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TW200632311A - Visual inspection apparatus and visual inspection method - Google Patents

Visual inspection apparatus and visual inspection method

Info

Publication number
TW200632311A
TW200632311A TW095104369A TW95104369A TW200632311A TW 200632311 A TW200632311 A TW 200632311A TW 095104369 A TW095104369 A TW 095104369A TW 95104369 A TW95104369 A TW 95104369A TW 200632311 A TW200632311 A TW 200632311A
Authority
TW
Taiwan
Prior art keywords
visual inspection
substrate
light
light source
defect
Prior art date
Application number
TW095104369A
Other languages
English (en)
Inventor
Hiroyuki Okahira
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200632311A publication Critical patent/TW200632311A/zh

Links

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW095104369A 2005-02-28 2006-02-09 Visual inspection apparatus and visual inspection method TW200632311A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005052799A JP4633499B2 (ja) 2005-02-28 2005-02-28 外観検査装置及び外観検査方法

Publications (1)

Publication Number Publication Date
TW200632311A true TW200632311A (en) 2006-09-16

Family

ID=36946776

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095104369A TW200632311A (en) 2005-02-28 2006-02-09 Visual inspection apparatus and visual inspection method

Country Status (4)

Country Link
JP (1) JP4633499B2 (zh)
KR (1) KR20060095479A (zh)
CN (1) CN1828280B (zh)
TW (1) TW200632311A (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831629B1 (ko) * 2006-08-31 2008-05-22 동일파텍주식회사 병렬지지 방식 매크로 검사장치
JP5006024B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置
KR101373129B1 (ko) * 2011-12-30 2014-03-13 엘아이지에이디피 주식회사 기판 검사장비
KR101593020B1 (ko) * 2014-07-09 2016-02-11 세광테크 주식회사 조명 반사판을 구비한 패널 얼라인장치
JP6587822B2 (ja) * 2015-04-22 2019-10-09 株式会社ブイ・テクノロジー 外観検査装置
CN105115978A (zh) * 2015-09-09 2015-12-02 山东华芯富创电子科技有限公司 触摸屏检验治具
CN107589072A (zh) * 2017-08-30 2018-01-16 东莞新友智能科技有限公司 一种用于表面检测的光源装置
CN108627516A (zh) * 2018-03-21 2018-10-09 郑州轻工业学院 一种用于空调产品的检修方法以及检修系统
CN109030495A (zh) * 2018-06-26 2018-12-18 大连鉴影光学科技有限公司 一种基于机器视觉技术的光学元件缺陷检测方法
JP7111659B2 (ja) * 2019-06-28 2022-08-02 矢崎総業株式会社 端子の外観検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4576006B2 (ja) * 1998-09-21 2010-11-04 オリンパス株式会社 外観検査用投光装置
CN1272624C (zh) * 2000-08-24 2006-08-30 奥林巴斯光学工业株式会社 外观检查用投光装置
JP2002374445A (ja) * 2001-06-12 2002-12-26 Nikon Corp 電子カメラ
WO2003102562A1 (fr) * 2002-05-31 2003-12-11 Olympus Corporation Dispositif de macro-illumination
JP4107020B2 (ja) * 2002-09-06 2008-06-25 セイコーエプソン株式会社 液晶パネルの検査装置
JP2004153422A (ja) * 2002-10-29 2004-05-27 Toshiba Corp 撮影装置、顔照合装置、撮影装置の汚れ検知方法、及び顔照合方法
JP4245452B2 (ja) * 2003-10-06 2009-03-25 富士通株式会社 レンズの汚れ判定方法及び装置

Also Published As

Publication number Publication date
CN1828280A (zh) 2006-09-06
CN1828280B (zh) 2011-07-13
JP2006234721A (ja) 2006-09-07
KR20060095479A (ko) 2006-08-31
JP4633499B2 (ja) 2011-02-16

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