SG11202005030XA - Catalyst influenced pattern transfer technology - Google Patents
Catalyst influenced pattern transfer technologyInfo
- Publication number
- SG11202005030XA SG11202005030XA SG11202005030XA SG11202005030XA SG11202005030XA SG 11202005030X A SG11202005030X A SG 11202005030XA SG 11202005030X A SG11202005030X A SG 11202005030XA SG 11202005030X A SG11202005030X A SG 11202005030XA SG 11202005030X A SG11202005030X A SG 11202005030XA
- Authority
- SG
- Singapore
- Prior art keywords
- pattern transfer
- transfer technology
- catalyst influenced
- influenced pattern
- catalyst
- Prior art date
Links
Classifications
-
- H10P50/642—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/10—EEPROM devices comprising charge-trapping gate insulators characterised by the top-view layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/024—Manufacture or treatment of FETs having insulated gates [IGFET] of fin field-effect transistors [FinFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/62—Fin field-effect transistors [FinFET]
- H10D30/6212—Fin field-effect transistors [FinFET] having fin-shaped semiconductor bodies having non-rectangular cross-sections
- H10D30/6213—Fin field-effect transistors [FinFET] having fin-shaped semiconductor bodies having non-rectangular cross-sections having rounded corners
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6735—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes having gates fully surrounding the channels, e.g. gate-all-around
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
- H10D84/0158—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including FinFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
- H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
- H10D84/834—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET] comprising FinFETs
-
- H10P50/242—
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762591326P | 2017-11-28 | 2017-11-28 | |
| US201862665084P | 2018-05-01 | 2018-05-01 | |
| US201862701049P | 2018-07-20 | 2018-07-20 | |
| US201862729361P | 2018-09-10 | 2018-09-10 | |
| PCT/US2018/060176 WO2019108366A1 (en) | 2017-11-28 | 2018-11-09 | Catalyst influenced pattern transfer technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202005030XA true SG11202005030XA (en) | 2020-06-29 |
Family
ID=66665736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202005030XA SG11202005030XA (en) | 2017-11-28 | 2018-11-09 | Catalyst influenced pattern transfer technology |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP3718133A4 (en) |
| JP (3) | JP7328220B2 (en) |
| KR (2) | KR20250096882A (en) |
| CN (1) | CN111670493B (en) |
| MY (1) | MY209531A (en) |
| SG (1) | SG11202005030XA (en) |
| TW (2) | TW202534795A (en) |
| WO (1) | WO2019108366A1 (en) |
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| CA3067304C (en) | 2016-06-18 | 2024-05-07 | Graphwear Technologies Inc. | Polar fluid gated field effect devices |
| SG11202005030XA (en) * | 2017-11-28 | 2020-06-29 | Univ Texas | Catalyst influenced pattern transfer technology |
| JP7553458B2 (en) * | 2019-02-25 | 2024-09-18 | ボード オブ リージェンツ,ザ ユニバーシティ オブ テキサス システム | Large area measurement and process control for anisotropic chemical etching. |
| US11355397B2 (en) | 2019-05-13 | 2022-06-07 | Board Of Regents, The University Of Texas System | Catalyst influenced chemical etching for fabricating three-dimensional SRAM architectures |
| EP3780070A1 (en) * | 2019-08-14 | 2021-02-17 | Paul Scherrer Institut | System and etching method for fabricating photonic device elements |
| CN111052381B (en) | 2019-11-28 | 2021-02-26 | 长江存储科技有限责任公司 | Three-dimensional memory device and manufacturing method thereof |
| EP3836194A1 (en) * | 2019-12-13 | 2021-06-16 | Imec VZW | Metal assisted chemical etch for channel and bit-line scaling in a 3d memory device |
| JP7610131B2 (en) * | 2019-12-20 | 2025-01-08 | 株式会社ソシオネクスト | Semiconductor memory device |
| WO2021153169A1 (en) * | 2020-01-27 | 2021-08-05 | 株式会社ソシオネクスト | Semiconductor storage device |
| EP4097754A4 (en) * | 2020-01-27 | 2024-01-24 | SMENA Catalysis AB | STRUCTURING OF MULTILAYER TRANSITION METAL DICHALCOGENIDES |
| US11367778B2 (en) * | 2020-03-31 | 2022-06-21 | Taiwan Semiconductor Manufacturing Company Limited | MOSFET device structure with air-gaps in spacer and methods for forming the same |
| CN115668463A (en) * | 2020-04-01 | 2023-01-31 | 朗姆研究公司 | Selective and precise etching of semiconductor materials |
| KR20230005380A (en) * | 2020-05-05 | 2023-01-09 | 더 보드 오브 리젠츠 오브 더 유니버시티 오브 텍사스 시스템 | Nanofabrication of collapse-free high aspect ratio nanostructures |
| US11257758B2 (en) * | 2020-06-24 | 2022-02-22 | Taiwan Semiconductor Manufacturing Company Limited | Backside connection structures for nanostructures and methods of forming the same |
| KR102578780B1 (en) * | 2020-09-29 | 2023-09-15 | 주식회사 히타치하이테크 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor devices |
| CN116583932A (en) | 2020-10-29 | 2023-08-11 | 德克萨斯大学系统董事会 | Equipment and process technology for chemical etching influenced by catalysts |
| CN112621779B (en) * | 2020-12-18 | 2022-04-08 | 南京鼓楼医院 | Near-infrared driven visual Janus structural color software robot and preparation method thereof |
| GB202020822D0 (en) | 2020-12-31 | 2021-02-17 | Spts Technologies Ltd | Method and apparatus |
| US12406852B2 (en) | 2021-01-21 | 2025-09-02 | Lam Research Corporation | Profile optimization for high aspect ratio memory using an etch front metal catalyst |
| JP7567547B2 (en) * | 2021-02-19 | 2024-10-16 | Agc株式会社 | Method for manufacturing silicon-containing member having recess |
| CN113134971B (en) * | 2021-04-26 | 2022-07-19 | 长春理工大学 | Manufacturing system and manufacturing method of bionic shark skin structure |
| CN113824826B (en) * | 2021-09-18 | 2023-05-30 | 广东阿特斯科技有限公司 | Production process of 3D printing mobile phone backboard |
| EP4152394A1 (en) * | 2021-09-20 | 2023-03-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for generating vertical channel structures in three-dimensionally integrated semiconductor storage devices |
| US20230299069A1 (en) * | 2021-09-27 | 2023-09-21 | Invention And Collaboration Laboratory Pte. Ltd. | Standard cell structure |
| US20230154984A1 (en) * | 2021-11-12 | 2023-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistor Isolation Regions and Methods of Forming the Same |
| WO2023166608A1 (en) * | 2022-03-02 | 2023-09-07 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | Memory device using semiconductor element |
| CN116130351B (en) * | 2022-11-25 | 2025-11-04 | 中国科学院声学研究所 | A method for fabricating micro-silicon spherical cavities |
| US12477780B2 (en) * | 2022-12-19 | 2025-11-18 | Nanya Technology Corporation | Semiconductor structure including multiple gate electrodes |
| KR102674927B1 (en) * | 2023-09-15 | 2024-06-14 | 아이티팜 주식회사 | Apparatus and method for detecting abnormalities in the semiconductor manufacturing process through sem image analysis using ai image processing technology |
| CN117153785B (en) * | 2023-10-27 | 2024-03-01 | 合肥晶合集成电路股份有限公司 | Manufacturing method of semiconductor structure |
| CN119601511B (en) * | 2025-02-10 | 2025-04-15 | 浙江中晶新材料研究有限公司 | A silicon wafer edge efficient peeling device and method |
| CN121123118A (en) * | 2025-11-14 | 2025-12-12 | 合肥晶合集成电路股份有限公司 | Semiconductor structure and manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1950338B (en) * | 2004-03-05 | 2012-05-16 | 霍尼韦尔国际公司 | Ionic Liquids of Heterocyclic Amines |
| US9095639B2 (en) * | 2006-06-30 | 2015-08-04 | The University Of Akron | Aligned carbon nanotube-polymer materials, systems and methods |
| US8486843B2 (en) * | 2008-09-04 | 2013-07-16 | The Board Of Trustrees Of The University Of Illinois | Method of forming nanoscale three-dimensional patterns in a porous material |
| US8278191B2 (en) * | 2009-03-31 | 2012-10-02 | Georgia Tech Research Corporation | Methods and systems for metal-assisted chemical etching of substrates |
| KR20100128518A (en) * | 2009-05-28 | 2010-12-08 | 경북대학교 산학협력단 | Polymerase chain reaction chip using nanofluid and its manufacturing method |
| US8193095B2 (en) * | 2010-05-28 | 2012-06-05 | National Taiwan University | Method for forming silicon trench |
| US9281206B2 (en) * | 2011-10-12 | 2016-03-08 | The Regents Of The University Of California | Semiconductor processing by magnetic field guided etching |
| GB201122315D0 (en) * | 2011-12-23 | 2012-02-01 | Nexeon Ltd | Etched silicon structures, method of forming etched silicon structures and uses thereof |
| GB201205178D0 (en) * | 2012-03-23 | 2012-05-09 | Nexeon Ltd | Etched silicon structures, method of forming etched silicon structures and uses thereof |
| US8951430B2 (en) * | 2012-04-18 | 2015-02-10 | The Board Of Trustees Of The University Of Illinois | Metal assisted chemical etching to produce III-V semiconductor nanostructures |
| CN104756268B (en) * | 2012-08-17 | 2017-10-24 | 美特瑞克斯实业公司 | System and method for forming thermoelectric devices |
| KR101636143B1 (en) * | 2013-09-02 | 2016-07-04 | 주식회사 엘지화학 | Porous silicon based particles, preparation method thereof, and anode active material comprising the same |
| TWI671812B (en) | 2013-11-13 | 2019-09-11 | Kabushiki Kaisha Toshiba | Semiconductor wafer manufacturing method, semiconductor wafer and semiconductor device |
| JP6121959B2 (en) | 2014-09-11 | 2017-04-26 | 株式会社東芝 | Etching method, article and semiconductor device manufacturing method, and etching solution |
| US10134634B2 (en) * | 2014-11-04 | 2018-11-20 | Georgia Tech Research Corporation | Metal-assisted chemical etching of a semiconductive substrate with high aspect ratio, high geometic uniformity, and controlled 3D profiles |
| KR101680070B1 (en) * | 2015-04-21 | 2016-11-30 | 연세대학교 산학협력단 | Semiconductor structure and method for manufacturing the same |
| JP6444805B2 (en) * | 2015-05-12 | 2018-12-26 | 株式会社東芝 | Manufacturing method of semiconductor chip |
| US10134599B2 (en) * | 2016-02-24 | 2018-11-20 | The Board Of Trustees Of The University Of Illinois | Self-anchored catalyst metal-assisted chemical etching |
| WO2017161224A1 (en) * | 2016-03-18 | 2017-09-21 | Massachusetts Institute Of Technology | Nanoporous semiconductor materials and manufacture thereof |
| JP2017201660A (en) * | 2016-05-04 | 2017-11-09 | 株式会社ザイキューブ | Method for forming hole in semiconductor substrate and mask structure used therein |
| JP6382886B2 (en) | 2016-05-26 | 2018-08-29 | 本田技研工業株式会社 | Differential pressure type high pressure water electrolyzer |
| JP6081647B1 (en) * | 2016-07-28 | 2017-02-15 | 株式会社東芝 | Etching method, semiconductor chip manufacturing method, and article manufacturing method |
| SG11202005030XA (en) * | 2017-11-28 | 2020-06-29 | Univ Texas | Catalyst influenced pattern transfer technology |
-
2018
- 2018-11-09 SG SG11202005030XA patent/SG11202005030XA/en unknown
- 2018-11-09 KR KR1020257020473A patent/KR20250096882A/en active Pending
- 2018-11-09 KR KR1020207018511A patent/KR102824535B1/en active Active
- 2018-11-09 EP EP18884487.2A patent/EP3718133A4/en active Pending
- 2018-11-09 WO PCT/US2018/060176 patent/WO2019108366A1/en not_active Ceased
- 2018-11-09 CN CN201880088011.6A patent/CN111670493B/en active Active
- 2018-11-09 MY MYPI2020002613A patent/MY209531A/en unknown
- 2018-11-09 JP JP2020529365A patent/JP7328220B2/en active Active
- 2018-11-23 TW TW114115039A patent/TW202534795A/en unknown
- 2018-11-23 TW TW107141826A patent/TWI884126B/en active
-
2023
- 2023-08-03 JP JP2023127219A patent/JP7655989B2/en active Active
-
2025
- 2025-03-21 JP JP2025046985A patent/JP2025098124A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2025098124A (en) | 2025-07-01 |
| WO2019108366A1 (en) | 2019-06-06 |
| KR20250096882A (en) | 2025-06-27 |
| CN111670493A (en) | 2020-09-15 |
| KR102824535B1 (en) | 2025-06-23 |
| JP2023145718A (en) | 2023-10-11 |
| TWI884126B (en) | 2025-05-21 |
| TW202534795A (en) | 2025-09-01 |
| EP3718133A1 (en) | 2020-10-07 |
| KR20200090237A (en) | 2020-07-28 |
| JP7655989B2 (en) | 2025-04-02 |
| JP7328220B2 (en) | 2023-08-16 |
| TW201926460A (en) | 2019-07-01 |
| CN111670493B (en) | 2024-06-28 |
| MY209531A (en) | 2025-07-17 |
| JP2021504961A (en) | 2021-02-15 |
| EP3718133A4 (en) | 2021-11-24 |
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