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TW200604366A - Coating device used for plate-type base material - Google Patents

Coating device used for plate-type base material

Info

Publication number
TW200604366A
TW200604366A TW093121697A TW93121697A TW200604366A TW 200604366 A TW200604366 A TW 200604366A TW 093121697 A TW093121697 A TW 093121697A TW 93121697 A TW93121697 A TW 93121697A TW 200604366 A TW200604366 A TW 200604366A
Authority
TW
Taiwan
Prior art keywords
plate
type base
base material
device used
coating device
Prior art date
Application number
TW093121697A
Other languages
Chinese (zh)
Other versions
TWI240760B (en
Inventor
Li-Kai Chang
Jenn-Chen Tang
Tien-Yuan Li
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW93121697A priority Critical patent/TWI240760B/en
Priority to DE200510011327 priority patent/DE102005011327A1/en
Application granted granted Critical
Publication of TWI240760B publication Critical patent/TWI240760B/en
Publication of TW200604366A publication Critical patent/TW200604366A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

Provided is a coating device used for plate-type base material which comprises: a cavity; a turntable installed inside the cavity; a plurality of racks installed around the turntable and at least one plate-type base material installed on the surface of each rack; a driving component for driving the turntable and the rack to respectively rotate; and a coating unit installed inside the cavity which can coat the plating materials on the plate-type base materials. And then this invention can solve the problem of the well known technology which fails to promote the coating production of plate-type base materials.
TW93121697A 2004-07-21 2004-07-21 Coating device used for plate-type base material TWI240760B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW93121697A TWI240760B (en) 2004-07-21 2004-07-21 Coating device used for plate-type base material
DE200510011327 DE102005011327A1 (en) 2004-07-21 2005-03-08 Device for applying a film to a flat substrate comprises a disk arranged in a chamber, bearing bodies arranged on the periphery of the disk, a drive unit for rotating the disk and/or bearing bodies and a unit for applying a film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93121697A TWI240760B (en) 2004-07-21 2004-07-21 Coating device used for plate-type base material

Publications (2)

Publication Number Publication Date
TWI240760B TWI240760B (en) 2005-10-01
TW200604366A true TW200604366A (en) 2006-02-01

Family

ID=35668706

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93121697A TWI240760B (en) 2004-07-21 2004-07-21 Coating device used for plate-type base material

Country Status (2)

Country Link
DE (1) DE102005011327A1 (en)
TW (1) TWI240760B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI480403B (en) * 2010-10-26 2015-04-11 Hon Hai Prec Ind Co Ltd Deposition device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI480403B (en) * 2010-10-26 2015-04-11 Hon Hai Prec Ind Co Ltd Deposition device

Also Published As

Publication number Publication date
DE102005011327A1 (en) 2006-02-16
TWI240760B (en) 2005-10-01

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent