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NL1000329C2 - Geïntegreerd oscillatorcircuit en werkwijzen voor het vervaardigen, respectievelijk het ontwerpen daarvan. - Google Patents

Geïntegreerd oscillatorcircuit en werkwijzen voor het vervaardigen, respectievelijk het ontwerpen daarvan.

Info

Publication number
NL1000329C2
NL1000329C2 NL1000329A NL1000329A NL1000329C2 NL 1000329 C2 NL1000329 C2 NL 1000329C2 NL 1000329 A NL1000329 A NL 1000329A NL 1000329 A NL1000329 A NL 1000329A NL 1000329 C2 NL1000329 C2 NL 1000329C2
Authority
NL
Netherlands
Prior art keywords
manufacture
design
methods
oscillator circuit
integrated oscillator
Prior art date
Application number
NL1000329A
Other languages
English (en)
Inventor
Gustaaf Borghs
Nicolai Marin
Kristel Fobelets
Steven Brebels
Eric Beyne
Original Assignee
Imec Vzw Interuniversitair Mic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Vzw Interuniversitair Mic filed Critical Imec Vzw Interuniversitair Mic
Priority to NL1000329A priority Critical patent/NL1000329C2/nl
Priority to DE1996622083 priority patent/DE69622083T2/de
Priority to AT96107063T priority patent/ATE220262T1/de
Priority to EP96107063A priority patent/EP0742639B1/en
Priority to US08/646,515 priority patent/US5675295A/en
Application granted granted Critical
Publication of NL1000329C2 publication Critical patent/NL1000329C2/nl

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q23/00Antennas with active circuits or circuit elements integrated within them or attached to them
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222Capacitive arrangements or effects of, or between wiring layers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B7/00Generation of oscillations using active element having a negative resistance between two of its electrodes
    • H03B7/02Generation of oscillations using active element having a negative resistance between two of its electrodes with frequency-determining element comprising lumped inductance and capacitance
    • H03B7/06Generation of oscillations using active element having a negative resistance between two of its electrodes with frequency-determining element comprising lumped inductance and capacitance active element being semiconductor device
    • H03B7/08Generation of oscillations using active element having a negative resistance between two of its electrodes with frequency-determining element comprising lumped inductance and capacitance active element being semiconductor device being a tunnel diode
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B9/00Generation of oscillations using transit-time effects
    • H03B9/12Generation of oscillations using transit-time effects using solid state devices, e.g. Gunn-effect devices
    • H03B9/14Generation of oscillations using transit-time effects using solid state devices, e.g. Gunn-effect devices and elements comprising distributed inductance and capacitance
    • H03B9/141Generation of oscillations using transit-time effects using solid state devices, e.g. Gunn-effect devices and elements comprising distributed inductance and capacitance and comprising a voltage sensitive element, e.g. varactor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/05Manufacture or treatment characterised by using material-based technologies using Group III-V technology
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6605High-frequency electrical connections
    • H01L2223/6627Waveguides, e.g. microstrip line, strip line, coplanar line
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/83894Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01322Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1903Structure including wave guides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1903Structure including wave guides
    • H01L2924/19032Structure including wave guides being a microstrip line type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
  • Waveguide Aerials (AREA)
NL1000329A 1995-05-09 1995-05-09 Geïntegreerd oscillatorcircuit en werkwijzen voor het vervaardigen, respectievelijk het ontwerpen daarvan. NL1000329C2 (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL1000329A NL1000329C2 (nl) 1995-05-09 1995-05-09 Geïntegreerd oscillatorcircuit en werkwijzen voor het vervaardigen, respectievelijk het ontwerpen daarvan.
DE1996622083 DE69622083T2 (de) 1995-05-09 1996-05-06 Mikrowellenoszillator, Antenne dafür und Verfahren zur Herstellung
AT96107063T ATE220262T1 (de) 1995-05-09 1996-05-06 Mikrowellenoszillator, antenne dafür und verfahren zur herstellung
EP96107063A EP0742639B1 (en) 1995-05-09 1996-05-06 Microwave oscillator, an antenna therefor and methods of manufacture
US08/646,515 US5675295A (en) 1995-05-09 1996-05-08 Microwave oscillator, an antenna therefor and methods of manufacture

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1000329A NL1000329C2 (nl) 1995-05-09 1995-05-09 Geïntegreerd oscillatorcircuit en werkwijzen voor het vervaardigen, respectievelijk het ontwerpen daarvan.
US08/646,515 US5675295A (en) 1995-05-09 1996-05-08 Microwave oscillator, an antenna therefor and methods of manufacture

Publications (1)

Publication Number Publication Date
NL1000329C2 true NL1000329C2 (nl) 1996-11-12

Family

ID=26642069

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1000329A NL1000329C2 (nl) 1995-05-09 1995-05-09 Geïntegreerd oscillatorcircuit en werkwijzen voor het vervaardigen, respectievelijk het ontwerpen daarvan.

Country Status (3)

Country Link
US (1) US5675295A (nl)
EP (1) EP0742639B1 (nl)
NL (1) NL1000329C2 (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN113394574A (zh) * 2021-06-17 2021-09-14 网络通信与安全紫金山实验室 一种集成差分天线的太赫兹振荡器及其场路融合方法

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US5751201A (en) * 1996-06-19 1998-05-12 Motorola, Inc. Resonator with metal layers devoid of DC connection and semiconductor device in substrate
US6049308A (en) * 1997-03-27 2000-04-11 Sandia Corporation Integrated resonant tunneling diode based antenna
JP3146260B2 (ja) * 1999-03-05 2001-03-12 郵政省通信総合研究所長 平面放射型発振装置
AU2001229896A1 (en) * 2000-01-28 2001-08-07 Interuniversitair Micro-Elektronica Centrum A method for transferring and stacking of semiconductor devices
JP2002124829A (ja) * 2000-10-12 2002-04-26 Murata Mfg Co Ltd 発振器およびそれを用いた電子装置
US7388276B2 (en) * 2001-05-21 2008-06-17 The Regents Of The University Of Colorado Metal-insulator varactor devices
US6967347B2 (en) * 2001-05-21 2005-11-22 The Regents Of The University Of Colorado Terahertz interconnect system and applications
US6563185B2 (en) * 2001-05-21 2003-05-13 The Regents Of The University Of Colorado High speed electron tunneling device and applications
US6566284B2 (en) * 2001-08-07 2003-05-20 Hrl Laboratories, Llc Method of manufacture for 80 nanometer diameter resonant tunneling diode with improved peak-to-valley ratio and resonant tunneling diode therefrom
US6657240B1 (en) 2002-01-28 2003-12-02 Taiwan Semiconductoring Manufacturing Company Gate-controlled, negative resistance diode device using band-to-band tunneling
DE10300955B4 (de) * 2003-01-13 2005-10-27 Epcos Ag Radar-Transceiver für Mikrowellen- und Millimeterwellenanwendungen
JP3913253B2 (ja) * 2004-07-30 2007-05-09 キヤノン株式会社 光半導体装置およびその製造方法
US7274263B2 (en) * 2004-08-25 2007-09-25 Samsung Electronics Co., Ltd. Microstrip stabilized quantum well resonance-tunneling generator for millimeter and submillimeter wavelength range
JP5006642B2 (ja) * 2006-05-31 2012-08-22 キヤノン株式会社 テラヘルツ波発振器
US20090181492A1 (en) * 2008-01-11 2009-07-16 Peter Nunan Nano-cleave a thin-film of silicon for solar cell fabrication
JP5366663B2 (ja) * 2008-07-29 2013-12-11 ローム株式会社 テラヘルツ発振素子
JP5717336B2 (ja) 2009-03-27 2015-05-13 キヤノン株式会社 発振器
JP5632599B2 (ja) * 2009-09-07 2014-11-26 キヤノン株式会社 発振器
JP5535316B2 (ja) * 2010-06-10 2014-07-02 キヤノンアネルバ株式会社 発振素子および発振素子の製造方法
KR101928438B1 (ko) 2012-08-08 2019-02-26 삼성전자주식회사 대전 입자의 진동을 이용한 전자기파 발생기 및 비트 생성기
JP6100024B2 (ja) * 2013-02-27 2017-03-22 キヤノン株式会社 発振素子
US10418940B2 (en) * 2016-12-16 2019-09-17 Intel Corporation Radio frequency interference mitigation in crystal oscillator circuitry
CN110011027A (zh) * 2018-12-28 2019-07-12 瑞声科技(新加坡)有限公司 一种天线、天线阵列和基站
JP7246960B2 (ja) * 2019-02-14 2023-03-28 古河電気工業株式会社 光導波路構造及びその製造方法

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US4789645A (en) * 1987-04-20 1988-12-06 Eaton Corporation Method for fabrication of monolithic integrated circuits
EP0296838A2 (en) * 1987-06-26 1988-12-28 Texas Instruments Incorporated Monolithic microwave transmitter/receiver

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US4789645A (en) * 1987-04-20 1988-12-06 Eaton Corporation Method for fabrication of monolithic integrated circuits
EP0296838A2 (en) * 1987-06-26 1988-12-28 Texas Instruments Incorporated Monolithic microwave transmitter/receiver

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Publication number Priority date Publication date Assignee Title
CN113394574A (zh) * 2021-06-17 2021-09-14 网络通信与安全紫金山实验室 一种集成差分天线的太赫兹振荡器及其场路融合方法

Also Published As

Publication number Publication date
EP0742639A3 (en) 1997-12-29
EP0742639A2 (en) 1996-11-13
US5675295A (en) 1997-10-07
EP0742639B1 (en) 2002-07-03

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Effective date: 19991201