RU2794157C1 - Rotatable substrate container with a mask for forming thin films of various configurations - Google Patents

Abstract

FIELD: mechanics.

SUBSTANCE: rotary container comprises a flat plate with an alignment column and a mask. The flat plate is connected by a connecting rod to the mask. In said plate, a seat is made in the form of a cell for placing the substrate, inside which a through groove of the window for spraying the substrate is concentrically made. The seat is covered with a locking cap. The mask is a titanium plate of a round shape with four windows and has four alignment columns located at the positions of these windows. The flat plate is configured to move relative to the mask and positioning the seat with the substrate over the given mask window by arranging the flat plate alignment column and the mask alignment column corresponding to the given mask window in one line.

EFFECT: obtaining thin films with a given configuration within one process cycle.

1 cl, 3 dwg

Description

The invention relates to elements of in-chamber devices of vacuum deposition installations and can be used in the deposition of metal and semiconductor films for coating parts and elements used in products of the electronic, instrument-making and optical industries, as well as for obtaining experimental and prototype samples in research activities.

Known substrate holder [US 5,703,493 Dec. 30.1997], suitable for obtaining thin-film coatings on substrates of various sizes and various film configurations.

The disadvantages of this substrate holder is the absence of a device holding the substrate, as well as the impossibility of forming thin films from various materials and obtaining their various configurations in a single technological cycle.

Known movable shutter for the formation of thin films of various configurations obtained by vacuum deposition [RU 2 773 032 C1, publ. May 30, 2022].

The disadvantage of using this damper is the difficulty of providing a vacuum seal when introducing the mechanism for moving the movable damper inside the working (vacuum) chamber, since this requires an input unit of the above mechanism (Not all vacuum chambers have such input units).

The closest technical solution is a removable container with substrate fixation for the substrate holder of the vacuum deposition unit [RU 198976 U1, publ. 03/04/2020], which proposes an insert designed for four substrates, with a substrate fixation system.

The disadvantage of this device is the lack of a "masking" system, i. production of thin films of various configurations in one technological cycle.

The technical result of the claimed invention is the production of thin films with a given configuration in one technological cycle, without unvacuuming the installation, removing the sample and installing the "mask".

The specified technical result is achieved due to the fact that the proposed design of the rotary sample substrate container for the formation of thin films obtained by vacuum deposition inside the working chamber. The turnable container of the substrate with a "mask" for forming thin films of various configurations is a flat plate with a seat designed to accommodate the sample substrate in the form of a cell, inside which there is a concentric through groove of the window for deposition of the sample; at the same time, the seat is covered with a locking cap, which is held by a spring. The swivel container is combined with a “mask” using a connecting rod, which is a titanium plate of a round shape, on which four windows are machined: a window of a longitudinal configuration, a window of a round configuration, a window for the transverse configuration of the film and a window for pretreatment of the sample substrate; movement of the swivel container of the substrate relative to the "mask" and its positioning in a given position is carried out with the help of alignment columns.

The present invention is explained by the drawings:

On FIG. 1 shows a turnable substrate container with a "mask" for forming thin films of various configurations, located in a factory container holder.

On FIG. 2 shows the location of the swivel container inside the working chamber.

On FIG. 3 shows an example of the operation of a rotary container and a manipulator inside the working chamber.

Rotary substrate container with a "mask" for forming thin films of various configurations contains:

1. Turnable substrate container.

2. Seat for sample substrate.

3. Through groove of the window of the substrate swivel container, for spraying the sample.

4. Lid-lock to hold the sample substrate in the cell.

5. Retaining spring for the locking cap.

6. Riveting of fastening of a spring to a cap-clamp.

7. Riveting for fastening the spring to the swivel container.

8. Through hole for movable fastening of the swivel container and "mask".

9. "Mask".

10. Post-aligner of the rotary container.

11. Longitudinal film configuration window.

12. Round film configuration window.

13. Window of transverse film configuration.

14. Window for preliminary processing of the sample substrate (radiation with RF frequencies, etc.).

15. Hole for movable fastening of the "mask" with a swivel substrate container.

16. Four “target” alignment posts.

17. Factory container holder.

18. Connecting rod.

19. Transport holder.

20. Working chamber.

21. Manipulator.

22. An intra-chamber probe equipped with a mechanism for turning around its own axis and an up-down system (elevator).

23. Viewing window of the working chamber.

24. Rotary mechanism of the intra-chamber probe.

25. Four magnetrons with different materials.

Example of a specific implementation

On FIG. 1 shows a turnable substrate container 1, which is a flat plate made of titanium 1.5 mm thick and having a seat 2 for the sample substrate. Seat 2 is a cell with a size of 18.1×18.1 mm and a depth of 1 mm, inside which there is a concentric through groove of window 3 with a size of 16×16 mm for spraying the sample. The seat 2 is covered with a locking cap 4, which in turn is held by a spring 5. The spring 5 of the locking cap 4 is attached to the cap itself with a riveting 6, and to the container with a riveting 7. Also, the swivel container of the substrate has a through hole 8 for connection with the » 9. On the turnable substrate container, there is an alignment post 10 designed to move the turnable substrate container relative to the “mask” 9 and position it in a predetermined position. "Mask" 9, which is a round titanium plate 1.5 mm thick, on which four windows are machined: 11 - window of the longitudinal configuration of the film, 12 - window of the round configuration, 13 - window for the transverse configuration of the film and 14 - window for pre-treatment of the substrate sample (radiation with RF frequencies, etc.). On the "mask" 9 there is a hole 15, designed for connection with the swivel container of the substrate 1. In addition, on the "mask" there are four alignment posts 16, located strictly at the positions of the grooves of windows 11, 12, 13 and 14, for precise positioning of the swivel container. substrate container on the "mask". The factory container holder 17 is included in the vacuum unit kit. The connection of the swivel container of the substrate 1 and the "mask" 9 is carried out using the connecting rod 18. The invention works as follows:

Before starting work from the loading chamber of the "lock" of the vacuum installation Fig. 2. The container holder 17 is removed, then the seat for the sample substrate 2 is vacated by removing the fixing cap 4. The previously prepared substrate is placed in the vacated place, and the fixing cap returns to its original place in the rotary container 1, tightly holding the substrate in the seat. Fig. 1. After that, the rotary container is manually positioned at position 14. If necessary, the positioning accuracy of the rotary container 1 relative to the window 14 should be adjusted. be on the same line Fig. 1 (top view). Then the container holder 17 is placed in the “lock” of the vacuum installation on the transport holder 19 of FIG. 2. The sluice is closed and the vacuum is evacuated. Upon reaching the desired vacuum value, the container holder 17 on the transport holder 19 moves from the "gateway" to the working chamber 20. back, the container holder 17 is removed from the transport holder 19 and placed in the seat of the in-chamber probe 22, equipped with a mechanism for turning around its own axis and an up-down system (elevator). All manipulations inside the working chamber can be observed through viewing windows 23. After the container holder 17 is located on the probe 22, the manipulator 21 and the transport holder 19 return to their original positions. The operating pressure is set in the working chamber, and the process of processing the substrate with RF radiation begins for additional cleaning of the surface and leveling the roughness of the substrate. At the end of the surface treatment of the substrate, the pivoting container of the substrate 1 is moved from position 14 of FIG. 3a to the maximum possible distance FIG. 3b by the manipulator 21 in contact with the leveling post 10, then the manipulator 21 is brought to its original position. By means of a rotary mechanism 24 located outside the working chamber of FIG. 2, the chamber probe 22 rotates 90° about its axis FIG. 3c (the direction of rotation is selected depending on what particular film configuration needs to be obtained at the moment), and then the manipulator 21 aligns the position of the rotary container 1 relative to the selected “mask” window (for example, 11 or 13) by setting the alignment column 10 and column-aligner "mask" 16 in one line Fig. 3y. This will mean that the seat of the sample 2 substrate with the substrate is located exactly above the specified “mask” window. Then the manipulator 21 returns to its original position. After that, the magnetrons 25 of FIG. 2 with selected materials. This algorithm of actions is performed every time when it is necessary to change the configuration of the "sprayed" film.

The proposed swivel substrate container with a "mask" for forming thin films of various configurations makes it possible to reduce financial costs and time for the manufacture of thin films in vacuum installations and their subsequent study.

Claims (1)

A rotary container for forming thin films on a substrate, characterized in that it contains a flat plate with an alignment column and a mask, the flat plate being connected by a connecting rod to the mask, while said plate has a seat in the form of a cell for placing the substrate, inside which a through groove of the window for deposition of the substrate is made concentrically, while the seat is covered with a locking cap, which is held by a spring, and the mask is a titanium plate of a round shape, on which four windows are machined: a window of a longitudinal film configuration, a window of a round film configuration, a window of a transverse configuration film and a window for pre-treatment of the substrate, and has four alignment posts located at the positions of these windows, while the flat plate is movable relative to the mask and positioning the seat with the substrate over a given mask window by positioning the alignment post of the flat plate and the corresponding to the specified mask window of the mask aligner column into one line.

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