NO116565B - - Google Patents
Download PDFInfo
- Publication number
- NO116565B NO116565B NO16044965A NO16044965A NO116565B NO 116565 B NO116565 B NO 116565B NO 16044965 A NO16044965 A NO 16044965A NO 16044965 A NO16044965 A NO 16044965A NO 116565 B NO116565 B NO 116565B
- Authority
- NO
- Norway
- Prior art keywords
- metal
- silicide
- carbon
- layer
- tungsten
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 claims description 48
- 239000002184 metal Substances 0.000 claims description 48
- 229910021332 silicide Inorganic materials 0.000 claims description 24
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 19
- 239000010410 layer Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 11
- 229910052758 niobium Inorganic materials 0.000 claims description 11
- 239000010955 niobium Substances 0.000 claims description 11
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 11
- 229910052715 tantalum Inorganic materials 0.000 claims description 11
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 11
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 11
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- 239000010937 tungsten Substances 0.000 claims description 11
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 10
- 229910052750 molybdenum Inorganic materials 0.000 claims description 10
- 239000011733 molybdenum Substances 0.000 claims description 10
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 8
- 229910052726 zirconium Inorganic materials 0.000 claims description 8
- 229910052735 hafnium Inorganic materials 0.000 claims description 7
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 7
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 5
- 229910052776 Thorium Inorganic materials 0.000 claims description 5
- 239000003575 carbonaceous material Substances 0.000 claims description 4
- 239000002344 surface layer Substances 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 claims 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 claims 1
- -1 thdrium Chemical compound 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 25
- 229910052799 carbon Inorganic materials 0.000 description 24
- 150000002739 metals Chemical class 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 230000008020 evaporation Effects 0.000 description 9
- 239000011888 foil Substances 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- JUZTWRXHHZRLED-UHFFFAOYSA-N [Si].[Cu].[Cu].[Cu].[Cu].[Cu] Chemical compound [Si].[Cu].[Cu].[Cu].[Cu].[Cu] JUZTWRXHHZRLED-UHFFFAOYSA-N 0.000 description 4
- 229910021360 copper silicide Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 2
- 229910021342 tungsten silicide Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011872 intimate mixture Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE1432364 | 1964-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO116565B true NO116565B (fi) | 1969-04-14 |
Family
ID=20298902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO16044965A NO116565B (fi) | 1964-11-27 | 1965-11-12 |
Country Status (3)
| Country | Link |
|---|---|
| DK (1) | DK123321B (fi) |
| FI (1) | FI51739C (fi) |
| NO (1) | NO116565B (fi) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4061015A (en) * | 1976-07-06 | 1977-12-06 | Weaver Engineering & Mfg. Co. | Pipe pressure testing device |
| US4086806A (en) * | 1977-01-28 | 1978-05-02 | The Presray Corporation | Seal and actuator for pipe testing |
-
1965
- 1965-11-11 DK DK580065A patent/DK123321B/da unknown
- 1965-11-12 NO NO16044965A patent/NO116565B/no unknown
- 1965-11-19 FI FI278265A patent/FI51739C/fi active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4061015A (en) * | 1976-07-06 | 1977-12-06 | Weaver Engineering & Mfg. Co. | Pipe pressure testing device |
| US4086806A (en) * | 1977-01-28 | 1978-05-02 | The Presray Corporation | Seal and actuator for pipe testing |
Also Published As
| Publication number | Publication date |
|---|---|
| DK123321B (da) | 1972-06-05 |
| FI51739C (fi) | 1977-03-10 |
| FI51739B (fi) | 1976-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2772318A (en) | Apparatus for vaporization of metals and metalloids | |
| US2432657A (en) | Process of evaporating metals | |
| US2866724A (en) | Coated evaporating elements and method of utilizing same | |
| NO153608B (no) | Fremgangsmaate ved ethoxylering av alkanoler i naervaer av katalysatorer inneholdende strontiumoxyder og -hydroxyder. | |
| US2413606A (en) | Method of coating by evaporating metals | |
| US2413604A (en) | Method or process of evaporating metals | |
| US2143723A (en) | Method and apparatus for applying metal coatings | |
| US3186880A (en) | Method of producing unsupported epitaxial films of germanium by evaporating the substrate | |
| US3063865A (en) | Process of treating a boron nitride crucible with molten aluminum | |
| WO1990012485A2 (en) | Multiple source evaporation for alloy production | |
| US3554739A (en) | Alloys and processes for their manufacture | |
| EP1483425A1 (en) | Method and device for coating a substrate | |
| NO116565B (fi) | ||
| US2450856A (en) | Method of coating by evaporating metals | |
| US2450850A (en) | Method of coating by evaporating metals | |
| US4214015A (en) | Method of coating metal substrates with alloys at elevated substrate temperatures | |
| US2866725A (en) | Coated evaporating elements and method of utilizing same | |
| US3265528A (en) | Method of forming metal carbide coating on carbon base | |
| US2450851A (en) | Method of coating by evaporating metals | |
| US3637421A (en) | Vacuum vapor coating with metals of high vapor pressure | |
| US3029777A (en) | Vapor deposition coating apparatus | |
| US2778485A (en) | Vacuum tube getter body material | |
| US2731366A (en) | Method of vapor depositing coatings of aluminum | |
| GB1103211A (en) | Improvements in and relating to vapour deposition and evaporation sources | |
| US2731365A (en) | Method of vapor depositing coatings of aluminum |