SI3296703T1 - Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnik - Google Patents
Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnikInfo
- Publication number
- SI3296703T1 SI3296703T1 SI201631216T SI201631216T SI3296703T1 SI 3296703 T1 SI3296703 T1 SI 3296703T1 SI 201631216 T SI201631216 T SI 201631216T SI 201631216 T SI201631216 T SI 201631216T SI 3296703 T1 SI3296703 T1 SI 3296703T1
- Authority
- SI
- Slovenia
- Prior art keywords
- grid plate
- optical encoder
- manufacturing
- encoder
- manufacturing grid
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015097864A JP5925365B1 (ja) | 2015-05-13 | 2015-05-13 | 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法 |
| PCT/JP2016/064064 WO2016182005A1 (ja) | 2015-05-13 | 2016-05-11 | 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法 |
| EP16792730.0A EP3296703B1 (en) | 2015-05-13 | 2016-05-11 | Grid plate for optical encoder, and method for manufacturing grid plate for optical encoder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SI3296703T1 true SI3296703T1 (sl) | 2021-09-30 |
Family
ID=56069578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SI201631216T SI3296703T1 (sl) | 2015-05-13 | 2016-05-11 | Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnik |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP3296703B1 (sl) |
| JP (1) | JP5925365B1 (sl) |
| CN (1) | CN106461424B (sl) |
| MY (1) | MY192930A (sl) |
| SI (1) | SI3296703T1 (sl) |
| TW (1) | TWI679402B (sl) |
| WO (1) | WO2016182005A1 (sl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248116A (zh) * | 2016-07-25 | 2016-12-21 | 哈尔滨工业大学 | 一种绝对式高度角光电编码器 |
| CN106197490A (zh) * | 2016-07-25 | 2016-12-07 | 哈尔滨工业大学 | 一种绝对式方位角光电编码器 |
| JPWO2024195754A1 (sl) * | 2023-03-20 | 2024-09-26 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61212727A (ja) * | 1985-03-18 | 1986-09-20 | Mitsutoyo Mfg Co Ltd | 光学式変位検出装置 |
| JPH01113615A (ja) * | 1987-10-27 | 1989-05-02 | Tokyo Seimitsu Co Ltd | 光学式スケールの製造方法 |
| JP2585449B2 (ja) * | 1990-03-27 | 1997-02-26 | 株式会社 ミツトヨ | 光電型エンコーダ |
| IT1245008B (it) * | 1991-01-25 | 1994-09-13 | Lamsweerde Edoardo Van | Elemento graduato per lettura ottica a riflessione e procedimento per la sua fabbricazione |
| JPH0599695A (ja) * | 1991-10-08 | 1993-04-23 | Mitsutoyo Corp | 光学格子の製造方法 |
| JP2006250784A (ja) * | 2005-03-11 | 2006-09-21 | Mitsutoyo Corp | ボールレンズ、及び、これを用いた光電式エンコーダ |
| JP2006337321A (ja) * | 2005-06-06 | 2006-12-14 | Mitsutoyo Corp | 光学スケール、及び、その製造方法 |
| US7903336B2 (en) * | 2005-10-11 | 2011-03-08 | Gsi Group Corporation | Optical metrological scale and laser-based manufacturing method therefor |
| US8127993B2 (en) * | 2007-06-01 | 2012-03-06 | Mitutoyo Corporation | Reflection type encoder, scale thereof and method for producing scale |
| JP5240198B2 (ja) * | 2007-09-05 | 2013-07-17 | 株式会社ニコン | 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ |
| JP5308059B2 (ja) * | 2008-04-25 | 2013-10-09 | 株式会社ミツトヨ | 光電式エンコーダ用スケール |
| JP5562076B2 (ja) * | 2010-03-10 | 2014-07-30 | キヤノン株式会社 | 光学式エンコーダおよび変位計測装置 |
| JP5443452B2 (ja) * | 2011-09-12 | 2014-03-19 | 株式会社大山光学 | 光学スケール、および、これを備える光学ユニット |
| TWI479125B (zh) * | 2011-11-09 | 2015-04-01 | Zygo Corp | 干涉式編碼器系統的密接式編碼頭 |
| JP5846686B2 (ja) * | 2011-11-22 | 2016-01-20 | 株式会社ミツトヨ | 光電式エンコーダのスケールの製造方法 |
| JP2013221818A (ja) * | 2012-04-16 | 2013-10-28 | Wavelock Advanced Technology Co Ltd | 表面反射型エンコーダ用スケール、その製造方法、及び、表面反射型エンコーダ |
| TWI516746B (zh) * | 2012-04-20 | 2016-01-11 | 賽格股份有限公司 | 在干涉編碼系統中執行非諧循環錯誤補償的方法、裝置及計算機程式產品，以及微影系統 |
| JP6291156B2 (ja) * | 2012-04-23 | 2018-03-14 | マクセル株式会社 | 樹脂製エンコーダスケール、エンコーダ、樹脂製エンコーダスケールの製造方法およびエンコーダの製造方法 |
-
2015
- 2015-05-13 JP JP2015097864A patent/JP5925365B1/ja active Active
-
2016
- 2016-05-05 TW TW105113981A patent/TWI679402B/zh active
- 2016-05-11 WO PCT/JP2016/064064 patent/WO2016182005A1/ja active Application Filing
- 2016-05-11 CN CN201680001599.8A patent/CN106461424B/zh active Active
- 2016-05-11 SI SI201631216T patent/SI3296703T1/sl unknown
- 2016-05-11 MY MYPI2016704547A patent/MY192930A/en unknown
- 2016-05-11 EP EP16792730.0A patent/EP3296703B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106461424A (zh) | 2017-02-22 |
| JP2016212027A (ja) | 2016-12-15 |
| CN106461424B (zh) | 2022-03-22 |
| EP3296703A1 (en) | 2018-03-21 |
| WO2016182005A1 (ja) | 2016-11-17 |
| EP3296703B1 (en) | 2021-03-03 |
| TWI679402B (zh) | 2019-12-11 |
| MY192930A (en) | 2022-09-15 |
| TW201643378A (zh) | 2016-12-16 |
| JP5925365B1 (ja) | 2016-05-25 |
| EP3296703A4 (en) | 2018-12-19 |
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