NL6414696A - - Google Patents
Info
- Publication number
- NL6414696A NL6414696A NL6414696A NL6414696A NL6414696A NL 6414696 A NL6414696 A NL 6414696A NL 6414696 A NL6414696 A NL 6414696A NL 6414696 A NL6414696 A NL 6414696A NL 6414696 A NL6414696 A NL 6414696A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US332587A US3244857A (en) | 1963-12-23 | 1963-12-23 | Vapor deposition source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6414696A true NL6414696A (xx) | 1965-06-24 |
Family
ID=23298897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6414696A NL6414696A (xx) | 1963-12-23 | 1964-12-17 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3244857A (xx) |
| DE (1) | DE1298381B (xx) |
| FR (1) | FR1436585A (xx) |
| GB (1) | GB1021776A (xx) |
| NL (1) | NL6414696A (xx) |
| SE (1) | SE304893B (xx) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3344768A (en) * | 1965-08-30 | 1967-10-03 | Burroughs Corp | Powder evaporation apparatus |
| US3450097A (en) * | 1965-09-10 | 1969-06-17 | Us Army | Vapor deposition apparatus |
| US3466424A (en) * | 1967-08-31 | 1969-09-09 | Nasa | Evaporant source for vapor deposition |
| US3538305A (en) * | 1969-05-16 | 1970-11-03 | Us Navy | Alloy deterring shunt for conical tungsten evaporation sources |
| US4002880A (en) * | 1975-08-13 | 1977-01-11 | Gte Sylvania Incorporated | Evaporation source |
| GB2176337B (en) * | 1985-06-04 | 1990-02-14 | English Electric Valve Co Ltd | Metal vapour laser apparatus |
| DE3530106A1 (de) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen |
| DE4439519C1 (de) * | 1994-11-04 | 1996-04-25 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zum Vakuumbedampfen von Folien |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE882173C (de) * | 1941-08-24 | 1953-07-06 | Siemens Ag | Einrichtung zur Herstellung duenner UEberzugsschichten aus verdampften Stoffen durchKondensation |
| NL184420B (nl) * | 1953-01-26 | Farber Sidney Cancer Inst | N-trifluoracetyladriamycinederivaten en werkwijze voor het bereiden van een farmaceutisch preparaat die ze bevatten. | |
| DE961772C (de) * | 1955-08-06 | 1957-04-11 | Vacuumtechnik A G | Verfahren und Anordnung zum Verdampfen von auf Traegermaterial wie Papierbahnen aufzubringenden Metallen, insbesondere Aluminium im Hochvakuum |
| US2998376A (en) * | 1956-10-29 | 1961-08-29 | Temescal Metallurgical Corp | High-vacuum evaporator |
| NL253747A (xx) * | 1959-07-13 | |||
| US3153137A (en) * | 1961-10-13 | 1964-10-13 | Union Carbide Corp | Evaporation source |
| US3129315A (en) * | 1961-12-26 | 1964-04-14 | Lear Siegler Inc | Vacuum vaporizing fixture |
-
1963
- 1963-12-23 US US332587A patent/US3244857A/en not_active Expired - Lifetime
-
1964
- 1964-12-16 SE SE15203/64A patent/SE304893B/xx unknown
- 1964-12-17 NL NL6414696A patent/NL6414696A/xx unknown
- 1964-12-17 GB GB51326/64A patent/GB1021776A/en not_active Expired
- 1964-12-18 DE DEI27154A patent/DE1298381B/de active Pending
- 1964-12-23 FR FR999733A patent/FR1436585A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE304893B (xx) | 1968-10-07 |
| US3244857A (en) | 1966-04-05 |
| DE1298381B (de) | 1969-06-26 |
| FR1436585A (fr) | 1966-04-29 |
| GB1021776A (xx) | 1966-03-09 |