200934309 九、發明說明： 【發明所屬之技術領域】 本發明係有關大氣電漿產生裝置的創新，尤指一種具有雙接地電極，内置 有導流板及凹凸表面的電極，可產生良好之低溫電漿效果，以供大面積清潔之 寬幅大氣電漿結構者。 【先前技術】 Ο 按’電漿（Plasma)是一種由自由電子和帶電離子為主要成分的物質形態， 廣泛存在於宇宙中，常被視為除了固態、液態、氣態之外，存在物質的第四種 形態，亦被稱為電漿態，或者「等離子態」。 在地球表面上，雖然存有自然的電漿態，如閃電、極光…等，但不多。我 們接觸到的大多數是人工製造的電漿，比如常見的日光燈、霓虹燈、弧焊、及 現在最熱門的電漿電視…等。隨著科學技術的發展和社會的進步，人類對電漿 © 瞭解越來越多依賴也就越來越大，人造電漿在實驗室和工業界被大量廣泛地應 用，而呈現出更為廣闊的前景。 伴隨有化學反應的電漿放電，已被廣泛地用來改變材料表面的性質，對全 世界若干大材料處理工業而言，電漿處理技術至關重要，對航空、汽車、鋼鐵 和生物醫學工業也有決定性的作用。在電子產業採用的超大型積體電路的處理 而言，以電漿進行表面處理更是不可缺少，利用這種技術製造出的材料和表面 結構是用其他生產方式無達到的，同時，材料的表面可以用很獨特的方式加以 200934309 改進。 唯，目前習知的寬幅電漿在應用上，其内部大都採用多管式的喷嘴組合來 達成，有些不同結構雖設有長條隙縫喷出設計，但結構技術上還非完善有待進 一歩改善。 因此，如何提供一種具有雙接地電極，内置有導流板及凹凸表面的電極， 可產生良好之低溫電漿效果，以供大面積清潔之寬幅大氣電漿結構，即是本發 明之技術重點之所在。 ❹ 【發明内容】 為達前述目的，本發明所設之一種寬幅大氣電漿結構，其主要包括：一組 合式腔艎及其内置之一長條電極，其中；該組合式腔體，係由左右對置之兩金 屬半體，上方結合設有一非金屬蓋板所構成，其組合成的腔道與内置長條電極 設有凹凸表面，而兩金屬半體及長條電極中可設置冷卻管，且於組合式腔體内 © 部之進氣通道上並可增設多孔性導流板，藉此，應用時其兩金屬半體可作為雙 接地電極，而腔體内與電極間因設有凹凸表面及導流板，故可有效加強放電效 應，並形成均壓穩定之低溫大氣電漿之效果，此發明產生之大氣電漿方式有別 於介電質屏障放電方式’其優點為對於高頻使用下無網路匹配對於電源供應器 之規格要求。 【實施方式】 200934309 為使貴審查委員方便瞭解本發明之其他特徵内容與優點，及其所達成之 功效能夠更為顯現，茲將本發明配合附圖，詳細說明如下： 如第一〜六圖所示，本發明一種寬幅大氣電漿結構，其主要包括：一組合 式腔體1及其内置之一長條電極2，其中； 該組合式腔體1，係由左右對置之兩金屬半體11、12，上方結合設有一非 金屬蓋板13所構成’該兩金屬半體11、12呈長條形，其内側各開設一平行貫 ❹ 體之半槽19,其半槽19上間隔設有複數平行凹溝191而形成利於放電的凹凸表 面15。而該蓋板13内側對應於進氣通道17則設有一内槽道131，於内槽道131 的兩端再貫體設有進氣孔132以供外通接管133。 對組時’兩金屬半體11、12下方留有窄縮之出氣狹缝18，其縫寬大約為 lmm ’中間形成一腔道14，而上方呈一較寬之進氣通道17。於兩金屬半體n、 12上方可對設有階梯平台172，使組合時可供一多孔性陶瓷製成之導流板7置 放’及在階梯平台172邊並設有溝道171以供墊片71纽增加氣密。 而該長條電極2 ’伽關隔f設絲道U巾，其電極2棚設有複數間 隔平行之凹溝21 ’使電極2上也具有凹凸表面25 ; 另外因為其寬幅電漿操作上需要較大的功率’故兩半til卜12及長條電 設冷卻管41、42 ’其中該長條電極2的冷卻管42可貫穿中心而設； 兩半體11、12的冷卻管41可平行埋設在體側，其冷卻管41的兩端並向外 設有接管43 ^ 如第四〜六囷所示，組合應用時，其兩金屬半魏n、12可作為雙接 200934309 地電極，且腔趙1内部之進氣通道17上設有多孔性導流板7，加上腔道14與内 置長條電極2間有凹凸表面15及25，故可有效加強放電效應（如第五圖所示， 其中線條較密者）’而能產生良好的解離效果，持續供應均壓穩定之低溫大氣電 聚。同時又可藉由兩金屬半體U、12及長條電極2中所設置冷卻管41、42，來 達到良好的降溫效果，使裝置在運作時不致過熱。 另外’請參第七圓所示’為本發明之另一實施例，其兩長條形金屬半體U、 ❹ 12製造時’内侧可各具有一斜削面10，使對組時；該兩金屬半體^、12上方 呈現一較寬之進氣通道17，中間則形成一三角形腔道14 ,下方同樣留有窄縮之 出氣狹縫18 ;而内置之長條電極2則可改呈三角柱體，並於向下的一角設有凹 溝21以構成前述之凹凸表面25,如此相同也可達到持續提供均壓穩定低溫大氣 電漿之效果。 由上可知本發明所具之優點如下： 1. 其組合具有雙接地電極’加上腔道與長條電極間均設有凹凸表面，故可 〇 有效加強放電效應，產生良好的解離效果。 2. 其腔體内部之進氣通道上設有多孔性導流板，故使製出之低溫大氣電漿 能在均壓穩定狀態下持續供應。 ^ 3.其組合式腔體及長條電極中均設有冷卻管，故可達到良好的降溫效果， 使裝置在運作時不致過熱。 以上實施例僅為方便說明而揭露’並非用以限定本發明，任何熟習此應用 者，當可做各種更動與不同的應用，其本質未脫離本發明之精神範鳴者，皆當 200934309 包含在本發明專利範圍保護中。 綜上所述，本發明在突破先前之技術下，確實已達到所欲增進之功效足供 產業上利用，再者，本發明申請前未曾公開，且也非熟悉該項技藝者所易於思 及，其所具之新穎性、進步性顯已符合發明專利之申請要件，爰依法提出發明 申請。 【圖式簡單說明】 Ο 第一圖：本發明之立體分解圖。 第二圖：本發明半組合狀態之示意圓。 第三圓：本發明之立體組合圖。 第四囷：本發明之組合平面圖。 第五圖：本發明之組合剖面圖。 第六圖：本發明可產生加強電場之示意圖。 © 第七圖：本發明另一實施例之組合平面圖。 【主要元件符號說明】 腔體…1 斜削面…10 半體…11 半體…12 蓋板…13 内槽道…131 接管…133 進氣孔…132 9 200934309 腔道…14 凹凸表面…15 通道…17 溝道…171 階梯平台…172 狹縫…18 半槽…19 凹溝…191 電極…2 凹溝…21 凹凸表面"·25 冷卻管…41 冷卻管…42 接管…43 導流板…7 墊片…71200934309 IX. Description of the Invention: [Technical Field] The present invention relates to an innovation of an atmospheric plasma generating device, and more particularly to an electrode having a double grounding electrode, a baffle plate and a concave-convex surface, which can generate good low temperature electricity. Pulp effect, for wide-area plasma structure for large area cleaning. [Prior Art] Ο Press 'Plasma' is a form of matter mainly composed of free electrons and charged ions. It is widely found in the universe and is often regarded as a substance other than solid, liquid, and gaseous. The four forms are also known as the plasma state, or the "plasma state". On the surface of the earth, although there are natural plasma states, such as lightning, aurora, etc., there are not many. Most of the exposure we have is artificially made plasma, such as common fluorescent lamps, neon lights, arc welding, and now the most popular plasma TVs...etc. With the development of science and technology and the advancement of society, human beings are becoming more and more dependent on the understanding of plasma ©. Artificial plasma is widely used in the laboratory and industry, and it is more widely used. Prospects. Plasma discharges with chemical reactions have been widely used to alter the properties of material surfaces. For many large material processing industries around the world, plasma processing technology is essential for the aerospace, automotive, steel and biomedical industries. It also has a decisive role. In the processing of ultra-large integrated circuits used in the electronics industry, surface treatment with plasma is indispensable. The materials and surface structures produced by this technology are not achieved by other production methods. At the same time, the materials are The surface can be improved in 200934309 in a very unique way. However, at present, the wide-format plasma is widely used in the application, and most of its internal use is achieved by a multi-tube nozzle combination. Although some different structures have a long slit slit design, the structural technology is still not perfect. improve. Therefore, how to provide a wide-surface plasma structure with a double ground electrode, a built-in baffle and a concave-convex surface, which can produce a good low-temperature plasma effect for large-area cleaning, is the technical focus of the present invention. Where it is. SUMMARY OF THE INVENTION In order to achieve the above object, a wide-format atmospheric plasma structure of the present invention mainly comprises: a combined cavity and a built-in strip electrode thereof; wherein the combined cavity is The two metal half bodies which are opposite to each other are formed by a non-metal cover plate, and the combined cavity and the built-in long electrode are provided with concave and convex surfaces, and the two metal half bodies and the long electrodes can be cooled. a tube and a porous baffle plate can be added to the inlet passage of the combined cavity, whereby the two metal halves can be used as a double grounding electrode in the application, and the cavity and the electrode are arranged. It has a concave-convex surface and a baffle plate, so it can effectively enhance the discharge effect and form the effect of low-temperature atmospheric plasma with uniform pressure. The atmospheric plasma method produced by this invention is different from the dielectric barrier discharge mode. There is no network matching under high frequency use for the specifications of the power supply. [Embodiment] 200934309 In order to make the other members of the present invention more convenient to understand the other features and advantages of the present invention, and to achieve the effects of the present invention, the present invention will be described in detail with reference to the accompanying drawings: As shown, the present invention provides a wide-width atmospheric plasma structure, which mainly comprises: a combined cavity 1 and a built-in elongated electrode 2 thereof; wherein the combined cavity 1 is composed of two metal opposite to each other The half bodies 11, 12 are integrally formed with a non-metal cover plate 13 formed. The two metal half bodies 11, 12 are elongated, and a half-slot 19 of a parallel cross-body is formed on the inner side thereof. A plurality of parallel grooves 191 are formed at intervals to form an uneven surface 15 for facilitating discharge. An inner channel 131 is defined in the inner side of the cover plate 13 corresponding to the air inlet passage 17, and an air inlet hole 132 is formed in the inner side of the inner channel 131 for the outer communication pipe 133. In the case of the group, a narrowed air outlet slit 18 is left under the two metal half bodies 11, 12, and a slit 14 is formed in the middle of the slit width of about 1 mm, and a wider air inlet passage 17 is formed above. A stepped platform 172 may be disposed above the two metal half bodies n, 12 so that a baffle plate 7 made of a porous ceramic can be placed in combination and a channel 171 is provided on the side of the stepped platform 172. The gasket 71 is added to increase the airtightness. The strip electrode 2' is separated by a wire U-strip, and the electrode 2 is provided with a plurality of parallel grooves 21' so that the electrode 2 also has an uneven surface 25; and because of its wide plasma operation A large power is required, so the two half til 12 and the long electric cooling pipes 41, 42 'where the cooling pipe 42 of the long electrode 2 can be disposed through the center; the cooling pipes 41 of the two halves 11, 12 can be parallel Buried on the body side, the two ends of the cooling tube 41 are outwardly provided with a connecting tube 43 ^ as shown in the fourth to the sixth, when the combination application, the two metal semi-wei n, 12 can be used as the double grounding 200934309 ground electrode, and A porous baffle 7 is disposed on the inlet passage 17 inside the cavity 1, and the concave and convex surfaces 15 and 25 are provided between the cavity 14 and the built-in long electrode 2, so that the discharge effect can be effectively enhanced (as shown in the fifth figure) Show that the line is denser)' can produce a good dissociation effect, and continue to supply low-temperature atmospheric electricity with stable pressure equalization. At the same time, the cooling tubes 41 and 42 provided in the two metal half U, 12 and the long electrode 2 can achieve a good cooling effect, so that the device does not overheat during operation. In addition, 'see the seventh circle' is another embodiment of the present invention. When the two elongated metal halves U and ❹ 12 are manufactured, the inner side may have a beveled surface 10 to make the pair; A wider air inlet passage 17 is formed above the metal half body, 12, and a triangular cavity 14 is formed in the middle, and a narrowing outlet slit 18 is also left under the left side; and the built-in long strip electrode 2 can be changed into a triangular column. The body is provided with a groove 21 at a downward corner to constitute the aforementioned concave-convex surface 25, so that the same effect of continuously providing a pressure-stabilizing low-temperature atmospheric plasma can be achieved. It can be seen from the above that the advantages of the present invention are as follows: 1. The combination has a double ground electrode 'plus a concave-convex surface between the cavity and the long electrode, so that the discharge effect can be effectively enhanced, and a good dissociation effect is produced. 2. A porous baffle is arranged on the inlet passage inside the cavity, so that the produced low-temperature atmospheric plasma can be continuously supplied under the condition of constant pressure. ^ 3. The cooling chamber is provided in both the combined cavity and the long electrode, so that a good cooling effect can be achieved, so that the device does not overheat when it is in operation. The above embodiments are merely for convenience of explanation. It is not intended to limit the present invention. Anyone who is familiar with the application, when making various changes and different applications, the essence of which is not deviated from the spirit of the present invention, is included in 200934309. The scope of the patent of the present invention is protected. In summary, the present invention has achieved the desired effect for industrial use under the prior art, and further, the invention has not been disclosed before the application, and it is not easy for those skilled in the art to think about it. The novelty and progress of the invention have been consistent with the application requirements of the invention patent, and the invention application has been filed according to law. BRIEF DESCRIPTION OF THE DRAWINGS Ο First drawing: An exploded perspective view of the present invention. Second Figure: A schematic circle of the semi-combined state of the present invention. Third circle: a three-dimensional combination of the present invention. Fourth aspect: a plan view of the combination of the present invention. Fifth Figure: A sectional view of the combination of the present invention. Figure 6: A schematic diagram of the invention that produces an enhanced electric field. © Figure 7: A combined plan view of another embodiment of the present invention. [Main component symbol description] Cavity...1 Beveled surface...10 Half body...11 Half body...12 Cover plate...13 Inner channel...131 Connector...133 Air inlet...132 9 200934309 Cavity...14 Concave surface...15 Channel ...17 channel...171 ladder platform...172 slit...18 half slot...19 groove...191 electrode...2 groove...21 bump surface"·25 cooling tube...41 cooling tube...42 take over...43 deflector... 7 gasket...71
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