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SU751166A1 - Device for cathode spraying of ferroelectrics in vacuum - Google Patents

Device for cathode spraying of ferroelectrics in vacuum

Info

Publication number
SU751166A1
SU751166A1 SU1899455/21A SU1899455A SU751166A1 SU 751166 A1 SU751166 A1 SU 751166A1 SU 1899455/21 A SU1899455/21 A SU 1899455/21A SU 1899455 A SU1899455 A SU 1899455A SU 751166 A1 SU751166 A1 SU 751166A1
Authority
SU
USSR - Soviet Union
Prior art keywords
ferroelectrics
vacuum
cathode spraying
cathode
spraying
Prior art date
Application number
SU1899455/21A
Other languages
Russian (ru)
Inventor
М.М. Некрасов
Г.Т. Левченко
А.Л. Сигаев
Original Assignee
Киевский Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Киевский Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции filed Critical Киевский Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции
Priority to SU1899455/21A priority Critical patent/SU751166A1/en
Application granted granted Critical
Publication of SU751166A1 publication Critical patent/SU751166A1/en

Links

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  • Cold Cathode And The Manufacture (AREA)
  • Solid Thermionic Cathode (AREA)
  • Inorganic Insulating Materials (AREA)

Abstract

The abstract is absent.
SU1899455/21A 1979-03-30 1979-03-30 Device for cathode spraying of ferroelectrics in vacuum SU751166A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1899455/21A SU751166A1 (en) 1979-03-30 1979-03-30 Device for cathode spraying of ferroelectrics in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1899455/21A SU751166A1 (en) 1979-03-30 1979-03-30 Device for cathode spraying of ferroelectrics in vacuum

Publications (1)

Publication Number Publication Date
SU751166A1 true SU751166A1 (en) 1996-05-20

Family

ID=60518204

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1899455/21A SU751166A1 (en) 1979-03-30 1979-03-30 Device for cathode spraying of ferroelectrics in vacuum

Country Status (1)

Country Link
SU (1) SU751166A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2657275C2 (en) * 2016-11-17 2018-06-09 Государственное бюджетное образовательное учреждение высшего образования Московской области "Университет "Дубна" (Государственный университет "Дубна") Method of producing films of cadmium telluride by magnetron sputtering at a constant current

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2657275C2 (en) * 2016-11-17 2018-06-09 Государственное бюджетное образовательное учреждение высшего образования Московской области "Университет "Дубна" (Государственный университет "Дубна") Method of producing films of cadmium telluride by magnetron sputtering at a constant current

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