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SE371867B - - Google Patents

Info

Publication number
SE371867B
SE371867B SE7108187A SE818771A SE371867B SE 371867 B SE371867 B SE 371867B SE 7108187 A SE7108187 A SE 7108187A SE 818771 A SE818771 A SE 818771A SE 371867 B SE371867 B SE 371867B
Authority
SE
Sweden
Application number
SE7108187A
Inventor
W Becker
Original Assignee
Pfeiffer A Vakuumtech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer A Vakuumtech Gmbh filed Critical Pfeiffer A Vakuumtech Gmbh
Publication of SE371867B publication Critical patent/SE371867B/xx

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/26Rotors specially for elastic fluids
    • F04D29/32Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324Blades
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/40Casings; Connections of working fluid
    • F04D29/52Casings; Connections of working fluid for axial pumps
    • F04D29/54Fluid-guiding means, e.g. diffusers
    • F04D29/541Specially adapted for elastic fluid pumps
    • F04D29/542Bladed diffusers
    • F04D29/544Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
SE7108187A 1970-07-15 1971-06-23 SE371867B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2035063A DE2035063C3 (de) 1970-07-15 1970-07-15 Laufrad für eine Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
SE371867B true SE371867B (de) 1974-12-02

Family

ID=5776829

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7108187A SE371867B (de) 1970-07-15 1971-06-23

Country Status (10)

Country Link
US (1) US3748055A (de)
JP (1) JPS5224683B1 (de)
BE (1) BE769932A (de)
CA (1) CA950872A (de)
CH (1) CH529927A (de)
DE (1) DE2035063C3 (de)
FR (1) FR2097945A5 (de)
GB (1) GB1308263A (de)
NL (1) NL157387B (de)
SE (1) SE371867B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
GB2226603B (en) * 1988-02-26 1992-07-29 Nikolai Mikhailovich Novikov Turbomolecular vacuum pump
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10203648B4 (de) * 2001-02-10 2016-05-25 Pfeiffer Vacuum Gmbh Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP1249613B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
CN205277504U (zh) * 2014-09-11 2016-06-01 摩尔动力(北京)技术股份有限公司 对转叶轮机构及包括其的装置
WO2016050006A1 (zh) * 2014-09-29 2016-04-07 摩尔动力(北京)技术股份有限公司 压胀一体对转叶轮机构
EP3734078B1 (de) * 2020-03-05 2022-01-12 Pfeiffer Vacuum Technology AG Turbomolekularpumpe und verfahren zur herstellung einer statorscheibe für eine solche

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (de) *
FR519759A (fr) * 1919-12-24 1921-06-15 Anciens Ets Sautter Harle Hélice à aile métallique
US1767786A (en) * 1927-05-06 1930-06-24 William Braat Propeller
US2011672A (en) * 1933-06-07 1935-08-20 Barker Auriol Screw propeller
US2500071A (en) * 1948-03-12 1950-03-07 Edmund E Hans Fan
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes

Also Published As

Publication number Publication date
DE2035063A1 (de) 1972-01-20
JPS5224683B1 (de) 1977-07-02
DE2035063C3 (de) 1974-05-30
US3748055A (en) 1973-07-24
CA950872A (en) 1974-07-09
DE2035063B2 (de) 1973-10-31
NL7109533A (de) 1972-01-18
GB1308263A (en) 1973-02-21
NL157387B (nl) 1978-07-17
CH529927A (de) 1972-10-31
FR2097945A5 (de) 1972-03-03
BE769932A (fr) 1971-11-16

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