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TW200622494A - Photoresist composition for positive liquid crystal device - Google Patents

Photoresist composition for positive liquid crystal device

Info

Publication number
TW200622494A
TW200622494A TW094133633A TW94133633A TW200622494A TW 200622494 A TW200622494 A TW 200622494A TW 094133633 A TW094133633 A TW 094133633A TW 94133633 A TW94133633 A TW 94133633A TW 200622494 A TW200622494 A TW 200622494A
Authority
TW
Taiwan
Prior art keywords
substituted
liquid crystal
crystal device
photoresist composition
positive liquid
Prior art date
Application number
TW094133633A
Other languages
English (en)
Inventor
Toshikazu Murayama
Katsuhiro Ito
Masatsugu Komai
Yosiyuki Kato
Ryo Numazaki
Original Assignee
Kyowa Hakko Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyowa Hakko Chemical Co Ltd filed Critical Kyowa Hakko Chemical Co Ltd
Publication of TW200622494A publication Critical patent/TW200622494A/zh

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/039Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
TW094133633A 2004-09-30 2005-09-28 Photoresist composition for positive liquid crystal device TW200622494A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004285750 2004-09-30

Publications (1)

Publication Number Publication Date
TW200622494A true TW200622494A (en) 2006-07-01

Family

ID=36119069

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094133633A TW200622494A (en) 2004-09-30 2005-09-28 Photoresist composition for positive liquid crystal device

Country Status (3)

Country Link
JP (1) JPWO2006035926A1 (zh)
TW (1) TW200622494A (zh)
WO (1) WO2006035926A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105384739B (zh) * 2014-09-02 2020-03-20 石药集团中奇制药技术(石家庄)有限公司 吡唑并[3,4-c]吡啶类衍生物

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3787271B2 (ja) * 2000-11-20 2006-06-21 東京応化工業株式会社 微細レジストホールパターン形成方法
US7015363B2 (en) * 2001-07-13 2006-03-21 Kyowa Yuka Co., Ltd. Process for producing ether compound
JP2003330172A (ja) * 2002-05-14 2003-11-19 Fuji Photo Film Co Ltd ポジ型感光性組成物
US20030235775A1 (en) * 2002-06-13 2003-12-25 Munirathna Padmanaban Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
JP3844069B2 (ja) * 2002-07-04 2006-11-08 信越化学工業株式会社 レジスト材料及びパターン形成方法
TWI283335B (en) * 2002-08-20 2007-07-01 Kyowa Yuka Kk A composition with photo-sensibility of visible light
JP2004075864A (ja) * 2002-08-20 2004-03-11 Kyowa Yuka Co Ltd 樹脂組成物
JP4302585B2 (ja) * 2003-10-08 2009-07-29 信越化学工業株式会社 重合性化合物、高分子化合物及びポジ型レジスト材料並びにこれを用いたパターン形成方法

Also Published As

Publication number Publication date
WO2006035926A1 (ja) 2006-04-06
JPWO2006035926A1 (ja) 2008-05-15

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