NL7706304A - Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand. - Google Patents

Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand.

Info

Publication number: NL7706304A
Authority: NL; Netherlands
Prior art keywords: lalge; brace; point distance; magnetic lens; force released
Prior art date: 1976-06-15

Application number

NL7706304A

Other languages

English (en)

Original Assignee

Siemens Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-06-15

Filing date

1977-06-08

Publication date

1977-12-19

1977-06-08 Application filed by Siemens Ag filed Critical Siemens Ag

1977-12-19 Publication of NL7706304A publication Critical patent/NL7706304A/nl

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses

Landscapes

Physics & Mathematics (AREA)
Electromagnetism (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)
Coils Or Transformers For Communication (AREA)

NL7706304A 1976-06-15 1977-06-08 Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand. NL7706304A (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19762627176 DE2627176B2 (de)	1976-06-15	1976-06-15	Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse

Publications (1)

Publication Number	Publication Date
NL7706304A true NL7706304A (nl)	1977-12-19

Family

ID=5980761

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7706304A NL7706304A (nl)	1976-06-15	1977-06-08	Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand.

Country Status (5)

Country	Link
JP (1)	JPS52153662A (nl)
DE (1)	DE2627176B2 (nl)
FR (1)	FR2355374A1 (nl)
GB (1)	GB1584005A (nl)
NL (1)	NL7706304A (nl)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2752598C3 (de) *	1977-11-25	1981-10-15	Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel	Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
JPS5678051A (en) *	1979-11-30	1981-06-26	Jeol Ltd	Electron beam device
US4345152A (en) *	1980-08-11	1982-08-17	The Perkin-Elmer Corporation	Magnetic lens
GB2192092A (en) *	1986-06-25	1987-12-31	Philips Electronic Associated	Magnetic lens system
GB2334372A (en) *	1998-02-11	1999-08-18	Nikon Corp	System for directing a charged particle beam, e.g. for electron beam projection
DE102004019835B4 (de) *	2004-04-23	2007-08-02	Vistec Electron Beam Gmbh	Beleuchtungskondensor für ein Partikeloptik-Projektionssystem
CN103811251A (zh) *	2012-11-08	2014-05-21	北京中科信电子装备有限公司	一种离子注入系统中束流均匀性调节装置

1976
- 1976-06-15 DE DE19762627176 patent/DE2627176B2/de active Granted
1977
- 1977-04-27 FR FR7712711A patent/FR2355374A1/fr active Granted
- 1977-06-08 NL NL7706304A patent/NL7706304A/nl not_active Application Discontinuation
- 1977-06-15 JP JP7095177A patent/JPS52153662A/ja active Pending
- 1977-06-15 GB GB2493477A patent/GB1584005A/en not_active Expired

Also Published As

Publication number	Publication date
JPS52153662A (en)	1977-12-20
FR2355374B1 (nl)	1980-09-12
GB1584005A (en)	1981-02-04
DE2627176B2 (de)	1978-09-14
DE2627176A1 (de)	1977-12-22
DE2627176C3 (nl)	1979-05-17
FR2355374A1 (fr)	1978-01-13

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Legal Events

Date	Code	Title	Description
1984-02-01	BV	The patent application has lapsed