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TW200639589A - Displacement device - Google Patents

Displacement device

Info

Publication number
TW200639589A
TW200639589A TW095101524A TW95101524A TW200639589A TW 200639589 A TW200639589 A TW 200639589A TW 095101524 A TW095101524 A TW 095101524A TW 95101524 A TW95101524 A TW 95101524A TW 200639589 A TW200639589 A TW 200639589A
Authority
TW
Taiwan
Prior art keywords
row
magnets
respect
arranged according
displacement device
Prior art date
Application number
TW095101524A
Other languages
English (en)
Inventor
Johan Cornelis Compter
Petrus Carolus Maria Frissen
Eijk Jan Van
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Publication of TW200639589A publication Critical patent/TW200639589A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Linear Motors (AREA)
  • Control Of Position Or Direction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW095101524A 2005-01-17 2006-01-13 Displacement device TW200639589A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05100237 2005-01-17

Publications (1)

Publication Number Publication Date
TW200639589A true TW200639589A (en) 2006-11-16

Family

ID=36580017

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095101524A TW200639589A (en) 2005-01-17 2006-01-13 Displacement device

Country Status (7)

Country Link
US (1) US7948122B2 (zh)
EP (1) EP1842101B1 (zh)
JP (1) JP5422126B2 (zh)
KR (1) KR20070099609A (zh)
CN (1) CN100541337C (zh)
TW (1) TW200639589A (zh)
WO (1) WO2006075291A2 (zh)

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WO2015179962A1 (en) 2014-05-30 2015-12-03 The University Of British Columbia Displacement devices and methods for fabrication, use and control of same
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EP3155712A4 (en) 2014-06-14 2018-02-21 The University Of British Columbia Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same
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EP3320606B1 (en) 2015-07-06 2023-06-07 The University Of British Columbia Method and system for controllably moving one or more moveable stages in a displacement device
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CN105487343A (zh) * 2016-01-14 2016-04-13 哈尔滨工业大学 基于平面光栅测量的动磁钢磁浮双工件台矢量圆弧换台方法及装置
CN105629676A (zh) * 2016-01-14 2016-06-01 哈尔滨工业大学 基于回转平衡质量的动磁钢磁浮双工件台矢量圆弧换台方法及装置
KR101792390B1 (ko) * 2016-02-01 2017-11-01 연세대학교 산학협력단 정밀 공간 운동기
CN113428597B (zh) 2016-10-05 2022-11-15 莱特拉姆有限责任公司 线性电机输送机系统
US10926418B2 (en) 2017-03-27 2021-02-23 Planar Motor Incorporated Robotic devices and methods for fabrication, use and control of same
DE102017003120A1 (de) 2017-03-30 2018-10-04 Nils Dreifke Planares Transportsystem und Verfahren zum gleichzeitigen, unabhängigen Handhaben von Objekten
JP7177785B2 (ja) 2017-05-02 2022-11-24 レイトラム，エル．エル．シー． ブラシレス直流モータによって駆動されるトレイコンベヤ
DE102017109510A1 (de) * 2017-05-03 2018-11-08 Technische Hochschule Mittelhessen Mehrkoordinatenaktor
WO2018236469A1 (en) 2017-06-19 2018-12-27 Laitram, L.L.C. Monorail tray conveyor
RU2020109693A (ru) 2017-09-13 2021-10-13 Лэйтрэм, Эл.Эл.Си. Монорельсовый лотковый конвейер с пассивными направляющими рельсами
DE102017219306A1 (de) 2017-10-27 2019-05-02 Robert Bosch Gmbh Verfahren zur Herstellung einer Spulenanordnung, Spulenanordnung und Stützkörper
US10807803B2 (en) 2018-01-31 2020-10-20 Laitram, L.L.C. Hygienic low-friction magnetic tray and conveyor
US10654660B2 (en) 2018-01-31 2020-05-19 Laitram, L.L.C. Hygienic magnetic tray and conveyor
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EP3844863B1 (en) 2018-10-13 2025-07-23 Planar Motor Incorporated Systems and methods for identifying a magnetic mover
CN109660064B (zh) * 2019-01-29 2024-05-17 苏州隐冠半导体技术有限公司 一种基于混合位移传感器和平面电机的位移装置
EP3947217A4 (en) 2019-03-29 2022-05-11 Planar Motor Inc. ROBOTIC DEVICE AND METHODS OF MAKING, USING AND CONTROLLING THE SAME
CN115104245A (zh) 2019-12-16 2022-09-23 平面电机公司 定子模块和机器人系统
EP3883103A1 (de) 2020-03-19 2021-09-22 Beckhoff Automation GmbH Planarantriebssystem, verfahren zum betreiben eines planarantriebssystems und stator zum antreiben eines läufers
EP3916994A1 (de) 2020-05-26 2021-12-01 Beckhoff Automation GmbH Planarantriebssystem und verfahren zum betreiben eines planarantriebssystems
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Also Published As

Publication number Publication date
US7948122B2 (en) 2011-05-24
WO2006075291A3 (en) 2007-04-12
KR20070099609A (ko) 2007-10-09
CN101107571A (zh) 2008-01-16
JP2008527964A (ja) 2008-07-24
CN100541337C (zh) 2009-09-16
US20080203828A1 (en) 2008-08-28
EP1842101A2 (en) 2007-10-10
JP5422126B2 (ja) 2014-02-19
WO2006075291A2 (en) 2006-07-20
EP1842101B1 (en) 2014-09-17

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