CH529927A - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number: CH529927A
Authority: CH; Switzerland
Prior art keywords: molecular pump; turbo molecular; turbo; pump; molecular
Prior art date: 1970-07-15

Application number

CH947471A

Other languages

English (en)

Inventor

Becker Willi Dr H C

Original Assignee

Pfeiffer Vakuumtechnik

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-07-15

Filing date

1971-06-28

Publication date

1972-10-31

1971-06-28 Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik

1972-10-31 Publication of CH529927A publication Critical patent/CH529927A/de

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F04D29/544—Blade shapes

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Geometry (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)
Non-Positive Displacement Air Blowers (AREA)

CH947471A 1970-07-15 1971-06-28 Turbomolekularpumpe CH529927A (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2035063A DE2035063C3 (de)	1970-07-15	1970-07-15	Laufrad für eine Turbomolekularpumpe

Publications (1)

Publication Number	Publication Date
CH529927A true CH529927A (de)	1972-10-31

Family

ID=5776829

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH947471A CH529927A (de)	1970-07-15	1971-06-28	Turbomolekularpumpe

Country Status (10)

Country	Link
US (1)	US3748055A (de)
JP (1)	JPS5224683B1 (de)
BE (1)	BE769932A (de)
CA (1)	CA950872A (de)
CH (1)	CH529927A (de)
DE (1)	DE2035063C3 (de)
FR (1)	FR2097945A5 (de)
GB (1)	GB1308263A (de)
NL (1)	NL157387B (de)
SE (1)	SE371867B (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4645413A (en) *	1983-05-17	1987-02-24	Leybold-Heraeus Gmbh	Friction pump
WO2010052056A1 (de) *	2008-11-07	2010-05-14	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpenrotor

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2229724B2 (de) *	1972-06-19	1980-06-04	Leybold-Heraeus Gmbh, 5000 Koeln	Turbomolekularpumpe
DE2554995A1 (de) *	1975-12-06	1977-06-16	Pfeiffer Vakuumtechnik	Turbomolekularpumpe
DE3507274A1 (de) *	1985-03-01	1986-09-04	Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar	Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
GB2226603B (en) *	1988-02-26	1992-07-29	Nikolai Mikhailovich Novikov	Turbomolecular vacuum pump
IT1238201B (it) *	1989-11-03	1993-07-09	Varian Spa	Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE10052637B4 (de) *	2000-10-24	2021-03-11	Pfeiffer Vacuum Gmbh	16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10203648B4 (de) *	2001-02-10	2016-05-25	Pfeiffer Vacuum Gmbh	Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP1249613B1 (de) *	2001-03-15	2004-01-28	VARIAN S.p.A.	Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
DE102004012713A1 (de) *	2004-03-16	2005-10-06	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
CN205277504U (zh) *	2014-09-11	2016-06-01	摩尔动力(北京)技术股份有限公司	对转叶轮机构及包括其的装置
WO2016050006A1 (zh) *	2014-09-29	2016-04-07	摩尔动力(北京)技术股份有限公司	压胀一体对转叶轮机构
EP3734078B1 (de) *	2020-03-05	2022-01-12	Pfeiffer Vacuum Technology AG	Turbomolekularpumpe und verfahren zur herstellung einer statorscheibe für eine solche

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL281280A (de) *
FR519759A (fr) *	1919-12-24	1921-06-15	Anciens Ets Sautter Harle	Hélice à aile métallique
US1767786A (en) *	1927-05-06	1930-06-24	William Braat	Propeller
US2011672A (en) *	1933-06-07	1935-08-20	Barker Auriol	Screw propeller
US2500071A (en) *	1948-03-12	1950-03-07	Edmund E Hans	Fan
DE1503704C3 (de) *	1966-12-30	1972-03-23	Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar	Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
BE757354A (fr) *	1969-10-27	1971-03-16	Sargent Welch Scientific Co	Pompe turbomoleculaire a stators et rotors perfectionnes

1970
- 1970-07-15 DE DE2035063A patent/DE2035063C3/de not_active Expired
1971
- 1971-06-17 FR FR7121957A patent/FR2097945A5/fr not_active Expired
- 1971-06-23 SE SE7108187A patent/SE371867B/xx unknown
- 1971-06-28 CH CH947471A patent/CH529927A/de not_active IP Right Cessation
- 1971-07-09 NL NL7109533.A patent/NL157387B/xx not_active IP Right Cessation
- 1971-07-12 US US00161662A patent/US3748055A/en not_active Expired - Lifetime
- 1971-07-12 GB GB3257071A patent/GB1308263A/en not_active Expired
- 1971-07-13 JP JP46051503A patent/JPS5224683B1/ja active Pending
- 1971-07-13 CA CA118,A patent/CA950872A/en not_active Expired
- 1971-07-13 BE BE769932A patent/BE769932A/xx unknown

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4645413A (en) *	1983-05-17	1987-02-24	Leybold-Heraeus Gmbh	Friction pump
WO2010052056A1 (de) *	2008-11-07	2010-05-14	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpenrotor
EP2775149A1 (de) *	2008-11-07	2014-09-10	Oerlikon Leybold Vacuum GmbH	Vakuumpumpenrotor

Also Published As

Publication number	Publication date
DE2035063A1 (de)	1972-01-20
JPS5224683B1 (de)	1977-07-02
DE2035063C3 (de)	1974-05-30
US3748055A (en)	1973-07-24
CA950872A (en)	1974-07-09
DE2035063B2 (de)	1973-10-31
NL7109533A (de)	1972-01-18
GB1308263A (en)	1973-02-21
NL157387B (nl)	1978-07-17
SE371867B (de)	1974-12-02
FR2097945A5 (de)	1972-03-03
BE769932A (fr)	1971-11-16

Publication	Publication Date	Title
AT305778B (de)	1973-03-12	Kreiselpumpe
NL168707C (nl)	1982-05-17	Infusiepomp.
AT316721B (de)	1974-07-25	Vakuumpume
AT304695B (de)	1973-01-25	Tauchmotor
NL171374C (nl)	1983-03-16	Centrifugaalpomp met verstelbare spelingen.
AT309991B (de)	1973-09-10	Pumpenaggregat
DK134062B (da)	1976-09-06	Spændebånd.
CH529927A (de)	1972-10-31	Turbomolekularpumpe
AT305776B (de)	1973-03-12	Kreiselpumpe
CH544224A (de)	1973-11-15	Turbomolekularvakuumpumpe
CH482119A (de)	1969-11-30	Turbo-Molekularpumpe
CH543005A (de)	1973-10-15	Schlauchquetschpumpe
NO137792C (no)	1978-04-26	Sentrifugalpumpe.
AT299585B (de)	1972-06-26	Turbo-Molekularpumpe
AT307808B (de)	1973-06-12	Einspritzpumpe
CH525397A (de)	1972-07-15	Zentrifugalkompressor
DE7112177U (de)	1971-07-15	Turbomolekular-vakuumpumpe
CH522825A (fr)	1972-05-15	Motopompe
CH523432A (de)	1972-05-31	Kompressor
ES169467Y (es)	1972-04-16	Ballesta.
FI52622C (fi)	1977-10-10	Keskipakoispumppu
SE388775B (sv)	1976-10-18	Blodpump
CH537528A (de)	1973-05-31	Kreiselpumpe
DD81606A1 (de)	1971-04-20	Staubpumpe
CH527368A (de)	1972-08-31	Vakuumpumpe

Legal Events

Date	Code	Title	Description
1991-08-30	PL	Patent ceased