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SE8502709L - Kapacitiv tryckdetektorkonstruktion och sett att tillverka densamma - Google Patents

Kapacitiv tryckdetektorkonstruktion och sett att tillverka densamma

Info

Publication number
SE8502709L
SE8502709L SE8502709A SE8502709A SE8502709L SE 8502709 L SE8502709 L SE 8502709L SE 8502709 A SE8502709 A SE 8502709A SE 8502709 A SE8502709 A SE 8502709A SE 8502709 L SE8502709 L SE 8502709L
Authority
SE
Sweden
Prior art keywords
substrate
layer
pressure detector
capacitive pressure
way
Prior art date
Application number
SE8502709A
Other languages
English (en)
Swedish (sv)
Other versions
SE8502709D0 (sv
Inventor
A Lehto
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of SE8502709D0 publication Critical patent/SE8502709D0/xx
Publication of SE8502709L publication Critical patent/SE8502709L/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07K—PEPTIDES
    • C07K14/00—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof
    • C07K14/435—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof from animals; from humans
    • C07K14/745—Blood coagulation or fibrinolysis factors
    • C07K14/755—Factors VIII, e.g. factor VIII C (AHF), factor VIII Ag (VWF)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Biophysics (AREA)
  • Medicinal Chemistry (AREA)
  • Zoology (AREA)
  • Gastroenterology & Hepatology (AREA)
  • Hematology (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Toxicology (AREA)
  • Molecular Biology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pens And Brushes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Pressure Sensors (AREA)
SE8502709A 1984-06-07 1985-05-31 Kapacitiv tryckdetektorkonstruktion och sett att tillverka densamma SE8502709L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI842307A FI842307L (fi) 1984-06-07 1984-06-07 Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.

Publications (2)

Publication Number Publication Date
SE8502709D0 SE8502709D0 (sv) 1985-05-31
SE8502709L true SE8502709L (sv) 1985-12-08

Family

ID=8519220

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8502709A SE8502709L (sv) 1984-06-07 1985-05-31 Kapacitiv tryckdetektorkonstruktion och sett att tillverka densamma

Country Status (11)

Country Link
US (1) US4597027A (it)
JP (1) JPS6135323A (it)
BR (1) BR8502717A (it)
DE (1) DE3520064C2 (it)
FI (2) FI842307L (it)
FR (1) FR2565687B1 (it)
GB (1) GB2159957B (it)
IT (1) IT1186893B (it)
NL (1) NL8501639A (it)
NO (1) NO852284L (it)
SE (1) SE8502709L (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI84401C (fi) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion.
FI872049L (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
GB8718639D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Capacitive pressure sensors
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
FI893874A (fi) * 1989-08-17 1991-02-18 Vaisala Oy Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen.
US5479827A (en) * 1994-10-07 1996-01-02 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor isolating electrodes from external environment
JP3319912B2 (ja) * 1995-06-29 2002-09-03 株式会社デンソー 半導体センサ用台座およびその加工方法
JP4480939B2 (ja) † 2001-03-14 2010-06-16 フラウンホファー ゲセルシャフトツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． ガラス系材料からなるフラット基板を構造化する方法
JP2006170893A (ja) * 2004-12-17 2006-06-29 Alps Electric Co Ltd 静電容量型圧力センサ
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
JP4773821B2 (ja) * 2005-12-26 2011-09-14 アルプス電気株式会社 静電容量型圧力センサ及びその製造方法
EP2377809A1 (en) 2010-04-16 2011-10-19 SensoNor Technologies AS Method for Manufacturing a Hermetically Sealed Structure
US9309105B2 (en) 2014-03-06 2016-04-12 Infineon Technologies Ag Sensor structure for sensing pressure waves and ambient pressure

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438592A (en) * 1942-12-08 1948-03-30 Victor S Johnson Electrical condenser
US2868894A (en) * 1955-09-14 1959-01-13 Theodore J Schultz Miniature condenser microphone
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
JPS581551B2 (ja) * 1977-12-20 1983-01-11 株式会社日立製作所 半導体圧力変換器
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
US4360955A (en) * 1978-05-08 1982-11-30 Barry Block Method of making a capacitive force transducer
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
DE2938205A1 (de) * 1979-09-21 1981-04-09 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver druckgeber und auswerteeinrichtung hierfuer
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
JPS57190242A (en) * 1981-05-20 1982-11-22 Hitachi Ltd Pressure sensor
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4424713A (en) * 1982-06-11 1984-01-10 General Signal Corporation Silicon diaphragm capacitive pressure transducer
GB2130435B (en) * 1982-10-27 1986-10-15 Tokyo Shibaura Electric Co Semiconductor strain sensor and method for manufacturing the same

Also Published As

Publication number Publication date
FI871604A0 (fi) 1987-04-13
FI842307L (fi) 1985-12-08
US4597027A (en) 1986-06-24
DE3520064C2 (de) 1996-04-18
FI871604L (fi) 1987-04-13
FR2565687B1 (fr) 1987-03-27
FR2565687A1 (fr) 1985-12-13
JPH0585857B2 (it) 1993-12-09
NO852284L (no) 1985-12-09
DE3520064A1 (de) 1985-12-12
IT8512516A0 (it) 1985-06-05
GB8513788D0 (en) 1985-07-03
GB2159957B (en) 1988-01-20
NL8501639A (nl) 1986-01-02
FI842307A0 (fi) 1984-06-07
JPS6135323A (ja) 1986-02-19
FI77328B (fi) 1988-10-31
SE8502709D0 (sv) 1985-05-31
BR8502717A (pt) 1986-02-12
GB2159957A (en) 1985-12-11
IT1186893B (it) 1987-12-16
FI77328C (fi) 1989-02-10

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