CN113134971B - Manufacturing system and manufacturing method of bionic shark skin structure - Google Patents

Abstract

The invention provides a manufacturing system and a manufacturing method of a bionic shark skin structure. According to the invention, the liquid photosensitive material is solidified to form the bionic sharkskin structure by converging N beams of coherent laser and interfering, so that not only can the macro structure of the bionic sharkskin structure be controlled, but also microscopic interference fringes can be superposed on the macro structure by utilizing the interference effect, and the performance of the bionic sharkskin structure is further improved, thereby realizing large-area, convenient, high-efficiency and low-energy-consumption preparation of the cross-scale bionic sharkskin structure in a common atmospheric environment.

Description

Manufacturing system and manufacturing method of bionic shark skin structure

technical field

The invention relates to the technical field of micro-nano structure processing, in particular to a manufacturing system and manufacturing method of a bionic shark skin structure.

Background technique

The preparation of biomimetic shark skin structures is a hot research issue in bionics, and is mainly used in hydrophobicity, antifouling and drag reduction. The existing preparation technologies are basically template method, hot embossing and precision 3D printing technology.

In 2014, George Lauder et al. established a 3D model of a single tooth with a length of only 0.15mm based on the mako shark shield scale. It took 1 year to use 3D printing technology to embed tens of thousands of small teeth into a flexible and smooth membrane. Got bionic shark skin.

In the process of realizing the present invention, the applicant found that the manufacturing method of the bionic shark skin structure in the traditional technology can only control the macroscopic structure, but cannot control the microscopic structure in the bionic shark skin structure.

SUMMARY OF THE INVENTION

(1) Technical problems to be solved

The present invention aims to at least partially solve at least one of the above technical problems.

(2) Technical solutions

In order to achieve the above purpose, according to an aspect of the present invention, a bionic shark skin structure manufacturing system is provided, including: a coherent laser system for generating N beams of coherent laser light, N≥2; an angle frame, a hollow area formed therein , a card slot is formed on the side of the hollow area; wherein, when the substrate is inserted into the card slot, its first plane faces the inner side of the hollow area, and forms a growth pool for accommodating liquid photosensitive materials with the corresponding surface of the hollow area; The two planes face the incident direction of the N beams of coherent laser light. After the N beams of coherent laser light are transmitted through the substrate, they converge and interfere in a local area of the first plane, so that the liquid photosensitive material in the local area in the growth cell is cured to form a microstructure with interference. Bionic shark skin structure.

In some embodiments of the present invention, a mask pattern is formed on the first plane of the substrate; after N beams of coherent laser light pass through the light-transmitting area defined by the mask pattern on the substrate, they converge in the corresponding area of the first plane and generate The interference causes the liquid photosensitive material in the corresponding area in the growth tank to solidify to form a bionic shark skin structure with the mask pattern as the outline.

In some embodiments of the present invention, the mask pattern includes: T×S shark fin units distributed in an array staggered, T≥3, S≥3; The outer contour is on the same circumference and includes: the main fin in the middle; and the left and right fins on either side of the main fin, respectively; where the left and right fins are separated from the main fin and mirrored relative to the midline of the main fin symmetry.

In some embodiments of the present invention, M card slots are formed on the side of the hollow area of the angle frame, M≥2; wherein, the substrate can be selectively inserted into one of the M card slots to form a growth pool, and when the substrate When the chip is inserted into different slots, the substrate and the incident N beams of coherent laser are at different angles.

In some embodiments of the present invention, the energy of the N beams of coherent laser light is the same, the angles of the incident substrate are the same, and are uniformly distributed on the conical surface with the convergence point as the vertex.

In some embodiments of the present invention, the incident angle β satisfies: 5°≤θ≤75°.

In some embodiments of the present invention, N=3; the coherent laser system includes:

laser;

total reflector;

The first coherent optical path includes: a first beam splitter; the laser light emitted by the laser is divided into two beams by the first beam splitter, the first beam is reflected to the total reflection mirror, and is reflected to the substrate by the total reflection mirror, becoming the first beam. One beam of coherent laser light; the second beam is incident on the next coherent optical path;

The second coherent optical path includes: a second beam splitter, a first reflector, and a second reflector; the second beam split from the laser by the first beam splitter is further divided into two beams by the second beam splitter, the first beam It is reflected to the substrate through the first reflection mirror, the second reflection mirror and the total reflection mirror to become the second beam of coherent laser light; the second beam is incident on the next coherent optical path;

The third coherent optical path includes: a third reflection mirror, and the second beam of the laser split by the second beam splitter is reflected to the substrate through the third reflection mirror and the total reflection mirror to become the third beam of coherent laser light;

Wherein, the first beam splitter, the second reflector, and the third reflector satisfy an equilateral triangle positional relationship.

In some embodiments of the invention, the laser is a continuous laser.

In some embodiments of the present invention, the bionic shark skin structure manufacturing system further includes: a three-dimensional displacement platform, and the angle frame is fixed on the platform surface of the three-dimensional displacement platform.

In some embodiments of the present invention, each of the first coherent optical path, the second coherent optical path, and the third coherent optical path includes a focusing lens and an aperture stop, both of which are located in the same light as other optical elements in the same optical path On-axis, upstream of the optical path of the total mirror, and the aperture stop is located in the focal plane of the focusing lens.

In order to achieve the above purpose, according to the second aspect of the present invention, a method for manufacturing a bionic shark skin structure is also provided, comprising: step A, forming a mask pattern on the first plane of the substrate; step B, using the above bionic The shark skin structure fabrication system forms a bionic shark skin structure with interference microstructures on a substrate.

In some embodiments of the present invention, in step B: by using mask patterns of different sizes and specifications, the feature size and periodic spacing of the bionic shark skin structure are controlled.

In some embodiments of the present invention, in step B: by controlling the incident angle β and light intensity of each laser beam in the N beams of coherent laser light, the period of the interference microstructure and the growth mode of the bionic shark skin structure are controlled.

In some embodiments of the present invention, in step B: by controlling the angle θ formed by the substrate and the normal line of the incident N beams of coherent laser light, the growth angle of the bionic shark skin structure is controlled.

In some embodiments of the present invention, in step B: by controlling the incident time of the N beams of coherent laser light, the growth size of the bionic shark skin structure is controlled.

In some embodiments of the present invention, in step B: by controlling the energy density of the N beams of coherent laser light, the growth rate of the bionic shark skin structure is controlled.

(3) Beneficial effects

As can be seen from the above technical solutions, the present invention has at least one of the following beneficial effects:

(1) The bionic shark skin structure is formed by solidifying the liquid photosensitive material by converging and interfering with N beams of coherent laser light, which can not only control the macroscopic structure of the bionic shark skin structure, but also superimpose the microscopic interference on the macroscopic structure by using the interference effect. The stripes further improve the performance of the bionic shark skin structure, so as to realize the large-area, convenient, efficient, and low-energy-consumption cross-scale bionic shark skin structure preparation in the ordinary atmospheric environment.

(2) Before forming the biomimetic shark skin structure, a mask pattern is formed on the substrate, so that the biomimetic shark skin structure can be controlled to grow in the light-transmitting area, thereby providing a flexible, low-cost, large-area biomimetic shark skin structure method of preparation.

(3) Different from the traditional mask pattern, the shark fin units in the present invention are arranged in an array and staggered, and a single shark fin unit is in the shape of a trident with the tip pointing downward as a whole, and its outer contour is on the same circumference. Compared with the forward projection of the shark skin structure used in the traditional technology, the mask pattern in the present invention has the advantage of reducing unnecessary cross-linking reaction during photocuring and generating a macroscopic groove structure; compared with the traditional technology The advantage of the mask pattern in the present invention is that the original structural shape of the shark skin can be maintained to the greatest extent, and a larger area of microstructure can be prepared.

(4) A plurality of card slots are formed on the angle frame. In actual production, one substrate is inserted into the card slot. When the substrate is inserted into different card slots, the normal lines of the substrate and the incident N beams of coherent laser are different. Therefore, by controlling the incident angle, the growth angle of the bionic shark skin structure can be controlled, which further improves the flexibility of the bionic shark skin structure preparation.

(5) Using one laser, combined with beam splitters, mirrors, etc. to form N beams of coherent lasers, has the advantages of low cost and flexible operation.

(6) By setting the first beam splitter in the first coherent optical path, the second mirror in the second coherent optical path, and the third reflection mirror in the third coherent optical path in an equilateral triangle positional relationship to ensure that the three beams are coherent The incident angle of the laser incident on the substrate is the same to ensure that the optical path is in the best position, so that the interference pattern is uniform and regular.

(7) An optical energy adjusting component is arranged in the optical path of each coherent laser to adjust and homogenize the energy of the laser, so that the texture of the interference fringes can be flexibly adjusted.

(8) In the preparation process, by using different mask patterns, the feature size and periodic spacing of the bionic shark skin structure are controlled; by controlling the incident angle and light intensity of each laser beam in the N beams of coherent lasers, the Interfering with the period of the microstructure and the growth mode of the bionic shark skin structure; by controlling the angle θ formed by the substrate and the normal line of the incident N beams of coherent laser light, the growth angle of the bionic shark skin structure is controlled; by controlling the N beam coherence beams The incident time of the laser controls the growth size of the biomimetic shark skin structure; by controlling the energy density of the N-beam coherent laser, the growth rate of the biomimetic shark skin structure is controlled; the flexibility and selectivity of the preparation are greatly enhanced, which is beneficial to the needs Provide suitable bionic sharkskin construction.

Description of drawings

FIG. 1 is a schematic structural diagram of a bionic shark skin structure manufacturing system according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of laser incidence after the substrate is inserted into the slot in the angle frame in the bionic shark skin structure manufacturing system shown in FIG. 1 .

FIG. 3 is a schematic diagram of a mask pattern of a substrate in the bionic shark skin structure manufacturing system shown in FIG. 1 .

FIG. 4 is a schematic diagram of an angle frame used in the bionic shark skin structure manufacturing system shown in FIG. 1 .

FIG. 5 is a schematic diagram of the structural outline of the bionic shark skin structure grown after the substrate is inserted into different card slots in the bionic shark skin structure manufacturing system shown in FIG. 1 .

6A and 6B are respectively a top view and a side view of the optical path trajectories of three coherent laser beams passing through the total reflector in the bionic shark skin structure manufacturing system shown in FIG. 1 .

7 is a scanning electron microscope image of a biomimetic shark skin structure prepared by a method for manufacturing a biomimetic shark skin structure according to an embodiment of the present invention.

FIG. 8 is an enlarged scanning electron microscope image of the bionic shark skin structure in FIG. 7 .

9 is a scanning electron microscope image of the top structure of the biomimetic shark skin structure prepared by the second embodiment of the biomimetic shark skin structure manufacturing method of the present invention.

FIG. 10 is an enlarged scanning electron microscope image of the bionic shark skin structure shown in FIG. 9 .

11 is a scanning electron microscope image of the bottom structure of the biomimetic shark skin structure prepared by the second embodiment of the biomimetic shark skin structure manufacturing method of the present invention.

12 is a scanning electron microscope image of the bottom structure of the biomimetic shark skin structure prepared by the third embodiment of the biomimetic shark skin structure manufacturing method of the present invention.

[Description of main component symbols in the attached drawings]

200-3D displacement platform;

300-substrate; 301-first plane; 302-second plane;

410-growth tank; 421, 422, 423-card slot;

111 - laser;

121 - total reflector;

131-first beam splitter; 132-first focusing lens; 133-first aperture diaphragm;

141 second beam splitter; 142-first reflector; 143-second reflector;

144-Second focusing lens; 145-Second aperture diaphragm;

151 The third reflecting mirror; 152- The third focusing lens; 153- The third aperture diaphragm;

LB ₁ , LB ₂ , LB ₃ - coherent laser light; O _grow - structure growth direction.

Detailed ways

The invention realizes the preparation of a cross-scale bionic shark skin structure based on the combination of laser interference and mask surface exposure technology.

In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the specific embodiments and the accompanying drawings. It should be understood that these embodiments are provided only so that this invention will satisfy legal requirements, which may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

1. Bionic shark skin structure manufacturing system

The present invention first provides a bionic shark skin structure manufacturing system.

In an exemplary embodiment of the present invention, a bionic shark skin structure manufacturing system is provided. FIG. 1 is a schematic structural diagram of a bionic shark skin structure manufacturing system according to an embodiment of the present invention. FIG. 2 is a schematic diagram of laser incidence after the substrate is inserted into the slot in the angle frame in the bionic shark skin structure manufacturing system shown in FIG. 1 . As shown in FIG. 1 , the bionic shark skin structure manufacturing system of this embodiment includes:

A coherent laser system for generating three coherent laser beams (LB ₁ , LB ₂ , LB ₃ );

three-dimensional displacement platform 200;

The angle frame is fixed on the three-dimensional displacement platform, and a hollow area is formed inside it;

As shown in FIG. 2, when the substrate 300 is inserted into the slot 421 of the angle frame, its first plane 301 faces the inner side of the hollow area, and forms a growth pool 410 for accommodating the liquid photosensitive material with the corresponding plane of the hollow area; The second plane 302 faces the incident direction of the three coherent laser beams. After passing through the substrate, the three beams of coherent laser beams (LB ₁ , LB ₂ , LB ₃ ) converge and interfere in a local area of the first plane 301 , so that the local area The liquid photosensitive material solidified to form a biomimetic shark skin structure with an interference microstructure. Wherein, the dotted line direction O _grow is the growth direction of the bionic shark skin structure.

In this embodiment, the bionic shark skin structure is formed by solidifying the liquid photosensitive material by converging and interfering with three coherent laser beams, which can not only control the macroscopic structure of the bionic shark skin structure, but also superimpose the microscopic structure on the macroscopic structure by using the interference effect. The interference fringes can further improve the performance of the bionic shark skin structure, so as to realize the large-area, convenient, efficient, and low-energy-consumption cross-scale bionic shark skin structure preparation in the ordinary atmospheric environment.

In addition, the angle frame is mounted on the three-dimensional displacement platform, and the lateral splicing of the substrate can be realized by moving the X axis; the longitudinal splicing of the substrate can be realized by the coordinated movement of Y and Z, so as to realize the preparation of larger area and industrialized preparation.

It can be understood by those skilled in the art that although three coherent laser beams are used in this embodiment, the present invention is not limited to this. In other embodiments of the present invention, two beams, four beams, and five beams may also be used. or more beams of coherent laser beams, as long as the number of beams of coherent laser beams is greater than two beams, they can converge in a local area of the first plane of the substrate to interfere and form interference fringes.

The substrate in this embodiment is formed by replicating an aluminum mask on quartz glass. In the present invention, the mask pattern of the substrate is a pattern designed in the case of combining the forward projection profile of shark skin and photocuring to generate cross-linking reaction. FIG. 3 is a schematic diagram of a mask pattern of a substrate in the bionic shark skin structure manufacturing system shown in FIG. 1 . As shown in FIG. 3 , the mask pattern includes: T×S shark fin units distributed in an array staggered, T≥3, S≥3. Regarding the mask pattern, it should be noted that:

(1) Staggered distribution of shark fin cell arrays

Please refer to FIG. 3 , the mask pattern includes T rows and S columns of shark fin units, along the vertical direction, the row spacing of the shark fin units is equal; in the horizontal direction, the shark fin units of adjacent rows are staggered, namely t rows s Shark fin unit Q _t,s in column t-1, shark fin unit Q _{t-1,s-1 in row t-1, column s-1} and shark fin unit Q _t-1,s+ in row t-1, column s+1 ₁ in the middle position.

(2) The shape of a single shark fin unit

The shark fin unit is in the shape of a trident with a pointed part as a whole, and its outer contour is on the same circumference, including: a main fin in the middle; and a left fin and a right fin respectively located on both sides of the main fin; The fin and right fin are separated from the main fin and are mirror-symmetrical with respect to the midline of the main fin.

In this embodiment, the radius of the circumference is 40 micrometers, and the gap between the main fin and the auxiliary fin in the horizontal direction is 10 micrometers. The lower ends of the main fins converge to the intersection of the midline and the circumference. The upper end of the inner arc of the auxiliary fin is respectively connected to the lower end of the outer arc in the Y direction at half the height and the upper end of the outer arc at the height of 1/4. Other feature sizes are scaled down or up.

Wherein, after the three coherent laser beams pass through the light-transmitting area defined by the mask pattern on the substrate, they converge and interfere in the corresponding area of the first plane, so that the liquid photosensitive material in the corresponding area is cured to form the mask pattern. Contoured bionic sharkskin construction.

Compared with the forward projection of the shark skin structure used in the traditional technology, the mask pattern in the present invention has the advantages of reducing unnecessary cross-linking reaction during photocuring and generating a macroscopic groove structure; The advantages of the line model in the technology and the mask pattern in the present invention are that the original structure and shape of the shark skin can be maintained to the greatest extent, and a larger area of microstructure can be prepared.

Those skilled in the art should understand that in addition to quartz glass, inorganic light-transmitting materials such as ordinary glass, optical glass, ITO glass and FTO glass can also be used as the original carrier of the mask pattern; in addition to aluminum, copper can also be used and other opaque materials to make mask patterns. Regarding the process of forming the mask pattern on the inorganic light-transmitting material, reference may be made to the related descriptions in the prior art, and details are not repeated here.

FIG. 4 is a schematic diagram of an angle frame used in the bionic shark skin structure manufacturing system shown in FIG. 1 . As shown in Fig. 4, the inside of the angle frame forms a hollow area. Three card slots (421, 422, 423) are formed inside the angle frame. When the substrate is inserted into one of the three slots, a growth pool can be formed with other surfaces of the hollow area, and the liquid photosensitive material is injected into the growth pool, and the injected resin does not overflow the highest part of the substrate. The liquid photosensitive material can be cured by ultraviolet light.

Please continue to refer to FIG. 4 , the difference between the substrates being inserted into different slots is that they present different angles to the incident coherent laser light. In descending order of the inclination angle, when the substrate is inserted into different slots, the angles between the substrate and the incident coherent laser are: θ ₁ =15°, θ ₂ =30°, θ ₃ =45° .

FIG. 5 is a schematic diagram of the structural outline of the bionic shark skin structure grown after the substrate is inserted into different card slots in the bionic shark skin structure manufacturing system shown in FIG. 1 . Taking the card slot with θ ₁ = 15° as an example, when the substrate is inserted into the card slot, the bionic shark skin structure will grow along the direction of the angle θ ₁ with the substrate, so this direction is called structure growth The direction, theta angle is called the structure growth angle.

In this embodiment, three card slots are arranged inside the angle frame. In actual operation, the card slots into which the substrate is inserted can be selected according to the required structural growth direction. Therefore, by controlling the angle θ formed by the substrate and the normal line of the incident coherent laser, the growth angle of the bionic shark skin structure can be controlled, and the flexibility of the bionic shark skin structure preparation can be further improved.

It should be clear to those skilled in the art that the number of card slots and the angle θ in this embodiment are all examples. In practical application, the number of card slots and the angle between the substrate and the incident coherent laser can be set as required, all within the protection scope of the present invention.

Please continue to refer to FIG. 1 , in this embodiment, three coherent laser beams are formed by splitting light by one laser. In order to achieve this effect, the coherent laser system in this embodiment includes: a laser 111 , a first coherent optical path, a second coherent optical path, a third coherent optical path, and a total reflection mirror 121 .

The laser 111 is an ultraviolet continuous semiconductor laser, capable of generating an ultraviolet laser with a wavelength of 360 nm, and its energy is adjustable.

(1) The first coherent optical path

The first coherent optical path includes: a first beam splitter 131 propagating on a central axis, a first focusing lens 132 , and a first aperture stop 133 .

The first aperture stop 133 is disposed on the focal plane of the first focusing lens 132 . After the laser light emitted by the ultraviolet continuous laser enters the first beam splitting mirror 131, it is divided into two parts. The first part is reflected by the first beam splitter 131, homogenized and adjusted by the first focusing lens 132 and the aperture diaphragm 133, and then incident on the total reflection mirror 121. The total reflection mirror 121 directs the part of the laser light toward the substrate reflection. The second part is transmitted by the first beam splitter 131 and enters the second coherent optical path.

(2) The second coherent optical path

The second coherent optical path includes: a second beam splitting mirror 141 propagating on the central axis, a first reflecting mirror 142 , a second reflecting mirror 143 , a second focusing lens 144 and a second aperture stop 145 . The second aperture stop 145 is disposed on the focal plane of the second focusing lens 144 .

After the laser enters the second coherent optical path, it is divided into two parts by the second beam splitter 141 . The first part is reflected by the second beam splitting mirror 141, then reflected by the first beam splitting mirror 142 and the third beam splitting mirror 143, and then uniformed and homogenized by the second focusing lens and the second aperture stop 145. After the energy is adjusted, it is incident on the total reflection mirror 121 . The total reflection mirror 121 reflects the part of the laser light toward the substrate. The second part is transmitted by the second beam splitter 141 and enters the third coherent optical path.

(3) The third coherent optical path

The third coherent optical path includes: a third mirror 151 , a third focusing lens 152 , and a third aperture stop 153 . The third aperture stop 153 is disposed on the focal plane of the third focusing lens 152 . In addition, the first beam splitter 131 , the second reflection mirror 143 and the third reflection mirror 151 are arranged in an equilateral triangle.

After the laser enters the third coherent optical path, it is reflected by the third reflecting mirror 151 , and is homogenized and regularized by the third focusing lens 152 and the third aperture diaphragm 153 , and the energy is adjusted, and then incident on the total reflecting mirror 121 , and the total reflecting mirror 121 This part of the laser light is reflected towards the substrate.

In this embodiment, the first beam splitter in the first coherent optical path, the second reflecting mirror in the second coherent optical path, and the third reflecting mirror in the third coherent optical path are arranged in an equilateral triangle positional relationship to ensure that the three The incident angle of the coherent laser beam incident on the substrate is the same to ensure that the optical path is in the best position and the interference pattern is uniform and regular. In addition, each coherent optical path is provided with a light energy adjusting component to adjust and homogenize the energy of the laser light, so that the texture of the interference fringes can be flexibly adjusted.

6A and 6B are respectively a top view and a side view of the optical path trajectories of three coherent laser beams passing through the total reflector in the bionic shark skin structure manufacturing system shown in FIG. 1 .

As shown in FIG. 6A , the light spots of the three related optical paths are arranged in an equilateral triangle, and finally converge to the center of gravity of the equilateral triangle. As shown in Figure 6B, the black dotted line is the normal direction of the laser incident, the angle β is the incident angle of the laser, β is 5° in the figure, and the other two lights overlap in the side view, with black dotted arrows and gray solid arrows respectively means that the angle θ is the angle formed by the substrate and the normal of the incident coherent laser light.

Wherein, the three coherent laser beams incident on the substrate converge and interfere in the local area of the first plane of the substrate, wherein for the three coherent laser beams:

(1) It satisfies spatially that the laser incident angles of the three coherent laser beams remain the same.

(2) It satisfies the energy relationship, and the energy of the three coherent laser beams is the same.

(3) It is satisfied on the interference surface, and the spot coincidence degree is high.

d为周期、λ为激光波长、β为入射角，从而形成干涉纳米图案的周期d＝2微米。Three coherent laser beams interfere, and the incident angle β of the three beams is 5°. According to the formula

d is the period, λ is the laser wavelength, and β is the incident angle, so that the period d=2 microns of the interference nano-pattern is formed.

In this embodiment, after the three coherent laser beams are converged, a circular spot with an interference area of approximately 1 cm in diameter is formed, and when projected onto the substrate, it is an elliptical spot with a long axis of 1.5 cm and a short axis of 1 cm.

So far, the introduction of the bionic shark skin structure manufacturing system according to the embodiment of the present invention is completed.

2. Manufacturing method of bionic shark skin structure

Based on the above bionic shark skin structure manufacturing system, the present invention also provides a bionic shark skin structure manufacturing method.

1. The first embodiment of the manufacturing method of the bionic shark skin structure

The manufacturing method of the bionic shark skin structure of the present embodiment includes:

Step A, forming a mask pattern on the first plane of the substrate;

Step B, using the bionic shark skin structure manufacturing system as described above to form a bionic shark skin structure with an interference microstructure on the substrate.

Wherein, for the method of forming a mask pattern on the first plane of the substrate in step A, reference may be made to the related descriptions in the prior art, which will not be repeated here.

In step B, the following aspects need to be explained:

①Laser type

The laser is a semiconductor laser capable of emitting ultraviolet laser light with a wavelength of 360 nm.

②Laser power

Here, the laser power refers to the energy of a single laser beam at the substrate. In this embodiment, the laser power is 0.8 mW.

① Incident angle of coherent laser

得出干涉图案周期为2微米。For the three beams incident on the substrate, the incident angle of the three coherent laser beams is 5°. According to the formula

The period of the interference pattern is obtained to be 2 microns.

②Exposure time

Here, the exposure time refers to the time during which the laser irradiates the first plane. In this embodiment, the exposure time is 5s.

③The angle θ formed by the substrate and the normal of the incident laser

Here, the growth direction of the structure depends on the angle θ formed by the substrate and the normal line of the incident laser. Referring to FIG. 6, it can be seen that the smaller the θ, the smaller the angle between the bottom of the structure and the substrate, and vice versa. In this example, θ=30° is selected.

7 is a scanning electron microscope image of a biomimetic shark skin structure prepared by using the first embodiment of the biomimetic shark skin structure manufacturing method of the present invention. As shown in FIG. 7 , the first embodiment of the bionic shark skin structure manufacturing method of the present invention realizes large-area, orderly and regular preparation.

FIG. 8 is an enlarged scanning electron microscope image of the bionic shark skin structure in FIG. 7 . It can be seen from Figure 8 that its structure is grown with a three-beam interference lattice structure, and the three-beam lattice structure can be clearly seen at the top, which proves that the surface microstructure of bionic shark skin can be regulated by laser interference, realizing cross-scale preparation. .

2. The second embodiment of the manufacturing method of the bionic shark skin structure

This embodiment is similar to the first embodiment of the method for manufacturing the bionic shark skin structure, except that the exposure time is 10s.

9 is a scanning electron microscope image of the top structure of the biomimetic shark skin structure prepared by the second embodiment of the biomimetic shark skin structure manufacturing method of the present invention. It can be seen from FIG. 9 that a large-area, ordered, and regular preparation can be achieved at a longer exposure time, and the prepared large-area structure has a longer growth size than that shown in FIG. 7 .

FIG. 10 is an enlarged scanning electron microscope image of the bionic shark skin structure shown in FIG. 9 . It can be seen from the figure that its structure is grown with a three-beam interference lattice structure, and the three-beam lattice structure can be clearly seen at the top. Compared with Fig. 8, the growth size of the structure is longer and the top area is relatively small, which proves that the growth size of the biomimetic shark skin structure can be controlled by controlling the exposure time.

11 is a scanning electron microscope image of the bottom structure of the biomimetic shark skin structure prepared by the second embodiment of the biomimetic shark skin structure manufacturing method of the present invention. It can be seen from Figure 11 that there is a clear lattice structure at the bottom of the structure, and the lattice is a convex part, which proves that the bionic shark skin structure in this case is a lattice structure formed by three-beam interference growing from the base to the top, which proves Laser interference control of structure growth.

3. The third embodiment of the manufacturing method of the bionic shark skin structure

This embodiment is similar to the first embodiment of the bionic shark skin structure manufacturing method, except that two coherent laser beams are used for preparation, namely N=2, the laser power is 1.2mW, and the exposure time is 10s.

12 is a scanning electron microscope image of the bottom structure of the biomimetic shark skin structure prepared by the third embodiment of the biomimetic shark skin structure manufacturing method of the present invention. It can be seen from Figure 12 that there are clear stripes at the bottom of the structure, and the stripes are raised parts, indicating that the bionic shark skin structure in this case is a stripe structure formed by the interference of two beams growing from the base to the top. By contrast, it is proved that different growth modes of structures can be controlled by changing the number of laser interference beams.

So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings.

It should be noted that, for some implementations, if they are not the key content of the present invention and are well known to those of ordinary skill in the art, they are not described in detail in the accompanying drawings or the text of the description. It can be understood with reference to the relevant prior art.

In addition, the above definitions of each element and method are not limited to various specific structures, shapes or manners mentioned in the embodiments, and those of ordinary skill in the art can simply modify or replace them, for example:

(1) The coherent optical path system can also adopt other optical path forms, such as the form in which each laser beam is reflected downward from the top to form interference, rather than the form of downward emission through the total reflector;

(2) The aperture diaphragm can also be replaced by other energy adjustment devices, such as polarizing crystals and wave plates.

From the above description, those skilled in the art should have a clear understanding of the present invention.

To sum up, the present invention forms a bionic shark skin structure by curing a liquid photosensitive material by means of mask surface exposure and N beams of coherent laser convergence and interference, which can not only control the macroscopic structure of the bionic shark skin structure, but also utilize the interference effect. The microscopic interference fringes can be superimposed on the macroscopic structure to further improve the performance of the bionic shark skin structure, so as to realize the large-area, convenient, efficient and low-energy-consumption cross-scale preparation of the bionic shark skin structure in the ordinary atmospheric environment. Practical value.

It should also be noted that the directional terms mentioned in the embodiments, such as "up", "down", "front", "rear", "left", "right", "inside", "outside", etc., only The direction of reference to the drawings is not intended to limit the protection scope of the present invention. Throughout the drawings, the same elements are denoted by the same or similar reference numbers. Conventional structures or constructions will be omitted when it may lead to obscuring the understanding of the present invention.

Moreover, the shapes and sizes of the components in the figures do not reflect the actual size and proportion, but merely illustrate the contents of the embodiments of the present invention. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.

In the description of the present invention, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms can be understood in specific situations.

Unless explicitly stated to the contrary, the numerical parameters set forth in the specification and claims of the present invention are approximations that can vary depending upon the teachings employed by the present invention. Specifically, all numbers used in the description and the claims to indicate the content of the composition, reaction conditions, etc., should be understood as being modified by the word "about" in all cases, and the meaning of its expression means that it includes the specific amount In some embodiments a change of ±10%, in some embodiments a change of ±5%, in some embodiments a change of ±1%, in some embodiments a change of ±0.5%.

Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.

Ordinal numbers such as "first", "second", "third", "main", "secondary", as well as Arabic numerals, letters, etc. used in the description and claims are used to modify corresponding elements or steps, and their original meanings It is only used to clearly distinguish an element (or step) with a certain name from another element (or step) with the same name, and does not mean that the element (or step) has any ordinal number, nor Represents the order of an element (or step) with another element (or step).

Furthermore, unless the steps are specifically described or must occur sequentially, the order of the above steps is not limited to those listed above, and may be varied or rearranged according to the desired design. And the above embodiments can be mixed and matched with each other or with other embodiments based on the consideration of design and reliability, that is, the technical features in different embodiments can be freely combined to form more embodiments.

Similarly, it is to be understood that in the above description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together into a single embodiment, Figure, or its description. However, this method of the invention should not be construed to reflect an intention that the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, various inventive aspects lie in less than all features of a single foregoing single embodiment. Thus, the claims following the Detailed Description are hereby expressly incorporated into this Detailed Description, with each claim standing on its own as a separate embodiment of this invention.

The specific embodiments described above describe in detail the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above are only specific embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (9)

1. a bionic shark skin structure manufacturing system, is characterized in that, comprises: Coherent laser system, used to generate N beams of coherent laser, N≥2; an angle frame, a hollow area is formed inside the angle frame, and a clamping slot is formed on the side of the hollow area; Wherein, when the substrate is inserted into the card slot, its first plane faces the inner side of the hollow area, and forms a growth pool for accommodating liquid photosensitive materials with the corresponding faces of the hollow area; its second plane faces the inside of the hollow area. The incident direction of the N beams of coherent laser light, the N beams of coherent laser light converge and interfere in a local area of the first plane after passing through the substrate, so that the liquid photosensitive material in the local area in the growth cell is cured to form a Bionic shark skin structure with interference microstructure; Wherein, a mask pattern is formed on the first plane of the substrate; after the N beams of coherent laser pass through the light-transmitting area defined by the mask pattern on the substrate, the corresponding area of the first plane is Convergence and interference occur, so that the liquid photosensitive material in the corresponding area in the growth cell is solidified to form a bionic shark skin structure with the mask pattern as the outline. 2 . The bionic shark skin structure manufacturing system according to claim 1 , wherein the mask pattern comprises: T×S shark fin units distributed in a staggered array, T≥3, S≥3; 2 . The shark fin unit is in the shape of a trident with a pointed portion facing downward as a whole, and its outer contour is on the same circumference, including: the main fin in the middle; and the left fin and the right fin respectively located on both sides of the main fin; The left and right fins are separated from the main fin and are mirror-symmetrical with respect to the midline of the main fin. 3. The bionic shark skin structure manufacturing system according to claim 1, wherein M card slots are formed on the side of the hollow area of the angle frame, and M≥2; Wherein, the substrate can be selectively inserted into one of the M card slots to form the growth pool, and when the substrate is inserted into different card slots, the substrate and the incident N beams Coherent laser light at different angles. 4 . The bionic shark skin structure manufacturing system according to claim 1 , wherein the energy of the N beams of coherent lasers is the same, and the angles of incident on the substrate are the same and uniformly distributed on the conical surface with the convergence point as the vertex. 5 . superior. 5 . The bionic shark skin structure manufacturing system according to claim 4 , wherein the angle θ satisfies: 5°≤θ≤75°, wherein the angle θ is the angle formed by the substrate and the normal line of the incident coherent laser light. 6 . Angle. 6. The bionic shark skin structure manufacturing system according to claim 4, wherein N=3; the coherent laser system comprises: laser; total reflector; The first coherent optical path includes: a first beam splitter; the laser light emitted by the laser is divided into two beams by the first beam splitter, and the first beam is reflected to the total reflection mirror and reflected by the total reflection mirror to the substrate to become the first coherent laser beam; the second beam enters the next coherent optical path; The second coherent optical path includes: a second beam splitter, a first reflector, and a second reflector; the second beam of laser split by the first beam splitter is further divided into two beams by the second beam splitter , the first beam is reflected to the substrate through the first reflection mirror, the second reflection mirror and the total reflection mirror to become the second coherent laser beam; the second beam is incident on the next coherent optical path; The third coherent optical path includes: a third reflection mirror, and the second beam of laser split by the second beam splitter is reflected to the substrate through the third reflection mirror and the total reflection mirror to become a third beam of coherent laser light ; Wherein, the first beam splitting mirror, the second reflecting mirror, and the third reflecting mirror satisfy the positional relationship of an equilateral triangle. 7. The bionic shark skin structure manufacturing system according to claim 6, wherein: the laser is a continuous laser; and/or The bionic shark skin structure manufacturing system further includes: a three-dimensional displacement platform, and the angle frame is fixed on the platform surface of the three-dimensional displacement platform; and/or Each of the first coherent optical path, the second coherent optical path and the third coherent optical path includes: a focusing lens and an aperture diaphragm, both of which are located on the same optical axis as other optical elements in the same optical path, and the total reflection The optical path of the mirror is upstream, and the aperture stop is located on the focal plane of the focusing lens. 8. A method for manufacturing a bionic shark skin structure, comprising: Step A, forming a mask pattern on the first plane of the substrate; Step B, using the biomimetic shark skin structure manufacturing system according to any one of claims 1 to 7 to form a biomimetic shark skin structure with an interference microstructure on a substrate. 9. The method for manufacturing a bionic shark skin structure according to claim 8, wherein in the step B: Control the feature size and periodic spacing of the biomimetic shark skin structure by using mask patterns of different sizes and specifications; and/or By controlling the incident angle β and light intensity of each laser beam in the N beams of coherent laser light, the period of the interference microstructure and the growth mode of the bionic shark skin structure are controlled; and/or By controlling the angle θ formed by the substrate and the normal line of the incident N beams of coherent laser light, the growth inclination angle of the biomimetic shark skin structure is controlled; and/or Controlling the growth size of the biomimetic shark skin structure by controlling the incident time of the N beams of coherent laser light; and/or By controlling the energy density of the N beams of coherent laser light, the growth rate of the bionic shark skin structure is controlled.

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