SU956064A1 - Apparatus for hydromechanical cleaning of flat articles - Google Patents

Description

The invention relates to the design of cleaning devices and is intended for hydromechanical cleaning. ki of flat products, predominantly fragile, for example, microcircuit substrates. It can find application in electrical, electronic, radio engineering and chemical industries when it is necessary to clean thin and fragile products,

A device for cleaning the mesh inventory is known, which comprises independent flat brushes installed vertically, in pairs, with hair facing each other and mounted with the possibility of rotation around their axis C1.

In this device, high-quality cleaning of microelectronic products cannot be ensured, since it is conducted unevenly due to the difference in the speeds of movement of all points on the surface of the brushes.

The poor quality of cleaning in a well-known device is explained by the same difference in the hair of a brush caused by its uneven abrasion with uneven cleaning. This prevents the brush from contacting with the surface to be cleaned and penetrate into the asperities of the substrate. As a result, the modes of operation of all points on the surface will be unequal; making holes for supplying the cleaning solution in the pile of brushes, which, when rotating the latter,, on the one hand, leads to the mixing of the wetting solution on the surface being cleaned, and

10 on the other hand - ° to the unevenness of its filing. In the first case, the contaminants will be smeared over the surface, and in the second, the cleaning modes at different points on the surface will be

15 are not the same; the presence of several inputs to the treatment zone, adding additional contamination to this zone.

The aim of the invention is to improve the quality of cleaning.

20

The goal is achieved by the fact that in a device for hydromechanical cleaning of flat products, mainly fragile, containing a drive unit installed in the housing with

25 mounted vertical facing surfaces of the brushes facing one another, associated means for supplying the washing solution and placed them

Claims (2)

30 between the brushes, the guides of the product being cleaned, the cleaning unit is made in the form of a cassette with parallel guides for the placement of brushes mounted with air. circular plane-parallel motion, the guides for the products being cleaned are fixed relative to the cassette, and the means for supplying washing solution is placed above the hair of the brushes. In addition, for simultaneous processing of several products it has additional guides for the product being cleaned fixedly relative to the cassette. The drawing shows the proposed device. The device comprises an actuator cleaning unit installed in the housing 1, in which the end brushes 2, facing one another with vertical working surfaces, are mounted, guides 3 for the product to be cleaned 4, placed between the brushes 2, and means for supplying the washing solution associated with the brushes 2. The guides 3 are fixed on the plate 5 under the cleaning unit, and the product to be cleaned 4 in the holder 6. Each brush 2 is made, for example, of plexiglass with holes in which the bundles 7 of the hair are attached to the column, and inserted into the body 8 of the U The grids 2 are mounted on both sides of the holder 6 in such a way that the deformation of their hair is at least 2 mm. The cleaning unit has a driven cassette 9 with guides 10 parallel to one relative to the other for brushes 2 and additional guides 11 for several products to be cleaned 4. The sprays 3 and 11 are fixedly positioned relative to the cassette 9. Means for supplying cleaning solution are placed above the hair brushes and represents the holes 12, made in the upper part of the housing 8 and connected through the cavity 13 with the fittings 14 of the supply of cleaning solution. The rear wall cassette 9 is attached to a circular plane-parallel motion drive. The latter can be performed, for example, in the form of a crank mechanism and consists of a lever 15, which is mounted on-output parallel crankshafts 17 via rolling bearings 16 to reduce the jamming of the cartridge 9 during operation of one lever 15, which is floating - in lever 15 There is a groove for rolling bearing 16, which sits on the output shaft of the gearbox. The output shafts 17 of the gearbox are inserted into the housing 1 through the openings on the rear wall. To prevent leakage of the washing solution on the shaft of the reducer between the lever 15 and the cassette 9, an overhead shield 18 is used. Under the guides 3 and 11 with holders 6 in the plate 5, a cutout is made to drain the spent solution into the funnel 19. The housing 1 is closed from above with the lid 20 The device works as follows. The products to be cleaned 4 are mounted on holders 6, which are inserted into guides 3 and additional guides 11. When the holders 6 are loaded, the cover 20 of the housing 1 is open. Two holders can be loaded simultaneously b. After the loading of the holders 6 is completed, the cover 20 of the housing 1 is closed, the electric motor driving the cartridge 9 is turned on (not shown) and the cleaning solution is supplied. The latter enters the fittings 14 in the cavity 13 of the housing 8 of the brushes 2 and through the holes 12 flows down, washing the product 4 on both sides. When the cassette drive motor 9 is turned on, both crankshafts 17 of the gearbox, rotating synchronously, move the cartridge 9 with the brushes 2 in a plane perpendicular to the axis of rotation. When this cassette 9 performs a circular plane-parallel movement. The spent cleaning solution is removed from the housing 1 through the funnel 19. Upon completion of the cleaning, the electric motor driving the cartridge 9 is turned off and the supply of cleaning solution is stopped. After that, the cover 20 of the housing 1 is opened and the holders 6 with the cleaned products 4 are unloaded. During operation of the device, as the hairs of the brushes 2 wear out, they are rearranged from one guide 10 to another in order to approach the products 4. The design of the device allows for a fine, high-quality cleaning of products, mainly fragile ones, which reduces the cost of subsequent cleaning operations. and also allows maximum use of hair brushes, reducing the cost of the process. Claim 1. Device for hydromechanical cleaning of flat products, mainly fragile, containing a drive cleaning unit installed in a housing with mounted vertical brushes facing one another and associated with them means for supplying cleaning solution and placed between brushes for the product being cleaned, so that, in order to improving the quality of cleaning; the cleaning unit is made in the form of a cassette with parallel guides for placing brushes mounted with circular plane-parallel movement, the guides for the products being cleaned being fixed relative to the cassette, and the means for supplying the washing solution are placed above the hair of the brushes. 2. The device according to claim 1, characterized in that, in order to increase productivity, it has additional directions to the products to be cleaned, fixedly mounted relative to the cassette. Sources of information taken into account in the examination 1. USSR author's certificate 464342, cl. B 08 B 1/04, 1972.