TW200903744A - Die package structure and the fabricating method thereof - Google Patents
Die package structure and the fabricating method thereof Download PDFInfo
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- TW200903744A TW200903744A TW97118964A TW97118964A TW200903744A TW 200903744 A TW200903744 A TW 200903744A TW 97118964 A TW97118964 A TW 97118964A TW 97118964 A TW97118964 A TW 97118964A TW 200903744 A TW200903744 A TW 200903744A
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- die
- substrate
- heat sink
- package structure
- item
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- 238000000034 method Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 230000008093 supporting effect Effects 0.000 claims abstract description 7
- 239000013078 crystal Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 239000012778 molding material Substances 0.000 claims description 11
- 238000005520 cutting process Methods 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 241000282320 Panthera leo Species 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000008393 encapsulating agent Substances 0.000 abstract 2
- 235000013339 cereals Nutrition 0.000 description 22
- 238000012858 packaging process Methods 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- SZUVGFMDDVSKSI-WIFOCOSTSA-N (1s,2s,3s,5r)-1-(carboxymethyl)-3,5-bis[(4-phenoxyphenyl)methyl-propylcarbamoyl]cyclopentane-1,2-dicarboxylic acid Chemical compound O=C([C@@H]1[C@@H]([C@](CC(O)=O)([C@H](C(=O)N(CCC)CC=2C=CC(OC=3C=CC=CC=3)=CC=2)C1)C(O)=O)C(O)=O)N(CCC)CC(C=C1)=CC=C1OC1=CC=CC=C1 SZUVGFMDDVSKSI-WIFOCOSTSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XRWSZZJLZRKHHD-WVWIJVSJSA-N asunaprevir Chemical compound O=C([C@@H]1C[C@H](CN1C(=O)[C@@H](NC(=O)OC(C)(C)C)C(C)(C)C)OC1=NC=C(C2=CC=C(Cl)C=C21)OC)N[C@]1(C(=O)NS(=O)(=O)C2CC2)C[C@H]1C=C XRWSZZJLZRKHHD-WVWIJVSJSA-N 0.000 description 1
- 229940126543 compound 14 Drugs 0.000 description 1
- 229940125961 compound 24 Drugs 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
200903744 九、發明說明: 【發明所屬之技術領域】 本案發明係一種防止散熱 陷,進科致_在封賴内之祕塌 【先前技術】 體元件之運作魏及壽命,是雜 無加散熱片,前有加散熱 7 巾—項極重要之技㈣徵。_ 愈熱,峨熱也咖物=提=半=件愈來 r::=r效率運== 量,易在中心位置產生塌陷之片本身的重 =至若塌陷變形過大__晶粒或;線::= 有鑑於此,本案發明人研發出於封裝過程 點處以點膠方式補上支娜件:或者 她食其支撐散熱片 【發明内容】200903744 IX. Description of the invention: [Technical field to which the invention belongs] The invention of the present invention is a kind of prevention of heat dissipation, and enters the company to _ in the seal of the secret [previous technology] the operation of the body components and the life, is no heat sink There is a heat-dissipating 7 towel in front of it - the most important skill (four). _ The hotter, the hotter is also the coffee = the = half = the piece is getting r::=r efficiency == quantity, easy to produce the collapse of the piece itself in the center position = to the extent of collapse if the deformation is too large __ grain or ; Line::= In view of this, the inventor of the present invention developed a point-filling method to fill the Zina part at the point of the packaging process: or she eats its supporting heat sink [invention]
P070005-TW ASEI898 200903744 =發明之目的在於解決封裝過程中散熱 所仏成中心表面塌陷的問題。 奉身重夏 上表面…_料二==基板之-上:一物& ::位於邊基板與概熱片之間,用以防止該散熱片:表:塌 較佳者’其中該支撐單元與該散熱片係為同一材質。 料元與該散熱片係、為—體成型結構。 ^者、巾錢稽單元係為抵_基板巾央處叫撐該散熱 較佳者,其中該支撐單元 中央處以支撐該散熱片。虛曰曰片、置於该基板上表面 其中該切單元之寬度約係為該晶粒與晶粒間距離之 其中該散熱片中心表面塌陷之最大容許距離係為該晶 =者〃中〆放熱片之材質係為銘、銅或其它高傳導係數之 =係Γ種晶粒封裝結構,包括:—基板(substrate); 稷數们日a粒㈤’係設置於該基板之—上表面上;一塑封 料,係用以覆盍該複數個晶粒與該上表面之上;以及一 凹型結構之散熱片,係覆蓋於該塑封材料之上,該凹型結構抵P070005-TW ASEI898 200903744 = The purpose of the invention was to solve the problem of heat sinking that collapsed into the center surface during the packaging process. The body is heavy on the upper surface of the summer..._Materials===Substrate-on: One thing&: is located between the edge substrate and the heat sink to prevent the heat sink: Table: better collapser' where the support unit It is made of the same material as the heat sink. The material element and the heat sink are in a body-forming structure. The person, the towel and the money unit are preferably the heat sink, and the center of the support unit supports the heat sink. a dummy sheet placed on the upper surface of the substrate, wherein the width of the tangent unit is approximately the distance between the crystal grain and the crystal grain, wherein the maximum allowable distance of the central surface of the heat sink collapses is the heat release of the crystal The material of the film is Ming, copper or other high-conductivity = system-type grain package structure, including: - substrate; the number of turns (a) is set on the upper surface of the substrate; a molding compound for covering the plurality of crystal grains and the upper surface; and a heat sink of a concave structure covering the molding material, the concave structure resisting
P070005-TW ASBJ898 200903744 住該基板以防止該散刻之表面塌陷。 = 型結構之底端係為-平面用以抵住該基板。 〜賴丨之材f係祕、峨其它高料係數之 材貝。 、⑽本另提供―種晶粒封裝結構之製造方法,包括: (3^ 板,具—上表面,其上具複數個置晶粒區;⑻分 個晶粒於該些置晶粒區;⑻電性連接該些晶粒至該 基板片;_具有—支料元之—散㈣目接於該基板片 上,⑻填充i封材料於該基板片及該散熱片之間,包覆該些 晶粒形成-封裝體;以及(ί)切難封裝體 ; 製得個別的晶粒封裝結構。 狀…乃而 β本案發明提供另-種晶_魏構之製造方法,包括:⑻ 提ί、基板>;’具-上表面,其上具複數個置晶粒區 別設置複數㈣粒於_置晶粒區;⑹電性連接祕晶粒至該 基板片」(d)將-支撐單元固接於該基板片上;⑷將一散熱片 固接於該基板片以及該支撐單元上;_充—韻材料於該基 板片及該散刻之間,包覆該些晶粒形成—封裝體;以 切割該封裝體以及該散㈣,而製得_的日日日粒封裝構造。P070005-TW ASBJ898 200903744 The substrate is placed to prevent the surface of the scatter from collapsing. The bottom end of the = structure is a flat surface against the substrate. ~ Lai's material f is secret, and other high material coefficients are shells. (10) The present invention further provides a method for manufacturing a grain package structure, comprising: (3^ a plate having an upper surface having a plurality of grain regions thereon; (8) a plurality of grains in the grain regions; (8) electrically connecting the dies to the substrate sheet; _ having a fulcrum element--distributing (4) on the substrate sheet, and (8) filling an encapsulating material between the substrate sheet and the heat sink, covering the substrate a die-forming package; and a (c) difficult-to-package; an individual die-package structure is produced. The invention provides a method for manufacturing another seed crystal, including: (8) Substrate>;'--the upper surface, which has a plurality of crystal grains disposed thereon, and a plurality of (4) grains are disposed in the _grain region; (6) electrically connecting the secret crystal grains to the substrate sheet" (d) Connected to the substrate piece; (4) a heat sink is fixed on the substrate piece and the supporting unit; _ charging material between the substrate piece and the scatter, covering the die-forming package; In order to cut the package and the dispersion (four), a day-to-day solar package structure is obtained.
P070005-TW ASE1898 7 200903744 【實施方式】 雖然本案發明可表現為不同形式之實施例,有關本 案發明之前述及其他技術内容,特點與功效,在配合以 下參考圖式之可行且較佳實施例的詳細說明中,將可清 楚的呈現。 請參照第一圖,如圖所示係為本案發明第一實施例 之剖面示意圖。由圖中可知本案發明之一種具支撐功效 散熱片之晶片封裝結構,首先在基板10之上表面15之 晶片區設置複數個晶粒14 ’之後再於基板10及晶粒14 上方設置虛晶片11用以支撐散熱片12,進而在基板10 與散熱片12之間填充塑封材料13來包覆該些晶粒14 以形成一封裝體。 請參照第二圖,如圖所示係為本案發明第二實施例 之剖面示意圖。由圖中可知本案發明之一種具支撐功效 散熱片之晶粒封裝結構,首先在基板20之上表面25之 晶片區設置複數個晶粒24,之後再於基板20及晶粒24 上方設置具有一凹型結構21之散熱片22,其中該凹型結 構21與散熱片22可為一體成形之結構,最後在基板20 與散熱片22之間填充塑封材料23來包覆該些晶粒24 以形成一封裝體。P070005-TW ASE1898 7 200903744 [Embodiment] Although the invention may be embodied in different forms, the foregoing and other technical contents, features and effects of the present invention are in accordance with the possible and preferred embodiments of the following reference drawings. In the detailed description, it will be clearly presented. Referring to the first figure, the figure is a schematic cross-sectional view of the first embodiment of the present invention. As shown in the figure, a chip package structure having a supporting heat sink according to the present invention is first provided with a plurality of crystal grains 14' in a wafer region on the upper surface 15 of the substrate 10, and then a dummy wafer 11 is disposed above the substrate 10 and the crystal grains 14. The heat sink 12 is supported, and a molding material 13 is filled between the substrate 10 and the heat sink 12 to cover the crystal grains 14 to form a package. Referring to the second figure, the figure is a schematic cross-sectional view of a second embodiment of the present invention. As shown in the figure, a die package structure having a supporting heat sink according to the present invention is first provided with a plurality of crystal grains 24 in a wafer region on the upper surface 25 of the substrate 20, and then disposed above the substrate 20 and the die 24. The heat sink 22 of the concave structure 21, wherein the concave structure 21 and the heat sink 22 can be integrally formed. Finally, a molding material 23 is filled between the substrate 20 and the heat sink 22 to cover the crystal grains 24 to form a package. body.
P070005-TW ASE1898 200903744 請參照第三圖,如圖所 ^丄 厅不係為本案發明第三實施例 之剖面不意圖。由圖中可知太 ^ ^ μ ^ a μ ^ 本案發明之一種具支撐功效 政熱片之日日片封裝結構,首弈 « " ^ 1 目无在基板30之上表面35之 曰日片區設置複數個晶粒34,之銘$ ,_ ^ <後再於基板30及晶粒34 上方設置具有支樓單元31之 t ^ <政熱片32,進而在基板30 與散熱片32之間填充塑封枒 3了材枓33來包覆該些晶粒34 以形成一封裝體。 根據本發明一實施例之晶粒封裝結構製造方法,係參 _四_第五圖詳述於下。第四圖所示為用於前述製 造方法 之基板以sub伽testrip)1Q()以及散熱片12〇。該散熱片12〇 可以紹、贼其它高料麵之材_成。基板片⑽包含複 數個陣列排狀置晶粒區1Q2,叹複數條_道(阳胃 st既咖4大致設於該些置晶粒區⑽之間。如第四圖所示, 該些置晶粒區1G2係排列成適於大量生產的2〇χ4的矩 陣,並且切割道1〇4在基板片上形成方格子。該基板片1〇〇 的每-置晶粒區1G2至少包含兩組接墊(未示於圖巾)分別設 於其上表面以及下表面’其中第—組接墊_以電性連接至一 晶粒’而第二組接墊係用以電性連接至一外部印刷電路板並且 其係分別電性連接至該基板片100上表面相對應之组 墊。該基板片100可由玻璃纖維強化'' ΒΤ (bismaleimide-triazine)樹脂,或FR-4玻璃纖維強化環氧樹 脂(fiberglass reinforced epoxy resin)製成之蕊層(c〇re layer)形成。此外,該基板片100亦可以是紹陶兗基板或卷P070005-TW ASE1898 200903744 Please refer to the third figure, which is not intended to be a cross-section of the third embodiment of the present invention. It can be seen from the figure that ^ ^ μ ^ a μ ^ is a solar-encapsulated structure with a supporting effect of the invention. The first game « " ^ 1 has no surface area on the upper surface 35 of the substrate 30. A plurality of crystal grains 34, the inscription $, _ ^ < and then a t ^ <<<>> thermal sheet 32 having the building unit 31 above the substrate 30 and the die 34, and further between the substrate 30 and the heat sink 32 A plastic sheet 33 is filled to cover the crystal grains 34 to form a package. A method for fabricating a die package structure according to an embodiment of the present invention is described in detail below. The fourth figure shows the substrate used in the above manufacturing method as sub-gates 1Q() and heat sink 12A. The heat sink 12 〇 can be used, thieves and other high-material materials _ into. The substrate sheet (10) comprises a plurality of array rows of grain regions 1Q2, and a plurality of slabs are arranged between the plurality of grain regions (10). As shown in the fourth figure, the substrates are arranged. The grain region 1G2 is arranged in a matrix suitable for mass production of 2〇χ4, and the dicing streets 1〇4 form a square lattice on the substrate sheet. The per-grain region 1G2 of the substrate sheet 1 至少 includes at least two sets of Pads (not shown) are respectively disposed on the upper surface and the lower surface thereof, wherein the first set of pads is electrically connected to a die and the second set of pads is electrically connected to an external print The circuit board is electrically connected to the corresponding pads of the upper surface of the substrate sheet 100. The substrate sheet 100 may be made of glass fiber reinforced 'bismaleimide-triazine resin, or FR-4 glass fiber reinforced epoxy resin. Formed by a fiberglass reinforced epoxy resin. The substrate sheet 100 may also be a sauerium substrate or a roll.
P070005-TW ASE1898 9 200903744 帶式基板。 請參照第五圖’每個晶粒130可藉由一黏著層(如 銀膠(未示於圖中))貼附於基板片1 〇〇之置晶粒區102 上。接著,每個晶粒可藉由複數條連接線(如金線未 示於圖中)電性連接至每一置晶粒區102之第—組接 墊。此外,每個晶粒亦可藉由覆晶接合的方式電性連接 至每一置晶粒區102之第一組接墊。在將一支稽單元 140 (例如一剛性體(例如虛晶片(Dummy Die)))利用 一膠層150固接於基板片100上之後,將散熱片12〇固 接於基板片1〇〇以及該支撐單元140上。在本實施例 中,該支撐單元140係可以支撐散熱片〗2〇而避免其在 中心位置產生塌陷情形。該支撐單元14〇較佳係設置於 該基板片100上大致中央之位置。為符合大規模生產的 需求,一般而言係利用陣列模塑製程(MAP (m〇ld array package) molding process)來將塑封材料16〇填充在基板 片100與散熱片120之間,使得塑封材料16〇包覆該些 晶粒130而形成一封裝體。最後,進行切成單顆步驟 (singulation step)而完成整個封裝製程。詳細言之,該切 成單顆步驟一般係使用一刀具(cutter)例如一樹脂接合 鋸刃(resin-bond saw blade)沿預先設定之切割道]〇4 (參 見第四圖)將該封膠後的模製產物(包含前述之封裝體 以及散熱片120)切割成個別單元而製得最終產物(亦 即個別的晶粒封裝構造)。P070005-TW ASE1898 9 200903744 Tape substrate. Referring to the fifth figure, each of the crystal grains 130 may be attached to the die region 102 of the substrate sheet 1 by an adhesive layer such as silver paste (not shown). Then, each of the dies can be electrically connected to the first set of pads of each of the die regions 102 by a plurality of connecting wires (e.g., gold wires not shown). In addition, each of the dies may be electrically connected to the first set of pads of each of the die regions 102 by flip chip bonding. After a unit 140 (for example, a rigid body (for example, a dummy die)) is fixed to the substrate sheet 100 by using a glue layer 150, the heat sink 12 is fixed to the substrate sheet 1 and The support unit 140 is on the support unit 140. In the present embodiment, the support unit 140 can support the fins 2 to avoid collapse in the center position. The support unit 14 is preferably disposed at a substantially central position on the substrate piece 100. In order to meet the needs of large-scale production, a MAP (m〇ld array package molding process) is generally used to fill the molding material 16 between the substrate sheet 100 and the heat sink 120, so that the molding material is used. The dies 130 are coated to form a package. Finally, the entire packaging process is completed by cutting into a single singulation step. In detail, the step of cutting into a single step generally uses a cutter such as a resin-bond saw blade to seal the seal along a predetermined cutting path 〇 4 (see the fourth figure). The subsequent molded product (comprising the aforementioned package and heat sink 120) is cut into individual units to produce the final product (ie, individual die package configurations).
P070005-TW ASE1898 200903744 根據本發明另一實施例 〜 方法,係參照第六圖與第七圖^"魏個晶粒封I構造之 附且電性連接至基板片1GG^ ;下。在每個晶粒130貼 熱片122固接於基板片1〇 =將具有。一支撐單元之散 熱片-體成型之-凹形結構丨° 4切單元可以是與該散 或钱刻方式成形。此外,該二21(參見第六圖)’其可以衝壓 型之-突出部(參見第片一體成 結構122a或突出邱)在本只把例中,該凹形 1大出,卩122b#糊—膠層15Q固接於 上,藉此可以支撐散埶片122而 甘 二土 產 "、、月I22而避免其在中心位置 =生4 '!月形。該凹形結構i 22a或突出部i挪較佳係設 於该散熱片1GG上大致中央之位置。接著,以塑封材 / : 16〇包覆該些晶粒130而形成一封裝體。最後,進行 切成單顆步驟(singulation step)而完成整個封裝製程。 雖然本發明已以前述較佳實施例揭示,然其並非用 以限定本發明,任何熟習此技藝者’在不脫離本發明之 精神和範圍内,當可作各種之更動與修改。因此本發明 之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 第—闽 〜—圖、係為本案發明第一實施例之剖面示意圖。 圖、係為本案發明第二實施例之剖面示意圖。 第二圖、係為本案發明第三實施例之剖面示意圖。P070005-TW ASE1898 200903744 According to another embodiment of the present invention, the method is attached to and electrically connected to the substrate piece 1GG^, with reference to the sixth and seventh figures. Each of the die 130 is attached to the substrate sheet 1 〇 = will have. A heat sink-body-formed-concave structure of a support unit can be formed in the form of a loose or a money. In addition, the two 21 (see the sixth figure) 'it can be stamped type-protrusion (see the first piece integrated structure 122a or protruding Qiu) in this example, the concave shape 1 is large, 卩122b# paste - The glue layer 15Q is fixed to the upper side, whereby the loose film piece 122 can be supported and the glutinous rice material is produced, and the moon I22 is prevented from being in the center position = raw 4 '! moon shape. Preferably, the concave structure i 22a or the projection i is disposed at a substantially central position on the heat sink 1GG. Next, the die 130 is coated with a molding material / : 16 而 to form a package. Finally, a single singulation step is performed to complete the entire packaging process. While the invention has been described in terms of the foregoing preferred embodiments, it is not intended to limit the invention, and various modifications and changes can be made without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing a first embodiment of the present invention. Figure is a schematic cross-sectional view showing a second embodiment of the invention. The second drawing is a schematic cross-sectional view of a third embodiment of the invention.
P070005-TW _ ASE1898 200903744 第四圖與第五圖、係用以說明根據本發明一實施例之製 造複數個晶粒封裝構造之方法。 第六圖與第七圖、係用以說明根據本發明另一實施例之 製造複數個晶粒封裝構造之方法。 【主要元件符號說明】 10:基板(substrate) 11:虛晶片(Dummy die) 12:散熱片(Heat Sinks block) 13:塑封材料(compound) 14:晶粒(die) 15:上表面 20:基板(substrate) 21:凹型結構 22:散熱片(Heat Sinks block) 2 3:塑封材料(compound) 24:晶粒(die) 25:上表面 30:基板(substrate) 3h支撐單元 32:散熱片(Heat Sinks block) 3 3:塑封材料(compound) 34:晶粒(die) 35:上表面 100: 基板片 102: 置晶粒區 104: 切割道 120: 散熱片P070005-TW _ ASE1898 200903744 The fourth and fifth figures are for explaining a method of fabricating a plurality of die package structures in accordance with an embodiment of the present invention. 6 and 7 are diagrams for explaining a method of fabricating a plurality of die package structures in accordance with another embodiment of the present invention. [Major component symbol description] 10: Substrate 11: Dummy die 12: Heat Sinks block 13: Compound 14: Die 15: Upper surface 20: Substrate Substrate 21: concave structure 22: heat sink block 2 3: plastic compound 24: die 25: upper surface 30: substrate 3h support unit 32: heat sink (Heat Sinks block) 3 3: Compounding material 34: die 35: upper surface 100: substrate piece 102: grain area 104: dicing street 120: heat sink
P070005-TW ASE1898 12 200903744 122:散熱片 122a:凹形結構 122b:突出部 130:晶粒 140:支撐單元 150:膠層 160:塑封材料 P070005-TW ASE1898 13P070005-TW ASE1898 12 200903744 122: Heat sink 122a: Concave structure 122b: Projection 130: Die 140: Support unit 150: Adhesive layer 160: Molding material P070005-TW ASE1898 13
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