[go: up one dir, main page]

NL7706304A - MAGNETIC LENS WITH LALGE BRACE-POINT DISTANCE FORCE RELEASED. - Google Patents

MAGNETIC LENS WITH LALGE BRACE-POINT DISTANCE FORCE RELEASED.

Info

Publication number
NL7706304A
NL7706304A NL7706304A NL7706304A NL7706304A NL 7706304 A NL7706304 A NL 7706304A NL 7706304 A NL7706304 A NL 7706304A NL 7706304 A NL7706304 A NL 7706304A NL 7706304 A NL7706304 A NL 7706304A
Authority
NL
Netherlands
Prior art keywords
lalge
brace
point distance
magnetic lens
force released
Prior art date
Application number
NL7706304A
Other languages
Dutch (nl)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7706304A publication Critical patent/NL7706304A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Coils Or Transformers For Communication (AREA)
NL7706304A 1976-06-15 1977-06-08 MAGNETIC LENS WITH LALGE BRACE-POINT DISTANCE FORCE RELEASED. NL7706304A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762627176 DE2627176B2 (en) 1976-06-15 1976-06-15 Electron beam optical projection device with a long focal length magnetic lens

Publications (1)

Publication Number Publication Date
NL7706304A true NL7706304A (en) 1977-12-19

Family

ID=5980761

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7706304A NL7706304A (en) 1976-06-15 1977-06-08 MAGNETIC LENS WITH LALGE BRACE-POINT DISTANCE FORCE RELEASED.

Country Status (5)

Country Link
JP (1) JPS52153662A (en)
DE (1) DE2627176B2 (en)
FR (1) FR2355374A1 (en)
GB (1) GB1584005A (en)
NL (1) NL7706304A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2752598C3 (en) * 1977-11-25 1981-10-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Method for operating an electromagnetic focusing electron-optical lens arrangement and lens arrangement therefor
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
GB2334372A (en) * 1998-02-11 1999-08-18 Nikon Corp System for directing a charged particle beam, e.g. for electron beam projection
DE102004019835B4 (en) * 2004-04-23 2007-08-02 Vistec Electron Beam Gmbh Illumination condenser for a particle-optical projection system
CN103811251A (en) * 2012-11-08 2014-05-21 北京中科信电子装备有限公司 Beam uniformity adjusting device in ion implantation system

Also Published As

Publication number Publication date
JPS52153662A (en) 1977-12-20
FR2355374B1 (en) 1980-09-12
GB1584005A (en) 1981-02-04
DE2627176B2 (en) 1978-09-14
DE2627176A1 (en) 1977-12-22
DE2627176C3 (en) 1979-05-17
FR2355374A1 (en) 1978-01-13

Similar Documents

Publication Publication Date Title
NL7604044A (en) VEHICLE.
BE855346A (en) BRAKE MECHANISM
NL7605534A (en) STRUCTURES WITH AN OPEN POROUSNESS.
NL173928C (en) VICE.
ES222012Y (en) MINIATURE VEHICLE.
NL7712584A (en) APERTURE.
NL7810340A (en) TOY VEHICLE.
NL7705796A (en) BRAKE DEVICE.
NL190563C (en) Vehicle brake.
NL7706304A (en) MAGNETIC LENS WITH LALGE BRACE-POINT DISTANCE FORCE RELEASED.
ES227043Y (en) TOY MECHANISM.
NL7705207A (en) DEVICE WITH PARTICLE OPTIC.
NL7613667A (en) FRICTIE BRAKE DEVICE.
PL202569A1 (en) BRAKE
ES226016Y (en) TOY DRAWING MUNECA.
DK134328B (en) Friction friction.
NL7701918A (en) VEHICLE BRAKE DEVICE.
NL7611246A (en) VEHICLE.
NL7606107A (en) BRAKE ASSEMBLY.
NL7604567A (en) EG.
NL7706085A (en) NEUTRALIZER.
ES220791Y (en) TOY VEHICLE.
PL202672A1 (en) BRAKE
NL7702045A (en) GUIDELINES.
ES223950Y (en) TOY VEHICLE.

Legal Events

Date Code Title Description
BV The patent application has lapsed