NL7810167A - METHOD AND DEVICE FOR MAKING ELECTRICAL CONNECTIONS BETWEEN A CONDUCTIVE SECTION. - Google Patents
METHOD AND DEVICE FOR MAKING ELECTRICAL CONNECTIONS BETWEEN A CONDUCTIVE SECTION.Info
- Publication number
- NL7810167A NL7810167A NL7810167A NL7810167A NL7810167A NL 7810167 A NL7810167 A NL 7810167A NL 7810167 A NL7810167 A NL 7810167A NL 7810167 A NL7810167 A NL 7810167A NL 7810167 A NL7810167 A NL 7810167A
- Authority
- NL
- Netherlands
- Prior art keywords
- electrical connections
- making electrical
- conductive section
- conductive
- section
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0277—Electrolithographic processes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US84067477A | 1977-10-11 | 1977-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7810167A true NL7810167A (en) | 1979-04-17 |
Family
ID=25282934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7810167A NL7810167A (en) | 1977-10-11 | 1978-10-10 | METHOD AND DEVICE FOR MAKING ELECTRICAL CONNECTIONS BETWEEN A CONDUCTIVE SECTION. |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5464477A (en) |
| CA (1) | CA1118535A (en) |
| DE (1) | DE2843310C2 (en) |
| FR (1) | FR2406304A1 (en) |
| GB (1) | GB1604004A (en) |
| NL (1) | NL7810167A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55162004A (en) * | 1979-06-06 | 1980-12-17 | Toshiba Corp | Electric charge corpuscular ray irradiation unit |
| US4323638A (en) * | 1980-08-18 | 1982-04-06 | Bell Telephone Laboratories, Incorporated | Reducing charging effects in charged-particle-beam lithography |
| JPS5744543U (en) * | 1980-08-27 | 1982-03-11 | ||
| US7038204B2 (en) | 2004-05-26 | 2006-05-02 | International Business Machines Corporation | Method for reducing proximity effects in electron beam lithography |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3390012A (en) * | 1964-05-14 | 1968-06-25 | Texas Instruments Inc | Method of making dielectric bodies having conducting portions |
| DE1800212A1 (en) * | 1968-10-01 | 1970-05-06 | Telefunken Patent | Method for manufacturing a semiconductor device |
| DE1800193A1 (en) * | 1968-10-01 | 1970-05-14 | Telefunken Patent | Method of making contacts |
| US3710101A (en) * | 1970-10-06 | 1973-01-09 | Westinghouse Electric Corp | Apparatus and method for alignment of members to electron beams |
| JPS5183788A (en) * | 1974-12-12 | 1976-07-22 | Du Pont | Daioodo oyobi kanrendodenrookeiseisurukozotai |
-
1978
- 1978-05-30 GB GB2439178A patent/GB1604004A/en not_active Expired
- 1978-09-26 CA CA000312138A patent/CA1118535A/en not_active Expired
- 1978-10-04 DE DE19782843310 patent/DE2843310C2/en not_active Expired
- 1978-10-10 NL NL7810167A patent/NL7810167A/en not_active Application Discontinuation
- 1978-10-11 FR FR7829057A patent/FR2406304A1/en active Granted
- 1978-10-11 JP JP12423678A patent/JPS5464477A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2843310A1 (en) | 1979-04-19 |
| CA1118535A (en) | 1982-02-16 |
| FR2406304A1 (en) | 1979-05-11 |
| DE2843310C2 (en) | 1983-06-01 |
| FR2406304B1 (en) | 1983-01-07 |
| JPS6129534B2 (en) | 1986-07-07 |
| GB1604004A (en) | 1981-12-02 |
| JPS5464477A (en) | 1979-05-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A1A | A request for search or an international-type search has been filed | ||
| BB | A search report has been drawn up | ||
| BC | A request for examination has been filed | ||
| A85 | Still pending on 85-01-01 | ||
| BV | The patent application has lapsed |