NO20006306L - Mikromekanisk rotasjonshastighetsensor - Google Patents

Mikromekanisk rotasjonshastighetsensor

Info

Publication number: NO20006306L
Authority: NO; Norway
Prior art keywords: rotation speed; speed sensor; micromechanical rotation; micromechanical; sensor
Prior art date: 1998-06-25

Application number

NO20006306A

Other languages

English (en)

Other versions

NO20006306D0 (no

Inventor

Uwe Breng

Martin Hafen

Eberhard Handrich

Bruno Ryrko

Original Assignee

Litef Gmbh

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-06-25

Filing date

2000-12-12

Publication date

2001-02-23

2000-12-12 Application filed by Litef Gmbh filed Critical Litef Gmbh

2000-12-12 Publication of NO20006306D0 publication Critical patent/NO20006306D0/no

2001-02-23 Publication of NO20006306L publication Critical patent/NO20006306L/no

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Gyroscopes (AREA)

NO20006306A 1998-06-25 2000-12-12 Mikromekanisk rotasjonshastighetsensor NO20006306L (no)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19828424A DE19828424C1 (de)	1998-06-25	1998-06-25	Mikromechanischer Drehratensensor
PCT/EP1999/002389 WO1999067597A1 (de)	1998-06-25	1999-04-08	Mikromechanischer drehratensensor

Publications (2)

Publication Number	Publication Date
NO20006306D0 NO20006306D0 (no)	2000-12-12
NO20006306L true NO20006306L (no)	2001-02-23

Family

ID=7872051

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NO20006306A NO20006306L (no)	1998-06-25	2000-12-12	Mikromekanisk rotasjonshastighetsensor

Country Status (6)

Country	Link
US (1)	US6490923B1 (no)
EP (1)	EP1090271B1 (no)
JP (1)	JP2002519625A (no)
DE (1)	DE19828424C1 (no)
NO (1)	NO20006306L (no)
WO (1)	WO1999067597A1 (no)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6831765B2 (en) *	2001-02-22	2004-12-14	Canon Kabushiki Kaisha	Tiltable-body apparatus, and method of fabricating the same
JP5159062B2 (ja) *	2006-08-09	2013-03-06	キヤノン株式会社	角速度センサ
CN100439864C (zh) *	2007-06-01	2008-12-03	北京沃尔康科技有限责任公司	一种新型硅微机械陀螺
CN102510995B (zh) *	2010-06-16	2015-03-04	丰田自动车株式会社	复合传感器
DE102011057032B4 (de) *	2011-12-23	2019-09-19	Hanking Electronics, Ltd.	Mikro-Gyroskop und Verfahren zum Betreiben eines Mikro-Gyroskops
WO2013112156A1 (en) *	2012-01-26	2013-08-01	Hewlett-Packard Development Company, L.P.	Micro-scale pendulum
EP3019442A4 (en)	2013-07-08	2017-01-25	Motion Engine Inc.	Mems device and method of manufacturing
WO2015042700A1 (en)	2013-09-24	2015-04-02	Motion Engine Inc.	Mems components and method of wafer-level manufacturing thereof
EP3028007A4 (en)	2013-08-02	2017-07-12	Motion Engine Inc.	Mems motion sensor and method of manufacturing
JP6590812B2 (ja)	2014-01-09	2019-10-16	モーション・エンジン・インコーポレーテッド	集積ｍｅｍｓシステム
US20170030788A1 (en)	2014-04-10	2017-02-02	Motion Engine Inc.	Mems pressure sensor
US11674803B2 (en)	2014-06-02	2023-06-13	Motion Engine, Inc.	Multi-mass MEMS motion sensor
CA3004760A1 (en)	2014-12-09	2016-06-16	Motion Engine Inc.	3d mems magnetometer and associated methods
US10407299B2 (en)	2015-01-15	2019-09-10	Motion Engine Inc.	3D MEMS device with hermetic cavity

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2886431B2 (ja) *	1993-10-27	1999-04-26	住友精密工業株式会社	振動ジャイロセンサー
DE19503623B4 (de) *	1995-02-03	2008-01-10	Robert Bosch Gmbh	Drehratensensor
JP3061864B2 (ja) *	1995-05-31	2000-07-10	リテフゲゼルシャフトミットベシュレンクテルハフツング	マイクロメカニカル回転速度センサ
DE19635923C1 (de) *	1996-09-04	1998-02-26	Litef Gmbh	Verfahren zur Antriebsanregung von Schwingern zur kapazitiven Messung von Kraft, Beschleunigung und/oder Drehraten
DE19831594C1 (de) *	1998-07-14	2000-01-27	Litef Gmbh	Mikromechanischer Drehratensensor mit Koppelstruktur

1998
- 1998-06-25 DE DE19828424A patent/DE19828424C1/de not_active Expired - Fee Related
1999
- 1999-04-08 US US09/719,698 patent/US6490923B1/en not_active Expired - Fee Related
- 1999-04-08 WO PCT/EP1999/002389 patent/WO1999067597A1/de active IP Right Grant
- 1999-04-08 JP JP2000556209A patent/JP2002519625A/ja active Pending
- 1999-04-08 EP EP99920612A patent/EP1090271B1/de not_active Expired - Lifetime
2000
- 2000-12-12 NO NO20006306A patent/NO20006306L/no not_active Application Discontinuation

Also Published As

Publication number	Publication date
EP1090271B1 (de)	2004-07-28
NO20006306D0 (no)	2000-12-12
US6490923B1 (en)	2002-12-10
DE19828424C1 (de)	1999-12-02
EP1090271A1 (de)	2001-04-11
JP2002519625A (ja)	2002-07-02
WO1999067597A1 (de)	1999-12-29

Publication	Publication Date	Title
DE69927346D1 (de)	2006-02-02	Drehsensor
DE69634571D1 (de)	2005-05-12	Drehgeschwindigkeitssensor
DE69628981D1 (de)	2003-08-14	Drehgeschwindigkeitssensor
DE69622815D1 (de)	2002-09-12	Drehgeschwindigkeitssensor
DE69934169D1 (de)	2007-01-11	Drehgeschwindigkeitssensor
DE69904551D1 (de)	2003-01-30	Drehgeschwindigkeitssensorvorrichtung
DE59913600D1 (de)	2006-08-03	Drehungssensor
DE69932225D1 (de)	2006-08-17	Winkelgeschwindigkeitssensor
DE59704257D1 (de)	2001-09-13	Mikromechanischer sensor
DE69915919D1 (de)	2004-05-06	Drehgeschwindigkeitssensor
DE69938221D1 (de)	2008-04-10	Positionssensor
DE69727756D1 (de)	2004-04-01	Drehgeschwindigkeitssensor
DE69726631D1 (de)	2004-01-22	Winkelgeschwindigkeitsaufnehmer
DE69503297D1 (de)	1998-08-13	Drehgeschwindigkeitssensorvorrichtung
BR9801582A (pt)	1999-06-15	Sensor de velocidade angular
DE69934776D1 (de)	2007-02-22	Positionssensor
DE69807777D1 (de)	2002-10-17	Reibrollen-Getriebe
DE69633909D1 (de)	2004-12-30	Drehgeschwindigkeitssensor
DE59814029D1 (de)	2007-07-26	Beschleunigungssensor
DE69712121D1 (de)	2002-05-29	Drehgeschwindigkeitssensor
DE60028153D1 (de)	2006-06-29	Drehwinkelsensor
DE59505604D1 (de)	1999-05-12	Drehratensensor
NO20006306L (no)	2001-02-23	Mikromekanisk rotasjonshastighetsensor
DE60042358D1 (de)	2009-07-23	Magnetischer Rotationssensor
DE19983808T1 (de)	2002-01-10	Differenz-VGMR-Sensor

Legal Events

Date	Code	Title	Description
2006-11-27	FC2A	Withdrawal, rejection or dismissal of laid open patent application