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PH12022050006A1 - System for changing reels and its method thereof - Google Patents

System for changing reels and its method thereof

Info

Publication number
PH12022050006A1
PH12022050006A1 PH1/2022/050006A PH12022050006A PH12022050006A1 PH 12022050006 A1 PH12022050006 A1 PH 12022050006A1 PH 12022050006 A PH12022050006 A PH 12022050006A PH 12022050006 A1 PH12022050006 A1 PH 12022050006A1
Authority
PH
Philippines
Prior art keywords
changing reels
present
reels
changing
semiconductor manufacturing
Prior art date
Application number
PH1/2022/050006A
Inventor
Liaghat Alireza Arash
Guan Yan Lai
Li Jie Yew
Original Assignee
Mi Equipment M Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mi Equipment M Sdn Bhd filed Critical Mi Equipment M Sdn Bhd
Publication of PH12022050006A1 publication Critical patent/PH12022050006A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Replacement Of Web Rolls (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Embodiments of the present invention herein generally relate to a workpiece handling and transport control in semiconductor manufacturing line. More particularly, the present invention relates to a system (1) for changing reels and its method (100) thereof.
PH1/2022/050006A 2021-10-21 2022-01-05 System for changing reels and its method thereof PH12022050006A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2021006293 2021-10-21

Publications (1)

Publication Number Publication Date
PH12022050006A1 true PH12022050006A1 (en) 2023-05-08

Family

ID=86143077

Family Applications (1)

Application Number Title Priority Date Filing Date
PH1/2022/050006A PH12022050006A1 (en) 2021-10-21 2022-01-05 System for changing reels and its method thereof

Country Status (3)

Country Link
KR (1) KR102724454B1 (en)
PH (1) PH12022050006A1 (en)
TW (1) TWI792809B (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4141674B2 (en) * 2001-10-22 2008-08-27 セイコーエプソン株式会社 Droplet discharge head, wiping method thereof, and electronic apparatus equipped with the same
KR100413638B1 (en) * 2001-10-29 2004-01-03 주식회사 씨어테크 An auto exchanging method and device of an wind reel for semiconductor carrier tape
JP5628099B2 (en) * 2011-06-13 2014-11-19 株式会社 東京ウエルズ Carrier tape take-up and storage device and carrier tape take-up and storage method
JP6195784B2 (en) * 2013-11-22 2017-09-13 株式会社 東京ウエルズ Carrier tape take-up and storage device and carrier tape take-up and storage method
KR101886163B1 (en) * 2016-09-02 2018-08-07 (주)제이티 Device handler, and carrier tape winding device therefor
WO2019177542A1 (en) * 2018-03-15 2019-09-19 Grand Team Technologies Limited Automatic output reel changer
MY194779A (en) * 2018-04-10 2022-12-15 Mi Equipment M Sdn Bhd System and method of replacing reel
KR102238802B1 (en) * 2019-08-26 2021-04-12 (주) 인텍플러스 Automatic change system for reel
KR102323063B1 (en) * 2019-09-06 2021-11-05 시너스텍 주식회사 Apparatus for packing of roll

Also Published As

Publication number Publication date
TWI792809B (en) 2023-02-11
KR102724454B1 (en) 2024-10-30
TW202318532A (en) 2023-05-01
KR20230057244A (en) 2023-04-28

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