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TW200704827A - Method of surface treatment - Google Patents

Method of surface treatment

Info

Publication number
TW200704827A
TW200704827A TW095117916A TW95117916A TW200704827A TW 200704827 A TW200704827 A TW 200704827A TW 095117916 A TW095117916 A TW 095117916A TW 95117916 A TW95117916 A TW 95117916A TW 200704827 A TW200704827 A TW 200704827A
Authority
TW
Taiwan
Prior art keywords
treatment
constituent
pickling
vacuum
less
Prior art date
Application number
TW095117916A
Other languages
Chinese (zh)
Other versions
TWI418656B (en
Inventor
Sakae Inayoshi
Takeru Nomura
Katsunobu Ishizawa
Shinichi Saito
Manami Yamaguchi
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200704827A publication Critical patent/TW200704827A/en
Application granted granted Critical
Publication of TWI418656B publication Critical patent/TWI418656B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/19—Iron or steel
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/16—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions using inhibitors
    • C23G1/18—Organic inhibitors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

Any matter of chemical liquid, metal, etc. adhering to the surface of a member as a constituent of vacuum treatment apparatus, such as a vacuum vessel, is removed without the use of highly dangerous nitric acid, etc. There is provided a method of surface treatment for a metal part being a constituent of vacuum treatment apparatus as a treatment object, characterized in that the treatment object on its surface is first subjected to electrolytic polishing, partial electrolytic polishing, chemical polishing, pickling or electrolytic pickling and thereafter washed by means of an alkali chelate solution obtained by adding a carboxylic acid or carboxylic salt to a 0.5 to less than 3 wt.% dilute alkali solution up to a concentration of 0.5 to less than 10 wt.%.
TW095117916A 2005-05-30 2006-05-19 Surface treatment method TWI418656B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005157554A JP4799908B2 (en) 2005-05-30 2005-05-30 Surface treatment method

Publications (2)

Publication Number Publication Date
TW200704827A true TW200704827A (en) 2007-02-01
TWI418656B TWI418656B (en) 2013-12-11

Family

ID=37481419

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095117916A TWI418656B (en) 2005-05-30 2006-05-19 Surface treatment method

Country Status (5)

Country Link
JP (1) JP4799908B2 (en)
KR (1) KR101116517B1 (en)
CN (2) CN103526276A (en)
TW (1) TWI418656B (en)
WO (1) WO2006129489A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI619800B (en) * 2010-10-06 2018-04-01 恩特葛瑞斯股份有限公司 Composition and method for selectively etching metal nitride

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009130248A1 (en) * 2008-04-23 2009-10-29 Martin-Nikolaus Meyn Method for chemical deburring
CN105332044A (en) * 2015-11-24 2016-02-17 苏州盖德精细材料有限公司 Novel chromic anhydride-free stainless steel electrolytic polishing solution and polishing process thereof
CN105970279A (en) * 2016-06-29 2016-09-28 无锡信大气象传感网科技有限公司 Surface treatment method for solar vacuum stainless steel tube
JP7038751B2 (en) * 2020-04-20 2022-03-18 株式会社Ihi How to handle stainless steel parts
CN111501085A (en) * 2020-04-29 2020-08-07 深圳仕上电子科技有限公司 Method for cleaning Mask in vacuum evaporation equipment

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1216066B (en) * 1963-01-29 1966-05-05 Henkel & Cie Gmbh Process for the treatment of degreased metal surfaces stained with an acidic solution before enamelling
US4045253A (en) * 1976-03-15 1977-08-30 Halliburton Company Passivating metal surfaces
JPH03180500A (en) * 1989-12-07 1991-08-06 Fujitsu Ltd Surface treatment method for the inner wall of a stainless steel vacuum container
JPH04187788A (en) * 1990-11-20 1992-07-06 Nippon Parkerizing Co Ltd How to clean aluminum or aluminum alloy
CN1080333A (en) * 1992-10-06 1994-01-05 云南五环工业设计研究所 A kind of electrolytic etching method of metal test-piece
JP3207636B2 (en) * 1993-10-18 2001-09-10 三菱重工業株式会社 Smut remover
JPH07185939A (en) * 1993-12-27 1995-07-25 Hitachi Zosen Corp Electrolytic polishing method for alloy steel members
JP4703803B2 (en) * 1999-10-08 2011-06-15 株式会社アルバック Method for electrolytic polishing of aluminum material
JP4317298B2 (en) * 1999-10-21 2009-08-19 朝日化学工業株式会社 Metal discoloration inhibitor composition, discoloration prevention liquid, and discoloration prevention method
JP4226239B2 (en) * 2001-10-17 2009-02-18 新日本製鐵株式会社 Method for preventing discoloration of pickled steel
CN1480566A (en) * 2002-09-03 2004-03-10 周国桢 Electrochemical grind (polishing) method for stainless steel
JP2005042177A (en) * 2003-07-25 2005-02-17 Tomoko Ujita Electrolytic polishing method for stainless steel increasing its corrosion resistance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI619800B (en) * 2010-10-06 2018-04-01 恩特葛瑞斯股份有限公司 Composition and method for selectively etching metal nitride

Also Published As

Publication number Publication date
JP4799908B2 (en) 2011-10-26
KR101116517B1 (en) 2012-03-13
JP2006328516A (en) 2006-12-07
WO2006129489A1 (en) 2006-12-07
CN101031672A (en) 2007-09-05
KR20070088516A (en) 2007-08-29
TWI418656B (en) 2013-12-11
CN103526276A (en) 2014-01-22

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