SG11202003747YA - Method for setting conditions for heating semiconductor chip during bonding, method for measuring viscosity of non-conductive film, and bonding device - Google Patents
Method for setting conditions for heating semiconductor chip during bonding, method for measuring viscosity of non-conductive film, and bonding deviceInfo
- Publication number
- SG11202003747YA SG11202003747YA SG11202003747YA SG11202003747YA SG11202003747YA SG 11202003747Y A SG11202003747Y A SG 11202003747YA SG 11202003747Y A SG11202003747Y A SG 11202003747YA SG 11202003747Y A SG11202003747Y A SG 11202003747YA SG 11202003747Y A SG11202003747Y A SG 11202003747YA
- Authority
- SG
- Singapore
- Prior art keywords
- bonding
- semiconductor chip
- conductive film
- setting conditions
- chip during
- Prior art date
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- Wire Bonding (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2017187921 | 2017-09-28 | ||
PCT/JP2018/034203 WO2019065309A1 (ja) | 2017-09-28 | 2018-09-14 | ボンディングの際の半導体チップの加熱条件設定方法及び非導電性フィルムの粘度測定方法ならびにボンディング装置 |
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KR (1) | KR102353013B1 (zh) |
CN (1) | CN111149195A (zh) |
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JP7287647B2 (ja) * | 2019-03-05 | 2023-06-06 | 株式会社新川 | 接合条件評価装置 |
JP7253780B2 (ja) * | 2019-03-11 | 2023-04-07 | 株式会社新川 | 接合材料の化学的特性を抽出する装置 |
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JP2008145273A (ja) | 2006-12-11 | 2008-06-26 | Fujitsu Ltd | 樹脂粘度測定装置及び樹脂粘度測定方法 |
JP6129696B2 (ja) * | 2013-09-11 | 2017-05-17 | デクセリアルズ株式会社 | アンダーフィル材、及びこれを用いた半導体装置の製造方法 |
KR102217826B1 (ko) * | 2013-11-26 | 2021-02-18 | 토레이 엔지니어링 컴퍼니, 리미티드 | 실장 장치 및 실장 방법 |
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JP2014237843A (ja) * | 2014-08-08 | 2014-12-18 | 日立化成株式会社 | フィルム状接着剤およびこれを用いた半導体装置の製造方法 |
WO2016056619A1 (ja) * | 2014-10-10 | 2016-04-14 | ナミックス株式会社 | 熱硬化性樹脂組成物及びその製造方法 |
JP6438340B2 (ja) * | 2015-04-08 | 2018-12-12 | 積水化学工業株式会社 | 半導体接合用接着フィルム及び半導体装置の製造方法 |
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WO2019065309A1 (ja) | 2019-04-04 |
KR102353013B1 (ko) | 2022-01-20 |
JPWO2019065309A1 (ja) | 2020-06-18 |
US20200286854A1 (en) | 2020-09-10 |
US11201132B2 (en) | 2021-12-14 |
TW201922996A (zh) | 2019-06-16 |
JP7008348B2 (ja) | 2022-01-28 |
KR20200059255A (ko) | 2020-05-28 |
TWI705120B (zh) | 2020-09-21 |
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