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NL153718B - DEVICE FOR ANALYZING THE ENERGY OF AN ELECTRON BEAM. - Google Patents

DEVICE FOR ANALYZING THE ENERGY OF AN ELECTRON BEAM.

Info

Publication number
NL153718B
NL153718B NL686804435A NL6804435A NL153718B NL 153718 B NL153718 B NL 153718B NL 686804435 A NL686804435 A NL 686804435A NL 6804435 A NL6804435 A NL 6804435A NL 153718 B NL153718 B NL 153718B
Authority
NL
Netherlands
Prior art keywords
analyzing
energy
electron beam
electron
Prior art date
Application number
NL686804435A
Other languages
Dutch (nl)
Other versions
NL6804435A (en
Original Assignee
Takeo Ichinokawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takeo Ichinokawa filed Critical Takeo Ichinokawa
Publication of NL6804435A publication Critical patent/NL6804435A/xx
Publication of NL153718B publication Critical patent/NL153718B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
NL686804435A 1967-03-30 1968-03-29 DEVICE FOR ANALYZING THE ENERGY OF AN ELECTRON BEAM. NL153718B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1953467 1967-03-30

Publications (2)

Publication Number Publication Date
NL6804435A NL6804435A (en) 1968-10-01
NL153718B true NL153718B (en) 1977-06-15

Family

ID=12001980

Family Applications (1)

Application Number Title Priority Date Filing Date
NL686804435A NL153718B (en) 1967-03-30 1968-03-29 DEVICE FOR ANALYZING THE ENERGY OF AN ELECTRON BEAM.

Country Status (5)

Country Link
US (1) US3619607A (en)
DE (1) DE1639280C3 (en)
FR (1) FR1558166A (en)
GB (1) GB1226872A (en)
NL (1) NL153718B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145221B2 (en) * 1973-01-31 1976-12-02
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
US4929838A (en) * 1988-02-16 1990-05-29 Fujitsu Limited Magnetic object lens for an electron beam exposure apparatus which processes a wafer carried on a continuously moving stage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
US3374346A (en) * 1964-07-15 1968-03-19 Hitachi Ltd Spectroscopic electron microscope wherein a specimen is irradiated with x-rays and the electrons emitted are energy analyzed

Also Published As

Publication number Publication date
DE1639280B2 (en) 1973-07-12
FR1558166A (en) 1969-02-21
US3619607A (en) 1971-11-09
NL6804435A (en) 1968-10-01
DE1639280C3 (en) 1974-01-31
GB1226872A (en) 1971-03-31
DE1639280A1 (en) 1972-03-16

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee
NL80 Information provided on patent owner name for an already discontinued patent

Owner name: TAKEO