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MX9703547A - Heteroestructura de capacitor ferroelectrica policristalina que emplea electrodos hibridos. - Google Patents

Heteroestructura de capacitor ferroelectrica policristalina que emplea electrodos hibridos.

Info

Publication number
MX9703547A
MX9703547A MX9703547A MX9703547A MX9703547A MX 9703547 A MX9703547 A MX 9703547A MX 9703547 A MX9703547 A MX 9703547A MX 9703547 A MX9703547 A MX 9703547A MX 9703547 A MX9703547 A MX 9703547A
Authority
MX
Mexico
Prior art keywords
ferroelectric capacitor
hybrid electrodes
polycrystalline ferroelectric
employing hybrid
capacitor heterostructure
Prior art date
Application number
MX9703547A
Other languages
English (en)
Other versions
MXPA97003547A (es
Inventor
Ramamoorthy Ramesh
Original Assignee
Bell Communications Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bell Communications Res filed Critical Bell Communications Res
Publication of MXPA97003547A publication Critical patent/MXPA97003547A/es
Publication of MX9703547A publication Critical patent/MX9703547A/es

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/36—Unipolar devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/692—Electrodes
    • H10D1/696—Electrodes comprising multiple layers, e.g. comprising a barrier layer and a metal layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/682—Capacitors having no potential barriers having dielectrics comprising perovskite structures

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

Se describen heteroestructuras de capacitor ferroeléctricas que exhiben confiabilidad excepcional y resistencia a la fatiga y a la impresion o estampado, que comprende electrodos híbridos de platino altamente conductor (14) con oxido metálico policristalino (15) y materiales ferroeléctricos (16) depositados sobre sustratos compatibles con Si-CMOS (11) sin el requerimiento de plantillas de orientacion cristalográficas interpuestas.
MX9703547A 1994-11-18 1995-11-03 Heteroestructura de capacitor ferroelectrica policristalina que emplea electrodos hibridos. MX9703547A (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/341,728 US5519235A (en) 1994-11-18 1994-11-18 Polycrystalline ferroelectric capacitor heterostructure employing hybrid electrodes
US08341728 1994-11-18
PCT/US1995/014740 WO1996016447A1 (en) 1994-11-18 1995-11-03 Polycrystalline ferroelectric capacitor heterostructure employing hybrid electrodes

Publications (2)

Publication Number Publication Date
MXPA97003547A MXPA97003547A (es) 1997-08-01
MX9703547A true MX9703547A (es) 1997-08-30

Family

ID=23338770

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9703547A MX9703547A (es) 1994-11-18 1995-11-03 Heteroestructura de capacitor ferroelectrica policristalina que emplea electrodos hibridos.

Country Status (12)

Country Link
US (1) US5519235A (es)
EP (1) EP0792524B1 (es)
JP (1) JP3040483B2 (es)
KR (1) KR100296236B1 (es)
AU (1) AU684407B2 (es)
DE (1) DE69527642T2 (es)
IL (1) IL115893A (es)
MX (1) MX9703547A (es)
MY (1) MY117284A (es)
NZ (1) NZ296461A (es)
TW (1) TW283234B (es)
WO (1) WO1996016447A1 (es)

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Also Published As

Publication number Publication date
TW283234B (es) 1996-08-11
KR100296236B1 (ko) 2001-08-07
EP0792524A4 (en) 1999-03-17
NZ296461A (en) 1999-03-29
JP3040483B2 (ja) 2000-05-15
US5519235A (en) 1996-05-21
IL115893A0 (en) 1996-01-31
DE69527642D1 (de) 2002-09-05
WO1996016447A1 (en) 1996-05-30
JPH09512963A (ja) 1997-12-22
IL115893A (en) 1998-08-16
KR970707588A (ko) 1997-12-01
EP0792524A1 (en) 1997-09-03
AU4108396A (en) 1996-06-17
MY117284A (en) 2004-06-30
AU684407B2 (en) 1997-12-11
DE69527642T2 (de) 2003-04-03
EP0792524B1 (en) 2002-07-31

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