RU2012143709A - SYSTEM FOR PRODUCING GEISLER FILMS - Google Patents
SYSTEM FOR PRODUCING GEISLER FILMS Download PDFInfo
- Publication number
- RU2012143709A RU2012143709A RU2012143709/07A RU2012143709A RU2012143709A RU 2012143709 A RU2012143709 A RU 2012143709A RU 2012143709/07 A RU2012143709/07 A RU 2012143709/07A RU 2012143709 A RU2012143709 A RU 2012143709A RU 2012143709 A RU2012143709 A RU 2012143709A
- Authority
- RU
- Russia
- Prior art keywords
- possibility
- target
- targets
- geisler
- producing
- Prior art date
Links
- 230000005855 radiation Effects 0.000 claims abstract 4
- 239000000758 substrate Substances 0.000 claims abstract 4
- 239000002120 nanofilm Substances 0.000 claims abstract 2
- 230000003287 optical effect Effects 0.000 claims abstract 2
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- Physical Vapour Deposition (AREA)
Abstract
Система для получения нанопленок Гейслера, содержащая загрузочную камеру, камеру роста, магнитный шток для подачи в нее через сверхвысоковаккумный шибер подложек и мишеней, закрепленных в системах крепления подложек и мишеней соответственно, а также Nd:YAG лазер, установленный с возможностью подачи излучения на мишень через оптический тракт, отличающийся тем, что в состав системы включен, по крайней мере, еще один Nd:YAG лазер, установленный с возможностью подачи излучения на другие мишени, а также управляемые зеркала, выполненные с возможностью быстрого изменения положения лучей лазеров на мишенях.A system for producing Geisler nanofilms, containing a loading chamber, a growth chamber, a magnetic rod for feeding substrates and targets into it through an ultrahigh-vacuum gate mounted in substrate and target attachment systems, respectively, as well as an Nd: YAG laser installed with the possibility of supplying radiation to the target through optical path, characterized in that the system includes at least one more Nd: YAG laser, mounted with the possibility of supplying radiation to other targets, as well as controlled mirrors made with the possibility of Strongly rapid changes in position of the laser beam on the target.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2012143709/07A RU2531516C2 (en) | 2012-10-12 | 2012-10-12 | System for production of nanofilms of heusler alloys |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2012143709/07A RU2531516C2 (en) | 2012-10-12 | 2012-10-12 | System for production of nanofilms of heusler alloys |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2012143709A true RU2012143709A (en) | 2014-04-20 |
| RU2531516C2 RU2531516C2 (en) | 2014-10-20 |
Family
ID=50480527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2012143709/07A RU2531516C2 (en) | 2012-10-12 | 2012-10-12 | System for production of nanofilms of heusler alloys |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2531516C2 (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL119719A0 (en) * | 1996-11-29 | 1997-02-18 | Yeda Res & Dev | Inorganic fullerene-like structures of metal chalcogenides |
| WO2006068325A2 (en) * | 2004-12-24 | 2006-06-29 | Showa Denko K. K. | Production method of thermoelectric semiconductor alloy, thermoelectric conversion module and thermoelectric power generating device |
| RU2382440C1 (en) * | 2008-11-01 | 2010-02-20 | Государственное образовательное учреждение высшего профессионального образования "Омский государственный университет им. Ф.М. Достоевского" | METHOD OF MAKING MULTILAYER SUPERCONDUCTING yBaCuO NANOFILMS ON SUBSTRATE |
| RU2428505C2 (en) * | 2009-10-12 | 2011-09-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский ядерный университет "МИФИ" (НИЯУ МИФИ) | PROCEDURE FOR PRODUCTION OF THIN FILMS ON BASE OF EuS |
-
2012
- 2012-10-12 RU RU2012143709/07A patent/RU2531516C2/en active IP Right Revival
Also Published As
| Publication number | Publication date |
|---|---|
| RU2531516C2 (en) | 2014-10-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20181013 |
|
| NF4A | Reinstatement of patent |
Effective date: 20190705 |