TW200402331A - Method of forming coating - Google Patents

Abstract

This objective of this invention is to provided a method of forming coating by applying paint on the surface of a substrate by using a die coater to ensure an even coating with very little unevenness of strips. To achieve this objective, this invention provides a method of forming coating by applying paint on the surface of a substrate by using a slit die coater ferrule having a paint ejecting slit formed therein, characterized in that the coating is formed to have a capillary number (Ca), which is obtained by expression (1): Ca= μ V/δ where μ is dynamic viscosity of the paint, V is the relative velocity between the substrate and the slit and δ is dynamic surface tension of the paint, and a dimensionless film pressure (X) obtained by (T/t) where a coating gap between a lower end of the slit and a surface of the substrate is (T) and a wet film thickness during the application of the coating is (t) set so as to satisfy either of expression (2): Ca ≤ 0.0651X-0.6669 and expression (3): Ca ≤ -0.0005Ln (X) + 0.0108.

Description

200402331 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a method for manufacturing a coating film. This method is used in precision coating such as the coloring layer of a color light sheet or the resist coating in the field of semiconductor manufacturing. A coating film manufacturing method in which a die (coater) is applied to a surface of a substrate, and a liquid coating is applied to form a coating film. [Prior Art] Conventionally, as a method for forming a coating film on a substrate, a spin coating method, a coating method, and a roll coating method are widely used. Among them, the method using spin coating is a method widely used for resist coating of semiconductor wafers, and a coating film can be formed by dripping paint on the center of the surface of a material to be coated that is rotated. In addition, by setting the type of paint to be suitable for the method, the obtained coating film is spread over the entire range of the material to be coated, and the coating film is extremely accurate and uniform. However, in order to obtain a coating film of a predetermined film thickness, a large amount of material is used, which is not economical. In addition, this method has the problems that the paint adheres to the edge or the back of the coating material, or the paint gels and solidifies when scattered in the device, and lacks the stability and cleanliness of the steps, which causes the quality of the coating to be low. The method using roller coating is a method in which a coating material is transferred to a material to be coated by a roller, and can be used for coating a long material to be coated and being rolled into a roll. However, since the coating is supplied to the application roller and coated in order from the plate, not only the coating is exposed to the air for a long time, but also the deterioration caused by the moisture absorption and oxidation of the coating is easy to occur, and the foreign matter is easily mixed. As a result, the quality of the coated product is lowered. 312 / Instruction for Inventory (Supplement) / 92-10 / 92120376 Filter the cloth rod and the fine coated quilt or cloth material under the light 5 200402331 In addition, the method of using rod coating is to use the coated material with a thin wire wound on the rod Method for applying coating. In this method, since it is wound around a thin wire and comes into contact with the material to be coated, it has a tendency to cause streaks on the coating film. In view of such disadvantages, a die coating method has been proposed in recent years. Therefore, patent document 1, patent document 2, and patent document 3 have been proposed to apply die coating to a color filter. Die coating is widely used in conventional thick film coating or continuous coating of high materials. The use of die coating to form the material to be coated is known as patent document 4, patent document 5, and patent document 6 curtainf 1 0w) method, extrusion method, liquid bead method and other coating methods. Among them, the above-mentioned liquid bead method discharges coating material from a slit provided in the die mouth, and between the discharge outlet and the material to be coated that moves at a certain interval, a state of aggregated paint called a coating liquid bead is accompanied. The coating material is moved and the paint is drawn out and formed. In addition, if the liquid bead method is used to supply the same amount of paint from the slit as the coating film is formed, and the coating film is continuously formed, the formed coating can be achieved to a high degree. Uniformity of film thickness. In addition, this method almost paints, and the liquid feeding path of the paint until it is discharged from the slit is closed, which can prevent the deterioration of the paint and the mixing of foreign matter, and can maintain the quality of the obtained paint. However, for example, in the manufacture of color filters for liquid crystal displays, most of the cloth film is a film with a film thickness of 10 μm or less when dry. In the case of coating a thin coating film, the volume of the coating liquid beads becomes smaller, and the material liquid There is a high possibility that bead stability is impaired. As a result, the disadvantages of the rod-to-rod in the coating film table 312 / Invention specification (Supplement) / 92-10 / 92120376. The die is made, and the viscosity is increased as shown in the coating film. The (Bead) cloth is spit out and moved relative to the coating film. The precision of the consumption phase is not wasted. Therefore, the south product is coated with this kind of coating. Therefore, the coated surface is relatively perpendicular to the direction of travel of the discharge port, and the possibility of so-called stripe unevenness becomes higher. Such a streaky uneven coating film cannot be used for high-precision applications such as a colored layer of a color filter. Therefore, a method for producing a streaky uneven coating film is unlikely to occur. (Patent Document 1) Japanese Patent Laid-open No. 5-1 1 1 0 5 (Patent Document 2) Japanese Patent Laid-open No. 5 _ 1 4 2 4 0 7 (Patent Document 3) Japanese Patent Laid-open No. 6-3 3 9 6 5 (Patent Document 4) U.S. Patent No. 4, 2 3 0, 7 9 3 (Patent Document 5) U.S. Patent No. 4, 6 9 6, 8 8 5 (Patent Document 6) U.S. Patent No. 2,7 6 1,7 9 1 [Summary of the Invention] (Problems to be Solved by the Invention) The present invention has been made in view of the above-mentioned problems, and the main object of the present invention is to provide a method for manufacturing a coating film. In a coating film manufacturing method for forming a coating film by applying a die on the surface of a base material, a method of manufacturing a coating film having a uniform coating film surface can be obtained with very few occurrences of streak unevenness. (Means for Solving the Problem) In order to achieve the above-mentioned object, the present invention provides a method for producing a coating film as described in item 1 of the scope of patent application, which is characterized by using a slit die provided with a slit for paint discharge. In the manufacturing method of a coating film that applies a coating on the surface of a substrate to form a coating film, the coating discharge port is set as follows: let the dynamic viscosity of the coating material be μ, the relative speed of the substrate and the discharge port be V, and When the dynamic surface tension is σ, the number of capillaries (C a) obtained by the following 312 / Invention Specification (Supplement) / 92-10 / 92120376 200402331 Formula (1)

Ca = β · V / α (1) The coating gap between the surface of the substrate and the bottom surface of the lower end of the discharge port is T, and the wet film thickness at the time of coating film coating is t. The secondary film thickness (X) satisfies the following formula (2)

CaS 0 · 0 6 5 1 X- 0.6 6 6 9 (2) and the following formula (3)

Ca ^-0. 0 0 0 5 Ln (X) + 0.011 08 (3) to form a coating film. In the present invention, since the coating film is formed by coating with a die under the above-mentioned conditions, the paint liquid beads are formed stably. As a result, the horizontal stripe unevenness caused by the chaos of the paint liquid beads can be suppressed. It is possible to suppress the occurrence of streak unevenness in a right-angle direction with respect to the advancing direction of the die coating, thereby making it possible to produce a coating film having an extremely smooth surface with excellent yield. On the other hand, the present invention also discloses a method for manufacturing a color filter, which is described in item 2 of the patent application, which is a method for manufacturing a color filter formed by forming at least a colored layer and a light-shielding layer on a transparent substrate. It is characterized in that at least one of the colored layer and the light-shielding layer is formed by using the manufacturing method of the coating film described in item 1 of the aforementioned patent application scope. Since the manufacturing method of the color filter of the present invention is a manufacturing method using the coating film described above, for example, when the colored layer is manufactured using the coating film manufacturing method described above, the stripe-like unevenness on the surface of the colored layer is small and can be good. A high-quality colored layer having an extremely uniform surface state is produced at a yield. (Effects of the Invention) According to the present invention, the coating film is formed by coating using a die under the above-mentioned conditions. 8 312 / Invention Specification (Supplement) / 92 · 10/92120376 200402331 can form a coating film, which can stably form a coating liquid bead. As a result, the horizontal stripe unevenness caused by the chaos of the coating liquid beads can be suppressed, and the occurrence of the stripe unevenness in the right-angle direction relative to the traveling direction of the die coating can be suppressed. Therefore, the present invention is effective in forming a coating having a smooth surface and excellent quality at a good yield. [Embodiment] Hereinafter, the manufacturing method of the coating film of this invention and the manufacturing method of the color light sheet using the same are demonstrated separately. A. Manufacturing method of coating film The inventors of this case have focused on stabilizing the coating liquid beads formed on the end surface of the coating outlet of the die and the surface of the substrate, which can greatly reduce the horizontal stripe unevenness that occurs on the coating film surface. From the viewpoint, various conditions for stabilizing the coating liquid beads were discussed. As a result, it was found that the number of capillaries determined by the dynamic surface tension of the coating's dynamic viscosity coating and the relative speed between the substrate and the die coating, and by the die The dimensionless film thickness determined by the coating gap and the wet film thickness of the gap between the bottom surface of the coating and the substrate is within the predetermined range, which can greatly reduce the horizontal stripe unevenness. Therefore, the following is completed. The manufacturing method of the coating film of this invention is demonstrated in detail using drawing. FIG. 1 shows an example of a state in which a coating film is manufactured by the coating film manufacturing method of the present invention, and shows that a discharge die 2 is coated with a slit die provided with a coating discharge slit 1 to form a coating film on a substrate 3 State of 4. As shown in the figure, when the coating film is formed, a coating liquid bead 312 made up of the coating material supplied by the slit 1 is formed between the lower end surface 5 of the discharge port 2 and the surface of the base material 3 / Instruction Manual (Supplement) / 92-10 / 92120376 It is expected that the separation range I will be caused by the membrane filtration. ° Detailed state table 6 ° 200402331 In this state, the ejection outlet 2 is moved relative to the substrate 3, and the substrate 3 is moved. The coating film 4 is formed on the surface. However, when the shape of the coating liquid beads 6 is unstable when the coating film 4 is formed, the shape of the coating film 4 formed is unstable, resulting in uneven thickness of the coating film 4. As a result, the horizontal stripe unevenness as described above occurs on the surface of the coating film. Therefore, it is necessary to stabilize the shape of the coating liquid beads 6 described above. In the present invention, as a parameter for stabilizing such coating liquid beads, the number of capillaries (C a) is first considered. The number of capillaries (C a) is represented by the following formula (1). C a = β · V / α (1) where μ is the dynamic viscosity of the coating, V is the relative speed of the substrate and the outlet, and σ is the dynamic surface tension of the coating. In general, from the viewpoint of stabilizing the paint bead, it is preferable that the paint's dynamic viscosity μ is low and the paint dynamic surface tension σ is high to maintain the shape of the paint bead. In terms of the shape stability of the coating, it is preferable that the relative speed V of the substrate and the outlet is low. Therefore, generally speaking, from the viewpoint of the stability of the coating liquid beads, the lower the capillary number (C a) is, the better. As another parameter, the dimensionless film thickness (X) is focused. The dimensionless film thickness (X) is represented by the following formula (4). X = T / t (4) Among them, T is the coating gap between the end surface of the coating die of the slit die and the outlet of the substrate and the surface of the substrate, and t is the wet film thickness of the coating film. As shown in FIG. 1, when T > t and the difference between the two are small, there are fewer problems such as liquid interruption, and the shape of the liquid droplets of the coating can be maintained, which is preferable. 10 312 / Invention Specification (Supplement) / 92-10 / 92120376 200402331 Therefore, in general, the value of dimensionless film thickness (x) is also better. Next, the number of capillaries (C a) was taken as the vertical axis, and the dimensionless film thickness (X) was taken as the horizontal axis. A coating film was formed and evaluated by varying various parameters. The results are summarized in FIG. 2. In addition, in FIG. 2, 0 indicates that no horizontal streak unevenness occurs, Δ indicates that a little horizontal streak unevenness occurs, X indicates that the horizontal streak unevenness occurs, and 氺 indicates that liquid interruption occurs. The presence or absence of the horizontal stripe unevenness was caused by irradiating the surface of the coating film with a Na lamp, and visually judging the reflected light. As described above, in the lower left, that is, regardless of the number of capillaries or dimensionless film thickness, the lower the effect is, the better the effect is. It can be said that the lower left region of the two straight lines shown in FIG. 2 is a better region. If it is expressed in the formula, it is as shown in the following formulas (2) and (3). By setting the number of capillaries and dimensionless film thickness to satisfy either of the two formulas, the horizontal streak can be greatly reduced. Evenly.

Ca ^ 0. 0 6 5 1 X " 0 · 6 6 6 9 (2)

Ca ^-0. 0 0 0 5 Ln (X) +0.0108 (3) In addition, FIG. 3 shows a better area, and it can be said that the area on the lower left side of the two straight lines shown in FIG. 3 is a better area. If it is expressed in the formula, it is as shown in the following formulas (5) and (6). By setting the number of capillaries and the dimensionless film thickness to satisfy either of the two formulas, the horizontal streak can be greatly reduced. Evenly.

Ca ^ 0. 0 4 0 3 X'0 · 6 3 0 1 (5) and the following formula (3)

Ca ^-0. 0 0 0 6 Ln (X) + 0. 0 0 8 (6) 1. Various parameters are followed by the calculation of the capillary number (C a) and dimensionless film thickness (X). Various parameters are explained. (Number of Capillaries) 11 312 / Invention Specification (Supplement) / 92 · 10/92120376 200402331 First, in order to obtain the number of capillaries, it is necessary to define the dynamic viscosity μ of the coating, the dynamic surface tension σ of the coating, and the relative between the substrate and the outlet speed. These are described below. a. Dynamic viscosity of paint μ In the present invention, the dynamic viscosity of the paint is a double-cylinder rheometer (made by Ray Europe, America, America, and the United States), and the shear rate is 1 0 0 S _1, 2 3 ° C, measured under the conditions of the liquid volume of 10 cc. The schematic diagram of the dual-cylinder rheometer is shown in Figure 4. The coating which can use the coating film manufacturing method of the present invention has a dynamic viscosity upper limit value of 20 mPa · s or less, preferably 10 mPa · s or less; a lower limit value of 1 mPa · s or more, and 1.5 or more as good. The reason why the above-mentioned paint is used in the present invention is that when a paint having a kinematic viscosity within the above range is used, it is possible to effectively suppress the unevenness of the horizontal stripes. b. Dynamic surface tension σ of the coating material In the present invention, the dynamic surface tension of the coating material is a value measured using a bubble pressure dynamic surface tension meter (trade name: BP-2, manufactured by KRUSS). The measurement conditions are shown below. Capillary diameter: φ 0. 2 2 8 mm Measurement temperature: 2 3 ° C Liquid volume: 60 cc Surface life: 10 ms Capillary immersion depth: 10 mm Set density: 1.0 g / cm3 Bubble pressure type A schematic diagram of a dynamic surface tensiometer is shown in FIG. 5. 12 312 / Invention Specification (Supplement) / 92-10 / 92120376 200402331

The paint which can use the coating film manufacturing method of the present invention has a dynamic surface tension upper limit value of 7 2 m N / m or less, preferably 50 m N / m or less; and a lower limit value of 27 mN / m or more, It is preferably 30 mN / m or more. The reason why the above-mentioned paint is used in the present invention is that when a paint having a dynamic surface tension within the above range is used, it is possible to effectively suppress the unevenness of the horizontal stripes. c. Coating speed V The coating speed of the present invention refers to the relative speed of the slit die coating outlet and the substrate. The coating speed applicable to the coating film manufacturing method of the present invention is in a range of O. Olm / sec to 0.50 m / sec, and particularly preferably in a range of 0.05 m / sec to 0.20 m / s e c. If the coating speed is lower than the above range, problems may occur in terms of production efficiency, which is not good, and if the coating speed is higher than the above range, the production apparatus cannot be realized. (Dimensional film thickness)

The dimensionless film thickness (X) used in the present invention is a parameter calculated from the coating slit T and the wet film thickness t as described above. a. Coating seam T The coating seam T used in the present invention refers to the distance from the lower end surface of the coating outlet of the slit die to the surface of the substrate. In the present invention, from the viewpoint of the stability of the coating liquid beads, the T value of the coating seam must be greater than the wet film thickness t described later. The specific range of the coating seam T of the present invention is 50 to 3 μm, particularly preferably in the range of 70 to 200 μm. If it exceeds the above range, it is generally difficult to stabilize the shape of the coating liquid bead. If it is lower than the above range, it is difficult to use it in practice due to the precision of the machine. 13 312 / Invention Specification (Supplement) / 92-10 / 92120376 200402331 b. Wet film thickness t The wet film thickness t used in the present invention is expressed by the shape of the coating amount / coated area applied to the substrate , Refers to the distance between the solid-liquid interface and the gas-liquid interface when the coating solvent is present before the coating solvent is volatilized. The specific range of the wet film thickness t of the present invention is in the range of 5 μm to 50 μm, and particularly in the range of 6 μm to 30 μm. If it is lower than the above range, it is difficult to form the surface into a uniform state, and if it is higher than the above range, it is impossible to find a suitable application (other parameters) for such a high-precision surface uniformity. In the present invention, as described above, The coating material is selected in such a way that the number of capillaries has a predetermined relationship with the dimensionless film, and the parameters of the device can be adjusted to obtain a coating film that suppresses the occurrence of lateral stripe unevenness. In addition to the consideration of dimensionless film thickness, when the values of other parameters are significantly different, it may affect the occurrence of striped unevenness. This type of participation is explained below. a. Discharge amount Since the discharge amount of the paint discharged from the discharge outlet is one of the results that affects the above wet film, when the discharge amount is also within a predetermined range, horizontal stripe unevenness is suppressed. Specifically, the discharge amount per unit length, that is, the discharge amount per length in the length direction of the outlet, is in the range of 0.1cc / min ~ 10cc / min, especially in the range of 0.1cc / min ~ 10cc / min. The coating film manufacturing of the invention 312 / Invention specification (Supplement) / 92-10 / 92120376 If the material is spit out, the thickness is 0, and the factor of 0 is 1 cm. The thickness can be 1 cm. 14 200402331 Good effect, can produce coating film which can suppress the occurrence of horizontal streaks. In addition, the above values are applicable when the slit width (slit of the slit) is within the range of 30 to 150 μm, and the dimensional error of the slit of the slit is within 10%. b. Dry film thickness of coating film This is also a parameter that affects the above-mentioned wet film thickness t, which is a parameter determined by the relationship between the solid content concentration and the wet film thickness t. Specifically, the term is in a range of 0.5 μm to 5 μm, in particular, in a range of 1 μm to 3 μm, and the film thickness difference between the central part of the substrate and the area inside 50 mm from the edge of the coating film is within ± 5. Within% is preferred. When the coating film in the above range is produced, the horizontal streak unevenness suppressing effect of the present invention can be effectively obtained. 2. Manufacturing method of coating film The present invention is to adjust the above parameters to satisfy a predetermined relationship, so as to produce a coating film with little unevenness in the horizontal stripes, but specifically, the manufacturing method of the coating film uses a mold A person who finishes the coating by coating the discharge port using a slit-type die provided with a slit for coating discharge, applies the coating on the surface of the substrate, and forms a coating film. a. Slot die coating and discharge port The slit die coating and discharge port used in the present invention is not particularly limited in shape or material. As long as the discharge port can control the discharge amount with high precision, Any kind or shape can be used. Specifically, for example, as shown in FIG. 1, a front periphery 7 and a rear periphery 8 are formed, and a slit 1 is formed therebetween. In this case, the paint is supplied to the manifold 9 by a pump (not shown), and is discharged from the surface of the substrate 3 through the slit 1. 312 / Invention Manual (Supplement) / 92-10 / 92120376 15 200402331 In addition, this type of pump for supplying coating to the slit die coating outlet is used for general die coating method, such as double diaphragm pump or tube film There are no particular restrictions on the tablet pump, etc. b. Substrate As the substrate on which the coating film is formed according to the present invention, it is only necessary to use a sheet and the surface has a certain degree of smoothness. There is no particular limitation on the use of a substrate such as a glass substrate or a transparent resin substrate. c. Coating The coating used in the present invention is not particularly limited as long as it can satisfy the above-mentioned coatings. In general, those formed by dissolving in a solvent are used, but are not limited to this type. Coatings also have many components and are polymerized and hardened after coating. Specific examples include coloring paints for color filters and paints for various kinds of resists as described later. d. Other In the coating film manufacturing method of the present invention, in order to make the edge of the coating film flat, after the coating by the die coating method is completed, a rotation of 500 r p m or less is applied. Also, in order to smooth the edge of the coating film, suck-back can also be performed. B. Manufacturing method of color filter The manufacturing method of the color filter of the present invention is based on a transparent substrate forming a colored layer A manufacturing method of the color filter made of the light-shielding layer and the light-shielding layer is formed by a coating film manufacturing method of at least one of the colored layer and the light-shielding layer. 3344 312 / Invention Manual (Supplement) / 92-10 / 92120376 Pump, which can be supplied by pump and injection type; According to the parameter relationship, solid-state dissolution can be used for slippage of monomer layer formation, and also optimized for low-speed rotation. The above method uses at least 16 200402331. Generally speaking, a color filter on a transparent substrate has: a light-shielding layer called a black matrix; the openings of the light-shielding layer are colored pixels, and red (R ), Green (G), blue (B) colored pixel layer; and a protective layer provided as needed. The above-mentioned coating film manufacturing method is used when forming the colored layer and the masking layer, whereby a color filter having a coloring layer having excellent surface smoothness can be formed in good yield. In addition, in the present invention, it is preferable to form the protective layer provided as described above by the above-mentioned coating film manufacturing method, and a protective layer with a uniform surface state can be obtained. In addition, the color filter obtained by the color filter manufacturing method of the present invention has a coating layer, a light-shielding layer, or a protective layer prepared by the above-mentioned coating film manufacturing method, so the material surface can be omitted. Waste, and obtain high-quality products that greatly suppress the occurrence of streaky unevenness. The transparent substrate used in the color filter manufacturing method of the present invention is only required to be used by general color filters, and is not particularly limited. The colored layer or light-shielding layer is formed by the above-mentioned coating film manufacturing method. At this time, only the composition of the coating is within the range of the above-mentioned various parameters, and generally all materials used can be used. In addition, the transparent electrical or other members formed in the color filter are not particularly limited as long as they are generally used in forming the color filter, and various members can be used depending on the application. The content of the present invention is not limited to the embodiments described above. The above-mentioned embodiment is merely an example, and any person having the same or substantially the same technical idea as that described in the patent application scope of the present invention, or having the same effect as the invention is included in the technical scope of the present invention (implementation Example) 312 / Explanation of the Invention (Supplement) / 92-10 / 92120376 The colored light becomes y, and the color can be different. 17 200402331 The following examples are given to further illustrate the present invention. The non-inspection glass 0A-1 0) with a substrate size of 550mmx650mnix0.7nim was used, and a dual-diaphragm pump was used as a quantitative pump. Moreover, the width | variety of the covering direction of a discharge opening is 540 mm. Stop the central part of the front end of the discharge port from the glass substrate i |, set the gap to 40 μm, and discharge the paint with 0 · 0 1 ~ 0 · 0 3 L / mi η for 0. 3 ~ 1. 0 sec To form coating liquid beads. The other components are as follows. Next, the substrate conveying speed and ejection rate are 4 15 mm / sec to 180 mm / sec and 0_01 to 0. 03L / min. The output device rises in the Z-axis direction, and stops at 40 μm to the coating seam. Fixed coating state. Next, the coating material is discharged from the edge of the substrate at the coating completion side by 10 mm, and the coating of the coating material discharge device at Z is completed at the same time. The obtained coated substrate was decompressed with a chemical dry pump (chemica 1) and temporarily dried until the internal pressure of the cavity was 93 Pa. The plate was aged at 80 ° C for 30 minutes to obtain a coating film. Here, the coating side was made. The parameters and parameter changes on the device side are shown, specifically, corresponding to the number of capillaries and dimensionless film thickness. Specifically, the solid content concentration of the coating is 16.4 mass%, 19.99 mass%, 2 4% by mass, 2 4 · 8% by mass! There are 6 grades such as% by mass and 34% by mass, thereby changing the dynamic surface tension by 6 levels. Also, regarding the glass on the device side (the front of the NEC glass slit! : The discharge rate of the edge part 10 mm will be set with regard to the paint & so that the paint will be discharged at a position of 200 μm at the point where the paint rises in the direction of the axis (dry pump), and then heated, as shown in Figure 2 ％ ， 18. 8 6, 2 9 · 6 mass viscosity and dynamic parameters, make the coating

312 / Instruction of the Invention (Supplement) / 92-10 / 92120376 18 200402331 The cloth speed is changed in the range of 15mm / sec ~ 180mm / sec, the wet film thickness is changed in the range of 5.06μm ~ 28 · 58μm, the coating seam is at 40μιη Changes in the range of ~ 200μηη (5 grades such as 40μπι, 80μιη, 100μπι, 150μπι, and 200μπι). The composition of the coating is as follows. < Paint composition 1: Solid content concentration 2 4. 8% by mass > • Propylene glycol monomethyl ether acetate ... 3 5. 6 2 parts by weight • 3-methoxybutyl acetate: 39.39 parts by weight • Pigment : 6.2 parts by weight (Pigment Red254, Pigment Ye 11ow13 8) • Alkali-soluble acrylic polymer: 7.8 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 6 0) • Photopolymerizable monomer : 5.2 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 2.5 parts by weight (2-methyl-1- [4- (methylthiol) phenol] -2- Morpholine acetone-1) + (diethylamino benzophenone) • Pigment dispersant: 3.1 parts by weight (Disperbykl61, manufactured by Bioscomi), < paint composition 2: solid content concentration 1 9. 9% by mass > • Propylene glycol monofluorenyl ether acetate: 3 8. 0 4 parts by weight • 3-methoxybutyl acetate: 42.06 parts by weight • Pigment: 5.0 parts by weight (Pigment Red254, Pigment Yellowl38) 19 312 / Invention Specification (Supplement) / 92-10 / 92120376 200402331 Alkali-soluble acrylic polymer: 6.3 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 60) Photopolymerizable monomer : 4.2 parts by weight (diisopentaerythritol pentaacrylate) Photopolymerization initiator: 2.0 parts by weight (2-methyl_1- [4- (methylthiol) benzene age]-2- Morinyl propanil with -1) + (diethylaminobenzophenone) pigment dispersant: 2.5 parts by weight (Disperbykl61, manufactured by Bioscomi), < coating composition 3: solid content concentration 1 6. 4% by mass > Propylene glycol monofluorenyl ether acetate: 3 9. 7 0 parts by weight 3-methoxybutyl acetate: 43.90 parts by weight Pigment: 4.1 parts by weight (Pigment Red 2 5 4, Pigment Y e 1 1 ow13 8) Alkali-soluble acrylic polymer: 5.2 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 6 0) Photopolymerizable monomer: 3.4 parts by weight (two different Pentaerythritol pentaacrylate) Photopolymerization initiator: 1.7 parts by weight (2-fluorenyl-1- [4- (fluorenyl mercaptan) benzene S]]-2-morpholinyl propyl__1) + (Diethylaminobenzophenone) Pigment dispersant: 2.1 parts by weight (Disperbykl61, manufactured by Bioscomi), < Paint composition 4: Solid content concentration 24% by mass > 20 312 / Invention specification (Supplement) / 92-10 / 92120376 200402331 • Propylene glycol monofluorenyl ether acetate: 3 6. 0 9 Weight part • 3-methoxybutyl acetate: 39.91 weight part • Pigment: 6.0 weight part (Pigment Red254, Pigment Y e11o w 1 3 8) • Alkali soluble acrylic polymer: 7. 5 weight part ( Average molecular weight: 1,000, acid value: 60) Photopolymerizable monomer: 5.0 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 2.4 parts by weight ( 0 重量 部 (2-fluorenyl-1-[4- (methyl mercaptan) phenol] -2 -morpholinylacetone-1) + (diethylaminobenzophenone) • Pigment dispersant: Disperbykl61, manufactured by Pico Combe Ltd.) < Paint composition 5: Solid content concentration 3 4% by mass > • Propylene glycol monofluorenyl ether acetate: 3 1. 3 4 parts by weight • 3-methoxybutyl Acetate: 34.66 parts by weight • Pigments: 8.5 parts by weight (Pigment Red 2 5 4, Pigment Y e11o w 1 3 8) • Alkali-soluble acrylic polymer: 10.7 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 60) Photopolymerizable monomer: 7.1 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 3.4 parts by weight (2-methyl- 1-[4-(fluorenyl mercaptan) Phenol]-2 -morpholinylacetone-1) + 312 / Invention (Supplement) / 92-10 / 92120376 21 200402331 (Diethylaminobenzophenone) • Pigment dispersant: 4.2 parts by weight ( Disperbykl61, manufactured by Pico Combe Ltd.) < Paint composition 6: Solid content concentration 18.8% by mass > • Propylene glycol monofluorenyl ether acetate: 38.14 parts by weight • 3 -methoxyoxybutyl acetate : 43.06 parts by weight • Pigments: 4.7 parts by weight (Pigment Red 2 5 4, Pigment Ye 1 1 ow 1 3 8) • Alkali-soluble acrylic polymer: 6.3 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 60) Photopolymerizable monomer: 3.9 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 1.6 parts by weight (2-methyl-1- [4- (methyl mercaptan) phenol] 2 -morpholinylacetone-1) + (diethylaminobenzophenone) • Pigment dispersant: 2.4 parts by weight System, Disperbykl61) The horizontal stripe unevenness corresponding to various capillary numbers and dimensionless film thickness values on the surface of the coating film is determined by the above-mentioned evaluation method, that is, visually judged, and no horizontal stripe is formed. Those with unevenness were evaluated with 0, those with slight horizontal streak unevenness were evaluated with △, those with horizontal streak unevenness were evaluated with X, and those with liquid interruption were evaluated with *. The results are shown in Table 1, Table 2 and Fig. 2.

312 / Description of the Invention (Supplement) / 92-10 / 92120376 22 200402331 (ϊ) After treatment, white transmission through 〇XXXX XXXXXX 〇〇0 < 3 〇 × 〇〇〇〇〇〇〇〇〇〇〇 After treatment Na Lamp reflection ◎ ◎ XX < XXX ◎ 〇〇0 <] ◎ 〇X ◎ ◎ ◎ ◎ ◎ ◎ ◎ < Ca number 0.0 00292 0. 00583 0. 00948 0. 00437 0. 00948 1 0.01385 0. 00583 0.01239 0.00181 0. 00423 0.00604 0. 00604 0.00903 0. 00423 0. 00781 0.01207 0. 00543 0.00145 0. 00435 0.00193 0.00387 [0. 00628 0.00290 0.00532 0.00821 Dimensionless film thickness (Νί CD 12.48 20.28 < NI cd 13.51 19.76 CO CD 13.26 〇〇CO 10.92 15.60 10.40 15.60 CO inch LO 10.14 § LO Bu · OO co-14.04 C £ 3 1 'i 03 CO OO 13.51 OO CO inch · OO ΙΓ5 OO 13.26 Coating seam (// m) 〇 ◦ τ—1 gr—Η < = > < = > 1— < gr—H ◦ CZ5 1 " ig ◦ 〇T— (◦ O t—H ◦ o τ—1 ο ◦ rH O o τ —HO τ—H ◦ O rH 〇CD T— (O CZ5 oo rH O CD τ—H o ◦ rH O o 1—H ◦ o τ—H oo rH 〇tH ο rH ¢ =) 〇τ 1 O or—H liquid film thickness (// m) 16.03 r < CZ) od CO CD Ye 16.03 Bu · CO ο LO 16.03 Ye LO Bu < NI CD rH CD cd CNI CD < 35 i H cd 18.32 CO OO 05 r—H cd 14.25 ”Cvl tH 24.04 12.02 BU rH (Nl 1 11.661 LO BU 铡 9 Μ 3 LO CO LO CO LO CD LO 〇〇LO 1— & LO CO ss OO LO OO BU 'CO g iH LO LO rH LO cc? LTD LO LO OO Dynamic surface tension (mN / m) 30.87 30.87 30.87 30.87 30.87 30.87 30.87 30.87 29.82 29.82 29.82 29.82 29.82 29.82 29.82 29.82 29.82 29.82 29.39 29.39 29.39 29.39 29.39 29.39 29. 39 29.39 29.39 29.39 29. 39 29.39 Viscosity (mPa · s) LD LO LO LT5 LO inch · LO LO in CD CO CO CO CO CO CO CD cd C £ 5 CO CO CO CO CO CO CO CO CO OO c < i 00 CNI OO οά OO 03 OO 00 CO OO CNI * 00 c < i parameter 1 parameter 2 parameter 3 parameter 4 parameter 5 parameter 6 parameter 7 r—H parameter 2 parameter 3 parameter 4 parameter 5 parameter 6 parameter 7 parameter 8 parameter 9 rH u 4. parameter 2 parameter 3 Parameter 4 parameter 5 parameter 6 parameter 7 parameter 8 paint 1 solid content 24. 8% paint 2 ΠΠ TLA 3 " mu nineteen 19. 9% paint 3 solid content 16.4 % 4 9z.eol-36 / ip} 3i) _ & ^ ls distillation / π e

200402331 (z <) l After the treatment, the white light was transmitted through 0000, 000, 00, 000, XX, 〇, 〇, 〇, 〇, 〇, 〇, 〇, 〇, 〇, 〇, 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 you fhj R shout ◎ ◎ 〇 ◎ ◎ <] ◎ 〇 ◎ ◎ ◎ ◎ XX ◎ ◎ < < 1 < < <] < 1 X ◎ X ◎ ◎ ◎ < < < X Ca number 0.00813 0.00578 0.01135 0.00963 0.00813 0 .01477 0.01242 0.01049 0.00749 0.00963 0.01259 0.00963 0.01284 0.01284 0.01606 I 0.01391 0.01927 0.01927 0.01927 0.01927 0.01927 0.01927 0.01573 0.01573 0.01573 0.01798 0.02022 0.00899 0.00899 0.01348 0.01155 1 0.01541 0.02311 0.02311 Dimensionless film thickness 4.92 3.50 4.91 4.17 3.52 4.97 4.18 3.53 2.91 3.74 5.41 3.74 27.04 13.52 1 3.74 3.24 5.34 '4.96 4.63 4.27 3.97 4.37 10.92 12.48 14.04 2.50 6.24 3.74 7.34 7.34 4.59 13.76 Coating seam (// m) § § § § § § § g τ-Η c = > g τ-Η § § § § § § O rH O gr— * g 1— < § § τ— < Ship thickness (// m) 20.31 28.58 20.38 24.01 28.43 20.13 23.95 28.34 13.74 10.68 7.40 10.68 7.40 7.40 10.68 12.33 14. 98 1 16.13 17.29 18.76 20.13 9.16 9.16 8.01 7.12 16.03 16.03 10.68 10.90 10.90 10.90 10.90 Coating bump (mm / sec) 8§ SSSS LO S § σ > § S § § § r— < Dynamic surface tension (mN / m) 32.27 32.27 I 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 32.27 1 32.27 34.24! 34.24 34.24 34.24 34.24 34.24 34.24 ί 34.24 29.60 29.60 29.60 29.60 29.60 cd. CD cd CD CO σϊ C £) 05 CO cd CJD cd 05 C £ > CT > CD 05 cd CD CD cd CD cd cd CT > cd Oi CD Oi cd 15.4 LO ΙΛ inch l £ D 15.4 15.4 15.4 〇〇CO 00 CO 〇〇 CO 00 cd parameter 1 1 parameter 2 record 3 丨 parameter 4 1 parameter 5 record 6 丨 parameter 7 1 parameter 8 1 parameter 9 parameter 10 1 parameter 11 1 parameter 12 parameter 13 1 parameter 14 parameter 15 1 parameter 161 1 parameter 18 | parameter 19 | parameter 20 | parameter 21 | parameter 1 CVJ parameter 3 1 Η parameter 5 CO 4 4 rH parameter 2 | parameter 3 I parameter 4 I 1 Μ l £ 1 Π il) paint 6 solid content m 1 18.8% |

Inch < N

9 Bu eozl-I: 6 / ffgi) _ ^ m ^^ / ZK 200402331 In addition, the evaluation of the reflection of the Na lamp and the evaluation of the white transmission in the table are performed according to the following standards. (Na lamp reflection) ◎: Good 〇: Some unevenness △: There is unevenness X: Poor coating occurs (white transmission) 〇: Good △: There is some unevenness X: Poor coating [Simplified description of the drawing] Figure 1 This is a schematic cross-sectional view showing an example of a method for producing a coating film of the present invention. Fig. 2 is a graph showing the relationship between parameters and surface conditions of the coating film manufacturing method of the present invention. Fig. 3 is a graph showing the relationship between the parameters and the surface state of the coating film manufacturing method of the present invention. Fig. 4 is a schematic perspective view showing a device for measuring dynamic viscosity. Fig. 5 is a schematic front view showing a device for measuring dynamic surface tension. (Explanation of component symbols) 1 Slit 2 Slot die coating and ejection outlet 3 Base material 25 312 / Invention specification (Supplement) / 92-10 / 92120376 200402331 4 Coating film 5 Lower end face of the ejection outlet 6 Coating liquid beads 7 front Peripheral edge 8 Back peripheral edge 9 Manifold cavity 312 / Invention specification (Supplement) / 92-10 / 92120376

Claims (1)

200402331 Scope of patent application: 1. A method for manufacturing a coating film, which uses a slit die provided with a coating discharge slit to coat the surface of a substrate and applies a coating to form a coating film. The method is characterized in that: ： Let the dynamic viscosity of the coating be μ, the pairing speed of the substrate and the discharge port be V, and the dynamic surface tension of the coating be σ, and the number of capillaries (C a) obtained by the following formula (1); C a = β · V / σ (1) When the coating gap between the lower end surface of the discharge port and the surface of the substrate is T, and the wet film thickness at the time of coating film coating is t, T / 1 is obtained without cause The secondary film thickness (X) satisfies the following formula (2) Ca ^ 0. 0 6 5 1 X- 0 · 6 6 6 9 (2) and the following formula (3) Ca ^-0. 0 0 0 5 Ln (X) + 0. 0108 (3) to form a coating film. 2. A method for manufacturing a color filter, which is a method for manufacturing a color filter formed on a transparent substrate to form a colored layer and a light-shielding layer, characterized in that at least one of the colored layer and the light-shielding layer is It is formed by using the manufacturing method of the coating film described in the above patent scope item 1. Narrow coatings are few of the mentioned cloths 312 / Invention Specification (Supplement) / 92 · 10/92120376 27