200813259 九、發明說明： 【發明所屬之技術領域】 本發明是關於藉由電沉積而製造銅箔、鐵箔、鎳箔和 不鏽箔等等金屬箔時所使用的電沉積鼓輪。 【先前技術】 以齡的電解金屬如言，特別是賴，大量的被使 用在印刷電路上’在製造方面使聽備有旋轉陰極式電沉BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrodeposition drum used for producing a metal foil such as a copper foil, an iron foil, a nickel foil, and a stainless foil by electrodeposition. [Prior Art] Age-old electrolytic metal, in particular, is used in a large number of printed circuits. In terms of manufacturing, the hearing has a rotating cathode type electric sink.
積鼓輪之電解賴製造裝置，圖2所示為其_部分破斷正 面圖’圖1所示為其代表例。 在圖卜配置在電解槽e中的旋轉陰極式電沉積鼓輪 a ’藉=軸承c、d支撐使旋轉轴b可以轉動，其下侧的一 口I5刀疋次泡在電解液f中，面對陰極的電沉積鼓輪a的電 /冗積面在電解液f中設置有陽極g。而且以直流電源h連 接電沉積鼓輪a和陽極g。在電贿鼓輪a及陽極g通電 後’讓電沉積鼓輪a轉動，在浸泡電解液£的時間内，在 ”輪a的電沉積面會析出_，當達到所規定的金 屬箱厚度後，從電沉積面將銅猪剝離、縣在捲取鼓輪上， 如此連續的製造。 ±在圖2所說明的，是以前電沉積鼓輪a的構造，將外 殼2燒嵌在炭素鋼製、不銹鋼製或者是銅合金製的内鼓輪 ^外周面而形成—体化，電流是由外殼2流通過連接的 Μ成►輪1 〇 像這樣以前的構造，外殼和内鼓輪職健合部位， 為在燒嵌_高溫加熱，以及在通電時電解液中和空氣 200813259 中，由於反覆的加溫和冷卻，無法避免地造成燒喪的外殼 内周面和·輪外周面之間接觸不均勻的狀況，如同圖3 所示的’在接合界面上產生的間隙R。因為這樣造成通電 狀況不均自’產生所謂的通電賴，及電崎物的金屬箱 m的厚度不均勻、發生異常析出的情形，更還有因局部過 熱而變色，產生所謂的熱斑。 為改善在以前這樣的構造之電_鼓輪的燒喪接合部 位’所產生的問題點，有提出各式各樣的提案。例如、在 内鼓輪的表面形成溝部等，以減少外殼和峡輪的接觸面 積，藉由提高接_壓力，讓通電效率提_技術提案(例 如请參照專利申請公告昭58-24507號公報 (JP-S58-24507B))。然而實際上，利用該技術在某程度上改 善了通電狀況不均勻的問題，卻無法充分抑制熱斑的發 生^且由於接_積的齡，紐通過大電流而造成通 電知失變大。輕有必要更加剩齡發生和提高通電效 率而使得生產性提升。 【發明内容】 本發明是有胁背景驗賴發，其目的在於提供- 電沉積鼓輪可崎糖斑的發生，在高生紐下製造高品 質的金屬箔。 ^發明者為了解決上述關題，認真檢討後的結論是 在内政輪喊複數的溝部，藉由在該溝勒填充良好導電 f生的低;谷融。金，其熱膨脹率大於該内鼓輪和該外殼發 現可以解決上物題，目而絲本發明。 200813259 亦即藉由本發明可以提供一電沉積鼓輪，其具有内鼓 輪和圓筒狀外殼配置於該内鼓輪的外周，在該内鼓輪和該 外嘁之間形成溝部，在該溝部充填有導電性的低溶融合 金，其熱膨脹率大於該内鼓輪和該外殼，且其融點在15(rc 以下。 本發明所提供的電沉積鼓輪，因為其燒嵌接合部是全 面的圓螬面，其接合狀況是完全地密封，所以電流均勻地 分佈，可以抑制熱斑等等通電斑點的弊端，由於提升通電 效率和全體的通電量而提升了生產性。 藉由内鼓輪和外殼的燒嵌接合界面無間隙地全面接 著，可以得到一體化的電沉積鼓輪，在本發明的電沉積鼓 輪，如上所述在内豉輪的外周面形成複數的溝部，在該溝 部填免有導電性且融點在150°C以下的低溶融合金，其熱 膨脹率大於該内鼓輪和該外殼，並且將外殼燒嵌在填充有 此低溶融合金的内鼓輪外面。在内鼓輪形成有溝部，由於 内鼓輪和外殼的接觸面積減少，而使得接觸面壓力變大， 得到密封接觸的狀態。另一方面+填充在溝部的導電性低 溶融合金’其熱膨服率大於該内鼓輪和該外殼，且其融點 在150°C以下，當通電時在高溫狀態下，由於其具有接著 劑的功能’提南密封性—因而在圓筒面全面可得到完全密 封的燒嵌接合界面。 在本發明之中，形成於内鼓輪的溝部裡溶融填充有低 溶融合金，其融點為150°C，相較於内鼓輪和外殼的融點， 乃是非常低。所使用的填充材料之組成條件為其熱膨脹率 200813259 大於内鼓輪和外殼，而且必須有良好的導電率，以及其融 點在150C以下。只要可以達成本發明的目的，熱膨脹率 以及導電率可以適當的設定。就填充材料而言，例如絲 (Βι)、錯(Pb)、錫(Sn)和銦(in)等等都很適合使用，在本發明 的低溶融合金最好具有優越的耐健。觀低溶融合金填 充用的溝部之形狀和大小，同樣的可以適當的設定 。此外 在發明中’填充著低溶融合金的溝部，並不限定於如後述 實施六所不’在内鼓輪的外周面上軸溝部，也包含在外 殼和内鼓輪之間所形成的間隙。 —就低溶融合金的填充方法而言，可以加熱溶融該低溶 融合金，使其流入清部。 在本發明的電沉積鼓輪，内鼓輪和外殼是使用通常使 用的素材’具體㈣，做為内鼓輪的素材，可以使用軟鋼、 銅、不鏽鋼等等，有必要時也可以施以細、鍍銀等等、 而做為外殼的储，可以伽m喊是這些的 合金，或是不鏽鋼或是將其鍍鉻的東西等等。 【實施方式】 以下舉實施例更加詳細的說明本發明。 (實施例1) 圖4是關於本發明的一個態樣之電沉積鼓輪以示出其 内鼓輪和外殼的燒喪接合界面。在此電沉積鼓輪a是由軟 奴鋼製内鼓輪1和厚度t = 4 5 mm的鈦製外殼2燒嵌於其外 周。在該軟碳峨峡輪1的相面，沿賴周方向形成 複數的溝部4，在該溝部4填充有低溶融合金3。關於製造 200813259 電沉積鼓輪a，在軟碳鋼製内鼓輪丨已旋削加工的外周面， 其寬w==3mm、深h = 的溝部4是藉由在内鼓輪}的圓 周方向經旋削加工而複數地形成。所以在該溝部4填充經 加熱溶融的低溶融合金3之後，表面經過機械加工處理使 之平滑’接著將已加熱外殼2燒嵌其上所製造。The electrolytic drum manufacturing apparatus of the drum wheel is shown in Fig. 2 as a partial broken front view thereof. The rotary cathode type electrodeposition drum a' disposed in the electrolytic cell e is supported by the bearings c and d to rotate the rotating shaft b, and the lower side of the I5 knife is bubbled in the electrolyte f. The electric/short surface of the electrodeposited drum a of the cathode is provided with an anode g in the electrolyte f. Further, the electrodepositing drum a and the anode g are connected by a DC power source h. After the electric brigade drum a and the anode g are energized, 'the electrodepositing drum a is rotated, and during the time of immersing the electrolyte, the electrodeposition surface of the wheel a will be precipitated _, when the specified metal box thickness is reached. The copper pig is peeled off from the electrodeposited surface, and the county is wound on the drum, so that it is continuously manufactured. ± As shown in Fig. 2, the structure of the electrodeposited drum a is previously, and the outer casing 2 is fired in carbon steel. , stainless steel or copper alloy inner drum wheel ^ outer surface to form a body, the current is flown by the outer casing 2 through the connection of the ► into the wheel 1 〇 like the previous structure, the outer shell and the inner drum The part, in the heat of the firing _ high temperature, and in the electrolyte neutralization air 200813259, due to the repeated heating and cooling, inevitably caused the contact between the inner circumferential surface of the casing and the outer circumferential surface of the wheel The uniform condition is as shown in Fig. 3, 'the gap R generated at the joint interface. Because of this, the energization condition is uneven, the so-called energization is caused, and the thickness of the metal box m of the electric object is uneven, and an abnormality occurs. The situation of precipitation, but also because of partial over The heat is discolored and the so-called hot spot is generated. In order to improve the problems caused by the burning joint portion of the electric drum of the prior structure, various proposals have been made. For example, on the inner drum. A groove or the like is formed on the surface to reduce the contact area between the outer casing and the girder, and the power supply efficiency is improved by increasing the connection pressure. (For example, refer to Patent Application Publication No. Sho 58-24507 (JP-S58-24507B)) However, in practice, the technique is used to improve the problem of uneven power supply to a certain extent, but the occurrence of hot spots cannot be sufficiently suppressed, and due to the age of the connection, the current is increased by the large current. It is necessary to have more residual age and improve the power-on efficiency to improve the productivity. [Invention] The present invention is a threatening background test, the purpose of which is to provide - the occurrence of the electrodeposited drum can be smear, in the high birth Under the manufacture of high-quality metal foil. In order to solve the above problems, the inventor concluded that the conclusion of the serious review is that the internal circle shouts the plural ditch, by filling the groove with a good conductivity, and the low; Gu Rong. The invention has the advantages that the thermal expansion rate is greater than that of the inner drum and the outer casing, and the present invention can be solved. 200813259, that is, by the present invention, an electrodeposition drum having an inner drum and a cylindrical outer casing can be provided. a peripheral portion of the inner drum, a groove portion is formed between the inner drum and the outer casing, and the groove portion is filled with a conductive low-melting fusion gold having a thermal expansion coefficient greater than that of the inner drum and the outer casing, and the melting point thereof is 15 (rc or less.) The electrodeposited drum provided by the present invention has a uniform rounded surface because its firing joint is completely sealed, so that the current is uniformly distributed, and it is possible to suppress heat spots such as hot spots. The disadvantage is that the productivity is improved by the improvement of the power-on efficiency and the total amount of power-on. The integrated electrodeposited drum can be obtained by the burn-in joint interface of the inner drum and the outer casing without any gap, in the present invention. In the electrodeposited drum, as described above, a plurality of groove portions are formed on the outer circumferential surface of the inner ring wheel, and the low-melting fusion gold having conductivity and melting point of 150 ° C or less is filled in the groove portion, and the coefficient of thermal expansion is larger than the inner portion. Wheel and the housing, and the housing is filled with a shrink fitting in this low-melted metal in the outer drum. A groove portion is formed in the inner drum, and the contact surface pressure is increased due to a decrease in the contact area between the inner drum and the outer casing, and a sealed contact state is obtained. On the other hand, the conductive low-melting fusion gold filled in the groove portion has a higher heat expansion rate than the inner drum and the outer casing, and its melting point is below 150 ° C, and when it is energized, it is at a high temperature, because it has the following The function of the agent 'Tinan sealability - thus providing a fully sealed burn-in joint interface on the cylindrical surface. In the present invention, the low-melting fusion gold is melted and filled in the groove portion of the inner drum, and its melting point is 150 ° C, which is very low compared to the melting point of the inner drum and the outer casing. The composition of the filler material used is that its thermal expansion rate is higher than that of the inner drum and the outer casing, and it must have good electrical conductivity and its melting point below 150C. The coefficient of thermal expansion and the electrical conductivity can be appropriately set as long as the object of the present invention can be attained. As the filler material, for example, silk (Pic), erbium (Pb), tin (Sn), and indium (in) are suitable for use, and the low-melting fusion gold of the present invention preferably has superior durability. The shape and size of the groove portion for the low-melting fusion gold filling can be appropriately set. Further, in the invention, the groove portion filled with the low-melting fusion gold is not limited to the groove portion on the outer circumferential surface of the inner drum as described later, and includes a gap formed between the outer casing and the inner drum. - In the case of the filling method of the low-melting fusion gold, the low-melting fusion gold can be heated and melted to flow into the clear portion. In the electrodeposited drum of the present invention, the inner drum and the outer casing are made of the commonly used material 'specific (four), as the material of the inner drum, and can be made of mild steel, copper, stainless steel, etc., if necessary, fine Silver plating, etc., as a storage for the outer shell, can be called the alloy of these, or stainless steel or chrome-plated things and so on. [Embodiment] Hereinafter, the present invention will be described in more detail by way of examples. (Embodiment 1) Fig. 4 is an electrodeposition drum relating to an aspect of the invention to show a burnt joint interface of the inner drum and the outer casing. Here, the electrodeposited drum a is burned in the outer periphery of the inner drum 2 made of soft steel and the outer casing 2 made of titanium having a thickness t = 4 5 mm. On the opposite side of the soft carbon gorge wheel 1, a plurality of groove portions 4 are formed in the circumferential direction, and the groove portion 4 is filled with the low-melting fusion gold 3. Regarding the manufacture of the 200813259 electrodeposited drum a, the outer peripheral surface of the drum rim which has been turned in the soft carbon steel, the groove portion 4 having the width w==3 mm and the depth h = is the circumferential direction of the inner drum} It is formed by a plurality of turning processes. Therefore, after the groove portion 4 is filled with the heat-dissolved low-melting fusion gold 3, the surface is mechanically treated to smoothen it, and then the heated outer casing 2 is burned and formed thereon.
就低溶融合全3而言，所使用的合金其組成為Bi:5〇 質量百分比、Pb:30質量百分比和Sn:2〇質量百分比。此合 金3的熱膨脹率高於軟破鋼製内鼓輪1及鈦製外殼2;融 點在90〜95°C，财敍性良好。 在使用電>儿積鼓輪a時，内鼓輪和外般的接觸部份之 接觸壓力不是非常咼 > 在弱的部份，由於通電時發熱，使 得溶融的導電性低溶融合金移動的結果，低溶融合金做為 速接内鼓輪和外殼的接觸界面全體之接著材的功能，實現 全面地接觸的狀態。 使用電沉積鼓輪a製造金屬箔的結果，可以抑制熱斑 等等通電斑點的弊害，以大電流通電，高速的製造速度， 製造均勻厚度的高品質金屬箔。 (實施例2) 圖5是關於本發明的其他態樣之電沉積鼓輪a，示出其 内鼓輪和外殼的燒嵌接合界面。在此的電沉積鼓輪a相較 於實施例1的電沉積鼓輪a，經由旋削加工後，溝部4的剖 面形狀是圓形，其寬w=3麵、深h=2腿。另外就填充物的 低洛融合金3而言’所使用的合金其組成為扭:5〇質量百分 比、Pb:20質量百分比、Sn:10質量百分比和In:2〇質量百 200813259 分比。此合金3的熱膨脹率高於軟碳鋼製内鼓輪丨及鈦製 外殼2，融點在56〜61°C >耐敍性良好。 本實施例可得到與實施例1相同的效果。 (實施例3)For the low-melting fusion all 3, the alloy used has a composition of Bi: 5 〇 mass percentage, Pb: 30 mass%, and Sn: 2 〇 mass percentage. The thermal expansion rate of this alloy 3 is higher than that of the soft broken steel inner drum 1 and the titanium outer casing 2; the melting point is 90 to 95 ° C, and the profitability is good. When the electric drum is used, the contact pressure between the inner drum and the outer contact portion is not very high. In the weak portion, the molten conductive low-melting fusion gold moves due to heat generation during energization. As a result, the low-melting fusion gold serves as a joint for the entire surface of the contact interface between the inner drum and the outer casing, and achieves a state of full contact. As a result of producing the metal foil using the electrodeposited drum a, it is possible to suppress the disadvantages of electric spots such as hot spots, and to manufacture a high-quality metal foil having a uniform thickness by energizing a large current and at a high speed. (Embodiment 2) Fig. 5 is a view showing an electrodeposited drum a of another aspect of the invention, showing a burn-in joint interface of the inner drum and the outer casing. Here, the electrodeposited drum a is thinner than the electrodeposited drum a of the first embodiment, and the groove portion 4 has a circular shape having a width w = 3 faces and a depth h = 2 legs. Further, in the case of the low-alloy fusion gold 3 of the filler, the composition used was twist: 5 〇 mass percentage, Pb: 20 mass%, Sn: 10 mass%, and In: 2 〇 mass 100, 200813259. The alloy 3 has a higher coefficient of thermal expansion than the inner drum rim of the soft carbon steel and the outer casing 2 of the titanium, and the melting point is 56 to 61 ° C > This embodiment can obtain the same effects as those of the first embodiment. (Example 3)
圖6是關於本發明的其他態樣之電沉積鼓輪a，示出其 内鼓輪和外殼的燒嵌接合界面。在電沉積鼓輪a的軟碳鋼 製内鼓輪1之外周面，經由旋削形成螺旋狀做為線材捲取 用的溝部5，不超過線寬w = 3.5mm、深h = 2.5 mm的設定。 鍍鋅網線6 (直徑π = 2.5 mm)在該溝部5中將内鼓輪1的 外周面捲取成螺旋狀。接著在電沉積鼓輪a，將此種狀態的 内鼓輪1和鈦製外殼2嵌合後所形成的間隙部做為本發明 的溝部4，在該溝部4溶融填充低溶融合金3。 就填充物的低溶融合金3而言，所使用的合金其組成 為Bi:50質量百分比、Pb:20質量百分比、Sn:20質量百分 比和In:10質|百分比。此合金3的熱膨脹率高於軟碳鋼製 内鼓輪1及鈦製外殼2 ;融點在58〜63°C ★耐钱性良好。 使用電沉積鼓輪a時，鍍鋅網線6和外殼2的接觸壓 力較弱的部份，由於通電時發熱，使得溶融的導電性低溶 融合金移動的結果，可以得到與實施例1以及2同樣的結 果0 200813259 【圖式簡單說明】 圖1所示是電解銅箔製造裝置的正面概略圖。 圖2所示是電沉積鼓輪構造的部分破斷正面圖。 爵3是為了說明以往的電沉積鼓輪構造所發生的問 題’而示出内鼓輪和外殼的燒嵌接合界面之剖面圖。 圖4是本發明的一個態樣，示出其内鼓輪和外殼的繞 嵌接合界面之剖面圖。Fig. 6 is a view showing the electrodeposited drum a of the other aspect of the invention, showing the burn-in joint interface of the inner drum and the outer casing. The outer peripheral surface of the soft carbon steel inner drum 1 of the electrodeposited drum a is spirally formed as a groove portion 5 for wire winding, and does not exceed the line width w = 3.5 mm and the depth h = 2.5 mm. . The galvanized wire 6 (diameter π = 2.5 mm) winds the outer peripheral surface of the inner drum 1 in a spiral shape in the groove portion 5. Next, in the electrodeposited drum a, the gap portion formed by fitting the inner drum 1 and the titanium outer casing 2 in this state is the groove portion 4 of the present invention, and the low-melting fusion gold 3 is melted and filled in the groove portion 4. For the low-melting fusion gold 3 of the filler, the alloy used has a composition of Bi: 50% by mass, Pb: 20% by mass, Sn: 20% by mass, and In: 10% by weight. The thermal expansion coefficient of this alloy 3 is higher than that of the soft carbon steel inner drum 1 and the titanium outer casing 2; the melting point is 58 to 63 ° C ★ good resistance to money. When the electrodeposited drum a is used, the weak contact portion between the galvanized wire 6 and the outer casing 2, as a result of the heat generated during energization, causes the molten conductive low-melting fusion gold to move, and can be obtained in the same manner as in the first and second embodiments. The same result 0 200813259 [Simplified description of the drawings] Fig. 1 is a front schematic view showing an apparatus for manufacturing an electrolytic copper foil. Figure 2 is a partially broken front elevational view of the electrodeposited drum construction. The triumph 3 is a cross-sectional view showing the burn-in joint interface between the inner drum and the outer casing in order to explain the problem that has occurred in the conventional electrodeposited drum structure. Figure 4 is a cross-sectional view of the present invention showing a winding engagement interface of the inner drum and the outer casing.
圖5是本發明的其他態樣，示出其内鼓輪__^ 嵌接合界面之剖面圖。 a /° 外殼的燒 圖6是本發明的其他態樣；示出其内鼓輪和 嵌接合界面之剖面圖。 【主要元件符號說明】 1 内鼓輪 2 外殼 3 低溶融合金 4 溝部 5 線材捲取用溝部 6 鍍鋅網線 a 電沉積鼓輪 b 旋轉軸 c、d 軸承 e 電解槽 f 電解液 200813259 m 金屬箔 R 間隙Fig. 5 is a cross-sectional view showing the inner joint of the inner drum __^ in accordance with another aspect of the present invention. a /° Burning of the outer casing Figure 6 is a cross-sectional view of the inner drum and the engagement interface of the present invention. [Main component symbol description] 1 Inner drum 2 Housing 3 Low-melting fusion gold 4 Groove 5 Wire winding groove 6 Galvanized wire a Electrodeposition drum b Rotary shaft c, d Bearing e Electrolyzer f Electrolyte 200813259 m Metal Foil R gap