the same time, the scan line is at the same time: for example, the first wire G1 is patterned by the same conductive layer; the second wire-G1 and the scan line-wire G1 itself, or In other embodiments, the first body layer is one of the scanning lines. The ejector, as shown in FIG. 2C, forms the first image layer 102 on the first and first insulating layer W2, and is insulated, and the wire Gi can be further formed. In the process of filling the gap between the GL and the second part g2, the first insulating layer 1 is opened in the opening 12. In the subsequent embodiment, the first wire G1 can be connected to the first wire. The electrical connection (which is not necessary). At this time, the contact hole 10 is reserved in the plurality of wires on the _. The contact hole is formed prior to the first insulating layer 1 〇 2 process. The general pattern is as shown in FIG. 2D, followed by the first material ' material and patterned. The conductive wires sb are formed thereon, and the second wires S2 and S' can be separately patterned to form! S1 through the contact hole 1 〇和与第一— wire:, = wide. Among them, 'lead-wire extension. The second guide s? = package connection, can be seen as different and cross-stacked, such as ^ direction and the first wire (1) r second wire magic and the first wire of the second wire of the two brothers an insulation layer 102 and each other snow brother - / knife to When there is S2 interval, the intermediate conductive structure may be selectively formed on the second wire formed by the second wood, and the near insulating layer 102 ❹ and the second wire S2 are formed in the same layer to form the ^ 2 conductive structure 104. The second wire S 2 can be formed as a conductive layer in a certain direction, and can be formed in the direction of the wire G1 and the second wire S2^'s insulating layer (10). Separately with the first -, it can be formed with the panel: the two wires S2, the second wire S2 can be fish surface "11 channel W formation. For example, S2 and the data line are formed by the same = same, that is, in the second wire embodiment, the -m _ is obtained. Or, in the following, if the first = itself is the green line of its data line. In this implementation:: show the first; second, form the second absolute brother, the ε edge layer i〇6 also covers the wire magic 8 201042340 and the intermediate conductive structure 104. As shown in FIG. 2F, the first insulating layer 102 and the second insulating layer 106 are patterned to form at least one first through hole 120a and at least one second through hole 120b to respectively expose the first portion gl and the second portion g2. As illustrated in FIG. 2F, the first through hole 120a exposes the first portion gl of the first wire G1, and the second through hole 120b exposes the second portion g2 of the first wire G1. In this embodiment, the second insulating layer 106 above the intermediate conductive structure 104 is further patterned to form at least a third via 122a (or 0 122b), and the bottom of the third via exposes the intermediate conductive structure 104. In this embodiment, two third perforations are formed, 122a and 122b, respectively. As can be seen from the description of Fig. 2B-2F, during the formation of the panel, many processes of deposition and patterning are experienced. Electrostatic discharge phenomena are easily generated during these processes. Since the embodiment of the present invention forms openings in the first wire G1 in advance, for example, the first opening 12 and the second opening 12' (refer to Fig. 2). Therefore, the electrostatic discharge charge generated from the other portions of the panel can only be conducted to the first portion gl or the third portion g3, after which the electrostatic discharge charge will be isolated by the opening and cannot be conducted to the second portion g2. Natural ❹ can greatly reduce the chance of electrostatic discharge at the junction C1 between the second part g2 and the second wire S2, which can greatly improve the process quality. Although the openings 12 and 12' shown in Fig. 2A are formed at both ends of the first wire G1 at the intersections with other wires (e.g., Cl, C2), the embodiment of the invention is not limited thereto. In other embodiments, more openings may be formed between the jumpers, and are not limited to being formed at both ends of the jumper, which further reduces the chance of electrostatic discharge occurring at the junction between the wires. Next, as shown in FIG. 2G, a conductive material is formed on the second insulating layer 106 and patterned to form a conductive structure 108 electrically connected to the first portion gl and the second portion 9201042340 portion g2. In this embodiment, the electrically conductive structure 108 is divided into left and right portions which are filled into the perforations 120a, 122a and the perforations 120b, 122b, respectively. In this embodiment, the intermediate conductive structure 104 acts as an intermediate conductive bridge and is further electrically connected to the second portion g2 through the conductive structure 108 in the via. After the conductive structure 108 is electrically connected, an electrical signal can be transmitted between the first portion gl and the second portion g2. Referring to Fig. 2A, a conductive structure similar to that in Fig. 2G can be formed at the position ' of the second opening 12' to transfer the electrical signal between the second portion g2 and the third portion g3. In addition, the formation of conductive structures 108 can be formed in the same process as other lines in the panel. For example, the electrically conductive structure 108 can be formed simultaneously with the halogen electrodes in the panel, i.e., the electrically conductive structure 108 and the halogen electrode are patterned from the same conductive layer. In the embodiment of the present invention, the opening of the wire is formed at one end or both ends of the jumper to divide the wire into a plurality of electrically insulated portions, so that the electrostatic discharge charge generated in subsequent processes cannot be transmitted to the cross. The junction effectively prevents or reduces electrostatic discharge from occurring at the junction. After the process of several easy-to-generate electrostatic discharge charges is completed, the conductive structure is formed to electrically connect the parts of the lead-to-wire, so that electrical signals can be transmitted. In the embodiment of the present invention, the conductive structure 108 and/or the intermediate conductive structure 104 for electrically connecting the first portion gl of the wire G1 and the second portion g2 (or the second portion g2 and the third portion g3) may have various kinds of different Style. Figures 3A-3C show some of the patterns. A partial panel cross-sectional view as shown in Fig. 3A is similar to the structure of the second G-figure, except that in the embodiment of Fig. 3A, only a third through-hole 122a is provided, and the conductive structure 108 is not divided into left and right portions. Figures 3B and 3C show two other possible conductive structural aspects. Structure in Figure 3B 10 201042340
中不於中間導雷么士搂1 n J 結構⑽i之上謂成穿孔,直接以導電 圖之結構中 =Vgi與弟二部分g2。在第3c 結構⑽電性連接ί_!Γ結構】04,且亦直接以導電 在本發明實施例之1=分§1與第二部分g2。如上所述’ 部分或裳-ί 電性連接第一部分幻與第二 & 4弟一 $分§2與第三部分g3)之導雷斗嗜 … 於任何特定形式或結構。 切之W料不限疋 ο 第-^雖然弟2A'2G圖及m3c圖之實施例中, 上。i。明與杳第,二部分g2彼此處於大抵相同高度的平面 線之第二;分’d不限於此。在其他實施例中,第-導 面上刀/、σ为的第二部分彼此處於不同高度的平 ==4A圖所示之實施例中,第-導;: + τ,σ/邙分的第二部分§2彼此處於不同高产的 十囬上。第4Α圖之每妒s A t Μ」阿没的 第-邱八貝施例更包括一絕緣層101,部分的 ,一#刀g2係位於絕緣層1〇1之上而盥 處於不同高度的平面上。在 ;、乐邻刀§彼此 % r^ ^ ^ jl 在此丨月开/中’仍可透過於第一導 次1中形成電性隔離第一部分σ1 _ ' 、 跨接處d、C2。如此,可保護跨接處;;荷傳導至 102免於受到靜電放電的破壞 2之絕緣層 接著,請袁昭第v D#u之傳遞得以順暢。 -邻八。、、Γ圖’可形成分別露出第—部分§1盈第 —4分g2之穿孔12如與u〇b,並接丨刀W與乐 上形成導電結構⑽。導電結構⑽進—^―絕^層106 與1施中而使第-部分gl與第八乂 ”入牙孔U〇a 接,使電性訊號得以傳遞。 77 彼此電性連 在上述實施例中,第—開口 12及/或第二開口 12,可 11 201042340 反之:非晝素區中。然本發明實施 成於面板之晝素區中。 力『形 第5Α-5Β圖顯示本私日日每被加今I 於晝素區中的實施方式之戶斤面板中,將開口形成 ,其上形成有多條大抵朝;圖:;:,面板包括基底 導線206。在此實=^朝―^方向.D1延伸之第— ㈣々上〜 中’第一導線206例如是多体⑼ 延伸之掃描線。盥先前每 疋夕U敗向 線、眛叮执: 例相似,在圖案化形成第—導 ❹ Ϊ二f導線2°6中形成_及12,,4 卹 '線刀成彼此電性絕緣之第-部分206a、裳 部分206b、及第三邱八, 丨刀』6a、乐二 微影與蝕刻等圖荦::: :::此’在後續各種沉積、 大抵朝-宾Γϋ 场成絕緣層(未顯示)與多條 电電何將無法傳導至第—道 、替:门茚包放 t 戶例中,第二導線2〇4例如是多蜱f 向韪伸之資料 !邻〜夕铋杈 出面板之—晝素區PX 確保料處之兩端以 曰得^至所有跨接處。換t之,笛一 此延伸之之導上方不具有大抵㈣二 第二方向延伸D2 :η〇6“上方亦不具有大抵朝 與以)係形成於所有於接虛在此貫施例中,由於開口⑴ 第二導線20:t:有跨接處之兩端,因此第-導線206與 上。線204之間的交錯跨接處僅限於第二部分2_之 素區成ti59B圖所示’可接著進行各種製程以於晝 成互素210 ’並於形成晝素210期間,形成電性 出面板之與第二導線綱共同定義 〇 12 201042340 連接第一部分206a與第二部分206b之第一導電結構 208a,以及電性連接第二部分206b與第三部分206c之第 二導電結構208b。第一導電結構208a與第二導電結構 208b可例如於形成晝素210之晝素電極時同時形成。 第6A-6B圖顯示本發明其他實施例之面板的示意 圖。如第6A圖所示,除了於例如是掃描線之第一導線206 中形成開口以避免靜電放電電荷傳至跨接處外,亦可於例 如是資料線之第二導線204中形成開口以避免靜電放電 0 電荷傳至跨接處。相似地,在各個製程完成後,可進一步 形成導電結構210a與210b以使第二導線204中各部分導 通。在第6A圖之實施例中,各導線之開口亦形成於該導 線與其他導線之所有跨接處之兩端。 在第6B圖之實施例中,導線之開口不限於形成於該 導線與其他導線之所有跨接處之兩端。在此實施例中5亦 可於跨接處之間形成開口,可更進一步避免發生於跨接處 間之靜電放電電荷傳至跨接處的絕緣層。接著,可進一步 形成導電結構208c以將導線206導通。 Θ 本發明實施例透過先將有與其他導線交錯跨接之部 分與導線之其他部分電性隔離,以於製程期間避免靜電放 電電荷破壞跨接處之絕緣層。接著,形成導電結構使整條 導線導通。可有效避免或減少靜電放電現象所造成之傷 害,且使各導線能依其功能順利地傳遞訊號。 本發明更揭露一種液晶顯示器,包括上述各實施例之 面板,對向基板以及液晶層位於面板以及基板之間。 雖然本發明已以數個較佳實施例揭露如上,然其並非 13 201042340 〇In the middle of the guide mine 么 搂 n 1 n J structure (10) i above the perforation, directly in the structure of the conductive graph =Vgi and the second part of the g2. The 3c structure (10) is electrically connected to the ί_!Γ structure] 04, and is also directly electrically conductive in the embodiment of the present invention 1 = § 1 and the second portion g2. As mentioned above, the 'partial or skirt- \\ electrical connection to the first part of the illusion and the second & 4 brothers one of the § § 2 and the third part of the g3) is in any particular form or structure. The W material is not limited to ο ο - ^ Although the brother 2A'2G map and m3c diagram in the embodiment, on. i. The second part g2 is the second of the planes of the same height, and the part 'd' is not limited thereto. In other embodiments, the first portion of the first guide surface knife /, σ is at a different height from each other in the embodiment shown in the figure of Fig. == 4A, the first guide;: + τ, σ / 邙The second part of § 2 is in ten times different from each other. The - t t t Μ 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿 阿on flat surface. In the first step, the first part σ1 _ ', the bridging point d, C2 can be formed in the first lead 1 by the mutual knives § each other % r ^ ^ ^ jl. In this way, the bridge can be protected; the charge is transmitted to 102 to be protected from electrostatic discharge. 2 Insulation layer Next, please let Yuan Zhaodi v D#u pass smoothly. - Neighbor eight. The Γ图' can form the perforations 12, such as u〇b, which respectively expose the first part § 1 盈 - 4 points g2, and connect the trowel W to form a conductive structure (10). The conductive structure (10) is connected to the first layer gl and the eighth 乂" into the tooth hole U〇a, so that the electrical signal is transmitted. 77 Electrically connected to each other in the above embodiment The first opening 12 and/or the second opening 12 may be 11 201042340 or vice versa: in the non-alloy region. However, the present invention is implemented in the pixel region of the panel. The force "5th-5" shows the private day In the panel of the embodiment of the present invention, the opening is formed, and an opening is formed thereon, and a plurality of large faces are formed thereon; and the panel includes a base wire 206. ―^direction.D1 extends the first—(4) 々上~中' The first wire 206 is, for example, a multi-body (9) extended scan line. 盥 Previously every U-turn to the line, 眛叮 :: Example is similar, in the pattern formation The first guide ❹ f 二 f wire 2 ° 6 formed _ and 12, 4 shirt 'wire knife into the electrical insulation of the first part - 206a, skirt part 206b, and the third Qiu Ba, sickle 』 6a, Le Two lithography and etching, etc. 荦:::::This 'in the subsequent various depositions, the large-to-Bin-Yuan field into an insulating layer (not shown) and multiple electric appliances Cannot be transmitted to the first road, instead of: the threshold pack is placed in the household example, the second conductor 2〇4 is, for example, the information of the multiple 蜱f 韪 ! ! ! ! ! ! ! ! ! ! ! ! ! ! 邻 确保 确保 确保 确保 确保 确保 确保 确保The two ends are connected to all the joints. For t, the flute is not extended above the guide. (4) The second direction extends D2: η〇6 “There is no upper and lower Formed in all the connections in this embodiment, due to the opening (1) of the second wire 20: t: there are two ends of the jumper, so the first wire 206 and the upper. The staggered bridging between the lines 204 is limited to the second portion of the 2 - element region as shown in the figure ti59B, which can be followed by various processes to form the mutual element 210 ' and form an electrical output during the formation of the halogen 210 The panel defines a first conductive structure 208a connecting the first portion 206a and the second portion 206b, and the second conductive structure 208b electrically connecting the second portion 206b and the third portion 206c. The first conductive structure 208a and the second conductive structure 208b may be formed simultaneously, for example, when forming a halogen electrode of the halogen 210. 6A-6B are schematic views showing panels of other embodiments of the present invention. As shown in FIG. 6A, in addition to forming an opening in the first wire 206, such as a scan line, to prevent electrostatic discharge charges from being transferred to the jumper, an opening may be formed in the second wire 204, such as a data line, to avoid Electrostatic discharge 0 charge is transferred to the jumper. Similarly, after each process is completed, conductive structures 210a and 210b may be further formed to conduct portions of the second wire 204. In the embodiment of Fig. 6A, the openings of the respective wires are also formed at both ends of the crossing of the wires and the other wires. In the embodiment of Fig. 6B, the opening of the wire is not limited to being formed at both ends of the intersection of the wire and the other wires. In this embodiment, 5 can also form an opening between the jumpers, which further prevents the electrostatic discharge charge occurring between the jumpers from passing to the insulating layer at the jumper. Next, a conductive structure 208c can be further formed to turn on the wire 206.实施 Embodiments of the present invention electrically isolate the portion of the conductor from the other portions of the conductor by first interleaving the other conductors to prevent the electrostatic discharge charge from damaging the insulation layer at the jumper during the process. Next, a conductive structure is formed to turn on the entire wire. It can effectively avoid or reduce the damage caused by the electrostatic discharge phenomenon, and enable the wires to smoothly transmit signals according to their functions. The present invention further discloses a liquid crystal display comprising the panel of each of the above embodiments, the opposite substrate and the liquid crystal layer being located between the panel and the substrate. Although the present invention has been disclosed above in several preferred embodiments, it is not 13 201042340 〇
用以限定本發明,任何所屬技術領域中具有通常知識者, 在不脫離本發明之精神和範圍内,當可作住音 ° 飾,因此本發明之保,諮pq太、从 心更動與潤 月示邊靶圍當視後附之 定者為準。 T明專利辄圍所界 14 201042340 【圖式簡單說明】 第1A及1B圖分別顯示本案發明人所知的一種面板的 上視圖及剖面圖。 第2A-2G圖顯示本發明一實施例之面板形成方法的示 意圖及製程剖面圖。 第3A-3C圖顯示本發明另一實施例之面板的剖面圖。 第4A-4B圖顯示本發明又一實施例之面板的製程剖面 圖。 Ο 第5A-5B圖顯示本發明又一實施例之面板的示意圖。 第6A-6B圖顯示本發明又一實施例之面板的示意圖。 【主要元件符號說明】 100、200〜基底;In order to limit the present invention, any one of ordinary skill in the art, without departing from the spirit and scope of the present invention, can be used as a sound decoration, so that the invention is guaranteed, too p, too The monthly target area is subject to the latter. T 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Fig. 2A-2G is a view showing a schematic view and a process sectional view of a panel forming method according to an embodiment of the present invention. 3A-3C are cross-sectional views showing a panel of another embodiment of the present invention. 4A-4B is a cross-sectional view showing the process of a panel of still another embodiment of the present invention. Ο 5A-5B are schematic views showing a panel of still another embodiment of the present invention. 6A-6B are schematic views showing a panel of still another embodiment of the present invention. [Main component symbol description] 100, 200~ substrate;
Gl、G2、G3、G4、G5、G6、SI、S2、S3、S4、S5、S6、206、 204〜導線, 102、106、101〜絕緣層; 10〜接觸孔; a、C2、C3、C4、C5〜跨接處; 〇 gl、206a〜第一部分; g2、206b〜第二部分; g3、206c〜第三部分; 12、12,〜開口; 104〜中間導電結構, 108、208a、208b、208c〜導電結構; 120a、120b、122a、122b〜穿孔; PX〜晝素區; 210〜晝素;Gl, G2, G3, G4, G5, G6, SI, S2, S3, S4, S5, S6, 206, 204~ wire, 102, 106, 101~ insulating layer; 10~ contact hole; a, C2, C3, C4, C5~crossover; 〇gl, 206a~first part; g2,206b~second part; g3,206c~third part; 12,12,~ opening; 104~ intermediate conductive structure, 108, 208a, 208b 208c~ conductive structure; 120a, 120b, 122a, 122b~perforation; PX~昼素区; 210~昼素;
Dl、D2〜方向。 15Dl, D2 ~ direction. 15