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TW200827315A - Glass thinning method - Google Patents

Glass thinning method Download PDF

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Publication number
TW200827315A
TW200827315A TW096107049A TW96107049A TW200827315A TW 200827315 A TW200827315 A TW 200827315A TW 096107049 A TW096107049 A TW 096107049A TW 96107049 A TW96107049 A TW 96107049A TW 200827315 A TW200827315 A TW 200827315A
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Taiwan
Prior art keywords
display panel
glass substrate
glass
etching solution
flow rate
Prior art date
Application number
TW096107049A
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Chinese (zh)
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TWI350275B (en
Inventor
Moon-Young Park
Original Assignee
Choi Chan Kyu
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Publication of TWI350275B publication Critical patent/TWI350275B/en

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Surface Treatment Of Glass (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)

Abstract

Disclosed is a glass thinning method, in which an etching solution downwardly flows from the upper portion to the lower portion of a glass substrate or a display panel, vertically erected, along the surfaces of the glass substrate or the display panel at a fixed flow rate or varying flow rates, to thin the glass substrate or the display panel. A HF solution is used as the etching solution. Since the etching solution flows down by gravity and etches the glass substrate or the display panel to a desired thickness, the method reduces the generation of particles and ultra-thins the glass substrate or the display panel. Further, the method prevents the generation of scratches on the surfaces of the glass substrate or the display panel, thus providing a thin glass substrate or display panel with excellent quality.

Description

200827315 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種將玻璃薄化的方法，更特別地係關 於一種使用蝕刻溶液藉由重力從一玻璃基板上部份沿著該 玻璃基板表面往下流動至其下部份以餘刻該破璃基板至一 欲求厚度，因而製備出一超薄玻璃基板，同時可大幅降低 所生成顆粒的方法。200827315 IX. Description of the Invention: [Technical Field] The present invention relates to a method for thinning glass, and more particularly to an embodiment of using an etching solution by gravity from a glass substrate along a surface of the glass substrate The method of flowing down to the lower portion to leave the glass substrate to a desired thickness, thereby preparing an ultra-thin glass substrate and greatly reducing the generated particles.

【先前技術】 用於顯不斋的玻璃包括納妈玻璃（soda lime glass)，其 係在需要時添加驗離子到二氧化石夕上而形成的；以及無驗 玻璃（alkali-free glass)，其係在高溫下幾乎不會產生變 化。鈉鈣玻璃有一低變化點（其視溫度變化而改變物理性 質），但價格低廉，因此被用在使用低溫製程的超扭曲向列 型液晶顯示器（STN LCDs)或被動矩陣有機發光二極體（PM OLEDs)中。無鹼玻璃則有一高變化點（其視溫度變化而改 變物理性質），因此適合用在高溫製程以形成一 TFT陣列， 因此被用在薄膜電晶體-液晶顯示器（TFT-LCDs)或主動矩 陣有機發光二極體（AM OLEDs)中。 最近，為了滿足顯示器設備產業的發展以及客戶朝向 軽、薄、短、小的產品需求，因此需要研發一種 < 將顯示 器面板（藉由將玻璃基板黏合而成來製造）薄化的技術。亦 即，需要一種可將LCD用玻璃基板薄化的方法，以滿足設 備朝向輕薄化發展的趨勢。薄化破璃基板的方法是利用# 刻顯示器面板來達成。[Prior Art] The glass used for the display of the fast includes a soda lime glass which is formed by adding an ion to the cerium oxide when needed; and an alkali-free glass, Its system hardly changes at high temperatures. Soda-lime glass has a low point of change (which changes physical properties depending on temperature), but is inexpensive, so it is used in ultra-twisted nematic liquid crystal displays (STN LCDs) or passive matrix organic light-emitting diodes using low temperature processes ( PM OLEDs). Alkali-free glass has a high change point (which changes its physical properties depending on temperature changes), so it is suitable for use in high-temperature processes to form a TFT array, and thus is used in thin film transistor-liquid crystal displays (TFT-LCDs) or active matrix organic Light-emitting diodes (AM OLEDs). Recently, in order to meet the development of the display device industry and the customer's demand for thin, thin, short, and small products, it is necessary to develop a technology that thins the display panel (made by bonding a glass substrate). That is, there is a need for a method of thinning a glass substrate for an LCD to meet the trend that the device is becoming thinner and lighter. The method of thinning the glass substrate is achieved by using the #刻显示器 panel.

200827315 傳統薄化玻璃的方式是利用一種浸潰技術， 技術，且該浸潰與喷灑技術均廣為人知。 以下，將參照附圖說明這些習知技術。 第1 A圖示出傳統使用浸潰技術i 〇 〇來薄化 法。參照第1A圖’以數個隔板12 〇將設置在外 的數個單元區域130彼此分隔，在每一單元區域 別放置了一顯示面板。在該外罩1 5 0内有一钱刻 應至每一單元區域中。之後，從内座11〇下方端 氣泡140，因而可將分別置放在各單元區域中的 加以薄化。此方法的優點在於其操作方法簡單且 化數個玻璃基板。但是’此方法需要花較長時間 璃基板薄化’同時從玻璃基板上產生的殘餘物還 生成時碰撞玻璃基板表面，或是因為在玻璃基板 下到痕或在玻璃基板内表面留下多數殘餘粒子。 第1B圖示出傳統使用噴灑技術200來薄化 法。參照第1B圖，設置在顯示面板2丨〇兩侧上 嘴220,可喷出蝕刻溶液到該顯示面板21〇的兩令 來蝕刻該顯示面板2 1 0的兩個表面，藉以薄化該 2 1 0。此方法與上述浸潰技術一樣，會產生少量的 且對薄化大型玻璃基板來說較有利。但是，因為 喷灑’因此此方法會在玻璃基板表面上留下酒渦 痕，且其方法較為複雜。 第1C圖示出傳統使用浸潰和喷灑技術3〇〇 璃的方法，其係組合使用上述浸潰和喷灑兩種技 第1C圖，在將顯示面板31〇浸潰入一内含钱刻 一種喷灑 玻璃的方 罩150内 1 3 0中分 溶液並供 往上供應 顯示面板 可同時薄 才可將玻 會在氣泡 表面上留 玻璃的方 的多個噴 J表面上， 顯示面板 殘餘物， 使用高壓 形狀的刮 來薄化玻 術。參照 溶液3 3 0 6200827315 The traditional way of thinning glass is to use a dipping technique, and the dipping and spraying techniques are well known. Hereinafter, these conventional techniques will be described with reference to the drawings. Figure 1A shows the conventional thinning method using the dipping technique i 〇 。. Referring to Fig. 1A', a plurality of cell regions 130 disposed outside are separated from each other by a plurality of spacers 12, and a display panel is placed in each cell region. There is a money in the outer cover 150 into each unit area. Thereafter, the bubble 140 from the lower end of the inner seat 11 is thinned, so that it can be thinned in each unit area. The advantage of this method is that it is simple to operate and has several glass substrates. However, 'this method takes a long time to thin the glass substrate' while the residue generated from the glass substrate is also generated when it collides with the surface of the glass substrate, or because the glass substrate is under the mark or remains on the inner surface of the glass substrate. particle. Fig. 1B shows a conventional thinning method using a spray technique 200. Referring to FIG. 1B, the nozzles 220 are disposed on both sides of the display panel 2, and two etching solutions are sprayed onto the display panel 21 to etch the two surfaces of the display panel 210, thereby thinning the 2 1 0. This method, like the above impregnation technique, produces a small amount and is advantageous for thinning large glass substrates. However, because of the spray, the method leaves a vortex on the surface of the glass substrate, and the method is complicated. Fig. 1C is a view showing a conventional method of using the immersion and spray technique 3 glass, which is used in combination with the above-mentioned two techniques of impregnation and spraying, and the display panel 31 is immersed in a money. Engraving a solution of the glass cover 150 into the solution and supplying the display panel to the surface of the plurality of spray J surfaces of the glass surface on the surface of the bubble, the display panel remains Object, use a high-pressure shape to scrape the glass. Reference solution 3 3 0 6

200827315 的設備後，即可由安裴在顯示面板310兩側上 喷出蝕刻溶液330到該顯示面板31〇的兩側表 刻該顯示面板310的兩個表面，藉以薄化該顯 此方法製程較為複雜且價格昂責，造成後續 難，且仍然會在玻璃基板表面上留下刮痕。 雖然延些刮痕非常細小，但會造成高科技 顯示面板）致命性的腐蝕，因而減損了這些昂貴 壽命。因為這些精細到痕往往使得這些受損玻 被丟棄。 換言之，當使用上述任一種習知方法，利 液中通入氣泡或噴灑蝕刻溶液來蝕刻_裸露 時，均會在基板表面留下精細的刮痕或粒子， 面受損，進而使得經由黏接這類基板所製成的 現致命性的缺陷，雖然所製造出來的面板極薄 到痕，往往必須將這些基板丟棄，因此，任一 方法的缺點是以其來製造顯示面板的話，成本 【發明内容】 因此，本發明提供可解決上述問題的方案 的之一在於提供一種薄化玻璃的方法，其中一 從一玻璃基板或一顯示面板的上部份沿著該玻 藉由重力往下流動至該玻璃基板或顯示面板的 餘刻該玻璃基板或顯示面板至一欲求厚戶，因 超薄的玻璃基板或顯示面板，同時可大幅降低; 依據本發明’上述和其他目的可缓由提供 的多個喷嘴 面上，來钱 b面板2 1 0。 維修上的困 產品（例如， 裝置的使用 璃基板必須 用在餘刻溶 的玻璃基板 造成基板表 顯示面板出 ，但因為有 種上述習知 過於高昂。 ，本發明目 蝕刻溶液係 璃基板表面 下部份，以 而製備出一 听生成顆粒。 一種薄化玻 7After the device of 200827315, the ampoules are sprayed on both sides of the display panel 310 to the two sides of the display panel 31 to etch the two surfaces of the display panel 310, thereby thinning the display process. Complex and expensive, causing subsequent difficulties, and still leaving scratches on the surface of the glass substrate. Although the scratches are very small, they can cause fatal corrosion of the high-tech display panel, thus detracting from these expensive life. Because these fine to traces often cause these damaged glass to be discarded. In other words, when any of the above-mentioned conventional methods are used, when bubbles or spray etching solutions are introduced into the liquid to etch_bare, fine scratches or particles are left on the surface of the substrate, and the surface is damaged, thereby making the bonding The fatal defects made by such substrates, although the manufactured panels are extremely thin and trace, it is often necessary to discard these substrates. Therefore, the disadvantage of either method is that the display panel is manufactured, and the cost is Therefore, the present invention provides a solution to the above problem in that a method for thinning glass is provided, wherein a glass substrate or an upper portion of a display panel flows downward along the glass by gravity to The glass substrate or the display panel is required to be thicker than the glass substrate or the display panel, because the ultra-thin glass substrate or the display panel can be greatly reduced at the same time; according to the present invention, the above and other objects can be provided more slowly. On the nozzle side, come to the money b panel 2 1 0. Maintenance of the sleepy product (for example, the use of the glass substrate of the device must be used in the residual glass substrate to cause the substrate display panel to appear, but because of the above-mentioned conventionally too high, the present invention etches the solution under the surface of the glass substrate Partially, to produce a ray-forming particle. A thin glass 7

200827315 璃的方法而獲得解決，其中一蝕刻溶液係從垂直立起 玻璃基板或一顯不面板的上部份往下流動至該玻璃基 顯示面板的下部份，其沿著該玻璃基板或顯示面板的 餘刻，以薄化該玻璃基板或顯示面板，因而可防止因 部壓力而對該玻璃基板或顯示面板的表面造成傷害， 不產生粒子的情況下，薄化該玻璃基板或顯示面板至 求厚度。 該蝕刻溶液以一固定流速或是可變流速，沿著該 基板或顯示面板的兩面從該玻璃基板或顯示面板的上 流動至其下部份，因此可藉由重力沿著該破壤基板或 面板的兩面均勻流動’藉以精確地控制一麵刻厚度。 使用一 HF溶液作為#刻溶液，因此可降低該玻 板或顯示面板的製造成本。 提供一用以固定該玻璃基板或顯示面板的固定單 以及一用以均勻地控制該蝕刻溶液流速的流量控制單 因此可去除因為該玻璃基板或顯示面板移動戶斤造成 厚度變化，並可薄化玻璃基板或顯示面板至~欲求厚 此外’运提供^一通道部份’用以调整一出口（其可 刻溶液自其中流出）寬度、用以調整該蝕刻溶液流寬廣 而可調整依據該顯示面板寬度之蝕刻溶液流寬度並容 玻璃基板或顯示面板的整體表面可被同和*均句地姓刻 【實施方式】 以下，將參照實施例詳細說明本發明。 第2圖示出依據本發明一較佳實施方案來薄化一 的一 板或 表面 為外 並在 一欲 破璃 部份 顯示 璃基 元， 元， 蝕刻 度。 供蝕 :，因 許該 玻璃 200827315 的方法。參照第2圖’將一蝕刻溶液3 0均勻地從意欲加以 薄化的一顯示面板1 〇的上部份，沿著該顧示面板1 〇的兩 面，流動到讓顯示面板1 0的下部份。雖然此實施方宰揭示 钱刻 >谷液3 0係沿者該顯不面板1 0的兩面，從該顯示面板 1 0的上部份流動到該顯示面板1 0的下部份，但習知技蓺 者應能了解該#刻溶液也可藉由重力，從該顯示面板J 〇 的上部份流動到該顯示面板1 0的下部份，藉以薄化該顯示 面板1 0。 更明確地說’在該顯示面板10或一破璃基板的上部份 安裝一喷嘴單元或複數個喷嘴單元’用以供應該餘刻溶液 30。當只使用一喷嘴單元時’該喷嘴單元被分支成兩部份 而位在該顯示面板1 0或玻璃基板的兩面上，使得從該兩部 份噴灑出來的蝕刻溶液3 0可沿著該顯示面板丨〇或玻璃美 板的兩面流動。或者，當使用複數個嘴嘴單元時，係將該 複數個喷嘴單元分別安裝在該S員示面板10或玻璃基板的 兩面上，使得從該複數個喷嘴單元噴灑出來的餘刻溶液30 可沿著該顯示面板1 0或玻璃基板的兩面流動。沿著該顯示 面板1 0或玻璃基板的兩面流動的蝕刻溶液的流速可以是 均一的，或可在製程中依據使用者的需求來改變，以便有 效地薄化該顯示面板1 0或玻璃基板。 任何可用來#刻玻璃的材料都可作為蝕刻溶液3()來 使用。較佳是’使用HF溶液來作為蝕刻溶液30，其最經 濟有效。此外，還設置一流動控制單元（去-山、^ u、禾不出），用以依 據一使用者要求的蝕刻程度來控制蝕刻溶德2 Λ > + 土 备履3 〇之流速。更 佳是，該流量控制單元係連接到一自動化設備，因此可自 200827315 動地控制蝕刻時間及蝕刻厚度。 在此實施方案中的方法，該蝕刻溶液3 0係從該 顯示面 板1 0的上部份往下流動到該顯示面板1 〇的下部份。 季父佳200827315 The method of glass is solved, wherein an etching solution flows down from the vertical standing glass substrate or the upper portion of a display panel to the lower portion of the glass-based display panel along the glass substrate or display The glass plate or the display panel is thinned in the remainder of the panel, thereby preventing damage to the surface of the glass substrate or the display panel due to partial pressure, and thinning the glass substrate or the display panel to the case where particles are not generated Find the thickness. The etching solution flows from the glass substrate or the display panel to the lower portion along the two sides of the substrate or the display panel at a fixed flow rate or a variable flow rate, and thus can be gravity along the broken substrate or The two sides of the panel are evenly flowing 'to precisely control the thickness of one side. An HF solution is used as the #etching solution, thereby reducing the manufacturing cost of the glass or display panel. Providing a fixing sheet for fixing the glass substrate or the display panel and a flow control sheet for uniformly controlling the flow rate of the etching solution, thereby removing the thickness variation caused by the glass substrate or the display panel, and thinning The glass substrate or the display panel is required to be thicker, and the width of the outlet is increased to adjust the width of the etching solution and can be adjusted according to the display panel. The width of the etching solution flow width and the entire surface of the glass substrate or the display panel can be the same as the same. [Embodiment] Hereinafter, the present invention will be described in detail with reference to the embodiments. Fig. 2 is a view showing a thin plate or a surface which is thinned according to a preferred embodiment of the present invention and which exhibits a glass element, an etch degree in a desired portion. Erosion: The method of the glass 200827315. Referring to FIG. 2', an etching solution 30 is uniformly distributed from the upper portion of a display panel 1 意 which is intended to be thinned, along both sides of the viewing panel 1 ,, to the lower portion of the display panel 10 Share. Although the implementation of the method reveals that both sides of the display panel 10 are flowing from the upper portion of the display panel 10 to the lower portion of the display panel 10, The skilled person should be able to understand that the #etching solution can also flow from the upper portion of the display panel J to the lower portion of the display panel 10 by gravity, thereby thinning the display panel 10. More specifically, a nozzle unit or a plurality of nozzle units ‘ are mounted on the upper portion of the display panel 10 or a glazing substrate for supplying the residual solution 30. When only one nozzle unit is used, the nozzle unit is branched into two parts and is positioned on both sides of the display panel 10 or the glass substrate, so that the etching solution 30 sprayed from the two portions can follow the display. The panel 丨〇 or the glass slab flows on both sides. Alternatively, when a plurality of nozzle units are used, the plurality of nozzle units are respectively mounted on both sides of the S-member panel 10 or the glass substrate, so that the residual solution 30 sprayed from the plurality of nozzle units can be along The display panel 10 or both sides of the glass substrate flow. The flow rate of the etching solution flowing along both sides of the display panel 10 or the glass substrate may be uniform or may be changed in the process according to the needs of the user to effectively thin the display panel 10 or the glass substrate. Any material that can be used to etch glass can be used as etching solution 3(). It is preferred to use an HF solution as the etching solution 30, which is most economically effective. In addition, a flow control unit (de-mountain, ^u, no) is provided to control the flow rate of the etching gas 2 Λ > + soil preparation according to the etching degree required by a user. More preferably, the flow control unit is coupled to an automated device so that the etching time and etch thickness can be dynamically controlled from 200827315. In the method of this embodiment, the etching solution 30 flows downward from the upper portion of the display panel 10 to the lower portion of the display panel 1A. Ji Jiajia

是，在該流量控制單元的一出口處設置一通道部份（未示 出），該蝕刻溶液3 0係從此通道流出，該通道並具有一可 調整的寬度。該通道部份的寬度可依據該顯示面板10的尺 寸而增加或減少，因而可執行一有效且通用的玻璃薄化方 法。 第3 A圖為一裸露的玻璃基板表面的照片，第3 B圖為 以習知方法薄化之基板表面的照片，第3 C圖為以本發明 方法薄化之基板表面的照片。以上這些照片均為掃描式顯 微鏡照片（SEM ; X 10,〇〇〇)。如第3B圖所示，在以習知方 法於一玻璃基板表面上實施玻璃薄化處理後，在該玻璃基 板表面上產生了多數到痕，即使這些刮痕相當細微，還是 會造成南科技裝置（例如，顯示面板）出現致命性的錯誤， 因而大幅減損這些裝置的價值。因此，必須將這些表面上 有細微刮痕的薄基板丟棄。相反的，如第3 c圖所示，待 以本發明方法於一玻璃基板表面上實施玻璃薄化處理後， 該玻璃基板表面上並沒有出現刮痕。 因此’本發明用以薄化玻璃的方法與習知技術不同， 本發明方法不會在玻璃基板表面上留下刮痕。因此，可提 高玻璃基板的品質並修復其上有刮痕的玻璃基板（其依據 習知技術必須被丟棄），因此可大幅降低成本。 除以上說明外，本發明提供一種薄化玻璃的方法，其 中一钱刻溶液係藉由重力從一玻璃基板或一顯示面板的上 10 200827315 部份往下流動至該玻璃基板或顯示面板的下部份，以蝕刻 該玻璃基板或顯示面板至一欲求厚度，因而可在不大量產 生粒子的情況下’超薄化該玻璃基板或顯不面板。 當以本發明方法將一顯示面板超薄化後，不會在該顯 示面板上留下刮痕。或者，本發明方法可提供具優異品質 的薄顯示面板。 雖然本發明已揭示如上，習知技藝人士應知在不脖離 本發明精神範脅下，仍可對本發明技術作多種改良與修 飾，這些改良與修飾仍應被視為涵蓋在附隨之申請專利範 圍中。 【圖式簡單說明】 第1 A圖示出一種使用浸潰技術來薄化玻璃的傳統方法 不意圖， 第1 B圖示出一種使用喷灑技術來薄化玻璃的傳統方法 示意圖； Φ 第1 C圖示出一種使用浸潰及噴灑技術來薄化玻璃的傳 統方法示意圖； 第 2圖示出一種依據本發明一實施例來薄化玻璃之方 法的側視圖；及 ， 第3 A至3(：圖分別代表一裸露的玻璃基板表面、以習 知方法薄化之基板表面、以本發明方法薄化之基板表面的 % 照片。 11 200827315Yes, a channel portion (not shown) is provided at an outlet of the flow control unit, and the etching solution 30 flows out of the channel, the channel having an adjustable width. The width of the channel portion can be increased or decreased depending on the size of the display panel 10, so that an efficient and versatile glass thinning method can be performed. Fig. 3A is a photograph of the surface of a bare glass substrate, Fig. 3B is a photograph of the surface of the substrate thinned by a conventional method, and Fig. 3C is a photograph of the surface of the substrate thinned by the method of the present invention. All of the above photos are scanning microscopy photographs (SEM; X 10, 〇〇〇). As shown in FIG. 3B, after the glass thinning treatment is performed on the surface of a glass substrate by a conventional method, a large number of traces are generated on the surface of the glass substrate, and even if the scratches are rather minute, the south technology device is caused. (eg, display panels) have fatal errors that greatly detract from the value of these devices. Therefore, these thin substrates with fine scratches on the surface must be discarded. On the contrary, as shown in Fig. 3c, after the glass thinning treatment is performed on the surface of a glass substrate by the method of the present invention, scratches are not formed on the surface of the glass substrate. Therefore, the method of the present invention for thinning glass differs from the prior art in that the method of the present invention does not leave scratches on the surface of the glass substrate. Therefore, the quality of the glass substrate can be improved and the scratched glass substrate (which must be discarded according to the prior art) can be repaired, so that the cost can be greatly reduced. In addition to the above description, the present invention provides a method for thinning a glass, wherein a solution of the ink is flowed downward from a glass substrate or a portion of the display panel 10 200827315 to the bottom of the glass substrate or display panel by gravity. In part, in order to etch the glass substrate or the display panel to a desired thickness, the glass substrate or the panel can be ultra-thinned without generating a large amount of particles. When a display panel is ultra-thinned by the method of the present invention, no scratches are left on the display panel. Alternatively, the method of the present invention can provide a thin display panel of superior quality. While the invention has been disclosed as described above, it will be apparent to those skilled in the art that the invention may be modified and modified without departing from the spirit and scope of the invention. In the scope of patents. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A shows a conventional method for thinning glass using an immersion technique, and FIG. 1B shows a conventional method for thinning glass using a spray technique; Φ 1 Figure C shows a schematic view of a conventional method of thinning glass using a dipping and spraying technique; Figure 2 is a side view showing a method of thinning glass according to an embodiment of the present invention; and, 3A to 3 ( The figure represents a bare glass substrate surface, a substrate surface thinned by a conventional method, and a % photograph of the surface of the substrate thinned by the method of the present invention. 11 200827315

【主要元件符號說明】 10 顯示面板 20 30 蝕刻溶液 100 浸潰技術 110 内座 120 隔板 130 單元區域 140 氣泡 150 外座 200 喷灑技術 210 顯示面板 220 喷嘴 12[Main component symbol description] 10 Display panel 20 30 Etching solution 100 Immersion technology 110 Inner seat 120 Separator 130 Unit area 140 Bubble 150 Outer seat 200 Spray technology 210 Display panel 220 Nozzle 12

Claims (1)

200827315 十、申請專利範圍： 種薄化破璃的方法，其中_餘刻溶液係以一 流速或可變流速，㈣直立起的1璃基板或一顯示 的上部份’沿著該玻璃基板或顯示面板的表面往下流 該玻璃基板或顯示面板的下部份，以薄化該玻璃基板 示面板。 2·如申請專利範圍第1項所述之方法，其中用以 該蝕刻溶液的一單一噴嘴單元或複數個喷嘴單元係被 在該玻璃基板或顯示面板的上部份，且該單一喷嘴單 被分支成為兩部份在該玻璃基板或顯示面板的兩面上 者該複數個噴嘴單元係個別地被安裝在該玻璃基板或 面板的兩面上，使得該蝕刻溶液可以一固定流速或可 速沿著該玻璃基板或顯示面板的兩面往下流動。 3 ·如申請專利範圍第2項所述之方法，其中係以-溶液作為該蝕刻溶液來使用。 4·如申請專利範圍第2或3項所述之方法，其中 有一固定單元，用以固定該玻璃基板或顯示面板；以 流速控制單元，用以均勻地控制該蝕刻溶液的流速。 5.如申請專利範圍第1或2項所述之方法，其中 刻溶液流之一寬度係利用一通道部份來調整，該通道 係用以調整一可讓該蝕刻溶液流出之一出口的寬度。 固定 面板 動至 或顯 供應 安裝 元係 ，或 顯示 變流 一 HF 設置 及一 該蝕 部份 13200827315 X. Patent application scope: A method for thinning the glass, wherein the _ residual solution is at a flow rate or a variable flow rate, (4) the erected 1 glass substrate or the upper portion of the display is along the glass substrate or The surface of the display panel flows down the glass substrate or the lower portion of the display panel to thin the glass substrate display panel. 2. The method of claim 1, wherein a single nozzle unit or a plurality of nozzle units for the etching solution are on an upper portion of the glass substrate or the display panel, and the single nozzle is single Branching into two parts on both sides of the glass substrate or the display panel, the plurality of nozzle units are individually mounted on both sides of the glass substrate or the panel such that the etching solution can be fixed at a constant flow rate or speed The glass substrate or the display panel flows downward on both sides. 3. The method of claim 2, wherein the solution is used as the etching solution. 4. The method of claim 2, wherein there is a fixing unit for fixing the glass substrate or the display panel; and a flow rate controlling unit for uniformly controlling the flow rate of the etching solution. 5. The method of claim 1 or 2, wherein one of the widths of the entrained solution stream is adjusted by a channel portion for adjusting a width of an outlet through which the etching solution can flow out . The fixed panel moves to or displays the installation element, or displays the variable current HF setting and an etched portion 13
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