200839929 九、發明說明 【發明所屬之技術領域】 本發明是關於將至少朝XY方向載置 動的平台裝置，例如，被使用於曝光裝置 而在板面將正交的XY方向載置工件的板 裝置。 【先前技術】 習知，作爲即使所載置的基板（工件 增加，以小力量也可用小力量就可移動的 有被稱爲表示於專利文獻1的表面電動機 電動機平台裝置的平台裝置。表面電動機 電動機平台裝置），是在棋盤狀設有強磁 面狀壓印板上，利用空氣浮起被動體，將 體，而利用變更移動體與壓印板的凸極之 能移動移動體。 本案發明人是先前在日本特願2006· 依據上述的表面電動機平台裝置（索耶電。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Device. [Prior Art] Conventionally, as a substrate to be mounted (a workpiece is increased, a small force can be moved with a small force, and there is a platform device called a surface motor motor platform device disclosed in Patent Document 1. Surface motor The motor platform device is provided with a strong magnetic surface plate on a checkerboard shape, and the passive body is floated by the air to move the moving body by changing the salient pole of the moving body and the platen. The inventor of the present case was previously in Japan's special wish 2006. According to the above surface motor platform device (Sawyer
的原理的朝ΧΥ0方向移動載置工件的板S 〇 第11圖是表示適用於上述申請的發^ 台的曝光裝置的構成的斷面圖；第12圖^ 平台的俯視圖。又，第11圖是表示第12 工件的板予以移 或檢查裝置等， 予以移動的平台 )大型化而重量 平台裝置，眾知 平台裝置或索耶 平台裝置（索耶 性體的凸極的平 磁力施加於移動 間的磁力，構成 3 4 〇 7 1中，提案 動機平台裝置） 9 ΧΥ 0移動平台 目的XY 0移動平 I表示XY 0移動 圖的A-A斷面圖 -4 - 200839929 在此些圖式中，1是裝載有χγ 0移動平台的底座板 或構成底座框的平台底座，2是被固定於平台底座1上的 推力發生手段，3是被固定於平台底座1的基準支撐構件 ，4是固定於平台底座1的補助支撐構件，5是由平面板6 ，蜂巢式核心7，及壓印板8所構成的平面平台，6是將 曝光進行於表面的工件9予以載置保持的平面板，7是設 於平面板6的背面側（與保持有工件9的側相反側），即 使將平面板6作成薄又輕，也爲了保持剛性所設置的蜂巢 式核心，8是設於平面板6背面，經由蜂巢式核心7，被 分割成複數而隔著間隙8 1所安裝的壓印板，9是工件，1 0 是投影透鏡。 如表示於此些圖式地，推力發生手段2是具備：發生 用以移動平面板6的在壓印板8的平面正交的X方向及Υ 方向的移動磁場，以及對於壓印板8的平面正交的座標軸 周圍的0旋轉軸方向的移動磁場的磁極。又，如第1 2圖 所示地，推力發生手段2是具有：在移動磁場的方向沿著 X軸的方向配置1個的X方向推力發生手段21，及在移 動磁場的方向沿著Υ軸的方向配置2個的Υ方向22。若 未移動Υ方向推力發生手段22，而移動X方向推力發生 手段21的磁場，則平面板6是朝X方向移動。又，於未 移動X方向推力發生手段21的磁場，而同步地朝相同方 向移動2個Υ方向推力發生手段22的磁場，則平面板6 是朝Υ方向移動。又，若未移動X方向推力發生手段21 的磁場，而朝相反方向移動2個Υ方向推力發生手段22 -5- 200839929 的磁場，則平面板6是朝0旋轉軸方向旋轉移動。 基準支撐構件3是爲了支撐平面板6設置複數個，即 使平面板6在其移動範圍內移動至任何處，經常地也在平 面板6下面^而配置在可支撐平面板6的位置。進行曝光 的領域爲圍繞基準支撐構件3的領域內之故，因而進行曝 光的領域不會有歪斜或搖動的情形，而在穩定的狀態下可 進行曝光處理。又，補助支撐構件4，是爲了支撐平面板 6設置1個以上於比平面板6所佔有領域還廣的範圍，而 分散配置在平面板6所移動的領域所有全體。藉由此，平 面板6在其移動範圍內移動至何處，經常地平面板6是除 了基準支撐構件3之外，也藉由補助支撐構成4所支撐， 而即使偏荷重施加於平面板6，平面板6也不會令平面板 6歪斜或搖動，而在穩定的狀態，可進行曝光處理。 又，由推力發生手段2，基準支撐構件3，及補助支 撐構件4對於平面平台5的面噴出空氣，以空氣壓力浮起 平面板6。平面板6是精度優異地平面加工著表面，形成 著用以保持工件9的未圖示的真空吸附溝，被連接有真空 配管。壓印板8是表面爲棋盤狀地形成有凸極，以樹脂塡 埋著凸極之間，之後，被平面硏削。壓印板8是被分割成 複數，設有間隙8 1，乃爲了平面板6爲機械加工容易的鋁 製，對於此，壓印板8是純鐵製，而熱脹係數不相同之故 ，因而利用間隙8 1吸收著熱脹的相差，以防止在平面板6 產生翹曲等的變形。 第13圖是表示推力發生手段2的具體性構成的一例 -6 - 200839929 的立體圖，推力發生手段2是由對於高度（上下）方 有自由度般地安裝於平台底座1的板簧2 3，及安裝於 23上’朝一軸方向發生移動磁場的磁極24所構成。 在磁極2 4的表面設有空氣噴出孔2 5，供給有用以浮 面板6的空氣。 第1 4圖是表示基準支撐構件3的具體性構成的 的斷面圖，基準支撐構件3是由具有空氣噴出孔31 墊32，及固定於平台底座1而支撐著氣墊32的台座 及將氣墊32支撐於台座33的球面軸承34所構.成。 32是具備由設有多孔質，或孔口的表面噴出著空氣的 噴出孔31，藉由球面軸承34可自由地擺頸所構成。 第1 5圖是表示補助支撐構件4的具體性構成的 的斷面圖，補助支撐構件4是由具有空氣噴出孔41 墊42，及支撐氣墊42的中間台43，及由中間台43 到氣缸45內的軸44，及固定於平台底座1而支撐中 43的氣缸45，及將氣墊42支撐於中間台43的球面 4 6所構成，補助支撐構件4是利用變更藉由氣缸4 5 給的空氣壓力，軸44以任意的推力進行上下動，可 墊42調整成任意高度。 又，使用第1 1圖至第15圖，針對於該XY 0移 台的動作加以說明。首先設定基準支撐構件3的高度 定後，將空氣供應於補助支撐構件4的氣缸45，俾上 44。供應於補助支撐構件4的氣缸4 5的空氣壓力， 爲可得到避免平面平台5的自重撓曲的推力的壓力。 向具 板賛 又， 起平 一例 的氣 33， 氣墊 空氣 一例 的氣 延伸 間台 軸承 所供 將氣 動平 ，設 昇軸 是作 避免 200839929 平面平台5的自重撓曲的推力，是從平面平台5的大小重 量與基準支撐構件3或補助支撐構件4的個數利用計算事 先求出。之後，將平面平台5置放在基準支撐構件3的氣 墊32與補助支撐構件4的氣墊42上。推力發生手段2是 利用本身的磁力，延伸支撐推力發生手段2的平行板簧23 ，被拉向設於平面板6背面的壓印板8。在基準支撐構件 3的氣墊32，補助支撐構件4的氣墊42及推力發生手段2 供應著空氣，當空氣從表面噴出，則平面平台5對於各氣 墊32，42及推力發生手段2會浮起。爲了進行曝光處理 ，工件9被載置於平面板6上。利用移動X方向推力發生 手段21及Y方向推力發生手段22的磁場，令平面平台5 移動在XY平面內，由未圖示的光照射部，經由罩幕進行 照射曝光光，利用分步重複被分割在複數曝光領域的工件 9，而藉由依被分割的領域順地予以移動來進行曝光。終 了全領域的曝光之後，從平面板6搬出工件9。 以下，使用第1 6圖，針對於該XY 0移動平台的移動 原理加以說明。同圖是表示設於平面平台5的壓印板8與 設於推力發生手段2的磁極24之關係的斷面圖。 在被捲在磁極24a〜24d的各線圏127a，27b，利用從 未圖示的驅動電路以以下順序流著電流而發生移動磁場， 對於磁極令24壓印部8朝周圍在方向移動。 首先，在第16 ( a )圖中，朝強化磁極24^的磁力的 方向將電流流在磁極24a，24b側的線圈27a。一方面，在 磁極24c，24d側的線圈27b不會流著電流。結果，磁極 200839929 24a是磁力被強化之故’因而與壓印板8的凸極8a有力地 互相引拉，令磁極2 4 a與凸極8 a成爲相對位置。磁極2 4 b 是相對於壓印板8的凸極8 b與凸極8 c之間的非磁性體8 3 之故，因而不會發生磁力。磁極2 4 c與磁極2 4 d是分別與 位於斜方向的凸極8d與凸極8f互相引拉。 之後，在第16(b)圖中，停止磁極24 a，24b側的線 圈27a的電流，而在磁極24c，24d側的線圈27b，這次爲 強化磁極24d的磁力般地流著電流。結果·，磁極24d與凸 極8f是有力地互相引拉。磁極24c是相對於壓印板8的 凸極8d與凸極8e之間的非磁性體83之後’因而不會與 凸極8d互相引拉。因此，令磁極24d與凸極8f相對般地 ，壓印板8是對於推力發生手段2，朝同圖左方向移動。 磁極24a與磁極24b是分別與斜方向的凸極8a與凸極8c 互相引拉。 之後，在第16 ( c)圖中，停止磁極2“，24d側的線 圈2 7b的電流，而在磁極24a，24b側的線圈27a，這次爲 強化磁極24b的磁力般地流著電流。結果，磁極24b與凸 極8c是有力地互相引拉。磁極24a是相對於壓印板8的 凸極8a與凸極8b之間的非磁性體83之後，因而不會與 凸極8a互相引拉。因此，令磁極24b與凸極8c相對般地 ，壓印板8是對於推力發生手段2，朝同圖在方向移動。 磁極24c與磁極24d是分別與斜方向的凸極8e與凸極8f 互相引拉。 之後，在第16 ( d )圖中，停止磁極24a，24b側的線 200839929 圈27a的電流，而在磁極24c，24d側的線圈27b，這次爲 強化磁極24c的磁力般地流著電流。結果，磁極24c與凸 極8e是有力地互相引拉。磁極24(1是相對於壓印板8的 凸極8f與凸極8g之間的非磁性體83之後，因而不會與 凸極8f互相引拉。因此，令磁極24c與凸極8e相對般地 ，壓印板8是對於推力發生手段2，朝同圖在方向移動。 磁極24a與磁極24b是分別與斜方向的凸極8b與凸極8c 互相引拉。 又，移動至第1 6 ( d )圖的位置之後，藉由將電流流 在線圈27b，就可將壓印板8，亦即平面平台5保持在第 16(d)的位置。 專利文獻1 :日本特開平9-23689號公報 【發明內容】 在表示於上述的第11圖及第12圖的ΧΥ0移動平台 中，使得被載置於平面板6的基板（工件）大型化，而若 平面板6的移動範圍變大，則僅配置著3個推力發生手段 2的情形，如第1 7圖所示地，若平面板6移動到其移動範 圍之端，則3個推力發生手段2是成爲位於平面板6的端 部。在此種位置關係下，爲了移動平面板6’力點成爲在 平面板6的角隅（在第17圖中爲平面板6的左下）之故 ，因而平面板6的力點附近的微小移動’在對角線上的相 反側（在第1 7圖中爲平面板6的右上）表現成爲很大的 移動之故，因而成爲很難控制平面板6的微小移動。又， -10- 200839929 移動平面板6時，會產生很大的力矩之故，因而推力發生 手段2是爲了制動平面平台5成爲需要極大力量’而使得 控制平面板6的微小的移動成爲更困難。 本發明的目的，是在於提供鑑於上述的問題點，對於 平台底座把空氣浮起的板，藉由被固定於平台底座的推力 發生手段所發生的推力以非接觸進行移動的平台裝置中， 而使令板位於其移動範圍的任何位置，也容易地可進行控 制板的微小移動的平台裝置。又，本發明的其他目的，是 在於提供具備搬入搬出以平台裝置本體所處理的工件的功 能的平台裝置。 本發明是爲了解決上述課題，採用下述的手段。 第1手段是一種平台裝置，屬於將保持工件的板朝正 交對於板面的XY方向移動的平台裝置，其特徵爲：具備 :平台底座；及被固定於該平台底座，具有噴出空氣來發 生移動磁場的磁極的複數推力發生手段；及設有在相對於 該推力發生手段的面形成有棋盤狀凸極的平面狀壓印板而 藉由上述推力發生手段所驅動的板；及檢測該板對於上述 平台底座的位置的板位置檢測手段；及依據來自該板位置 檢測手段的板位置訊號，上述複數推力發生手段中選擇進 行動作的推力發生手段的控制部。 第2手段是一種平台裝置，屬於將保持工件的板朝正 交對於板面的XY方向移動的平台裝置，其特徵爲：具備 :平台底座；及將保持在區劃於該平台底座上的板上的工 件加以處理的工件處理部與鄰接配置於該工件處理部，而 -11 - 200839929 將保持未處理的工件的板予以搬入至該工件處理部或是將 保持已處理的工件的板從該工件處理部予以搬出的板搬入 搬出部；及將未處理的工件從裝置外搬入至該板搬入搬出 部的板上或是將上述板搬入搬出部的板上的已處理的工件 搬出至裝置外的工件搬入搬出機構；及被固定在設於上述 工件處理部及上述板搬入搬運部的上述平台底座，而具有· 噴出空氣來發生移動磁場的磁極的複數推力發生手段；及 設有在相對於該推力發生手段的面形成有棋盤狀凸極的平 面狀壓印板而藉由上述推力發生手段所驅動的板；及檢測 該板對於上述平台底座的位置的板位置檢測手段；及依據 來自該板位置檢測手段的板位置訊號，上述複數推力發生 手段中選擇進行動作的推力發生手段的控制部。 第3手段是在第2手段中設有複數組將工件予以搬入 搬出上述板搬入搬出部與該板搬入搬出部的工件搬入搬出 機構所構成的組，爲其特徵的平台裝置。 第4手段是在第1手段至第3手段中任一手段中，上 述複數推力發生手段是排列配置有發生朝X方向推力的推 力發生手段與發生朝Y方向推力的推力發生手段，不管上 述板的移動位置，位於上述板下方的推力發生手段中至少 3個推力發生手段進行動作，爲其特徵的平台裝置。 依照申請專利範圍第1項所述的發明，即使板移動到 移動範圍的端，也可將動作的推力發生手段的位置對於板 作成較接近中央之故，因而成爲容易控制板的微小移動。 依照申請專利範圍第2項所述的發明，可容易地進行 -12- 200839929 在平台裝置本體所處理的工件的搬入搬出，即使板移動到 移動範圍的端，也可將動作的推力發生手段的位置對於板 作成較接近中央之故，因而成爲容易控制板的微小移動。 依照申請專利範圍第3項所述發明，利用交互地動作 複數組的板搬入搬出部與工件搬入搬出機構，可迅速地進 行以平台裝置本體所處理的工件處理。 依照申請專利範圍第4項所述發明，不管板的如何大 小，利用位於板下方的平台裝置中，藉由可至少動作3個 平台裝置來移動板。 【實施方式】 使用第1圖至第5圖來說明本發明的第1實施形態。 又，在以下的各實施形態下，以朝XY 0方向可移動的平 台裝置作爲例子加以說明，惟在朝XY方向可移動的平台 裝置也可適用。 第1圖是表示本實施形態的發明的平台裝置的構成的 斷面圖，第2圖是表示該平台裝置的俯視圖。又，第1圖 是表示由第2圖的B-B所觀看的斷面圖。 在此些圖式中，21-1〜21-4是X方向推力發生手段， 22-1〜22-5是Y方向推力發生手段，11是X方向雷射干涉 計，1 2是Y方向雷射干涉計，1 3是控制部，1 4是處理形 成於平台底座1上的工件9的工件處理部。又，其他的構 成是省略對應於表示於第1 1圖的相同符號的構成之故， 因而省略說明。又，第1圖及第2圖所示之X方向推力發 -13- 200839929 生手段21-1〜2 1-4、Y方向推力發生手段2 1-1〜21-5 支撐構件3、補助支撐構件4之具體的構成是分別 1 3圖〜第1 5圖中說明者同樣之故，因而省略說明 ΧΥ 0移動平台的移動原理，也與第1 6圖中所說明 之故，因而省略說明。又，在第2圖中，位於平面 面的平台裝置21，22是實際上未看到而表示成可 又，表示於工件處理部14的4角的虛線都是虛線 上不存在。 如第1圖及第2圖所示地，在平台底座1上， 個基準支撐構件3，複數補助支撐構件4，在其上 空氣浮起支撐平面板6。平台底座1上的3個基準 件，是平面板6在移動範圍內移動到何處，經常地 面板6下方，配置於可支撐平面板6的位置。在平 1上設有發生用以移動平面板6的推力的複數推力 段2，例如在第2圖中設有9個推力發生手段（X 力發生手段21-1〜2 1-4，Υ方向推力發生手段22-。推力發生手段是相鄰接的推力發生手段的磁極排 ，配置成互相地正交。亦即，交互地排列配置有將 6朝X方向移動的X方向推力發生手段21-1〜2 1-4 方向移動的Υ方向推力發生手段2 2-1〜22-5。平面 藉由來自X方向推力發生手段21-1〜2 1-4與Υ方向 生手段22-1〜22-5的推力，移動平台底座1上的所 內。 又，在上述平台裝置中，在平台底座1上，設 、基準 與在第 。又， 者同稱 板6下 看到。 ，實際 設有3 面藉由 支撐構 也在平 台底座 發生手 方向推 -22-5 ) 列方向 平面板 與朝γ 板6是 推力發 定範圍 :有用以 •14- 200839929 檢測平面板6的位置的X方向雷射千涉計1 1與Y方向雷 射干涉計12。藉由X方向干涉計11來檢測平面板6的X 方向移動距離，而藉由Υ方向干涉計1 2來檢測平面板5 的Υ方向移動距離。亦即，藉由X方向雷射干涉計1 1與 Υ方向雷射干涉計1 2，檢測來自平面板6的原點位置的移 動距離，而將該檢測訊號輸出至控制部1 3。在控制部1 3 依據檢測訊號而運算平面板6的位置座標。在控制部1 3， 事先對於平面板6的位置座標，記憶著複數X方向推力發 生手段21-1〜2 1-4與Υ方向推力發生手段22-1〜22-5中， 動作那一個推力發生手段的情報。控制部1 3是選擇依據 該資訊須動作的平台裝置進行動作。 以下，使用第3圖至第5圖，針對於上述平台裝置的 動作加以說明。此些圖式，是表示圖示於第1圖的平台裝 置的工件處理部14與平面板6與9個推力發生手段（X 方向推力發生手段21-1〜21-4，Υ方向推力發生手段22-1〜22-5 )的關係的圖式。 首先，在第3 ( a )圖中，平面板6位於工件處理部 14的左下時，將平面板6的位置座標作爲（0，0)〔方便 上將平面板6的左下隅角的位置作爲位置座標（0，0)〕 。同樣地，在第3 ( b )圖中，將平面板6位於工件處理部 1 4的右下時的平面板6的位置座標作爲（2，0 )，同樣地 ，在第3 ( c )圖中，將平面板6位於工件處理部14的左 上時的平面板6的位置座標作爲（0，2)，同樣地，在第 4(d)圖中，將平面板6位於工件處理部14的右上時的 -15- 200839929 平面板6的位置座標作爲（2，2)。因此，平面板6是成 爲移動位置座標（0，0 )〜（2，2 )的範圍。如此，對應 於位置座標（0，0)〜（2，2)區分平面板6的移動範圍 ，而由X方向推力發生手段21-1〜2 1-4及Y方向推力發生 手段22-1〜22-5中來選擇對應於所區分的位置座標（0，0 )〜（2，2 )進行動作的推力發生手段，並將其資訊被記 憶在控制部。 如第4 ( e )圖所示地，控制部1 3是一直到平面板6 的位置座標爲（〇，〇)〜（1，1)爲止，亦即位於（0S X<1，OS Y<1 )的範圍時，則在該移動範圍內將平面板6 下的4個推力發生手段（X方向推力發生手段2 1 -1，2 1 -3 ，Y方向推力發生手段22-2，22-3 )確實地動作，俾移動 平面板6。該4個推力發生手段是X方向推力發生手段 21-1，21-3與Y方向推力發生手段22-2，22-3之故，因 而可將平面板6朝XY 0方向的任意方向移動。 同樣地，如第4 ( f)圖所示地，控制部13是一直到 平面板6的位置座標爲（1 ’ 〇 )〜（2，1 )爲止，亦即位 於（1 S X<2，0 S Y<1 )的範圍時，則在該移動範圍內將 平面板6下的4個推力發生手段（X方向推力發生手段 21-3，21-4，Y方向推力發生手段22-3，22-5)確實地動 作，俾移動平面板6。又，如第5(g)圖所示地，控制部 13是一直到平面板6的位置座標爲（〇 ’ 1 )〜（1，2 )爲 止，亦即位於（0 ‘ X<1 ’ 1 ‘ Y<2 )的範圍時，則在該移 動範圍內將平面板6下的4個推力發生手段（X方向推力 -16- 200839929 發生手段21-1，21-2，Y方向推力發生手段22-1，22-3) 確實地動作，俾移動平面板6。又，如第5 ( h )圖所示地 ，控制部1 3是一直到平面板6的位置座標爲（1，1 )〜（ 2，2 )爲止，亦即位於（1‘又<2，1^丫<2)的範圍時， 則在該移動範圍內將平面板6下的4個推力發生手段（X 方向推力發生手段21-2，21-4，Y方向推力發生手段22-3 ，22-4 )確實地動作，俾移動平面板6。 φ 如上述，在該平台裝置中，若平面板6在其移動範圍 內，即使在任一位置（座標），也可令4個推力發生手段 配置成必須在平面板6下。亦即，平面板6的移動是利用 2個X方向推力發生手段與2個Y方向推力發生手段所進 行。但是，爲了朝ΧΥ0方向移動平面板6，在先前申請 (日本特願2006-34071 )也說明，推力發生手段是若有3 個（X方向推力發生手段2個與Y方向推力發生手段1個 ，或X方向推力發生手段1個與Y方向推力發生手段2 # 個）就可朝X方向，Y方向及0方向移動。因此，在平面 板6的移動範圍內，至少配置推力發生手段成爲至少3個 推力發生手段可到平面板6的下面也可以。例如在第4 ( e )圖至第5(h)圖中，4個推力發生手段中除掉Y方向推 力發生手段22-3也可以。 使用第6圖至第10圖來說明本發明的第2實施形態 〇 第6圖至第10圖是表示用以說明本實施形態的發明 的平台裝置的構成及動作的俯視圖。 -17- 200839929 在此些圖中，6-1是第一平面板，6-2是第二平面板， 9-1，9-2是工件，14是處理被保持在平台底座1上所區劃 的板6上的工件9的工件處理部，15，16是被區劃在平台 底座1上，分別鄰接配置於工件處理部1 4，將保持未處理 的工件9的板6搬入到工件處理部14，或是將保持已處理 的工件9的板6從工件處理部14搬出的第一板搬入搬出 部及第二板搬入搬出部，17，18是將未處理的工件9從裝 置外分別搬入到板搬入搬出部15，16的板6上，或將板 搬入搬出部15，16的板6上的已處理的工件9搬出到裝 置外的第一工件搬入搬出機構及第二工件搬入搬出機構， 19是機械手，21-1〜21-14是X方向推力發生手段，22-1〜22-13是Y方向推力發生手段。 又，X方向推力發生手段21-1〜21-14及Y方向推力 發生手段22-1〜22-13的具體性構成是與表示於第13圖者 同樣之故，因而省略說明。又，複數的基準支撐構件或補 助支撐構件是省略而未圖示，惟其具體性構成是分別與在 第1 4圖及第1 5圖所說明者同樣之故，因而省略說明。又 ，XY 0移動平台之移動原理亦與第1 6圖中說明者同樣之 故，因而省略說明。又，用以檢測平面板6的位置的X方 向雷射干涉計與Y方向雷射干涉計也省略而未圖示，輸入 者惟藉由此些雷射干涉計檢測來自平面板6的原點位置的 移動距離的訊號的控制部也省略而未圖示，惟與在第2圖 所說明者同樣之故，因而省略說明。又，在第6圖至第1 〇 圖中，爲了容易瞭解平面板6的動作，位於平面板6下的 -18- 200839929 推力發生手段21，22是實際上看不到而表示成看得到。 又’表示於工件處理部14及第一板搬入搬出部15，第二 板搬入搬出部16的四方虛線都是假想線，實際上不存在 。又，表示於第6圖的平台裝置，是適用於曝光裝置時的 構成，在工件處理部14進行著工件的曝光處理，惟該平 台裝置是並不限定於適用在曝光裝置，例如也可適用於檢 查裝置。 • 如第6圖至第10圖所示地，本實施形態的發明的平 台裝置，是設有鄰接於與展示於第2圖的工件處理部14 同樣的工件處理部1 4，而將保持未處理的工件9的板6搬 入到工件處理部1 4或是用以將保持已處理的工件9的板6 從工件處理部1 4搬出的2個板搬入搬出部1 5，1 6。又， 如第6圖至第10圖所示地，具備有載置工件9而移動的 兩張第一平面板6-1與第二平面板6-2。例如，一方的平 面板6-1爲了進行處理而移動時，則另一方的平面板6-2 ® 是待機在第二板搬入搬出部16，構成迅速地可進行更換已 處理的工件9-1與處理前的工件9-2。 在第一板搬入搬出部15及第二板搬入搬出部16，分 別附設有具備機械手19的第一工件搬入搬出機構17及第 二工件搬入搬出機構18。例如，第一工件搬入搬出機構 1 7是藉由機械手1 9保持著處理前的工件9-1，而搬入到 弟一板搬入搬出部1 5 ’並將完成處理的工件9 _ 1從第一'板 搬入搬出部15搬出到裝置外。推力發生手段21，22是在 平台底座1上，從工件處理部14延續到其兩旁邊的第一 -19- 200839929 板搬入搬出部15及第二板搬入搬出部16’有27個相鄰接 的磁極所排列的方向互相正交的X方向推力發生手段21-1〜21-14與Y方向推力發生手段22-1〜22-13被固定在平台 底座1，兩張平面板6-1，6-2是分別可移動在第一板搬入 搬出部1 5與工件處理部1 4之間及第二板搬入搬出部1 6 與工件處理部1 4之間。 以下，使用第6圖至第1 0圖，針對於該平台裝置的 動作加以說明。 首先，如第6 ( a )圖所示地，第一平面板6-1待機在 第一板搬入搬出部15。第一平面板6-2是待機在第二板搬 入搬出部16。藉由第一工件搬入搬出機構17的機械手19 ，把工件9-1搬入到平台裝置，而被載置於待機在第一板 搬入搬出部1 5的第一平面板6-1上。在此，控制第一平 面板6-1的移動，是藉由X方向推力發生手段21_4，21-9 及Y方向推力發生手段22-5，22-9所進行，而第二平面 板6-2是藉由X方向推力發生手段21_ι，21_5及γ方向 推力發生手段2 2 -1，2 2 · 6所進行。 之後，如第7 ( b )圖所示地，第一平面板6-〗是如箭 號所示地’從第一板搬入搬出部i 5移動到工件處理部i 4 ’開始曝光處理。又，以斜線表示進行工件處理的領域。 從該第一板搬入搬出部1 5移動到工件處理部1 4之際，從 X方向推力發生手段21-1，21-5，γ方向推力發生手段 22-1，22-6被轉換成X方向推力發生手段21_4，21-8，Y 方向推力發生手段22-4 ’ 22-9，然後爲X方向推力發生手 -20 - 200839929 段21·3，21_8，Y方向推力發生手段22-4，22-8，然後爲 X方向推力發生手段21-3，21-7，Υ方向推力發生手段 22-3，22-8 的順序。 在工件處理部14中，進行著工件9-1的處理期間， 第二工件搬入搬出機構18藉由機械手9將工件9-2搬入 到平台裝置內，而載置於待機在第二工件搬入搬出機構6-2的第二平面板6-2上。 • 之後，如第7 ( c )圖，第8 ( d )圖，第8 ( e )圖， 第8(f)圖，第9(g)圖，第9(h)圖，第9(〇圖所 示地，第一平面板6-1是藉由推力發生手段21，22依次 被移動，使得被載置於第一平面板6-1的工件9-1的全領 域，被曝光處理。該期間的移動動作，是在第7 ( c )圖中 藉由X方向推力發生手段21-2，21-7，Y方向推力發生手 段22-3，22-7所進行，在第8(d)圖中藉由X方向推力 發生手段21-7，21-10，Y方向推力發生手段22-7，22-10 ^ 所進行，在第8(e)圖中藉由X方向推力發生手段21-7 ，21-11，Y方向推力發生手段22-8，22-10所進行，在第 8(f)圖中藉由X方向推力發生手段21-11，21·12，Y方 向推力發生手段22-10，2 2-12所進行，在第9(g)圖中 藉由X方向推力發生手段21-10，21-12，Y方向推力發生 手段22-10，22-11所進行，在第9 ( h)圖中藉由X方向 推力發生手段21-12，21-13，Y方向推力發生手段2 2-11 ，22_13所進行，在第9(i)圖中藉由X方向推力發生手 段21-12，21-14，Y方向推力發生手段22-12，22-13所進 -21 - 200839929 行。 在此，4個以上的推力發生手段21，22位於平面板6 下方，此時板6的重心會到達圍繞所動作的複數推力發生 手段21，22的領域內般地，來選擇推力發生手段21，22 的組合。藉由如此地選擇，可將平面板6穩定地進行動作 〇 之後，在第9(i)圖中，結束工件9-1的工件處理部 14的處理。當結束處理，則如第l〇(j)圖所示地，第一 平面板6-1是移動到第一板搬入搬出部15，而藉由第一工 件搬入搬出機構17使得工件9-1被搬出到裝置外。一方 面，載置工件9-2的第二平面板6-2移動至工件處理部14 ，而開始處理。 之後，在第1 〇 ( k)圖中，工件9-2在工件處理部14 被處理的期間，工件9-3藉由第一工件搬入搬出機構17 被搬入到裝置內，而被載置到第一平面板6-1上。以上， 重複上述動作，使得複數工件9連續地被處理。 【圖式簡單說明】 第1圖是表示第1實施形態的發明的平台裝置的構成 的斷面圖。 第2圖是表示第1實施形態的發明的平台裝置的俯視 圖。 第3(a)圖至第3(c)圖是表示圖示於第1圖的平 台裝置的平台底座1與平面板6與9個推力發生手段的關 -22- 200839929 係的圖式。 第4(d)圖至第4(f)圖是表示圖示於第1圖的平 台裝置的平台底座1與平面板6與9個推力發生手段的關 係的圖式。 第5(g)圖至第5(h)圖是表示圖示於第1圖的平 台裝置的平台底座1與平面板6與9個推力發生手段的關 係的圖式。 第6 ( a )圖是表示用以說明第2實施形態的發明的平 台裝置的構成及動作的俯視圖。 第7(b)圖至第7(c)圖是表示用以說明第2實施 形態的發明的平台裝置的構成及動作的俯視圖。 第8(d)圖至第8(f)圖是表示用以說明第2實施 形態的發明的平台裝置的構成及動作的俯視圖。 第9 ( g )圖至第9 ( i )圖是表示用以說明第2實施 形態的發明的平台裝置的構成及動作的俯視圖。 第l〇(j)圖至第10(k)圖是表示用以說明第2實 施形態的發明的平台裝置的構成及動作的俯視圖。 第11圖是表示適用先前申請的發明的ΧΥ0移動平台 的曝光裝置的構成的斷面圖。 第12圖是表示ΧΥ0移動平台的俯視圖。 第13圖是表示推力發生手段2的具體性構成的一例 的立體圖。 第1 4圖是表示基準支撐構件3的具體性構成的一例 的立體圖。 -23- 200839929 第15圖是表示補助支撐構件4的具體性構成的一例 的立體圖。 第16圖（a)圖至第16(d)圖是表示設於平面平台 5的壓印板8與設於推力發生手段2的磁極24之關係的斷 面圖。 第17圖是:表示在僅配置3個推力發生手段2時’用 以說明平面板6移動到移動範圍的端部時的不方便的平台 裝置的俯視圖。 【主要元件符號說明】 1 :平台底座 2 :推力發生手段 21，21-1〜21-14 : X方向推力發生手段 22、22-1〜22-13·: Y方向推力發生手段 23 :板簧 2 4 :磁極 24a〜24d :磁極 2 5 :空氣噴出孔 2 6 :永久磁鐵 27a、27b :線圈 3 :基準支撐構件 3 1 :空氣噴出孔 32 :氣墊 3 3 :台座 -24- 200839929 3 4 :球面軸承 4 :補助支撐構件 4 1 :空氣噴出孔 42 :氣墊 43 :中間台 45 :氣缸 4 6 :球面軸承 φ 5 :平面平台 6 :平面板 6-1 :第一平面板 6-2:第二平面板 7 :蜂巢狀核心 8 :壓印板 8 a〜8 g :凸極 8 1 :間隙 ® 82 :強磁性體 83 :非磁性體 9，9 -1，9 - 2，9 - 3 :工件 1 〇 :投影透鏡 1 1 : X方向雷射干涉計 1 2 : Y方向雷射干涉計 13 :控制部 1 4 :工件處理部 1 5 :第一板搬入搬出部 -25 200839929The principle of moving the workpiece S in the direction of the ΧΥ0 direction 〇 Fig. 11 is a cross-sectional view showing the configuration of an exposure apparatus applied to the apparatus of the above application; Fig. 12 is a plan view of the stage. Further, Fig. 11 is a plan view showing a table in which a 12th workpiece is moved or inspected, and a platform is moved, and a weight platform device is known. The platform device or the Sawyer platform device (the salient pole of the Sawyer body is flat). The magnetic force applied to the moving magnetic force constitutes 3 4 〇7 1 , the proposed motive platform device) 9 ΧΥ 0 mobile platform purpose XY 0 moving flat I represents the AA cross-section of the XY 0 moving graph - 4 - 200839929 In the formula, 1 is a base plate loaded with a χγ 0 mobile platform or a platform base constituting a base frame, 2 is a thrust generating means fixed to the platform base 1, and 3 is a reference supporting member fixed to the platform base 1, 4 It is a supplementary supporting member fixed to the platform base 1, and 5 is a flat platform composed of a flat plate 6, a honeycomb core 7, and a platen 8, and 6 is a flat for holding and holding the workpiece 9 exposed on the surface. The panel 7 is provided on the back side of the flat plate 6 (on the side opposite to the side on which the workpiece 9 is held). Even if the flat plate 6 is made thin and light, the honeycomb core is provided to maintain rigidity. Panel 6 back, via 7 honeycomb core, and is divided into a plurality of platen gap 81 therebetween installed, the work piece 9, 10 is a projection lens. As shown in the drawings, the thrust generating means 2 is provided with a moving magnetic field in the X direction and the Υ direction orthogonal to the plane of the platen 8 for moving the flat plate 6, and for the platen 8. The magnetic pole of the moving magnetic field in the direction of the 0 rotation axis around the coordinate axis orthogonal to the plane. Further, as shown in FIG. 2, the thrust generating means 2 has the X-direction thrust generating means 21 disposed in the direction of the X-axis in the direction of the moving magnetic field, and the thrust axis in the direction of the moving magnetic field. The direction of the two is configured in the Υ direction 22. When the yaw direction thrust generating means 22 is not moved and the magnetic field of the X direction thrust generating means 21 is moved, the plane plate 6 is moved in the X direction. When the magnetic field of the X-direction thrust generating means 21 is moved in the same direction without moving the magnetic field of the X-direction thrust generating means 21, the plane plate 6 is moved in the x direction. When the magnetic field of the X-direction thrust generating means 21 is not moved and the magnetic fields of the two thrust direction generating means 22 -5 - 200839929 are moved in the opposite directions, the flat plate 6 is rotationally moved in the 0-axis rotation direction. The reference support member 3 is provided in plurality for supporting the flat plate 6, even if the flat plate 6 is moved to any position within its range of movement, and is often disposed below the flat panel 6 at a position where the flat plate 6 can be supported. The field of exposure is in the field surrounding the reference supporting member 3, so that the field of exposure does not have a skew or shake, and the exposure process can be performed in a stable state. In addition, the support member 4 is provided in such a manner that one or more of the support flat members 6 are wider than the area occupied by the flat plate 6, and are disposed in a distributed manner in all of the fields in which the flat plate 6 is moved. Thereby, the plane plate 6 is moved within its range of movement, and often the plane plate 6 is supported by the auxiliary support structure 4 in addition to the reference support member 3, even if a bias load is applied to the plane plate 6, The flat plate 6 also does not cause the flat plate 6 to be skewed or shaken, and in a stable state, exposure processing can be performed. Further, the thrust generating means 2, the reference supporting member 3, and the auxiliary supporting member 4 eject air to the surface of the flat stage 5, and float the flat plate 6 with air pressure. The flat plate 6 is a surface in which the surface is machined with high precision, and a vacuum suction groove (not shown) for holding the workpiece 9 is formed, and a vacuum pipe is connected. The platen 8 has a salient pole formed in a checkerboard shape, and is buried between the salient poles by a resin crucible, and then is flattened by a plane. The platen 8 is divided into a plurality of sheets, and the gaps 8 1 are provided, so that the flat plate 6 is made of aluminum which is easy to machine. For this reason, the platen 8 is made of pure iron, and the coefficient of thermal expansion is not the same. Therefore, the phase difference of the thermal expansion is absorbed by the gap 81 to prevent deformation of the flat plate 6 due to warpage or the like. Fig. 13 is a perspective view showing an example of a specific configuration of the thrust generating means 2, -6 - 200839929, and the thrust generating means 2 is a leaf spring 23 attached to the platform base 1 with a degree of freedom (up and down). And the magnetic pole 24 which is mounted on 23 and which moves a magnetic field in one axial direction. Air ejection holes 25 are provided on the surface of the magnetic poles 24, and air for the floating panel 6 is supplied. Fig. 14 is a cross-sectional view showing a specific configuration of the reference supporting member 3, and the reference supporting member 3 is a pedestal having an air ejection hole 31, a pad 32 fixed to the platform base 1 and supporting the air cushion 32, and an air cushion. 32 is supported by the spherical bearing 34 of the pedestal 33. 32 is a discharge hole 31 having a surface in which a porous or perforated surface is ejected, and the spherical bearing 34 is freely swayable. Fig. 15 is a cross-sectional view showing a specific configuration of the auxiliary supporting member 4. The auxiliary supporting member 4 is composed of a pad 42 having an air ejection hole 41, a middle table 43 supporting the air cushion 42, and a cylinder 43 to the cylinder. A shaft 44 in 45, a cylinder 45 fixed to the platform base 1 and supporting the middle 43 , and a spherical surface 46 supporting the air cushion 42 to the intermediate stage 43 are provided. The auxiliary support member 4 is given by the cylinder 4 5 by the change. With the air pressure, the shaft 44 is moved up and down with an arbitrary thrust, and the pad 42 can be adjusted to an arbitrary height. Further, the operation of the XY 0 shifting station will be described using Figs. 1 to 15 . First, after the height of the reference support member 3 is set, air is supplied to the cylinder 45 of the auxiliary support member 4, and the upper portion 44 is placed. The air pressure supplied to the cylinder 45 of the auxiliary supporting member 4 is a pressure at which the thrust of the self-weight deflection of the flat platform 5 can be obtained. To the slab, and to flatten a case of gas 33, the air-stretching table bearing of the air cushion air is supplied with a pneumatic flat, and the lifting shaft is used to avoid the self-weight deflection of the 200839929 plane platform 5, which is from the plane platform 5 The size and weight of the reference support member 3 or the auxiliary support member 4 are calculated in advance by calculation. Thereafter, the flat stage 5 is placed on the air cushion 32 of the reference support member 3 and the air cushion 42 of the auxiliary support member 4. The thrust generating means 2 is a parallel plate spring 23 that extends and supports the thrust generating means 2 by its own magnetic force, and is pulled toward the platen 8 provided on the back surface of the flat plate 6. In the air cushion 32 of the reference support member 3, the air cushion 42 of the auxiliary support member 4 and the thrust generating means 2 supply air, and when the air is ejected from the surface, the flat platform 5 floats for the air cushions 32, 42 and the thrust generating means 2. For the exposure processing, the workpiece 9 is placed on the flat plate 6. By moving the magnetic field of the X-direction thrust generating means 21 and the Y-direction thrust generating means 22, the plane platform 5 is moved in the XY plane, and the light-irradiating portion (not shown) irradiates the exposure light through the mask, and is repeatedly used in steps. The workpiece 9 in the field of the complex exposure is divided, and exposure is performed by moving the field according to the division. After the exposure of the entire field is completed, the workpiece 9 is carried out from the flat plate 6. Hereinafter, the principle of movement of the XY 0 mobile platform will be described using Fig. 16. The same figure shows a cross-sectional view showing the relationship between the platen 8 provided on the flat stage 5 and the magnetic poles 24 provided in the thrust generating means 2. In each of the turns 127a and 27b which are wound around the magnetic poles 24a to 24d, a current is generated by a current flowing from a drive circuit (not shown) in the following order, and the magnetic poles 24 are moved in the direction of the periphery. First, in the 16th (a) diagram, a current flows in the direction of the magnetic force of the magnetic pole 24^ to the coil 27a on the side of the magnetic poles 24a, 24b. On the other hand, current does not flow to the coil 27b on the side of the magnetic poles 24c, 24d. As a result, the magnetic poles 200839929 24a are magnetically strengthened. Thus, the salient poles 8a of the platen 8 are strongly pulled toward each other, so that the magnetic poles 24a and the salient poles 8a are in relative positions. The magnetic pole 2 4 b is a non-magnetic body 8 3 between the salient pole 8 b and the salient pole 8 c of the platen 8, so that no magnetic force is generated. The magnetic poles 2 4 c and the magnetic poles 2 4 d are mutually attracted to the salient poles 8d and the salient poles 8f in the oblique direction, respectively. Then, in the 16th (b)th view, the current of the coil 27a on the magnetic poles 24a, 24b side is stopped, and the coil 27b on the magnetic poles 24c, 24d side flows a current like the magnetic force of the reinforcing magnetic pole 24d. As a result, the magnetic pole 24d and the salient pole 8f are strongly pulled toward each other. The magnetic pole 24c is rearward with respect to the non-magnetic body 83 between the salient pole 8d and the salient pole 8e of the platen 8, and thus does not pull from the salient pole 8d. Therefore, the magnetic pole 24d and the salient pole 8f are opposed to each other, and the platen 8 is moved toward the thrust generating means 2 in the left direction. The magnetic pole 24a and the magnetic pole 24b are mutually attracted to the salient poles 8a and the salient poles 8c in the oblique direction, respectively. Then, in the 16th (c) diagram, the current of the coil 2 7b on the magnetic pole 2", 24d side is stopped, and the coil 27a on the magnetic poles 24a, 24b side is current flowing in the magnetic field of the reinforcing magnetic pole 24b. The magnetic pole 24b and the salient pole 8c are strongly pulled to each other. The magnetic pole 24a is opposite to the non-magnetic body 83 between the salient pole 8a and the salient pole 8b of the platen 8, and thus does not pull with the salient pole 8a. Therefore, the magnetic pole 24b and the salient pole 8c are opposed to each other, and the platen 8 is moved in the same direction with respect to the thrust generating means 2. The magnetic pole 24c and the magnetic pole 24d are salient poles 8e and salient poles 8f and oblique directions, respectively. Then, in the 16th (d) diagram, the current of the line 200839929 circle 27a on the magnetic poles 24a, 24b side is stopped, and the coil 27b on the magnetic poles 24c, 24d side, this time is the magnetic flow of the reinforcing magnetic pole 24c. As a result, the magnetic pole 24c and the salient pole 8e are strongly pulled toward each other. The magnetic pole 24 (1 is opposite to the non-magnetic body 83 between the salient pole 8f and the salient pole 8g of the platen 8, and thus does not The salient poles 8f are pulled toward each other. Therefore, the magnetic poles 24c are opposite to the salient poles 8e, and the platen 8 is for thrust The magnetic means 24a and the magnetic poles 24b are respectively pulled apart from the salient poles 8b and the salient poles 8c in the oblique direction. Further, after moving to the position of the 16th (d) diagram, The current is applied to the coil 27b, and the platen 8, that is, the flat stage 5, is held at the position of the 16th (d). Patent Document 1: Japanese Laid-Open Patent Publication No. Hei 9-23689. In the ΧΥ0 moving platform of FIGS. 11 and 12, the substrate (workpiece) placed on the flat plate 6 is increased in size, and if the moving range of the flat plate 6 is increased, only three thrust generating means are disposed. In the case of 2, as shown in Fig. 17, when the flat plate 6 is moved to the end of its moving range, the three thrust generating means 2 are located at the end of the flat plate 6. In this positional relationship, The moving plane plate 6' force point becomes the corner 平面 of the plane plate 6 (the lower left of the plane plate 6 in Fig. 17), and thus the minute movement near the force point of the plane plate 6 'on the opposite side of the diagonal line (in the upper right of the plane plate 6 in Fig. 7), it appears to be a large movement, thus In order to control the minute movement of the flat plate 6, it is difficult to control the small movement of the flat plate 6. Further, -10-200839929, when the flat plate 6 is moved, a large torque is generated, and thus the thrust generating means 2 is required to brake the flat platform 5 to require great force. It is more difficult to control the slight movement of the plane plate 6. It is an object of the present invention to provide a plate for lifting the air to the platform base in view of the above problems, by means of a thrust generating means fixed to the platform base. The platform device in which the thrust is moved in a non-contact manner, and the plate is placed at any position within the range of its movement, the platform device for the minute movement of the control panel can be easily performed. Further, another object of the present invention is to provide a platform device having a function of loading and unloading a workpiece processed by a platform device body. In order to solve the above problems, the present invention employs the following means. The first means is a platform device, which belongs to a platform device for moving a plate holding a workpiece toward an XY direction orthogonal to a plate surface, and is characterized in that: a platform base is provided; and is fixed to the base of the platform, and has a jet of air to generate a complex thrust generating means for moving a magnetic pole of a magnetic field; and a plate driven by the thrust generating means provided with a planar platen having a checkerboard-shaped salient pole formed on a surface of the thrust generating means; and detecting the plate a board position detecting means for the position of the platform base; and a control unit for selecting a thrust generating means for operating the plurality of thrust generating means based on the board position signal from the board position detecting means. The second means is a platform device belonging to a platform device for moving the plate holding the workpiece toward the XY direction orthogonal to the plate surface, characterized in that: a platform base; and a plate to be held on the base of the platform The workpiece processing unit that processes the workpiece is disposed adjacent to the workpiece processing unit, and -11 - 200839929 loads the board that holds the unprocessed workpiece into the workpiece processing portion or the board that holds the processed workpiece from the workpiece The board loading/unloading unit that the processing unit carries out; and the unprocessed workpiece is carried out from the outside of the apparatus to the board loading/unloading unit or the processed workpiece on the board of the board loading/unloading unit is carried out to the outside of the apparatus. a workpiece loading/unloading mechanism; and a plurality of thrust generating means having a magnetic pole for generating a moving magnetic field by ejecting air to the platform base provided in the workpiece processing unit and the board loading and transporting unit; and a surface of the thrust generating means is formed with a planar plate of a checkerboard salient pole and driven by the thrust generating means; and detecting the plate To the position of the stage base plate position detecting means; plate according to the position signal and position detecting means from said plate, said plurality of thrust generating means selecting the control unit operates the thrust generating means. The third means is a platform device in which a plurality of sets of workpiece loading/unloading means for carrying in and out of the board loading/unloading unit and the board loading/unloading unit are provided in the second means. In a fourth aspect, in any one of the first to third means, the plurality of thrust generating means is arranged such that a thrust generating means for generating a thrust in the X direction and a thrust generating means for generating a thrust in the Y direction are arranged, regardless of the plate. The moving position is a platform device characterized by at least three thrust generating means that are located in the thrust generating means below the plate. According to the invention of the first aspect of the invention, even if the plate is moved to the end of the moving range, the position of the thrust generating means for the operation can be made closer to the center of the plate, and thus the minute movement of the control plate can be easily performed. According to the invention of claim 2, it is possible to easily carry out the loading and unloading of the workpiece processed by the platform apparatus main body -12-200839929, and the thrust generating means of the operation can be performed even if the board moves to the end of the moving range. The position is made closer to the center of the board, and thus it becomes easy to control the minute movement of the board. According to the invention of claim 3, the workpiece loading and unloading unit and the workpiece loading/unloading mechanism are alternately operated in an interactive manner, and the workpiece processing by the platform apparatus main body can be quickly performed. According to the invention of claim 4, regardless of the size of the board, the board can be moved by at least three platform devices by using the platform device located below the board. [Embodiment] A first embodiment of the present invention will be described using Figs. 1 to 5 . Further, in the following embodiments, a platform device movable in the XY 0 direction will be described as an example, but a platform device movable in the XY direction is also applicable. Fig. 1 is a cross-sectional view showing a configuration of a stage device according to the present invention, and Fig. 2 is a plan view showing the platform device. Further, Fig. 1 is a cross-sectional view taken along line B-B of Fig. 2; In these figures, 21-1 to 21-4 are X-direction thrust generating means, 22-1 to 22-5 are Y-direction thrust generating means, 11 is an X-direction laser interferometer, and 12 is a Y-direction Thunder. The interferometer, 13 is a control unit, and 14 is a workpiece processing unit that processes the workpiece 9 formed on the platform base 1. In addition, the other configurations are omitted for the same reference numerals as those shown in Fig. 1, and the description thereof is omitted. In addition, the X-direction thrusts shown in Figs. 1 and 2 are -13,399,399,29, and the Y-direction thrust generating means 21-1 to 21-5, the support member 3, and the auxiliary support. The specific configuration of the member 4 is the same as that described in Figs. 1 to 5, respectively, and therefore the description of the movement principle of the ΧΥ 0 moving platform will be omitted, and the description will be made with reference to Fig. 6, and thus the description thereof will be omitted. Further, in Fig. 2, the platform devices 21, 22 located on the plane are not actually seen, and are shown as being versatile, and the dotted lines indicated by the four corners of the workpiece processing portion 14 are not present on the broken line. As shown in Figs. 1 and 2, on the platform base 1, a plurality of reference support members 3, a plurality of auxiliary support members 4, on which the air floats to support the flat plate 6. The three reference members on the platform base 1 are where the planar plate 6 moves within the range of movement, often below the panel 6, and are disposed at positions that can support the planar plate 6. A plurality of thrust segments 2 for generating a thrust for moving the flat plate 6 are provided on the flat 1, for example, nine thrust generating means are provided in Fig. 2 (X force generating means 21-1 to 2 1-4, Υ direction) The thrust generating means 22-. The thrust generating means is a magnetic pole row of the adjacent thrust generating means, and is arranged to be orthogonal to each other. That is, the X-direction thrust generating means 21 for moving the 6 toward the X direction is alternately arranged. 1 to 2 1-4 direction Υ direction thrust generating means 2 2-1 to 22-5. The plane is generated by the X direction thrust generating means 21-1~2 1-4 and the Υ direction generating means 22-1~22 The thrust of -5 is moved inside the base 1 of the platform. Further, in the above-mentioned platform device, the platform base 1 is provided, the reference is the same as the first one, and the same as the plate 6 is seen. The 3 faces are also pushed by the support structure in the hand of the platform base. -22-5) The column direction plate and the γ plate 6 are the thrust range: useful to detect the position of the plane plate 6 in the X direction. Shooting thousands of 1 and Y-direction laser interferometers 12. The X-direction moving distance of the plane plate 6 is detected by the X-direction interferometer 11, and the Υ-direction interferometer 12 is used to detect the Υ-direction moving distance of the plane plate 5. That is, the X-direction laser interferometer 1 1 and the X-direction laser interferometer 12 detect the moving distance from the origin position of the plane plate 6, and output the detection signal to the control unit 13. The control unit 13 calculates the position coordinates of the plane plate 6 based on the detection signal. In the control unit 13, the positional coordinates of the plane plate 6 are previously stored, and the thrust is generated by the plurality of X-direction thrust generating means 21-1 to 21-4 and the meandering thrust generating means 22-1 to 22-5. Information about the means of occurrence. The control unit 13 selects a platform device that is to be operated in accordance with the information to operate. Hereinafter, the operation of the above-described platform device will be described using Figs. 3 to 5 . In the drawings, the workpiece processing unit 14 and the flat plate 6 and the nine thrust generating means (the X-direction thrust generating means 21-1 to 21-4, the thrust generating means in the Υ direction) are shown in the table apparatus of Fig. 1 . The pattern of the relationship of 22-1 to 22-5). First, in the third (a) diagram, when the plane plate 6 is located at the lower left of the workpiece processing portion 14, the position coordinates of the plane plate 6 are taken as (0, 0) [conveniently, the position of the lower left corner of the plane plate 6 is taken as Position coordinates (0,0)]. Similarly, in the third (b) diagram, the positional coordinates of the plane plate 6 when the plane plate 6 is positioned at the lower right of the workpiece processing unit 14 are (2, 0), and similarly, in the third (c) diagram. The position coordinates of the flat plate 6 when the flat plate 6 is positioned on the upper left side of the workpiece processing portion 14 are (0, 2), and similarly, in the fourth (d) view, the flat plate 6 is placed at the workpiece processing portion 14. -15- 200839929 in the upper right position coordinates of the plane 6 as (2, 2). Therefore, the plane plate 6 is in the range of coordinates (0, 0) to (2, 2) of the moving position. In this manner, the positional coordinates (0, 0) to (2, 2) are used to distinguish the range of movement of the plane plate 6, and the X-direction thrust generating means 21-1 to 21-4 and the Y-direction thrust generating means 22-1 are In 22-5, the thrust generating means corresponding to the determined position coordinates (0, 0) to (2, 2) is selected, and the information is stored in the control unit. As shown in Fig. 4(e), the control unit 13 is located until the position coordinates of the plane plate 6 are (〇, 〇) ~ (1, 1), that is, at (0S X). <1, OS Y In the range of <1), four thrust generating means (X-direction thrust generating means 2 1 -1, 2 1 -3 and Y-direction thrust generating means 22-2) in the plane plate 6 are arranged in the moving range. 22-3) Acting surely, 俾 move the flat panel 6. The four thrust generating means are the X-direction thrust generating means 21-1, 21-3 and the Y-direction thrust generating means 22-2, 22-3, so that the flat plate 6 can be moved in any direction in the XY 0 direction. Similarly, as shown in Fig. 4(f), the control unit 13 is until the position coordinates of the plane plate 6 are (1 〇 〜 ) to (2, 1 ), that is, at (1 S X ). <2,0 S Y In the range of <1), four thrust generating means (X-direction thrust generating means 21-3, 21-4, Y-direction thrust generating means 22-3, 22- under the plane plate 6 are moved in the moving range. 5) Acting positively, 俾 move the flat panel 6. Further, as shown in Fig. 5(g), the control unit 13 is until the position coordinates of the plane plate 6 are (〇 ' 1 ) to (1, 2 ), that is, at (0 ‘ X <1 ’ 1 ‘ Y In the range of <2), the four thrust generating means under the plane plate 6 in the moving range (X-direction thrust-16-200839929 generating means 21-1, 21-2, Y-direction thrust generating means 22- 1,22-3) Acting surely, 俾 move the flat panel 6. Further, as shown in Fig. 5(h), the control unit 13 is until the position coordinates of the plane plate 6 are (1, 1) to (2, 2), that is, at (1) <2,1^丫 In the range of <2), four thrust generating means (X-direction thrust generating means 21-2, 21-4, Y-direction thrust generating means 22-3, 22- under the plane plate 6 are moved in the moving range. 4) Acting positively, moving the flat panel 6. φ As described above, in the table apparatus, if the flat plate 6 is within its moving range, the four thrust generating means can be disposed to be under the flat plate 6 even at any position (coordinate). That is, the movement of the flat plate 6 is performed by two X-direction thrust generating means and two Y-direction thrust generating means. However, in order to move the flat plate 6 in the ΧΥ0 direction, the prior art application (Japanese Patent Application No. 2006-34071) also shows that there are three thrust generating means (two in the X-direction thrust generating means and one in the Y-direction thrust generating means). Or one of the X-direction thrust generating means and the Y-direction thrust generating means 2 #) can move in the X direction, the Y direction, and the 0 direction. Therefore, at least three thrust generating means may be disposed in the moving range of the plane plate 6 so that at least three thrust generating means may be provided below the flat plate 6. For example, in the fourth (e)th to fifth (h)th drawings, the Y-direction thrust generating means 22-3 may be removed from the four thrust generating means. The second embodiment of the present invention will be described with reference to the drawings. Fig. 6 to Fig. 10 are plan views showing the configuration and operation of the platform apparatus according to the embodiment of the present invention. -17- 200839929 In these figures, 6-1 is the first plane plate, 6-2 is the second plane plate, 9-1, 9-2 are the workpieces, and 14 is the division of the process to be held on the platform base 1 The workpiece processing portions 15, 15 and 16 of the workpiece 9 on the plate 6 are partitioned on the platform base 1, and are respectively disposed adjacent to the workpiece processing portion 14 to carry the sheet 6 holding the unprocessed workpiece 9 into the workpiece processing portion 14. Or the first board loading/unloading unit and the second board loading/unloading unit that carry the processed sheet 9 of the workpiece 9 from the workpiece processing unit 14, and the unloaded workpieces 9 are carried out from the outside of the apparatus. The processed workpiece 9 on the plate 6 of the plate loading/unloading portions 15 and 16 or the processed workpiece 9 on the plate 6 of the plate loading/unloading portions 15 and 16 is carried out to the first workpiece loading/unloading mechanism and the second workpiece loading/unloading mechanism outside the device. 19 is a manipulator, 21-1 to 21-14 are means for generating thrust in the X direction, and 22-1 to 22-13 are means for generating thrust in the Y direction. Further, the specific configurations of the X-direction thrust generating means 21-1 to 21-14 and the Y-direction thrust generating means 22-1 to 22-13 are the same as those shown in Fig. 13, and thus the description thereof will be omitted. Further, the plurality of reference support members or the supplementary support members are omitted and are not shown, but the specific configurations are the same as those described in Figs. 14 and 15, respectively, and thus the description thereof is omitted. Further, the principle of movement of the XY 0 moving platform is also the same as that explained in Fig. 16, and thus the description thereof will be omitted. Further, the X-direction laser interferometer and the Y-direction laser interferometer for detecting the position of the plane plate 6 are also omitted and are not shown, and the input means only detects the origin from the plane plate 6 by the laser interferometers. The control unit of the signal of the moving distance of the position is also omitted and is not shown, but is the same as that described in FIG. 2, and thus the description thereof is omitted. Further, in Fig. 6 to Fig. 1 , in order to facilitate the understanding of the operation of the flat plate 6, the thrust generating means 21, 22 located under the flat plate 6 are actually not visible and are shown. Further, the workpiece processing unit 14 and the first board loading/unloading unit 15 are shown, and the square dotted lines of the second board loading/unloading unit 16 are all imaginary lines, and actually do not exist. Further, the platform device shown in Fig. 6 is configured to be applied to an exposure device, and the workpiece processing unit 14 performs exposure processing of the workpiece. However, the platform device is not limited to being applied to an exposure device, and may be applied, for example. Inspect the device. • As shown in Fig. 6 to Fig. 10, the platform apparatus of the present invention is provided adjacent to the workpiece processing unit 14 similar to the workpiece processing unit 14 shown in Fig. 2, and remains unchanged. The plate 6 of the workpiece 9 to be processed is carried into the workpiece processing unit 14 or the two sheets carried in and out of the workpiece processing unit 14 from the workpiece processing unit 14 into the carry-out unit 15 and 16. Further, as shown in Figs. 6 to 10, two first flat plates 6-1 and a second flat plate 6-2 which are moved by placing the workpiece 9 are provided. For example, when one of the flat plates 6-1 moves for processing, the other flat plate 6-2 ® stands by in the second plate loading/unloading portion 16 and is configured to quickly replace the processed workpiece 9-1. With the workpiece 9-2 before processing. In the first plate loading/unloading portion 15 and the second plate loading/unloading portion 16, a first workpiece loading/unloading mechanism 17 including a robot 19 and a second workpiece loading/unloading mechanism 18 are attached. For example, the first workpiece loading/unloading mechanism 17 holds the workpiece 9-1 before the processing by the robot 19, and carries it into the board loading/unloading unit 1 5 ' and processes the finished workpiece 9 _ 1 from the first The 'plate loading/unloading unit 15 is carried out to the outside of the apparatus. The thrust generating means 21, 22 are on the platform base 1, and the first -19-200839929 board loading/unloading part 15 and the second board loading/unloading part 16' which are continued from the workpiece processing unit 14 to the two sides thereof have 27 adjacent connections. The X-direction thrust generating means 21-1 to 21-14 and the Y-direction thrust generating means 22-1 to 22-13 in which the directions in which the magnetic poles are arranged are orthogonal to each other are fixed to the platform base 1 and the two flat plates 6-1. 6-2 is movable between the first board loading/unloading unit 15 and the workpiece processing unit 14 and between the second board loading/unloading unit 16 and the workpiece processing unit 14 respectively. Hereinafter, the operation of the platform device will be described using Figs. 6 to 10. First, as shown in Fig. 6(a), the first flat plate 6-1 stands by in the first plate loading/unloading portion 15. The first flat plate 6-2 stands by in the second plate loading/unloading portion 16. The workpiece 9-1 is carried into the table device by the robot 19 of the first workpiece loading/unloading mechanism 17, and is placed on the first flat plate 6-1 which is placed in the first plate loading/unloading portion 15 in standby. Here, the movement of the first planar plate 6-1 is controlled by the X-direction thrust generating means 21_4, 21-9 and the Y-direction thrust generating means 22-5, 22-9, and the second flat plate 6- 2 is performed by the X-direction thrust generating means 21_ι, 21_5 and the γ-direction thrust generating means 2 2 -1, 2 2 · 6. Then, as shown in Fig. 7(b), the first flat plate 6-〗 is moved from the first plate loading/unloading portion i5 to the workpiece processing portion i4' as shown by the arrow to start the exposure processing. Further, the field in which the workpiece processing is performed is indicated by oblique lines. When the first plate loading/unloading unit 15 moves to the workpiece processing unit 14 , the X-direction thrust generating means 21-1, 21-5 and the γ-direction thrust generating means 22-1, 22-6 are converted into X. Directional thrust generating means 21_4, 21-8, Y-direction thrust generating means 22-4 ' 22-9, then X-direction thrust generating hand -20 - 200839929 paragraph 21·3, 21_8, Y-direction thrust generating means 22-4, 22-8, then the order of the thrust generating means 21-3, 21-7 in the X direction, and the thrust generating means 22-3, 22-8 in the Υ direction. In the workpiece processing unit 14, during the processing of the workpiece 9-1, the second workpiece loading/unloading mechanism 18 carries the workpiece 9-2 into the platform device by the robot 9, and carries the workpiece in the standby position. The second flat plate 6-2 of the mechanism 6-2 is carried out. • After, as shown in Figure 7 (c), Figure 8 (d), Figure 8 (e), Figure 8 (f), Figure 9 (g), Figure 9 (h), Figure 9 (〇 As shown in the figure, the first flat plate 6-1 is sequentially moved by the thrust generating means 21, 22 so that the entire field of the workpiece 9-1 placed on the first flat plate 6-1 is exposed. The movement operation during this period is performed by the X-direction thrust generating means 21-2, 21-7, and the Y-direction thrust generating means 22-3, 22-7 in the 7th (c) diagram, at 8th (d) The figure is performed by the X-direction thrust generating means 21-7, 21-10, the Y-direction thrust generating means 22-7, 22-10^, and the X-direction thrust generating means 21 in the 8th (e) figure. -7, 21-11, Y-direction thrust generating means 22-8, 22-10, in the 8th (f) diagram by X-direction thrust generating means 21-11, 21·12, Y-direction thrust generating means 22-10, 2 2-12, in the 9th (g) diagram by the X-direction thrust generating means 21-10, 21-12, the Y-direction thrust generating means 22-10, 22-11, In the figure 9 (h), the X-direction thrust generating means 21-12, 21-13, and the Y-direction thrust generating means 2 2-11 , 22_13 perform In the figure 9(i), the X-direction thrust generating means 21-12, 21-14, and the Y-direction thrust generating means 22-12, 22-13 are advanced from -21 to 200839929. Here, four or more The thrust generating means 21, 22 are located below the plane plate 6, and at this time, the center of gravity of the plate 6 reaches the combination of the thrust generating means 21, 22 in the same manner as in the field of the plurality of thrust generating means 21, 22 that are operated. By selecting in this way, the plane plate 6 can be stably operated, and then the processing of the workpiece processing unit 14 of the workpiece 9-1 is completed in the ninth (i) diagram. When the processing is finished, the first step (j) is as follows. As shown in the figure, the first flat plate 6-1 is moved to the first plate loading/unloading portion 15, and the workpiece 9-1 is carried out of the device by the first workpiece loading/unloading mechanism 17. On the one hand, the workpiece is placed. The second flat plate 6-2 of 9-2 moves to the workpiece processing unit 14 to start processing. Thereafter, in the first 〇(k) diagram, the workpiece 9-2 is processed while the workpiece processing unit 14 is being processed, and the workpiece 9 is -3 is carried into the apparatus by the first workpiece loading/unloading mechanism 17, and is placed on the first flat plate 6-1. 1 is a cross-sectional view showing a configuration of a stage device according to the first embodiment of the present invention. Fig. 2 is a cross-sectional view showing a configuration of the platform device according to the first embodiment. Top view of the platform device. Figures 3(a) to 3(c) are diagrams showing the platform base 1 and the plane plate 6 and the nine thrust generating means of the platform device shown in Fig. 1 - 2008-39929 The pattern. Figs. 4(d) to 4(f) are views showing the relationship between the platform base 1 and the plane plate 6 and the nine thrust generating means of the platform apparatus shown in Fig. 1. Figs. 5(g) to 5(h) are diagrams showing the relationship between the platform base 1 and the plane plate 6 and the nine thrust generating means of the platform apparatus shown in Fig. 1. Fig. 6(a) is a plan view showing the configuration and operation of the platform device for explaining the second embodiment. 7(b) to 7(c) are plan views showing the configuration and operation of the stage device according to the second embodiment of the present invention. 8(d) to 8(f) are plan views showing the configuration and operation of the stage device according to the second embodiment of the present invention. 9(g) to 9(i) are plan views showing the configuration and operation of the platform apparatus for explaining the invention of the second embodiment. (1) to (10) are plan views showing the configuration and operation of the platform apparatus for explaining the second embodiment. Fig. 11 is a cross-sectional view showing the configuration of an exposure apparatus of the ΧΥ0 mobile platform to which the invention of the prior application is applied. Fig. 12 is a plan view showing the ΧΥ0 moving platform. Fig. 13 is a perspective view showing an example of a specific configuration of the thrust generating means 2. Fig. 14 is a perspective view showing an example of a specific configuration of the reference supporting member 3. -23- 200839929 Fig. 15 is a perspective view showing an example of a specific configuration of the support supporting member 4. Figs. 16(a) to 16(d) are cross-sectional views showing the relationship between the platen 8 provided on the flat stage 5 and the magnetic poles 24 provided in the thrust generating means 2. Fig. 17 is a plan view showing an inconvenient platform device for explaining when the flat plate 6 is moved to the end portion of the moving range when only three thrust generating means 2 are disposed. [Description of main component symbols] 1 : Platform base 2: Thrust generating means 21, 21-1 to 21-14: X-direction thrust generating means 22, 22-1 to 22-13 ·: Y-direction thrust generating means 23: leaf spring 2 4 : Magnetic poles 24a to 24d : Magnetic pole 2 5 : Air ejection hole 2 6 : Permanent magnet 27a, 27b : Coil 3 : Reference support member 3 1 : Air ejection hole 32 : Air cushion 3 3 : Bench 24 - 200839929 3 4 : Spherical bearing 4: supplementary support member 4 1 : air ejection hole 42 : air cushion 43 : intermediate stage 45 : cylinder 4 6 : spherical bearing φ 5 : plane platform 6 : plane plate 6-1 : first plane plate 6-2: Two flat plates 7: honeycomb core 8: platen 8 a~8 g: salient pole 8 1 : gap® 82: ferromagnetic body 83: non-magnetic body 9, 9 -1, 9 - 2, 9 - 3 : Workpiece 1 投影: Projection lens 1 1 : X-direction laser interferometer 1 2 : Y-direction laser interferometer 13 : Control unit 1 4 : Workpiece processing unit 1 5 : First board loading/unloading unit - 25 200839929
1 6 :第二板搬入搬出部 1 7 :第一工件搬入搬出機構 1 8 :第二工件搬入搬出機構 1 9 :機械手 -26-1 6 : Second plate loading/unloading unit 1 7 : First workpiece loading/unloading mechanism 1 8 : Second workpiece loading/unloading mechanism 1 9 : Robot -26-