200819706 九、發明說明： 【發明所屬之技術領域】 本1¾明有關於對測定被檢面的傾斜角度的干涉儀的角 度靈敏度進行校準的方法。 【先前技術】200819706 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD This invention relates to a method of calibrating the angular sensitivity of an interferometer for measuring the tilt angle of a surface to be inspected. [Prior Art]
目前，爲了能夠測定被檢面的傾斜角度而構成的干涉 儀，習知的是用於光纖連接器部的傾斜研磨型套圈的前端 面測定用的干涉儀（參照下述專利前案1)。 傾斜研磨型套圈的前端面的傾斜角度（相對於與套圈 的軸線垂直的面的角度）已由JiS標準化爲8度。另一方面， 在套圈測定用的干涉儀中，可測定的傾斜角度範圍有時被 限制在5度左右，在這樣的套圈測定用的干涉儀中，使用進 行保持的專用的保持器具，以使套圈的前端面相對於測定 光轴的垂直面的傾斜角度爲4度左右，從而進行測定（參照 下述專利前案2 )。 但是，在這種傾斜角度測定用的干涉儀中，表示所觀 察的條紋條數與傾斜角度之間的對應關係的角度靈敏度已 被預先設定，由於因干涉儀的設置誤差及常年使用産生的 20誤差等，有時需要校準暫且設定的角度靈敏度。 目刖’作爲進行這樣校準的方法，公知的是，將由成 爲权準物件的干涉儀測量的被檢面的傾斜，和由自動準直 儀等基準角度儀測定相同被檢面而得的傾斜進行比較來校 準的方法’但是’由於需要高精度地進行成爲校準物件的 5 200819706 干涉儀及基準角度儀的各校準，並且需要改變被檢面的傾 斜進打多次測定，所以存在校準所需要的程式繁雜 很多時間的問題。 m，本發明中請人提出了使用具有相互所呈的 5肖度已知的兩個反射面的校準用夾具的校準方法，並已經 對專利局公開（參照下述專利前案3)。該校準方法，由於 能夠基於由成爲校準物件的干涉儀拍攝的一個條紋圖像進 _ 行校準，因此可容易地進行角度靈敏度的校準。 專利前案1:日本特開2004 — 37167號公報。 10 專利前案2 :日本特開2004- 286595號公報。 專利前案3:日本特願2〇〇5 — 102934號說明書。 但是，所述專利前案3所記載的校準方法存在難以適用 於套圈測定用的干涉儀這一問題。即在該校準方法中，前 提是使用具有兩個反射面的校準用夾具，而由於在套圈測 15定用的干涉儀的場合，需要使校準用的夾具相當小地形 _ 成，所以難以高精度地製作兩個反射面（尤其是相互的邊 •界部分）。 另外’該校準方法在干涉儀的角度靈敏度相對於測定 角度的大小具有線性（相對於被檢面的傾斜角度的變化 20 的、觀察到的干涉條紋的條數變化的比例爲一定）時是有 效的’但是’在角度靈敏度具有非線性時，恐怕不能進行 高精度的校準。 由於套圈測定用干涉儀所測定的傾斜角度限定在夾著 基準角度（例如4度）的規定的狹小範圍（例如，±0.1度左 6 200819706 右的=範圍）’所以對於在該角度範圍㈣角度靈敏度， 如果能谷易且高精度地校準，是極其有益的。 【發明内容】 5 、科明目的在於提供—種干涉儀的角度靈敏度校準方 法’其可容易且高精度地校準所測定的傾斜角度限定在規 定的角度範圍内的傾斜角度測定用的干涉儀的角度 度。 ) 本發明提供-種干涉儀的角度靈敏度校準方法，所述 川干涉儀拍攝承載有被檢面的傾斜資訊的干涉條紋圖像，並 基於該干涉條紋圖像測定所述被檢面的傾斜角度，所述干 f儀的角度靈敏度校準方法對所述干涉儀的角度靈敏度進 行权準’係依次進行以下步驟： 角度靈敏度算式設定步驟，其在與所述被檢面的傾斜 15角^應的規定的被測定角度範圍内，視爲在所述被檢面 的每單位長度的干涉條紋的條數？和所述傾斜角度Θ之 間^使用了規定的比例係數k的比例關係成立，設定下式 所示的角度靈敏度算式。 ^測定步驟，其用所述干涉儀測定以呈所述被測定角度 2〇乾圍内的基準傾斜角度_方式蚊的基準傾斜面，求出該 基準傾斜面的每單位長度的條紋條數化，並且基於該條紋 、數pl和下式（1)什异所述基準傾斜角度α的測定臨時值（饭 値）αι，從而得到下式（2)的關係。 以及，权準步驟，其基於所述條紋條數A和所述基準 傾斜角度α且通過下式（3)求出已校準的比例係數匕，將該已 7 200819706 式（4)所示的已校準的角度靈敏度算式。 校準的比例係數kl和下式⑴的比例係數k難，從而得到下 ⑴ (2)In the interferometer for measuring the front end surface of the inclined polishing type ferrule for the optical fiber connector portion, the interferometer for measuring the inclination angle of the surface to be inspected is known (refer to the following patent 1) . The inclination angle of the front end face of the inclined grinding type ferrule (angle with respect to the plane perpendicular to the axis of the ferrule) has been standardized to 8 degrees by JiS. On the other hand, in the interferometer for measuring the ferrule, the range of the tilt angle that can be measured is limited to about 5 degrees, and in such an interferometer for measuring the ferrule, a dedicated holder for holding is used. The measurement was performed so that the inclination angle of the front end surface of the ferrule with respect to the vertical plane of the measurement optical axis was about 4 degrees (refer to Patent Reference 2 below). However, in such an interferometer for measuring the inclination angle, the angular sensitivity indicating the correspondence relationship between the number of stripes to be observed and the inclination angle has been set in advance, due to the setting error of the interferometer and the use of the perennial 20 Errors, etc., sometimes need to be calibrated for the temporarily set angle sensitivity. As a method of performing such calibration, it is known that the inclination of the surface to be inspected measured by the interferometer which becomes the weighting object is performed by measuring the inclination of the same surface to be inspected by a reference angle meter such as an automatic collimator. The method of calibrating is 'but' because there is a need to perform high-precision calibration of the 5 200819706 interferometer and the reference angle meter which are calibration objects, and it is necessary to change the inclination of the surface to be inspected multiple times, so there is a need for calibration. The program is complicated by a lot of time issues. m, in the present invention, a calibration method using a calibration jig having two reflection surfaces known to each other is proposed, and has been disclosed to the Patent Office (refer to Patent Prep. 3 below). This calibration method makes it easy to calibrate the angle sensitivity because it can be calibrated based on a stripe image taken by an interferometer that becomes a calibration object. Patent Proposal 1: Japanese Laid-Open Patent Publication No. 2004-37167. 10 Patent Proceedings 2: Japanese Laid-Open Patent Publication No. 2004-286595. Patent Preamble 3: Japanese Patent No. 2〇〇5—102934. However, the calibration method described in the third patent document has a problem that it is difficult to apply to an interferometer for measuring a ferrule. That is, in the calibration method, the premise is that a calibration jig having two reflecting surfaces is used, and in the case of an interferometer for measuring the ferrule 15, it is necessary to make the jig for calibration relatively small in size, so that it is difficult to be high. Accurately create two reflective surfaces (especially the edges of each other). In addition, the calibration method is effective when the angular sensitivity of the interferometer is linear with respect to the magnitude of the measurement angle (the ratio of the change in the number of observed interference fringes with respect to the change in the inclination angle of the detected surface 20 is constant). 'But' when the angular sensitivity is nonlinear, I am afraid that high-precision calibration is not possible. The inclination angle measured by the interferometer for the ferrule measurement is limited to a predetermined narrow range (for example, ±0.1 degrees left 6 200819706 right = range) sandwiching the reference angle (for example, 4 degrees), so for the angle range (four) Angle sensitivity, if it can be easily and accurately calibrated, is extremely beneficial. SUMMARY OF THE INVENTION 5. The purpose of the invention is to provide an angular sensitivity calibration method for an interferometer, which can easily and accurately calibrate an interferometer for measuring an inclination angle in which a measured inclination angle is limited within a predetermined angle range. Angle degree. The present invention provides an angle sensitivity calibration method of an interferometer that captures an interference fringe image carrying tilt information of a detected surface, and measures an inclination angle of the detected surface based on the interference fringe image The angle sensitivity calibration method of the dry meter performs the following steps on the angular sensitivity of the interferometer: the angle sensitivity calculation formula setting step is performed at an angle of 15 degrees with respect to the detected surface What is the number of interference fringes per unit length of the surface to be inspected within the specified measured angle range? The proportional relationship between the tilt angles 使用 and the predetermined scale factor k is established, and the angle sensitivity formula shown by the following equation is set. a measuring step of measuring the number of stripes per unit length of the reference inclined surface by measuring the reference inclined surface of the reference tilt angle_the mosquito in the dry angle of the measured angle 2〇 by the interferometer And based on the stripe, the number pl, and the measurement temporary value (rice meal) αι of the reference inclination angle α which is different from the following formula (1), the relationship of the following formula (2) is obtained. And a weighting step based on the stripe number A and the reference tilt angle α and determining a calibrated scale factor 通过 by the following equation (3), which has been shown in equation (4) Calibrated angular sensitivity formula. It is difficult to calibrate the proportional coefficient kl and the proportional coefficient k of the following formula (1) to obtain the next (1) (2)
p = k · Θ Pi = k-a! k]= p]/a p= ki · 0 在所述測定步驟中，使所述基準傾斜面相對於所述干 • ㈣自轉規定角度’在該自轉操作前後的兩個旋轉位置分 別進行測定，基於這兩個測定結果，使用規定的運算式， 10計算所述基準傾斜角度(X的測定臨時值αι。 根據本發明干涉儀的肖度靈敏度校準方法，在與被檢 面的傾斜角度對應的規定的被測定角度範圍内，視爲在被 檢面的每單位長度的干涉條紋的條數和傾斜角度之間比例 關係成立而設定規定的角度靈敏度算式，基於以呈被測定 肖度Ι&圍内的基準傾斜肖度的方式設定的基準傾斜面的測 _ 疋結果，校準該設定的角度靈敏度算式的比例係數，所以， 起到如下的效果。 即’因爲其與現有方法不同，不需要使用具有兩個反 射面的权準用夾具’所以對於套圈測定用的干涉儀也可適 2〇 用。 另外’如套圈測定用的干涉儀所述，在所測定的傾斜 角度限定在規定的狹小角度範圍内的干涉儀中，即使角度 風敏度在寬範圍具有非線性時，也可以通過將所述基準傾 斜角度設定爲該狹小角度範圍内的角度，來容易並且高精 200819706 度地校準用於該角度範圍内的測定解析的角度靈敏度 【實施方式】 下面，參照附圖對本發明的實施方式進行詳細說明。 圖1是表示應用本發明一實施方式的干涉儀的結構示意 圖’圖2是表示具有基準傾斜面的校準用失具的結構的立體 圖。 圖1所不的干涉儀是基於所拍攝的干涉條紋圖像測定 被檢面的傾斜角度的干涉儀，其具有拍攝干涉條紋圖像的 菲索型的干涉儀主體卜和對拍攝的干涉條紋圖像進行解析 的解析部2。 所述干涉儀主體丨具有：輸出高可干涉性的光束的光源 部11、將從該光源部u射出的發散光束變成平行光束的準 15 20 直透鏡12、置於來自料直透鏡12的平行光束的光路上 的分光器13及基準板14。 另外’該干涉儀主體㈣雜被檢面反射的光束和從所 速基準板14的基準面14a反㈣基準光的干涉，得到承載有 2面的形狀及傾斜資訊的干涉條紋，其除所述構成外還 八有·使所得制干涉條紋成像的成像透鏡15 干涉條紋的攝影機16。 另-方面，所述解析部2具有：進行圖像處理和條咬解 析的條紋解析裝置21、鍵盤等輸人裝置22、和顯示裝置23。 所述條紋騎裝置21由電财構成，具有 用 圖像處理及條紋解析的程式的存儲部、和進行程式的2 及各種運㈣㈣部# ’基於被所述攝影機Μ攝入的干涉 25 200819706 條紋’可求出被檢面的傾斜角度。 另外’在圖1所示的干涉儀中，表示所觀察到的條紋 條數和傾斜角度之間的對應關係的角度靈敏度被預先設 疋’所a又疋的角度靈敏度存儲於所述條紋解析裝置21的記 5 憶體等中。 進而，圖1所示的干涉儀設計爲，測定的傾斜角度被限 定於夾著基準角度（例如4度）的規定的狹小角度範圍（例 如土〇· 1度的角度範圍）。作爲這樣的干涉儀例如可例舉 所述的專利前案1、2記載的傾斜研磨型套圈測定用的干涉 10 儀作爲其具體的形態。 15p = k · Θ Pi = ka! k] = p] / ap = ki · 0 In the measuring step, the reference inclined surface is made with respect to the dry (four) rotation specified angle 'two before and after the rotation operation The rotation position is measured separately, and based on the two measurement results, the reference inclination angle (X measurement temporary value α1) is calculated using a predetermined calculation formula. The sensitivity sensitivity calibration method of the interferometer according to the present invention is In the predetermined measurement angle range corresponding to the inclination angle of the inspection surface, it is considered that the proportional relationship between the number of interference fringes per unit length of the inspection surface and the inclination angle is established, and a predetermined angle sensitivity calculation formula is set, based on The measured result of the reference inclined surface set by the method of measuring the reference tilt angle in the range of the degree Ι & and the scale factor of the set angle sensitivity formula is calibrated, so that the effect is as follows. In the conventional method, it is not necessary to use a right-purpose jig having two reflecting surfaces. Therefore, the interferometer for measuring the ferrule can also be used. According to the instrument, in the interferometer in which the measured tilt angle is limited to a predetermined narrow angle range, even if the angular wind sensitivity has a nonlinearity in a wide range, the reference tilt angle can be set to the narrow Angles in the range of angles are easy and high-precision 200819706 degree calibration of angular sensitivity for measurement analysis in the range of angles. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 2 is a perspective view showing a configuration of a calibration tripper having a reference inclined surface. The interferometer shown in FIG. 1 measures the detected surface based on the captured interference fringe image. The interferometer of the oblique angle includes a pessonic type interferometer main body that captures an interference fringe image and an analysis unit 2 that analyzes the captured interference fringe image. The interferometer main body has: high output interference The light source unit 11 of the luminous flux, the divergent beam emitted from the light source unit u, and the quasi-15 20 straight lens 12 of the parallel beam are placed The beam splitter 13 and the reference plate 14 on the optical path of the parallel beam of the straight lens 12. The beam of the interferometer body (four) reflected by the surface of the interferometer and the reference plane 14a of the velocity reference plate 14 are inverted (four) reference light. Interference is performed to obtain an interference fringe carrying a shape of two sides and tilt information. In addition to the above configuration, the imaging lens 15 that images the resulting interference fringe is interfered with the stripe camera 16. In addition, the analysis unit 2 includes a stripe analysis device 21 for performing image processing and strip bit analysis, an input device 22 such as a keyboard, and a display device 23. The stripe riding device 21 is composed of electricity, and has a program for image processing and stripe analysis. The storage unit and the program 2 and the various (4) (4) parts # 'based on the interference 25 in the camera Μ 200819706 stripe' can determine the tilt angle of the surface to be inspected. In addition, in the interferometer shown in FIG. 1, the angular sensitivity indicating the correspondence relationship between the number of stripes to be observed and the inclination angle is stored in the stripe resolution device in advance. Note 2 of 21 recalls the body and so on. Further, the interferometer shown in Fig. 1 is designed such that the measured tilt angle is limited to a predetermined narrow angle range (e.g., a range of angles of 1 degree) sandwiching the reference angle (e.g., 4 degrees). As such an interferometer, for example, the interference meter for measuring the inclined polishing type ferrule described in the above-mentioned Patent Nos. 1 and 2 can be exemplified as a specific embodiment. 15
圖2所示的校準用夾具3是實施後述的干涉儀角度靈敏 度校準方法時使用的夾具，其在圓柱狀的構件的前端具有 基準傾斜面31。該基準傾斜面31的構成爲：具有與圖丨所示 的干涉儀作爲測定物件的被檢面的傾斜角度相對應的、規 定的被測定角度範圍内（例如，夾著4度的土〇1度的角度範 圍内）的基準傾斜角度α(在圖2中，作爲校準用失具3的^ 心軸線S和基準傾斜面31的法線Τ所成的角度來表示） 下面對有關本發明的-實施方式的干涉儀角I靈敏度 校準方法的實施順序進行說明。 又 <1>首先，在所述被測定角度範圍内，視爲在被檢面的 每單位長度的干涉條紋的條數Ρ和所述傾斜角度0之 用了規定的比例係數k的比例關係成立，設定下式（1)所厂、使 角度靈敏度算式（角度靈敏度算式設定步驟）。 (1) 20 200819706 <2>其次，如圖1所示，在干涉儀上設置校準用夾具$ 亚進打測定，求出基準傾斜面的每單位長度的條紋條數The calibration jig 3 shown in Fig. 2 is a jig used in the interferometer angle sensitivity calibration method described later, and has a reference inclined surface 31 at the tip end of the columnar member. The reference inclined surface 31 is configured to have a predetermined angle range to be measured corresponding to the inclination angle of the surface to be inspected of the interferometer as the object to be measured (for example, the bandage 1 sandwiched by 4 degrees) The reference tilt angle α (in the angular range of degrees) (in FIG. 2, the angle formed by the center axis S of the calibration trip 3 and the normal line 基准 of the reference inclined surface 31) is as follows. The implementation sequence of the interferometer angle I sensitivity calibration method of the embodiment will be described. Further, <1> First, in the range of the measured angles, the relationship between the number of interference fringes per unit length of the surface to be inspected and the predetermined scale factor k of the tilt angle 0 is considered. When it is established, the angle sensitivity calculation formula (the angle sensitivity calculation formula setting step) of the following formula (1) is set. (1) 20 200819706 <2> Next, as shown in Fig. 1, a calibration jig is set on the interferometer, and the number of stripes per unit length of the reference inclined surface is obtained.
Pi ’亚且基於該條紋條數”和上式（1)計算基準傾斜角度以的 測定臨時值ajan^/k)，從轉到下式（2)的關係（測定 5 步驟）。 pi = k · αι ......(2) <3>其次，基於求出的條紋條數以和基準傾斜角度以， 用下式（3)求出已校準的比例係數匕，將該已校準的比例係 數匕和上式（1)的比例係數k置換，得到下式（4)所示的已校 10 準的角度靈敏度算式（校準步驟）。 ki= Ρι/α ......(3) θ ·••…（4) 通過以上的順序，角度靈敏度的校準結束。也就是說， 使用通過所述順序得到的角度靈敏度算式（4)，計算被檢面 15 的傾斜角度即可。 另外’在干涉儀上設置所述校準用夾具3時，例如，可 以使用所述的專利前案1、2記載的夾緊裝置及其保持器具。 而且，在所述順序(2)中，是以設置後的校準用夾具3 的中心軸線S (參照圖2 )和干涉儀的測定光轴r (參照圖j ) 20 相互一致爲前提的。但是，在實際的設置狀況中，也可能 産生在校準用夾具3的中心軸線s相對於干涉儀的測定光軸 R傾斜的狀態下進行設置的情況。 考慮到這一點，在所述順序（2)的測定步驟中，可使用 所述的專利前案1記載的被稱爲反轉法的方法。該反轉法是 11 200819706 如下所述的方法··在柱狀構件保持於夾緊裝置的狀態下， 使柱狀構件相對於干涉儀自轉夫見定角度，在兩個旋轉位置 上，分別檢測出干涉儀的基準面和柱狀構件前端面之間的 相對角度，基於該檢測出的兩個角度，使用規定的運算式 5測定該柱狀構件的軸的傾斜，所述規定角度爲180度的情況 下，作爲所述運算式，例如使用下式（5)所示的算式。 ai==(mi- m2+ 180)/2 ··· ”·（5) 其中’ ^^表示在第一旋轉位置檢測出的、干涉儀的基 準面和柱狀構件前端面之間的相對角度，叫表示在第二旋 10轉位置檢測出的、干涉儀的基準面和柱狀構件前端面之間 的相對角度。 即，在使用該反轉法時，使所述基準傾斜面相對於干 涉儀繞中心軸線S自轉18〇度，並在兩個旋轉位置分別進行 測定，基於兩個測定結果使用所述運算式（5)計算出基準傾 15 斜角度a的測定臨時值〜。另外，在用於所述說明的各算式 中，將傾斜角度作爲向量來處理。 以上說明了本發明的一個實施方式，不過本發明不限 於所述的實施方式。例如，在所述實施方式中，使用了圓 柱狀的校準用夾具，但也可以使用形成爲棱柱狀的校準用 20 夾具。 另外，在所述實施方式中，示出了將本發明應用於傾 斜研磨型套圈測定用的干涉儀的例子，但是，本發明也可 以合適地應用於對測定的傾斜角度限定於規定的角度範圍 的各種傾斜角度測定用的干涉儀，進行其角度靈敏度的校 12 200819706 準的情況。 【圖式簡單說明】 圖1是表示應用本發明一實施方式的干涉儀的結構示意圖。 5 圖2是表示具有基準傾斜面的校準用夾具的結構的立體圖。 解析部2 光源部11 分光器13 基準面14a 攝影機16 輸入裝置22 基準傾斜面31 中心軸線S 基準傾斜角度αPi 'i is based on the number of stripe strips' and the above formula (1) calculates the reference tilt angle by the measured temporary value ajan^/k), and shifts to the relationship of the following equation (2) (measurement 5 steps). pi = k · αι (2) <3> Next, based on the obtained number of stripes and the reference tilt angle, the calibrated scale factor 求出 is obtained by the following equation (3), and the calibration is performed. The proportional coefficient 匕 is replaced with the proportional coefficient k of the above formula (1) to obtain the corrected angular sensitivity formula (calibration step) shown in the following equation (4). ki= Ρι/α ......( 3) θ ·•• (4) By the above procedure, the calibration of the angle sensitivity is completed. That is, the angle of inclination of the surface 15 to be inspected can be calculated using the angle sensitivity formula (4) obtained by the above procedure. In addition, when the calibration jig 3 is provided on the interferometer, for example, the clamp device described in the aforementioned Patent Documents 1 and 2 and the holder thereof can be used. Further, in the above sequence (2), The center axis S of the calibration jig 3 after installation (see FIG. 2) and the measurement optical axis r of the interferometer (see FIG. j) 20 are identical to each other. However, in the actual installation state, the center axis s of the calibration jig 3 may be set in a state of being inclined with respect to the measurement optical axis R of the interferometer. In view of this, in the above, In the measurement step of the sequence (2), the method called the inversion method described in the above-mentioned Patent No. 1 can be used. The inversion method is 11 200819706. The method described below is held in the columnar member. In the state of the tight device, the columnar member is angled with respect to the interferometer, and the relative angle between the reference surface of the interferometer and the front end surface of the columnar member is detected at two rotational positions, based on the detection. In the two angles, the inclination of the axis of the columnar member is measured using a predetermined calculation formula 5. When the predetermined angle is 180 degrees, the equation shown by the following formula (5) is used as the calculation formula. Ai==(mi- m2+ 180)/2 ··· ”·(5) where '^^ indicates the relative angle between the reference plane of the interferometer and the front end face of the columnar member detected at the first rotational position , called the detection in the second rotation 10 rotation position The relative angle between the reference surface and a front surface of the columnar member interferometer. That is, when the inversion method is used, the reference inclined surface is rotated by 18 degrees with respect to the interferometer about the central axis S, and measured at two rotational positions, and the arithmetic expression is used based on the two measurement results (5). ) Calculate the measured temporary value ~ of the reference tilt angle a. Further, in each of the equations used for the description, the tilt angle is treated as a vector. One embodiment of the present invention has been described above, but the present invention is not limited to the embodiment described. For example, in the above-described embodiment, a cylindrical calibration jig is used, but a calibration 20 jig formed in a prism shape may be used. Further, in the above-described embodiment, an example in which the present invention is applied to an interferometer for measuring an inclined polishing type ferrule is shown. However, the present invention can also be suitably applied to a measurement of an inclination angle to a predetermined angle. The interferometer for measuring various tilt angles in the range is subject to the accuracy of the angle 12 200819706. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic structural view showing an interferometer to which an embodiment of the present invention is applied. 5 is a perspective view showing a configuration of a calibration jig having a reference inclined surface. Analysis unit 2 Light source unit 11 Beam splitter 13 Reference plane 14a Camera 16 Input device 22 Reference inclined surface 31 Center axis S Reference tilt angle α
【主要元件符號說明】 干涉儀主體1 夾具3[Main component symbol description] Interferometer main body 1 Fixture 3
準直透鏡12 基準板14 成像透鏡15 條紋解析裝置21 顯示裝置23 光軸R 法線TCollimating lens 12 Reference plate 14 Imaging lens 15 Stripe analysis device 21 Display device 23 Optical axis R Normal line T
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