200417303 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種當於層合物或塑膠板中製作孔洞時 設置於層合物或塑膠板之表面上之鑽孔用潤滑劑片材，及 一種使用以上之鑽孔用潤滑劑片材的鑽孔方法。在印刷布 線板之製造中使用以上之鑽孔用潤滑劑片材製得之穿孔主 要適合使用作為印刷布線板諸如半導體塑膠封裝或主機板 之通孑L ( t h r〇u g h hole)。此外，可將本發明所提供之鑽孔 用潤滑劑片材應用至其他精密鑽孔應用，例如，將硬塑膠 板諸如眼鏡用透鏡鑽孔之應用。 【先前技術】 習知之鋁片材係使用作為利用金屬鑽將使用於印刷布 線板之層合物鑽孔的入口片材。近年來，在使用於半導體 塑膠封裝或其類似物之高密度印刷布線板中，通孔的直徑 變得愈來愈小，且具有0 . 1 5毫米Φ以下之最小通孔直徑 的印刷布線板逐漸增加。當單獨使用紹入口片材製作此一 小直徑孔洞時，會有鑽子之壽命短，孔洞壁之糙度大及孔 洞位置準確度差的問題。因此，經由將潤滑劑樹脂層形成 於金屬箔諸如鋁之一表面上而製得之鑽孔用潤滑劑片材係 用以延長鑽子之壽命、改良孔洞位置準確度及改良孔洞壁 之糙度。舉例來說，J P - A - 5 - 1 6 9 4 0 0公告提出一種可經由 將厚度0 . 1至3 . 0毫米之潤滑劑樹脂組成物層形成於金屬 箔之一表面上而製得的潤滑劑片材。以上之潤滑劑樹脂組 成物層的色相係天然的顏色。因此，當潤滑劑樹脂層之厚 312/發明說明書(補件)/93-04/93101839 200417303 度小時，彳艮難區別潤滑劑片材的兩表面，故很難判斷應使 哪一表面與層合物或塑膠板接觸。以上的困難會產生諸如 誤將潤滑劑片材放反或孔洞品質減低的問題。此外，當使 用小直徑鑽子，尤其係直徑〇. 1毫米以下之鑽子時，會產 生鑽子易斷裂及孔洞位置準確度視存在於潤滑劑樹脂組成 物層中之空氣泡之大小而變得不足夠的問題。 【發明内容】 本發明之一目的為提供一種可克服由誤將潤滑劑片材 放反所產生之不良孔洞品質之問題的潤滑劑片材。 本發明之另一目的為提供一種可防止當使用小直徑鑽 子時發生任何鑽子斷裂的潤滑劑片材。 本發明之再一目的為提供一種可克服由存在於潤滑劑 片材之樹脂中之微小空氣泡所造成之孔洞位置準確度不足 之問題的潤滑劑片材。 根據本發明，提供一種鑽孔用潤滑劑片材，其包括金屬 箔或有機薄膜，及潤滑劑樹脂組成物層或底塗層及潤滑劑 樹脂組成物層，此潤滑劑樹脂組成物層或底塗層及潤滑劑 樹脂組成物層係形成於金屬箔或有機薄膜之至少一表面 上，其中底塗層及潤滑劑樹脂組成物層之至少一層包含著 色劑。 此外，根據本發明，提供一種根據以上潤滑劑片材之鑽 孔用潤滑劑片材，其中有機薄膜於其之一表面上具有0 . 5 至1 5微米之糙度，及在糙度之外凸部分之間的距離為1 至50微米。 6 312/發明說明書(補件)/93-04/93101839 200417303 再者，根據本發明，提供一種將層合物或塑膠板鑽孔之 方法，此方法包括將鑽孔用潤滑劑片材設置於層合物或塑 膠板上，及自潤滑劑樹脂組成物層側鑽孔。 再者，根據本發明，提供一種由潤滑劑樹脂組成物形成 之潤滑劑片材，此片材適用於將層合物或塑膠板鑽孔之方 法，其中包含於潤滑劑片材中之空氣泡具有3 0微米以下之 直徑。 【實施方式】 在本發明，術語「層合物」係指用於印刷板之具有絕緣 層之塑膠板，且以上術語包括除絕緣層之外，尚進一步具 有導體層之塑膠板。術語「塑膠板」係指由包含有機聚合 化合物為主成分之組成物所形成的板狀物件，且其包括具 有玻璃基材或無機填料之板狀物件。 關於經由將潤滑劑樹脂組成物層或底塗層及潤滑劑樹 脂組成物層形成於金屬箔或有機薄膜之至少一表面上而製 得之鑽孔用潤滑劑片材，本發明經由將著色劑，較佳為非 鹵素著色劑，加入底塗層及潤滑劑樹脂層之至少一層中， 而使潤滑劑片材之兩表面可彼此明顯地區別，因此，本發 明可防止在鑽孔時將潤滑劑片材誤置。此外，加入非鹵素 著色劑可提供環保的鑽孔用潤滑劑片材。此外，在潤滑劑 樹脂組成物中使用水溶性樹脂較佳，由於如此當潤滑劑樹 脂組成物黏著至層合物或塑膠板時，其將可容易地被移 除。在此情況，使用水溶性著色劑作為著色劑亦較佳。 此外，關於將潤滑劑樹脂組成物層或底塗層及潤滑劑樹 7 312/發明說明書(補件)/93-04/93101839 200417303 脂組成物層形成於有機薄膜之至少一表面上而製得之潤滑 劑片材，本發明提供具有預定尺寸之糙度的有機薄膜，而 防止任何鑽子斷裂及改良孔洞位置準確度。 再者，本發明經由控制包含於潤滑劑片材之潤滑劑樹脂 組成物層中之空氣泡的大小，而顯著改良孔洞位置準確度。 使用於本發明之潤滑劑片材中之潤滑劑樹脂組成物可 選自已知之用於鑽孔用潤滑劑片材之樹脂組成物的樹脂組 成物。其例子包括水溶性樹脂、熱塑性樹脂、熱固性樹脂 及潤滑劑和此等樹脂之任何一者的混合物等等。其可單獨 或結合使用。使用包含水溶性樹脂為主成分之潤滑劑樹脂 組成物為較佳。以上之水溶性樹脂當於鑽孔過程中殘留於 穿孔中時，可經由以熱水洗滌而容易地移除，以致可得到 可靠度優異的孔洞。 可將各種添加劑加至潤滑劑樹脂組成物。舉例來說，可 視用途需要而加入各種有機或無機填料。 使用於本發明之潤滑劑樹脂組成物中之水溶性樹脂的 較佳例子包括聚氧化乙烯、聚丙二醇、聚氧化丙烯、聚乙 烯醇、聚丙烯酸鈉、聚丙烯醯胺、聚乙烯基吡咯啶酮、羧 曱基纖維素、聚丁二醇、聚醚酯等 > 。其可單獨或結合使 用。 使用於本發明之潤滑劑樹脂組成物中之熱塑性樹脂的 較佳例子包括聚乙烯、聚丙稀、聚苯乙稀、聚酯、聚對苯 二曱酸乙二酯、聚醯胺、聚碳酸酯、聚砜、聚醚砜、聚烯 丙酸酯、聚醚醚酮、聚苯硫等等。此等熱塑性樹脂可單獨 8 312/發明說明書(補件)/93-04/93101839 200417303 或結合使用。 使用於本發明之潤滑劑樹脂組成物中之熱固性樹 較佳例子包括酚樹脂、環氧樹脂、三聚氰胺樹脂、脲 丙烯酸系樹脂、不飽和聚酯樹脂、聚胺基甲酸酯樹 酸樹脂、聚矽氧樹脂、氰酸酯樹脂、順丁烯二醯亞 等等。此等熱固性樹脂可單獨或結合使用。 使用於本發明之潤滑劑樹脂組成物中之水溶性潤 的較佳例子包括聚氧伸乙基之單元醚諸如聚乙二醇 伸乙基油基醚、聚氧伸乙基黥蠟基醚、聚氧伸乙基 醚、聚氧伸乙基月桂基醚、聚氧伸乙基十二基醚、 乙基壬基醚及聚氧伸乙基辛苯基醚，聚氧伸乙基之 聚氧伸乙基單月桂酸酯、聚氧伸乙基單硬脂酸酯及 乙基單油酸酷，聚氧伸乙基脫水山梨糖醇之單元酯 油單硬脂酸酯諸如六甘油單硬脂酸酯及十甘油單硬 酯，聚氧伸乙基伸丙基嵌段聚合物等等。其可單獨 使用。 使用於本發明之潤滑劑樹脂組成物中之水溶性潤 的例子包括ss胺化合物諸如伸乙基雙硬脂酸胺、油 胺、硬脂酸醯胺及亞曱基雙硬脂醯胺，脂肪酸化合 月桂酸、硬脂酸、棕櫚酸及油酸，脂肪酸酯化合物 脂酸丁酯、油酸丁酯及乙二醇月桂酸酯，脂族烴化 如液態石蠟及聚乙烯蠟，及高碳脂族醇諸如油醇等 可單獨或結合使用。 由本發明所提供之經由將以上潤滑劑樹脂組成物 312/發明說明書(補件)/93-04/93101839 脂的 樹脂、 脂、醇 胺樹脂 滑劑 、聚氧 硬脂基 聚氧伸 西旨諸如 聚氧伸 ，聚甘 脂酸 或結合 滑劑 酸醯 物諸如 諸如硬 合物諸 等。其 之潤 9 200417303 滑劑樹脂組成物層形成於金屬箔或有機薄膜上而製造鑽孔 用潤滑劑片材之方法並無特殊之限制。以上之方法可選自 一般知曉的方法。舉例來說，可採用在高溫下利用捏合機 等等不使用溶劑而將潤滑劑樹脂組成物捏合，將經捏合之 樹脂組成物擠塑以製備片材，及將片材壓於金屬箔或有機 薄膜上，而製造鑽孔用潤滑劑片材之方法；及將潤滑劑樹 脂組成物溶解於溶劑或水中以製備塗布組成物，將塗布組 成物塗布至金屬箔或有機薄膜之表面，及將經塗布之塗布 組成物乾燥，而製得鑽孔用潤滑劑片材之方法。潤滑劑樹 脂組成物層之厚度並無特殊之限制，然而其係5至1 0 0微 米較佳。可將潤滑劑樹脂組成物層形成於金屬箔或有機薄 膜之各表面上。舉例來說，當將樹脂層形成於金屬箔之兩 表面上時，將用於防止毛刺的硬樹脂設置於作為鑽孔標的 材料側之表面上，及將包含潤滑劑之軟樹脂設置於作為鑽 子側的另一表面上。以此方式，可使兩表面上之樹脂扮演 不同的角色。當使用以上類型之潤滑劑片材時，兩表面之 間的區別尤其重要。 當在金屬箔或有機薄膜與潤滑劑樹脂組成物之間的黏 著不足時，將一般由熱固性樹脂或熱塑性樹脂所形成，且 具0 . 5至1 5微米較佳之厚度的底塗層形成於金屬箔或有機 薄膜表面上，以改良黏著強度。於金屬箔或有機薄膜表面 上形成底塗層之方法並無特殊之限制。其可選自已知之方 法。舉例來說，可採用將沒有溶劑之底塗料樹脂或經由將 底塗料樹脂溶解於溶劑中而得之塗布組成物塗布至金屬箔 10 312/發明說明書(補件)/93-04/93101839 200417303 或有機薄膜表面，及將其乾燥形成底塗層之方法；或將以 上之塗布組成物直接噴塗於金屬箔或有機薄膜表面上之方 法。在本發明中，當潤滑劑片材具有底塗層時，較佳係將 著色劑加入底塗層中，以使潤滑劑片材之兩表面明顯地區 別。在此情況，亦可將著色劑加入至形成於底塗層上之潤 滑劑樹脂層中。 使用於本發明之著色劑可選自一般知曉的有機及無機 顏料及有機及無機染料。明確言之，有機顏料包括偶氮顏 料諸如色淀紅（1 a k e r e d )、漢沙黃（h a n s a y e 1 1 〇 w )、/3 _ 萘紛、萘盼A S、苯并味σ坐酮、雙偶氮黃及吼°坐嗣、酜青素、 口奎吖咬酮、二。丼、签、硫款藍、蔥嵌蔥g昆（a n t h a n t h r ο n e )、 異吲哚琳、異丨哚琳8同、陰丹士林、唆菲嗣 (quinophtharone) ^金屬錯合物、吼洛并吼洛、酜青綠、 銅狄青藍、鎳S大青藍、iSS大青藍、驗藍、天空藍（skyblue)、 鐵藍、群青藍、靛藍、單偶氮黃、苯并咪唑酮黃及蔥醌黃。 此等著色劑可單獨或結合使用，以獲致預期的色相。 有機染料係以食用著色物質較佳。大多數的食用著色物 質為水溶性且具極低毒性，因此由此等特徵來看使用食用 著色物質為較佳。明確言之，食用著色物質包括黃色著色 物質、紅色著色物質及藍色著色物質。黃色著色物質包括 11^-°比°坐-3-竣酸、4，5-二氫-5-氧-1-（4-石黃酿基）_4-[(4_ 磺醯基）偶氮基]三鈉鹽（黃色4號）、2 -萘磺酸、6 -羥基 -5 - [( 4 -磺醯基）偶氮基]二鈉鹽（黃色5號）等等。紅色著色 物質包括2，7 -萘二磺酸、3 -羥基-4 - [( 4 -磺酸基-1 -萘）偶 11 312/發明說明書(補件)/93-04/93101839 200417303 氮基]三鈉鹽（紅色2號）、螺-[異苯并呋喃-1 ( 3 Η )，9 ’ - [ 9 Η ] g山酮]- 3 -酮-3，，6，-二羥基-2，，4，，5，，7，-四碘二鈉鹽（紅色 3號）、6-羥基-5- [(2-曱氧基-5-曱基-4-磺酸苯基）偶氮基 ]_ 2 -萘石黃酸二鈉鹽（紅色4 0號）、1 , 3 -萘二石黃酸、7 -經基-8 - [( 4 -磺酸基-1 -萘）偶氮基]三鈉鹽（紅色1 0 2號）、螺-[ 異苯并呋喃-1 ( 3 Η )， 9，- [ 9 Η ] ϋ山]-3 -酮-2，，4，，5，，7，-四溴- 4，5，6，7 -四氯-3 ’，6 ’ -二羥基二鈉鹽（紅色1 0 4號）及螺-[ 異苯并呋喃 - 1 ( 3 Η )， 9，- [ 9 Η ] σ山]-3 -酮-4，5，6，7 -四氯 - 3，， 6’-二羥基- 2’，4’，5’，7’ -四碘二鉀鹽（紅色105號）等等。藍 色著色物質包括苯曱胺/|^(乜6112611611161：113118111111111111)、1乙 基-Ν - [4-[[4-[乙基[(3-硫苯基）曱基]胺基]苯基](2 -石黃酸 苯基）亞曱基]-2,5-環己二烯-1-丙啶（11^(^116)]-3-磺酸 基氫氧化物内鹽二鈉鹽（藍色1號）、1 Η -叫1哚-5 -磺酸、 2-(1，3-二羥基-3-酮基-5-磺酸基-2Η -叫丨哚-2-丙啶）-2,3-二氫-3 -酮基二鈉鹽等等。此等著色劑可為含鹵素著色劑或 非鹵素著色劑。由環境觀點來看，不含鹵素之著色劑為較 佳。此外，由於水溶性著色劑當殘留於孔洞部分中時可經 由以熱水洗務而移除，因而著色劑為水溶性著色劑較佳。 著色劑之量並無特殊之限制。潤滑劑樹脂組成物中之著色 劑的量為0 . 1至5重量％較佳。 無機顏料包括二氧化鈦等等。當然，可使用有機顏料及 無機顏料之混合物。此外，可使用已知之染料。 潤滑劑樹脂組成物及著色劑之組合並無特殊之限制。明 確言之，其例子包括（1 )其中潤滑劑樹脂為不溶於水之樹脂 12 312/發明說明書(補件)/93-04/93】01839 200417303 及著色劑為水溶性或不溶於水之著色劑之方法，（2 )其中潤 滑劑樹脂為水溶性樹脂及著色劑為水溶性或不溶於水之著 色劑之方法，及（3 )其中潤滑劑樹脂為水溶性或不溶於水之 樹脂之混合物及著色劑為水溶性或不溶於水之著色劑之方 法。 底塗料樹脂及著色劑之組合並無特殊之限制。明綠言 之，其例子包括（1 )其中底塗料樹脂為不溶於水之樹脂及著 色劑為水溶性或不溶於水之著色劑之方法，（2 )其中底塗料 樹脂為水溶性樹脂及著色劑為水溶性或不溶於水之著色劑 之方法，（3 )其中底塗料樹脂為水溶性或不溶於水之樹脂之 混合物及著色劑為水溶性或不溶於水之著色劑之方法，及 (4 )其中底塗料樹脂之本身為有色樹脂之方法。 關於將潤滑劑樹脂組成物層形成於金屬箔上之潤滑劑 片材，由使用後之金屬箔之回收及再循環的觀點來看，水 溶性樹脂及水溶性著色劑之組合為較佳。在本發明，術語 「非鹵素」係指其中各氣之含量及溴之含量根據說明於 J P C A標準中之測量方法（J P C A - E S - (Π - 1 9 9 9 )分別為 0·09%(900 ppn〇以下之化合物。 將以上之顏料或染料與潤滑劑樹脂組成物或底塗料樹 脂混合之方法可為已知之方法。關於顏料，使用具有微細 顆粒之顏料，及將顏料分散或溶解於潤滑劑樹脂組成物、 底塗料樹脂、溶劑或其類似物中。將染料溶解或分散於溶 劑及/或水中，然後將所得之溶液或分散液加至潤滑劑樹 脂組成物或底塗料樹脂。或者，將染料直接分散或溶解於 13 312/發明說明書(補件)/93-04/93101839 200417303 潤滑劑樹脂組成物或底塗料樹脂中。 其上要形成潤滑劑樹脂組成物層之金屬箔可選自已知 之使用作為鑽孔用潤滑劑片材之金屬箔的金屬箔。明確言 之，可使用硬紹、軟紹、經退火之ί呂、高純度紹、鎳、銅 等等、及其合金。使用厚度50至5 0 0微米，更佳為80至 2 0 0微米之硬、軟或經退火鋁箔，或經由結合此等箔而製 得，且具50至5 0 0微米，更佳為80至2 0 0微米厚度的鋁 箔較佳。金屬箔可經底塗料處理作表面處理。此外，使用 表面經由已知之方法諸如物理或化學處理而具有0 . 5至3 微米糙度之金屬箔較佳。 其上要形成潤滑劑樹脂組成物層之有機薄膜並無特殊 之限制，只要其係本身可模塑成薄膜之聚合化合物即可。 明確言之，其例子包括聚對苯二甲酸乙二酯、聚對苯二甲 酸丁二酯、聚丙烯、聚乙烯、聚醯胺、聚碳酸酯等等、及 此等聚合化合物之至少兩者的混合物。此等聚合化合物係 考慮耐熱性、水溶解度、黏性、鑽孔加工性、操縱能力等 等視需要的孔洞加工步驟而視需要適當地選擇及使用。有 機薄膜之厚度為5 0至5 0 0微米較佳，8 0至2 0 0微米更佳。 有機薄膜之表面糙度如下，外凸部分之間之距離為1至50 微米，較佳為3至3 0微米。此外，深度方向中之糙度為 0 . 5至1 5微米，較佳為1至3微米。潤滑劑樹脂組成物層 係形成於以上具有糙度之有機薄膜的至少一表面上。當有 機薄膜為透明時，很難區別潤滑劑薄膜的兩表面，因此分 別將不同的著色劑加至潤滑劑樹脂組成物層及有機薄膜。 14 312/發明說明書(補件)/93-04/93101839 200417303 由本發明所提供之其中包含於潤滑劑樹脂組成物層之 樹脂中之空氣泡之直徑為3 0微米以下之鑽孔用潤滑劑片 材係將潤滑劑樹脂組成物層形成於金屬箔之至少一表面上 之片材，單獨由潤滑劑樹脂形成之片材，或將潤滑劑樹脂 組成物層形成於有機薄膜之至少一表面上之片材。 控制空氣泡大小之使用於本發明中之金屬箔或有機薄 膜可選自前述的金屬箔及有機薄膜。有機薄膜可經物理或 化學表面處理成具有糙度。表面處理係利用一般知曉的方 法諸如電漿處理、電暈處理、化學試劑處理或喷砂處理進 行。 本發明之鑽孔用潤滑劑片材需要包含於潤滑劑樹脂組 成物層中之空氣泡的直徑為3 0微米以下，及潤滑劑樹脂組 成物層不含具大於鑽錐直徑之1 / 1 0之直徑的空氣泡更 佳。當潤滑劑樹脂組成物層包含直徑大於3 0微米之空氣泡 或當空氣泡之直徑大於鑽錐直徑之1 / 1 0時，鑽錐易受到空 氣泡的影響而在鑽孔過程中滑動。在此情況，待堆疊之層 合物或塑膠板的數目愈大，則在下側之板中之孔洞的錯位 (m i s r e g i s t r a t i ο η )變得愈大，以致孔洞位置準確度減低。 所使用之鑽錐的直徑並無特殊之限制。然而，當鑽錐直徑 為3 0 0微米以下，或為1 5 0微米以下時，由於鑽錐薄，因 而鑽錐易彎曲。孔洞位置準確度僅由於鑽錐之些微彎曲即 大大減低。 將本發明之鑽孔用潤滑劑片材設置於層合物或塑膠板 之至少上表面上，及自潤滑劑片材之潤滑劑樹脂組成物層 15 312/發明說明書(補件)/93-04/93101839 200417303 側鑽孔。使用於以上鑽孔中之層合物或塑膠板並無特殊之 限制。明確言之，層合物或塑膠板之例子包括不具有銅箔 之層合物、單面或雙面銅面層合物、使用以上之銅面層合 物製得之多層板、銅面撓性片材、軟硬合板（r i g i d - f 1 e X board)、聚碳酸酯板、丙烯酸系板等等。 (發明效果） 根據本發明所提供之鑽孔用潤滑劑片材，可設置潤滑劑 片材，而不會錯誤辨識兩表面。關於使用水溶性樹脂之潤 滑劑片材，即使當樹脂黏著至孔洞壁時，亦可經由在後續 的步驟中以水洗滌，而容易地將樹脂移除。可製得具高工 業實用性之入口片材。 根據本發明所提供之有色鑽孔用潤滑劑片材，可容易地 區別其之兩表面，因此可防止由將潤滑劑片材放反所造成 的不良孔洞品質。 根據本發明所提供之將樹脂組成物層形成於具有糙度 之有機薄膜上之鑽孔用潤滑劑片材，鑽子斷裂速率大大地 改良，且可製得孔洞位置準確度等等優異的孔洞。 根據本發明所提供之控制空氣泡大小之鑽孔用潤滑劑 片材，可製得鑽孔位置準確度優異的孔洞。 (實施例） 本發明將參照以下之實施例及比較例作具體說明，其中 「份」代表「重量份數」。 (實施例1 ) 將1份不含鹵素之藍色水溶性染料（食用著色物質藍色1 16 312/發明說明書(補件)/93-04/93101839 200417303 號）加至3 5份具5 0 0，0 0 0之分子量的聚氧化乙烯及6 5份具 9 0 0之分子量的聚甘油單硬脂酸酯中。利用 合機在1 3 0 °C在氮氣密封下將其捏合1小時，而得具1 6 0，0 0 0泊（ρ 〇 i s e ) 黏度之混合物。使混合物通過在1 3 0 °C下之加熱輥，而製 得厚度0 . 0 5毫米之藍色片材。 另外將1 0份於端基具有羥基及具2 0 , 0 0 0之分子量及 8 0 0泊之熔體黏度（在2 0 0 °C下）的飽和聚酯樹脂及3份二異 氰酸己二酯溶解於甲苯/甲基乙基酮二3 / 1之混合溶劑 中，而得具1 0重量％濃度之溶液。將溶液塗布至厚度1 0 0 微米之硬鋁箔的一表面，並將塗布溶液在1 0 0 °C下乾燥1 小時，而形成於鋁箔上具5微米厚度之底塗層。將以上之 藍色片材置於鋁箔之底塗層上，及利用加熱輥將片材及鋁 箔加壓及整合，而製得其中一表面為藍色之鑽孔用潤滑劑 片材（其之兩表面可明顯地區別）。然後堆疊兩1 . 6毫米厚 之雙順丁烯二醯亞胺-氰酸酯樹脂（B T樹脂）型銅面六層 板。將以上之潤滑劑片材設置於堆疊板之上表面上，使潤 滑劑片材之樹脂組成物層面向上，及將1 . 6毫米厚之紙酚 層合物設置於堆疊六層板之下表面上。利用在每分鐘 150，000轉（150，000 rpm)在25微米/轉之進給速度旋轉 下之具0 . 2 5毫米Φ鑽錐直徑之鑽子製作孔洞。評估孔洞。 表1顯示其結果。 (實施例2 ) 將1 0份作為潤滑劑之聚乙二醇力π至2 0 0份之聚乙烯縮 醛樹脂、4 0 0份之環氧樹脂及4 0 0份之酚樹脂中，及將2 17 312/發明說明書(補件)/93-04/93101839 200417303 份作為著色劑之食用著色物質黃色5號加至混合物中 製得熱固性樹脂組成物。將熱固性樹脂組成物黏合至 1 0 0微米之硬鋁箔（表面糙度平均1 . 6微米，最大2 . 7指 的一表面，而製得具有厚度1 0 0微米之樹脂組成物層 孔用潤滑劑片材（潤滑劑片材之兩表面可明顯地作區另 然後堆疊兩1 . 6毫米厚之玻璃環氧銅面六層板。將以 潤滑劑片材設置於堆疊板之上表面上，使潤滑劑片材 脂組成物層面向上，及將1 . 5毫米厚之紙基材料酚樹 合物設置於堆疊六層板之下表面上。利用在每分鐘8 0 轉在20微米/轉之進給速度旋轉下之具0.3毫米Φ4 直徑之鑽子製作孔洞。評估孔洞。表1顯示其結果。 (比較例1及2 ) 以與實施例1及2相同之方式製備鑽孔用潤滑劑片 除了未使用實施例1及2中所使用之著色劑。將各潤 片材分別設置於兩堆疊銅面六層板之上表面上，使潤 片材之鋁箔側面向上。以與實施例1及2相同之條件 孔洞。表1顯示評估結果。 (比較例3 ) 在與實施例1相同之條件下製作孔洞，除了未使用 例1中所使用之鑽孔用潤滑劑片材。表1顯示評估結 (比較例4 ) 在與實施例1相同之條件下製作孔洞，除了以鋁箔取 施例1中所使用之鑽孔用潤滑劑片材。表1顯示評估i 312/發明說明書(補件)/93-04/93101839 ， 而 厚度 ί米） 的鑽 J ) 0 上之 之樹 脂層 ,000 I錐 材， 滑劑 滑劑 製作 實施 果。 代實 果。 18 200417303 (表1 ) 項目 實施例 比較例 1 2 1 2 3 4 暈圈（um) 上表面 131 147 222 267 491 450 下表面 110 129 165 212 400 383 污點 2，0 0 0擊 平均 9.9 9. 4 9. 0 8. 7 8. 4 8.5 最小 (9. 4) (8. 8) (8. 5) (8. 0) (7. 3) (7. 7) 5，0 0 0擊 平均 9. 3 8. 9 8. 4 8. 3 7. 7 8.0 最小 (8. 6) (8. 2) (7· 8) (7. 5) (6. 5) (7. 0) 孔洞位置準確度 (最大μηι) 27 20 67 69 75 71 孔洞壁之糙度（最 大 μπι) 8 13 12 17 29 27 〈測量方法〉 1 )暈圈：於六層板中鑽孔3，0 0 0擊，然後將六層板於2 5 °C下之4 N - H C 1中浸泡5分鐘。測量内層之黑色氧化物部分 中之暈圈的最大距離。 2 )污點：分別鑽孔2，0 0 0擊及5，0 0 0擊，觀察經鑽孔 2 , 0 0 0擊之1 0個孔洞及經鑽孔5，0 0 0擊之1 0個孔洞的截 面，及評估污點的產生狀態。當未發現污點時給1 0分，及 當全部發現污點時給0分。 3 )孔洞位置準確度及孔洞壁之糙度：於在兩堆疊六層板 中鑽孔3，0 0 0擊後，測量在兩堆疊六層板之下方板之背面 中之孔洞位置之導引位置與鑽孔位置之間的錯位。顯示最 大值。此外，關於孔洞壁之糙度，測量經鑽孔3，0 0 0擊之 1 0個孔洞的壁糙度，及顯示最大值。 (實施例3 ) 利用捏合機在1 3 0 °C在氮氣密封下將3 5份具5 0 0，0 0 0之 19 312/發明說明書(補件)/93-04/93101839 200417303 分子量的聚氧化乙烯及6 5份具9 0 0之分子量的聚甘油單硬 脂酸酯捏合1小時，而得具1 6 0，0 0 0泊黏度之混合物。使 混合物通過在1 3 0 °C下之加熱輥，而製得厚度0 . 0 5毫米之 片材。 另外將1 0份於端基具有羥基及具2 0 , 0 0 0之分子量及 8 0 0泊之熔體黏度（在2 0 0 °C下）的飽和聚酯樹脂及3份二異 氰酸己二酯溶解於曱苯/曱基乙基酮=3 / 1之混合溶劑 中，而得具1 0重量％濃度之溶液。將3份不含鹵素之藍色 顏料（酞青素藍）加至溶液，及將藍色顏料均勻溶解及混合 於溶液中。將所得之溶液塗布至厚度1 0 0微米之硬鋁箔的 一表面，及將塗布溶液在1 0 0 °C下乾燥1小時，而形成厚 度5微米之底塗層。將以上製得之片材置於鋁箔之底塗層 上，及利用加熱輥將片材及鋁箔加壓及整合，而製得其中 一表面為藍色之鑽孔用潤滑劑片材（其之兩表面可明顯地 區別）。然後堆疊三個0 . 4毫米厚之B T樹脂銅面層合物。 將潤滑劑片材設置於堆疊層合物之上表面上，使潤滑劑片 材之樹脂組成物層面向上，及將1 . 5毫米厚之紙酚層合物 設置於堆疊層合物之下表面上。利用在每分鐘1 6 0，0 0 0轉 在1 5微米/轉之進給速度旋轉下之具0 . 1 5毫米Φ鑽錐直 徑之鑽子製作孔洞。評估孔洞。表2顯示其結果。 (實施例4 ) 將2份紅色之非鹵素著色劑（食用紅色2號）加至1 0 0份 之水溶性聚胺基曱酸酯樹脂中，而得樹脂組成物。將樹脂 組成物塗布至厚度1 0 0微米之硬鋁箔（表面糙度平均1 · 6 20 312/發明說明書(補件)/93-04/93101839 200417303 微米，最大2 . 7微米）的一表面，而形成厚度1 0微米之樹 脂組成物層。將於實施例3中製得之片材置於鋁箔之樹脂 組成物層上，及經由層合使片材與鋁箔彼此黏合以將其整 合，由此製備得鑽孔用潤滑劑片材（其之兩表面可明顯地區 別）。將製得之潤滑劑片材與實施例3類似地使用於製作孔 洞。評估孔洞。表2顯示評估結果。 (比較例5及6 ) 以與實施例3及4相同之方式製備鑽孔用潤滑劑片材， 除了未使用實施例3及4中所使用之著色劑。將各潤滑劑 片材分別設置於三個堆疊銅面層合物之上表面上，使潤滑 劑片材之鋁箔側面向上。以與實施例3及4相同之條件製 作孔洞。表2顯示評估結果。 (比較例4 ) 在與實施例3相同之條件下製作孔洞，除了以鋁箔取代 實施例3中所使用之鑽孔用潤滑劑片材。表2顯示評估結 果0 (表2) 項目 實施例 比較例 3 4 5 6 7 毛刺（μ m ) 2 2 11 12 3 孔洞位置準確度 (A V G + 3 σ ) (最大 μ m ) 25 27 5 1 55 62 27 29 77 72 75 孔洞壁之糙度（最 大 Mm) 7 6 14 17 29 〈孔洞位置準確度之測量方法〉 關於在三個堆疊層合物之最下方層合物之背面中之 1 5，0 0 0個孔洞（3，0 0 0擊X 5 )，測量在指向座標與各孔洞 21 312/發明說明書(補件)/93-04/93101839 200417303 位置之間的錯位。顯示其之平均值+ 3 σ及最大值。 (實施例5 ) 利用捏合機在1 3 0 °C在氮氣密封下將3 5份具5 0 0，0 0 0之 分子量的聚氧化乙烯及6 5份具9 0 0之分子量的聚甘油單硬 脂酸酯及2份作為著色劑之食用著色物質藍色1號捏合1 小時，而得具1 6 0，0 0 0泊黏度之混合物。使混合物通過在 1 3 0 °C下之加熱輥，而製得厚度0 . 0 5毫米之藍色片材。 另外經由噴砂處理厚度1 0 0微米之聚對苯二甲酸乙二酯 薄膜的兩表面，以致表面各具有1至4微米之糙度及2 0 - 3 0 微米之在外凸部分之間的距離。將以上之藍色片材置於聚 對苯二曱酸乙二酯薄膜之一表面上，及利用加熱輥將其加 壓及整合，而製得其中一表面為藍色之鑽孔用潤滑劑片 材。然後堆疊三個0 . 2毫米厚之B T樹脂銅面層合物。將潤 滑劑片材設置於堆疊層合物之上表面上，使潤滑劑片材之 樹脂組成物層面向上，及將1 . 5毫米厚之紙酚層合物設置 於堆疊層合物之下表面上。利用在每分鐘1 6 0，0 0 0轉在7. 5 微米/轉之進給速度旋轉下之具7 5微米Φ鑽錐直徑之鑽 子製作孔洞。然後利用6 0 °C熱水在高壓下洗滌孔洞。定性 分析孔洞之内側，而發現沒有水溶性樹脂殘留於孔洞之内 側。評估孔洞。表3顯示其結果。 (比較例8 ) 重複實施例5，除了以具有6 0 - 8 0微米之在外凸部分之 間之距離的薄膜取代實施例5中所使用之具有2 0 - 3 0微米 之在外凸部分之間之距離的薄膜。表3顯示評估結果。 22 312/發明說明書(補件)/93-04/93101839 200417303 (比較例9 ) 重複實施例5，除了以厚度1 0 0微米之硬鋁箔取代實施 例5中所使用之薄膜。表3顯示評估結果。 (比較例1 0 ) 重複實施例5，除了以厚度1 0 0微米之聚對苯二曱酸乙 二酯薄膜取代實施例5中所使用之鑽孔用潤滑劑片材。表 3顯示評估結果。 (表3) 項目 實施例 比較1 5 8 9 10 鑽子之斷裂（3, 000擊， n = 5) 無 無 5 / 5斷裂 2/5斷裂 孔洞位置準確度 (最大Mm) 20 25 — 28 孔洞壁之韃度（最大μ m) 5 6 - 10 〈孔洞位置準確度之測量方法〉 關於在三個堆疊層合物之最下方層合物之背面中之 1 5，0 0 0個孔洞（3，0 0 0擊X 5 )，測量在指向座標與各孔洞 位置之間的錯位。顯示其之最大值。 (實施例6 ) 將1份不含鹵素之藍色水溶性染料（食用著色物質藍色1 號）加至3 5份具5 0 0，0 0 0之分子量的聚氧化乙烯及6 5份具 9 0 0之分子量的聚甘油單硬脂酸酯。利用捏合機在1 3 0 °C在 氮氣密封下將其捏合1小時，而得具1 6 0，0 0 0泊黏度之混 合物。使混合物通過在1 3 0 °C下之加熱親，而製得厚度〇 . 〇 5 毫米之藍色片材。 另外將1 0份於端基具有羥基及具2 0，0 0 0之分子量及 23 312/發明說明補件)/93-04/93101839 200417303 8 0 0泊之熔體黏度（在2 0 0 °C下）的飽和聚酯樹脂及3份 氰酸己二酯溶解於曱苯/曱基乙基酮=3 / 1之混合溶齊 中，而得具1 0重量％濃度之溶液。將溶液塗布至厚度 微米之硬鋁箔的一表面，及將塗布溶液在1 0 0 °C下乾 小時，而形成厚度5微米之底塗層。將以上之片材置 箔之底塗層上，及利用加熱報將片材及銘箔加壓及整 而製得其中一表面為藍色之鑽孔用潤滑劑片材。潤滑 脂層中之空氣泡的最大直徑為9微米。然後堆疊三個 毫米厚之B T樹脂銅面六層板。將潤滑劑片材設置於堆 之上表面上，使潤滑劑片材之樹脂組成物層面向上， 1 . 6毫米厚之紙酚層合物設置於堆疊六層板之下表面 利用在每分鐘1 6 0，0 0 0轉在1 5微米/轉之進給速度旋 之具1 5 0微米Φ鑽錐直徑之鑽子製作孔洞。評估孔洞 4顯示其結果。 (比較例1 1 ) 重複實施例6，除了以其中空氣泡之最大直徑為7 0 之潤滑劑樹脂組成物層取代實施例6中所使用之其中 泡之最大直徑為9微米之潤滑劑樹脂組成物層。表4 評估結果。 (比較例1 2 ) 在與實施例6相同之條件下製作孔洞，除了以鋁箔 實施例6中所使用之鑽孔用潤滑劑片材。表4顯示評 果。 312/發明說明書(補件)/93-04/93101839 二異 I 10 0 燥1 於鋁 合， 劑樹 0. 4 疊板 及將 上。 轉下 。表 微米 空氣 顯示 取代 估結 24 200417303 (表4) 項目 實施例 比較例 6 11 12 孔洞位置準確度（μ in ) (AVG+3a) 29 42 38 (最大） 35 63 78 〈測量方法〉 關於在三個堆疊層合物之最下方層合物之背面中之 1 5，0 0 0個孔洞（3，0 0 0擊X 5 )，測量在指向座標與各孔洞 位置之間的錯位。顯示其之平均值+ 3σ及最大值。 25 312/發明說明書(補件)/93-04/93101839200417303 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a lubricant sheet for drilling, which is provided on the surface of a laminate or a plastic plate when a hole is made in the laminate or a plastic plate. And a drilling method using the above lubricant sheet for drilling. In the manufacture of printed wiring boards, perforations made by using the above-mentioned lubricant sheet for drilling are mainly suitable for use as printed circuit boards such as semiconductor plastic packages or motherboard holes (t h r og hole). In addition, the lubricant sheet for drilling provided by the present invention can be applied to other precision drilling applications, for example, drilling a hard plastic plate such as a lens for glasses. [Prior Art] The conventional aluminum sheet is used as an entrance sheet for drilling a laminate for a printed wiring board using a metal drill. In recent years, in high-density printed wiring boards used in semiconductor plastic packages or the like, the diameter of through holes has become smaller and smaller, and has 0. The number of printed wiring boards with a minimum through-hole diameter of 15 mmΦ or less has gradually increased. When this small-diameter hole is made by using the entrance sheet alone, there are problems that the life of the drill is short, the roughness of the hole wall is large, and the accuracy of the hole position is poor. Therefore, a lubricant sheet for drilling obtained by forming a lubricant resin layer on a surface of a metal foil such as aluminum is used to extend the life of a drill, improve the accuracy of hole locations, and improve the roughness of hole walls. . For example, the J P-A-5-1 6 9 4 0 0 announcement proposes a method that can pass through the thickness 0. 1 to 3. A lubricant resin composition layer of 0 mm was formed on one surface of a metal foil and was a lubricant sheet. The hue of the above lubricant resin composition layer is a natural color. Therefore, when the thickness of the lubricant resin layer 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 is small, it is difficult to distinguish the two surfaces of the lubricant sheet, so it is difficult to determine which surface and layer should be used. Compound or plastic plate. The above difficulties may cause problems such as mistakenly turning the lubricant sheet back or reducing the quality of the holes. In addition, when using a small diameter drill, especially the diameter of 0. When the drill is less than 1 mm, problems such as easy fracture of the drill and the accuracy of the hole position may be insufficient depending on the size of the air bubbles existing in the lubricant resin composition layer. SUMMARY OF THE INVENTION An object of the present invention is to provide a lubricant sheet which can overcome the problem of poor hole quality caused by mistakenly putting the lubricant sheet back. Another object of the present invention is to provide a lubricant sheet which can prevent any drill breakage when a small-diameter drill is used. Still another object of the present invention is to provide a lubricant sheet which can overcome the problem of insufficient accuracy of hole positions caused by minute air bubbles existing in the resin of the lubricant sheet. According to the present invention, there is provided a lubricant sheet for drilling, which includes a metal foil or an organic film, a lubricant resin composition layer or an undercoat layer and a lubricant resin composition layer, and the lubricant resin composition layer or the bottom The coating layer and the lubricant resin composition layer are formed on at least one surface of a metal foil or an organic film, and at least one of the undercoat layer and the lubricant resin composition layer includes a colorant. In addition, according to the present invention, there is provided a lubricant sheet for drilling according to the above lubricant sheet, wherein the organic thin film has 0 on one surface thereof. A roughness of 5 to 15 micrometers, and a distance between the convex portions of the roughness is 1 to 50 micrometers. 6 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 Furthermore, according to the present invention, a method for drilling a laminate or a plastic plate is provided. The method includes setting a lubricant sheet for drilling on Laminate or plastic plate, and drill holes from the lubricant resin composition layer side. Furthermore, according to the present invention, there is provided a lubricant sheet formed of a lubricant resin composition, which sheet is suitable for a method for drilling a laminate or a plastic plate, and the air bubbles contained in the lubricant sheet Has a diameter of 30 microns or less. [Embodiment] In the present invention, the term "laminate" refers to a plastic board having an insulating layer for a printed board, and the above terms include a plastic board having a conductive layer in addition to the insulating layer. The term "plastic plate" refers to a plate-like article formed of a composition containing an organic polymer compound as a main component, and includes a plate-like article having a glass substrate or an inorganic filler. Regarding a lubricant sheet for drilling obtained by forming a lubricant resin composition layer or an undercoat layer and a lubricant resin composition layer on at least one surface of a metal foil or an organic film, the present invention relates to a colorant Preferably, it is a non-halogen colorant, added to at least one of the undercoat layer and the lubricant resin layer, so that the two surfaces of the lubricant sheet can be clearly distinguished from each other. Therefore, the present invention can prevent lubrication during drilling The agent sheet is misplaced. In addition, the addition of non-halogen colorants provides an environmentally friendly lubricant sheet for drilling. In addition, it is preferable to use a water-soluble resin in the lubricant resin composition, because the lubricant resin composition can be easily removed when it adheres to a laminate or a plastic plate. In this case, it is also preferable to use a water-soluble colorant as the colorant. In addition, a lubricant resin composition layer or an undercoat layer and a lubricant tree 7 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 are formed on at least one surface of an organic thin film. As a lubricant sheet, the present invention provides an organic film having a roughness of a predetermined size, preventing any drill from breaking and improving the accuracy of hole location. Furthermore, the present invention significantly improves the accuracy of hole positions by controlling the size of air bubbles in the lubricant resin composition layer of the lubricant sheet. The lubricant resin composition used in the lubricant sheet of the present invention may be selected from resin compositions known as the resin composition for a lubricant sheet for drilling. Examples thereof include water-soluble resins, thermoplastic resins, thermosetting resins and mixtures of lubricants and any of these resins, and the like. They can be used alone or in combination. It is preferable to use a lubricant resin composition containing a water-soluble resin as a main component. When the above water-soluble resin remains in the perforation during drilling, it can be easily removed by washing with hot water, so that holes with excellent reliability can be obtained. Various additives may be added to the lubricant resin composition. For example, various organic or inorganic fillers can be added as needed. Preferred examples of the water-soluble resin used in the lubricant resin composition of the present invention include polyethylene oxide, polypropylene glycol, polypropylene oxide, polyvinyl alcohol, sodium polyacrylate, polypropylene amidamine, and polyvinylpyrrolidone. , Carboxymethyl cellulose, polybutylene glycol, polyether ester, etc. >. It can be used alone or in combination. Preferred examples of the thermoplastic resin used in the lubricant resin composition of the present invention include polyethylene, polypropylene, polystyrene, polyester, polyethylene terephthalate, polyamide, and polycarbonate. , Polysulfone, polyethersulfone, polyallylate, polyetheretherketone, polyphenylenesulfide, and so on. These thermoplastic resins can be used individually or in combination with 8 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303. Preferred examples of the thermosetting tree used in the lubricant resin composition of the present invention include phenol resin, epoxy resin, melamine resin, urea acrylic resin, unsaturated polyester resin, polyurethane resin, and Silicone resin, cyanate resin, maleic acid, etc. These thermosetting resins may be used alone or in combination. Preferable examples of the water-soluble lubricant used in the lubricant resin composition of the present invention include polyoxyethylene unit ethers such as polyethylene glycol oleyl ether, polyoxyethylene ethenyl ether, Polyoxyethylene ether, polyoxyethyl lauryl ether, polyoxyethylene dodecyl ether, ethyl nonyl ether and polyoxyethyl octylphenyl ether, polyoxyethylene polyoxylate Ethyl monolaurate, polyoxyethylene monostearate and ethyl monooleate, unit esters of polyoxyethylene sorbitan monostearate such as hexaglyceryl monostearate Acid esters and decaglyceryl monostearate, polyoxyethylene propylene polymers and so on. It can be used alone. Examples of the water-soluble lubricant used in the lubricant resin composition of the present invention include ss amine compounds such as ethynylstearate, oleylamine, ammonium stearate, and arylenebisstearylamine, fatty acids Combining lauric acid, stearic acid, palmitic acid and oleic acid, fatty acid ester compounds butyl fatty acid ester, butyl oleate and ethylene glycol laurate, aliphatic hydrocarbons such as liquid paraffin and polyethylene wax, and high carbon Aliphatic alcohols such as oleyl alcohol and the like can be used alone or in combination. Provided by the present invention, the above-mentioned lubricant resin composition 312 / Invention Specification (Supplement) / 93-04 / 93101839 grease resin, grease, alcohol amine resin lubricant, polyoxystearyl polyoxygenate etc. Polyoxygen, polyglycolic acid, or a combination of lubricants such as hard compounds. Its lubricant 9 200417303 The method for forming a lubricant resin composition layer on a metal foil or an organic film to manufacture a lubricant sheet for drilling is not particularly limited. The above method may be selected from generally known methods. For example, a lubricant resin composition can be kneaded using a kneader or the like at a high temperature without using a solvent, the kneaded resin composition can be extruded to prepare a sheet, and the sheet can be pressed on a metal foil or organic A method of manufacturing a lubricant sheet for drilling on a film; and dissolving a lubricant resin composition in a solvent or water to prepare a coating composition, applying the coating composition to a surface of a metal foil or an organic film, and A method for preparing a lubricant sheet for drilling by drying the applied coating composition. The thickness of the lubricant resin composition layer is not particularly limited, but it is preferably 5 to 100 µm. The lubricant resin composition layer may be formed on each surface of a metal foil or an organic film. For example, when a resin layer is formed on both surfaces of a metal foil, a hard resin for preventing burrs is provided on a surface of a material side serving as a drilling target, and a soft resin containing a lubricant is provided as a drill On the other side of the child side. In this way, the resins on the two surfaces can play different roles. The difference between the two surfaces is especially important when using the above types of lubricant sheets. When the adhesion between the metal foil or organic film and the lubricant resin composition is insufficient, it will generally be formed of a thermosetting resin or a thermoplastic resin, and have a value of 0. An undercoat layer with a preferred thickness of 5 to 15 microns is formed on the surface of a metal foil or an organic film to improve the adhesive strength. The method for forming the undercoat layer on the surface of a metal foil or an organic film is not particularly limited. It can be selected from known methods. For example, a solvent-free primer resin or a coating composition obtained by dissolving a primer resin in a solvent may be applied to a metal foil 10 312 / Invention Note (Supplement) / 93-04 / 93101839 200417303 or Organic film surface, and a method of drying it to form an undercoat layer; or a method of spraying the above coating composition directly on a metal foil or an organic film surface. In the present invention, when the lubricant sheet has an undercoat layer, a colorant is preferably added to the undercoat layer so that the two surfaces of the lubricant sheet are clearly distinguished. In this case, a colorant may also be added to the lubricant resin layer formed on the undercoat layer. The coloring agent used in the present invention may be selected from generally known organic and inorganic pigments and organic and inorganic dyes. Specifically, organic pigments include azo pigments such as lake red (1 akered), hansaye (hansaye 1 1 0w), / 3 _ naphthalene, naphthyl AS, benzoyl sigmazone, bisazo Yellow and roar ° Sit down, scopolamine, oraquine, two.丼, lottery, sulfur blue, green onion (anthanthr ο ne), isoindolin, iso 丨 olin 8 with, Yin Dan Shilin, quinophtharone ^ metal complex, roar Buloba, cyan blue, copper dicyan blue, nickel S blue blue, iSS blue, blue test, skyblue, iron blue, ultramarine blue, indigo, monoazo yellow, benzimidazolone yellow and Allium quinone yellow. These colorants can be used alone or in combination to obtain the desired hue. The organic dye is preferably an edible coloring substance. Since most food coloring substances are water-soluble and have very low toxicity, it is preferable to use food coloring substances in view of these characteristics. Specifically, edible coloring matter includes yellow coloring matter, red coloring matter, and blue coloring matter. The yellow coloring matter includes 11 ^-° ratio ° 3--3-acid acid, 4,5-dihydro-5-oxo-1- (4-stone yellow alcohol group) _4-[(4_ sulfonyl) azo group ] Trisodium salt (Yellow No. 4), 2-naphthalenesulfonic acid, 6-hydroxy-5-[(4-sulfonyl) azo] disodium salt (Yellow No. 5), and so on. The red coloring matter includes 2,7-naphthalenedisulfonic acid, 3-hydroxy-4-[(4-sulfonic acid group 1-naphthalene) couple 11 312 / Invention specification (Supplement) / 93-04 / 93101839 200417303 nitrogen group ] Trisodium salt (red No. 2), Spiro- [isobenzofuran-1 (3 Η), 9 '-[9 Η] g ketone]-3 -one-3,6, -dihydroxy-2 4,4,5,7, -tetraiododi disodium salt (red No. 3), 6-hydroxy-5-[(2-fluorenyl-5-fluorenyl-4-sulfonylphenyl) azo Group] _ 2 -Naphtholite disodium salt (red number 40), 1, 3 -naphthyldiaxite acid, 7-Cyclo-8-[(4-sulfonyl-1 -naphthalene) azo Base] trisodium salt (red 102), spiro- [isobenzofuran-1 (3 Η), 9,-[9 Η] Bishan] -3 -one-2, 4, 4, 5, , 7, -tetrabromo-4,5,6,7-tetrachloro-3 ', 6'-dihydroxy disodium salt (red 104) and spiro- [isobenzofuran-1 (3 Η) , 9,-[9 Η] σ 山] -3 -one-4,5,6,7-tetrachloro-3,6'-dihydroxy-2 ', 4', 5 ', 7'-tetraiodine Dipotassium salt (red 105) and so on. The blue coloring matter includes benzamidine / (^ 6112611611161: 113118111111111111), 1ethyl-N-[4-[[4- [ethyl [(3-thiophenyl) amido] amino] phenyl ] (2 -Phenylsulfuric acid phenyl) sulfenyl] -2,5-cyclohexadiene-1-propidine (11 ^ (^ 116)]-3-sulfonic acid hydroxide internal salt disodium salt (Blue No. 1), 1 Η-called 1 indole-5-sulfonic acid, 2- (1,3-dihydroxy-3-keto-5-sulfonyl-2 Η-called 丨 indole-2-propidine ) -2,3-dihydro-3 -keto disodium salt, etc. These colorants may be halogen-containing colorants or non-halogen colorants. From an environmental point of view, halogen-free colorants are preferred In addition, since the water-soluble colorant can be removed by washing with hot water when remaining in the hole portion, it is preferable that the colorant is a water-soluble colorant. There is no particular limitation on the amount of the colorant. The composition of the lubricant resin The amount of toner in the product is 0. 1 to 5 wt% is preferred. Inorganic pigments include titanium dioxide and the like. Of course, a mixture of organic pigments and inorganic pigments can be used. In addition, known dyes can be used. The combination of the lubricant resin composition and the coloring agent is not particularly limited. Specifically, examples thereof include (1) a resin in which a lubricant resin is water-insoluble 12 312 / Invention Specification (Supplement) / 93-04 / 93] 01839 200417303 and a coloring agent that is water-soluble or water-insoluble Agent method, (2) a method in which the lubricant resin is a water-soluble resin and the colorant is a water-soluble or water-insoluble colorant, and (3) a mixture in which the lubricant resin is a water-soluble or water-insoluble resin And the method in which the coloring agent is a water-soluble or insoluble coloring agent. The combination of the primer resin and the coloring agent is not particularly limited. In plain green, examples include (1) a method in which the primer resin is a water-insoluble resin and the colorant is a water-soluble or water-insoluble colorant, and (2) in which the primer resin is a water-soluble resin and a colorant A method in which the agent is a water-soluble or water-insoluble coloring agent, (3) a method in which the primer resin is a mixture of a water-soluble or water-insoluble resin and the method is a water-soluble or water-insoluble coloring agent, and 4) A method in which the primer resin itself is a colored resin. Regarding a lubricant sheet in which a lubricant resin composition layer is formed on a metal foil, a combination of a water-soluble resin and a water-soluble colorant is preferable from the viewpoint of recovery and recycling of the metal foil after use. In the present invention, the term "non-halogen" means that the content of each gas and the content of bromine according to the measurement method described in the JPCA standard (JPCA-ES-(Π-1 9 9 9) are 0 · 09% (900 Compounds below ppn. The method of mixing the above pigments or dyes with a lubricant resin composition or a primer resin may be a known method. As for the pigment, a pigment having fine particles is used, and the pigment is dispersed or dissolved in the lubricant Resin composition, primer resin, solvent or the like. The dye is dissolved or dispersed in the solvent and / or water, and the resulting solution or dispersion is added to the lubricant resin composition or the primer resin. Or, The dye is directly dispersed or dissolved in 13 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 lubricant resin composition or primer resin. The metal foil on which the lubricant resin composition layer is to be formed may be selected from known ones Metal foil using metal foil as a lubricant sheet for drilling. Specifically, hard, soft, annealed, high purity, nickel, copper, etc., and Alloy. Made of hard, soft or annealed aluminum foil with a thickness of 50 to 500 microns, more preferably 80 to 200 microns, or by combining these foils, and preferably 50 to 500 microns An aluminum foil having a thickness of 80 to 200 micrometers is preferred. The metal foil may be surface-treated with a primer coating. In addition, the surface is used to have a thickness of 0 by a known method such as physical or chemical treatment. Metal foils with a roughness of 5 to 3 microns are preferred. The organic thin film on which the lubricant resin composition layer is to be formed is not particularly limited as long as it is a polymer compound which can be molded into a thin film by itself. Specifically, examples include polyethylene terephthalate, polybutylene terephthalate, polypropylene, polyethylene, polyamide, polycarbonate, etc., and at least two of these polymeric compounds mixture. These polymer compounds are appropriately selected and used as necessary in consideration of the required hole processing steps such as heat resistance, water solubility, viscosity, drilling workability, handling ability, and the like. The thickness of the organic film is preferably 50 to 500 microns, and more preferably 80 to 200 microns. The surface roughness of the organic thin film is as follows. The distance between the convex portions is 1 to 50 microns, preferably 3 to 30 microns. In addition, the roughness in the depth direction is 0. 5 to 15 microns, preferably 1 to 3 microns. The lubricant resin composition layer is formed on at least one surface of the above organic thin film having roughness. When the organic film is transparent, it is difficult to distinguish the two surfaces of the lubricant film, so different colorants are added to the lubricant resin composition layer and the organic film, respectively. 14 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 Lubricant sheet for drilling with a diameter of air bubbles in the resin contained in the lubricant resin composition layer provided by the present invention is 30 micrometers or less The material is a sheet having a lubricant resin composition layer formed on at least one surface of a metal foil, a sheet formed of a lubricant resin alone, or a lubricant resin composition layer formed on at least one surface of an organic film. Sheet. The metal foil or organic thin film used in the present invention for controlling the size of the air bubbles may be selected from the aforementioned metal foils and organic thin films. The organic thin film may be physically or chemically surface-treated to have a roughness. The surface treatment is performed by a generally known method such as plasma treatment, corona treatment, chemical treatment, or sandblasting. The lubricant sheet for drilling of the present invention needs the diameter of the air bubbles contained in the lubricant resin composition layer to be 30 micrometers or less, and the lubricant resin composition layer does not have a diameter larger than 1/10 of the drill cone diameter. The diameter of air bubbles is better. When the lubricant resin composition layer contains air bubbles having a diameter larger than 30 microns or when the diameter of the air bubbles is larger than 1/10 of the diameter of the drill cone, the drill cone is easily affected by the air bubbles and slides during the drilling process. In this case, the larger the number of laminates or plastic plates to be stacked, the larger the misalignment of the holes (m i s r e g i s t r a t i ο η) in the lower plate becomes, so that the accuracy of the hole position decreases. There is no particular limitation on the diameter of the drill used. However, when the diameter of the drill cone is 300 μm or less, or 150 μm or less, the drill cone is easily bent because the drill cone is thin. The accuracy of the hole position is greatly reduced due to the slight bending of the drill cone. The lubricant sheet for drilling of the present invention is provided on at least the upper surface of a laminate or a plastic plate, and a lubricant resin composition layer 15 312 / Invention Specification (Supplement) / 93- 04/93101839 200417303 Side drilling. There are no special restrictions on the laminates or plastic plates used in the above drillings. Specifically, examples of laminates or plastic plates include laminates without copper foil, single-sided or double-sided copper-surface laminates, multilayer boards made using the above copper-surface laminates, and copper-surface laminates. Flexible sheet, rigid-f 1 e X board, polycarbonate board, acrylic board, etc. (Effects of the Invention) According to the lubricant sheet for drilling provided by the present invention, a lubricant sheet can be provided without misidentifying both surfaces. Regarding the lubricant sheet using a water-soluble resin, even when the resin adheres to the hole wall, the resin can be easily removed by washing with water in a subsequent step. The entrance sheet can be made with high industrial applicability. According to the lubricating sheet for colored drilling provided by the present invention, the two surfaces can be easily distinguished, so that the poor hole quality caused by turning the lubricating sheet back can be prevented. According to the present invention, a lubricant sheet for drilling in which a resin composition layer is formed on an organic film having a roughness, a drill break rate is greatly improved, and holes having excellent hole position accuracy and the like can be obtained. . According to the lubricating sheet for drilling provided by the present invention for controlling the size of air bubbles, holes with excellent accuracy in drilling position can be obtained. (Examples) The present invention will be specifically described with reference to the following examples and comparative examples, where "part" represents "parts by weight". (Example 1) Add 1 part of a halogen-free blue water-soluble dye (edible coloring matter blue 1 16 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303) to 3 5 parts with 50 0 Polyethylene oxide having a molecular weight of 0,0 0 and 65 parts of polyglycerol monostearate having a molecular weight of 900. The mixture was kneaded at 130 ° C for 1 hour under a nitrogen seal using a kneader to obtain a mixture having a viscosity of 160,000 poise (ρ 〇 s e). The mixture was passed through a heated roller at 130 ° C to obtain a thickness of 0. 0 5 mm blue sheet. In addition, 10 parts of a saturated polyester resin having a hydroxyl group at a terminal group and a molecular weight of 20,000 and a melt viscosity of 800 poise (at 200 ° C) and 3 parts of diisocyanate Adipate is dissolved in a mixed solvent of toluene / methyl ethyl ketone di / 3/1 to obtain a solution having a concentration of 10% by weight. The solution was applied to one surface of a hard aluminum foil having a thickness of 100 micrometers, and the coating solution was dried at 100 ° C for 1 hour to form an undercoat layer having a thickness of 5 micrometers on the aluminum foil. The above blue sheet was placed on the undercoat layer of aluminum foil, and the sheet and aluminum foil were pressed and integrated with a heating roller to prepare a lubricant sheet for drilling (whose surface is blue) The two surfaces can be clearly distinguished). Then stack two 1's. Six-mm-thick, six-layer copper-clad bis-butylene diimide-cyanate resin (BT resin) type copper surface. The above lubricant sheet is set on the upper surface of the stacked plate, so that the resin composition of the lubricant sheet faces up, and 1. A 6 mm thick paper phenol laminate was placed on the lower surface of the stacked six-layer board. Utilize a tool with a rotation speed of 15,000 rpm (150,000 rpm) at a feed rate of 25 microns per revolution. 2 5 mm Φ drill cone diameter drill for making holes. Assess holes. Table 1 shows the results. (Example 2) Among 10 parts of polyethylene acetal resin π to 200 parts of polyethylene acetal resin as a lubricant, 400 parts of epoxy resin and 400 parts of phenol resin, and A thermosetting resin composition was prepared by adding 2 17 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 parts of edible coloring substance Yellow No. 5 as a colorant to the mixture. The thermosetting resin composition was bonded to a 100 micron hard aluminum foil (the surface roughness averaged 1. 6 microns, max. 2 7 refers to one surface, and a resin composition layer having a thickness of 100 micrometers is prepared as a lubricant sheet for holes (both surfaces of the lubricant sheet can be clearly divided into zones and then two 1's are stacked. 6mm thick glass epoxy copper surface six-layer board. A lubricant sheet is set on the upper surface of the stacking plate, with the lubricant sheet fat composition layer facing upward, and 1. A 5 mm thick paper-based material phenol resin was placed on the lower surface of the stacked six-layer board. Utilize a tool with a rotation speed of 8 0 revolutions per minute at a feed rate of 20 microns / revolution. 3 mm Φ4 diameter drill for making holes. Assess holes. Table 1 shows the results. (Comparative Examples 1 and 2) A lubricant sheet for drilling was prepared in the same manner as in Examples 1 and 2, except that the coloring agents used in Examples 1 and 2 were not used. Each wet sheet was set on the upper surface of two stacked copper-faced six-layer boards, with the aluminum foil side of the wet sheet facing up. Holes were formed under the same conditions as in Examples 1 and 2. Table 1 shows the evaluation results. (Comparative Example 3) Holes were formed under the same conditions as in Example 1, except that the lubricant sheet for drilling used in Example 1 was not used. Table 1 shows the evaluation results. (Comparative Example 4) Holes were formed under the same conditions as in Example 1, except that the aluminum foil was used as the lubricant sheet for drilling used in Example 1. Table 1 shows the evaluation results of i 312 / Invention Specification (Supplement) / 93-04 / 93101839, and the thickness of the drill J), the resin layer on the top surface, 000 I cone, lubricant, and lubricant production results. Generation results. 18 200417303 (Table 1) Item Example Comparative Example 1 2 1 2 3 4 Halo (um) Upper surface 131 147 222 267 491 450 Lower surface 110 129 165 212 400 383 Stain 2.0 0 0 0 Hit average 9. 9 9. 4 9. 0 8. 7 8. 4 8. 5 minimum (9. 4) (8. 8) (8. 5) (8. 0) (7. 3) (7. 7) 5, 0 0 0 hits average 9. 3 8. 9 8. 4 8. 3 7. 7 8. 0 minimum (8. 6) (8. 2) (7.8) (7. 5) (6. 5) (7. 0) Hole position accuracy (maximum μηι) 27 20 67 69 75 71 Roughness of hole wall (maximum μπι) 8 13 12 17 29 27 <Measurement method> 1) Halo: Drill holes in six-layer board 3,0 0 0 strokes, and then immerse the six-layer board in 4 N-HC 1 at 25 ° C for 5 minutes. Measure the maximum distance of the halo in the black oxide portion of the inner layer. 2) Stain: drill holes of 2, 0 0 0 and 5, 0 0 0, respectively, observe 10 holes of 2, 0 0 0 and 10 of 5 0 0 0 Cross section of the hole, and assess the state of the stain. 10 points are given when no stains are found, and 0 points are given when all stains are found. 3) Hole position accuracy and hole wall roughness: After 3,0 0 holes were drilled in the two stacked six-layer boards, the guide of the hole position in the back of the lower board of the two stacked six-layer boards was measured. Misalignment between position and drilling position. The maximum value is displayed. In addition, as for the roughness of the hole wall, the wall roughness of 10 holes hit by 3,000 holes was measured, and the maximum value was displayed. (Example 3) Using a kneader at 130 ° C under a nitrogen seal, 35 parts of 50, 0, 0, 0, 19 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 molecular weight polymer Ethylene oxide and 65 parts of polyglycerol monostearate having a molecular weight of 900 were kneaded for 1 hour to obtain a mixture having a viscosity of 160,000 poise. The mixture was passed through a heated roller at 130 ° C to obtain a thickness of 0. 0 5 mm sheet. In addition, 10 parts of a saturated polyester resin having a hydroxyl group at a terminal group and a molecular weight of 20,000 and a melt viscosity of 800 poise (at 200 ° C) and 3 parts of diisocyanate Adipic acid is dissolved in a mixed solvent of toluene / fluorenyl ethyl ketone = 3/1 to obtain a solution having a concentration of 10% by weight. Add 3 parts of halogen-free blue pigment (phthalocyanin blue) to the solution, and dissolve and mix the blue pigment evenly in the solution. The obtained solution was applied to one surface of a hard aluminum foil having a thickness of 100 µm, and the coating solution was dried at 100 ° C for 1 hour to form an undercoat layer having a thickness of 5 µm. The above-prepared sheet was placed on the undercoat layer of aluminum foil, and the sheet and the aluminum foil were pressed and integrated with a heating roller to obtain a lubricant sheet for drilling (whose surface was blue) The two surfaces can be clearly distinguished). Then stack three 0's. 4 mm thick B T resin copper surface laminate. The lubricant sheet is set on the upper surface of the stacked laminate, so that the resin composition of the lubricant sheet faces upward, and 1. A 5 mm thick paper phenol laminate was placed on the lower surface of the stacked laminate. Utilize a tool with a rotation speed of 16 0, 0 0 0 per minute at a feed speed of 15 microns per revolution. 15 mm Φ drill cone diameter drill for making holes. Assess holes. Table 2 shows the results. (Example 4) Two parts of a red non-halogen colorant (edible red No. 2) was added to 100 parts of a water-soluble polyurethane resin to obtain a resin composition. The resin composition is applied to a hard aluminum foil with a thickness of 100 microns (the average surface roughness is 1 · 6 20 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303 microns, the maximum is 2. 7 microns) on one surface to form a resin composition layer with a thickness of 10 microns. The sheet prepared in Example 3 was placed on the resin composition layer of aluminum foil, and the sheet and the aluminum foil were adhered to each other by lamination to integrate them, thereby preparing a lubricant sheet for drilling (which The two surfaces can be clearly distinguished). The obtained lubricant sheet was used for making holes similarly to Example 3. Assess holes. Table 2 shows the evaluation results. (Comparative Examples 5 and 6) A lubricant sheet for drilling was prepared in the same manner as in Examples 3 and 4, except that the coloring agents used in Examples 3 and 4 were not used. Each lubricant sheet was placed on the upper surface of three stacked copper surface laminates with the aluminum foil side of the lubricant sheet facing up. Holes were made under the same conditions as in Examples 3 and 4. Table 2 shows the evaluation results. (Comparative Example 4) Holes were formed under the same conditions as in Example 3, except that aluminum foil was used instead of the lubricant sheet for drilling used in Example 3. Table 2 shows the evaluation results. 0 (Table 2) Project Example Comparative Example 3 4 5 6 7 Burr (μm) 2 2 11 12 3 Hole Position Accuracy (AVG + 3 σ) (Maximum μm) 25 27 5 1 55 62 27 29 77 72 75 Roughness of hole wall (maximum Mm) 7 6 14 17 29 <Measurement method of hole position accuracy> Regarding one of the back of the lowermost laminate of the three stacked laminates, 5 0 0 0 holes (3, 0 0 hit X 5), measured the misalignment between the pointing coordinates and the position of each hole 21 312 / Invention Specification (Supplement) / 93-04 / 93101839 200417303. The average value + 3 σ and the maximum value are displayed. (Example 5) Using a kneader at 130 ° C under a nitrogen seal, 35 parts of a polyethylene oxide having a molecular weight of 5000, 0 0 and 65 parts of a polyglycerin monomer having a molecular weight of 9 0 0 The stearic acid ester and 2 parts of the edible coloring matter Blue No. 1 as a colorant were kneaded for 1 hour to obtain a mixture having a viscosity of 160,000 poise. The mixture was passed through a heated roller at 130 ° C to obtain a thickness of 0. 0 5 mm blue sheet. In addition, both surfaces of a polyethylene terephthalate film having a thickness of 100 micrometers were sandblasted, so that each surface had a roughness of 1 to 4 micrometers and a distance between the convex portions of 20 to 30 micrometers. The above blue sheet was placed on one surface of a polyethylene terephthalate film, and it was pressed and integrated by a heating roller to obtain a drilling lubricant with a blue surface. Sheet. Then stack three 0's. 2 mm thick B T resin copper surface laminate. Place the lubricant sheet on the upper surface of the stacked laminate so that the resin composition of the lubricant sheet faces up, and 1. A 5 mm thick paper phenolic laminate was placed on the lower surface of the stacked laminate. Utilize at 16 0, 0 0 0 rpm at 7. A drill with a diameter of 7 5 micron Φ at a feed speed of 5 μm / rev made a hole. The holes were then washed with hot water at 60 ° C under high pressure. The inside of the hole was qualitatively analyzed, and it was found that no water-soluble resin remained on the inside of the hole. Assess holes. Table 3 shows the results. (Comparative Example 8) Example 5 was repeated, except that a film having a distance between the convex portions of 60 to 80 micrometers was used instead of the convex portion having a distance of 20 to 30 micrometers used in Example 5. Distance of the film. Table 3 shows the evaluation results. 22 312 / Explanation of the Invention (Supplement) / 93-04 / 93101839 200417303 (Comparative Example 9) Example 5 was repeated, except that the film used in Example 5 was replaced with a hard aluminum foil having a thickness of 100 µm. Table 3 shows the evaluation results. (Comparative Example 10) Example 5 was repeated, except that a polyethylene terephthalate film having a thickness of 100 m was used instead of the lubricant sheet for drilling used in Example 5. Table 3 shows the evaluation results. (Table 3) Comparison of project examples 1 5 8 9 10 Drill fracture (3,000 shots, n = 5) None None 5/5 fracture 2/5 fracture hole location accuracy (maximum Mm) 20 25 — 28 holes Wall thickness (maximum μm) 5 6-10 <Measurement method of hole position accuracy> About 15,000 holes (3 in the back of the lowermost laminate of the three stacked laminates) , 0 0 0 click X 5), measure the misalignment between the pointing coordinates and the position of each hole. The maximum value is displayed. (Example 6) 1 part of a halogen-free blue water-soluble dye (edible coloring matter Blue No. 1) was added to 35 parts of polyethylene oxide having a molecular weight of 5000, 0, and 65 parts. Polyglycerol monostearate with a molecular weight of 900. Using a kneader at 130 ° C under a nitrogen seal for 1 hour, a mixture having a viscosity of 160,000 poise was obtained. The mixture was heated to a thickness of 130 ° C to obtain a thickness of 0. 〇 5 mm blue sheet. In addition, 10 parts of the end group have a hydroxyl group and have a molecular weight of 20,000 and a molecular weight of 23 312 / instructions for the invention) / 93-04 / 93101839 200417303 8 0 poise melt viscosity (at 20 0 ° C) The saturated polyester resin and 3 parts of adipic acid cyanate are dissolved in a mixed solvent of toluene / fluorenyl ethyl ketone = 3/1 to obtain a solution having a concentration of 10% by weight. The solution was applied to one surface of a hard aluminum foil having a thickness of micrometers, and the coating solution was dried at 100 ° C for one hour to form an undercoat layer having a thickness of 5 micrometers. The above sheet was placed on the undercoat layer of the foil, and the sheet and the foil were pressurized and formed by a heating paper to obtain a lubricating sheet for drilling in which one surface was blue. The maximum diameter of air bubbles in the grease layer is 9 microns. Three three-mm-thick B T resin copper six-layer boards were then stacked. The lubricant sheet is set on the upper surface of the stack, so that the resin composition of the lubricant sheet faces up, 1. The 6 mm thick paper phenol laminate is placed on the lower surface of the stacked six-layer board. The rotation speed is 150 micron Φ with a feed speed of 160,00 0 revolutions per minute at 15 micron / revolution. A diameter drill makes holes. Evaluation hole 4 shows the result. (Comparative Example 1) Example 6 was repeated, except that the lubricant resin composition layer in which the maximum diameter of air bubbles was 70 was used instead of the lubricant resin composition in which the maximum diameter of bubbles was 9 micrometers used in Example 6. Physical layer. Table 4 Evaluation results. (Comparative Example 1 2) Holes were formed under the same conditions as in Example 6, except that the aluminum foil was used as the lubricant sheet for drilling used in Example 6. Table 4 shows the results. 312 / Invention Specification (Supplement) / 93-04 / 93101839 Two different I 10 0 Dry 1 in aluminum, agent tree 0. 4 stacks and will be on. Turn down. Table micrometer air display replacement estimate 24 200417303 (Table 4) Project Example Comparative Example 6 11 12 Hole Position Accuracy (μ in) (AVG + 3a) 29 42 38 (Maximum) 35 63 78 <Measurement Method> 1500 holes (3,500 clicks X 5) in the back surface of the bottommost laminate of each stacked laminate were measured for the misalignment between the pointing coordinates and the location of each hole. The average value + 3σ and the maximum value are displayed. 25 312 / Invention Specification (Supplement) / 93-04 / 93101839