MX165044B - Metodo de desprendimiento fotolitografico - Google Patents

Metodo de desprendimiento fotolitografico

Info

Publication number: MX165044B
Authority: MX; Mexico
Prior art keywords: photolithographic; detachment method; detachment; photolithographic detachment
Prior art date: 1985-01-16

Application number

MX1248A

Other languages

English (en)

Inventor

Paul Richard West

Original Assignee

Gen Electric

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-01-16

Filing date

1986-01-16

Publication date

1992-10-20

1986-01-16 Application filed by Gen Electric filed Critical Gen Electric

1992-10-20 Publication of MX165044B publication Critical patent/MX165044B/es

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F5/00—Screening processes; Screens therefor
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Photosensitive Polymer And Photoresist Processing (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

MX1248A 1985-01-16 1986-01-16 Metodo de desprendimiento fotolitografico MX165044B (es)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US06/691,829 US4623611A (en)	1985-01-16	1985-01-16	Photolithographic stripping method for removing contrast enhancement layer

Publications (1)

Publication Number	Publication Date
MX165044B true MX165044B (es)	1992-10-20

Family

ID=24778149

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
MX1248A MX165044B (es)	1985-01-16	1986-01-16	Metodo de desprendimiento fotolitografico

Country Status (7)

Country	Link
US (1)	US4623611A (es)
EP (1)	EP0188230B1 (es)
JP (1)	JPS61198237A (es)
KR (1)	KR940001554B1 (es)
DE (1)	DE3676715D1 (es)
IE (1)	IE56848B1 (es)
MX (1)	MX165044B (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3689949T2 (de) *	1985-12-09	1995-03-16	Nippon Paint Co Ltd	Druckmaterial auf der Basis eines lichtempfindlichen Harzes.
US4714670A (en) *	1986-06-09	1987-12-22	Imperial Metal & Chemical Company	Developer including an aliphatic cyclic carbonate in the oil phase emulsion
KR920001450B1 (ko) *	1986-12-23	1992-02-14	쉬플리 캄파니 인코포레이티드	감광성 내식막의 제조방법, 감광성 내식막 조성물 및 이의 제조방법
US5196295A (en) *	1987-07-31	1993-03-23	Microsi, Inc.	Spin castable mixtures useful for making deep-UV contrast enhancement layers
JPH0727222B2 (ja) *	1987-10-28	1995-03-29	日本合成ゴム株式会社	ホトレジスト用剥離液
DE3836404A1 (de) *	1988-10-26	1990-05-03	Hoechst Ag	Entwicklungsloesemittel fuer durch photopolymerisation vernetzbare schichten sowie verfahren zur herstellung von reliefformen
JPH0683596U (ja) *	1993-04-30	1994-11-29	立仁馮	スノーケル
DE69704298T2 (de) *	1996-05-31	2001-09-27	Atofina, Puteaux	Abbeizmittelzusammensetzung auf Basis von einem polaren, aprotischen Lösungsmittel, einem Ether und Wasser
FR2749315B1 (fr) *	1996-05-31	1998-08-14	Atochem Elf Sa	Composition decapante a base d'eau et d'anisole
US7897296B2 (en)	2004-09-30	2011-03-01	General Electric Company	Method for holographic storage
US20060078802A1 (en) *	2004-10-13	2006-04-13	Chan Kwok P	Holographic storage medium
JP6109896B2 (ja) *	2015-09-03	2017-04-05	日新製鋼株式会社	金属板からレジスト膜を除去する方法およびエッチングされた金属板の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3725069A (en) *	1971-09-13	1973-04-03	Scott Paper Co	Diazo lithographic composition and article
GB1588417A (en) *	1977-03-15	1981-04-23	Agfa Gevaert	Photoresist materials
US4395348A (en) *	1981-11-23	1983-07-26	Ekc Technology, Inc.	Photoresist stripping composition and method
IE56082B1 (en) *	1982-11-01	1991-04-10	Microsi Inc	Photobleachable compositions
US4578344A (en) *	1984-12-20	1986-03-25	General Electric Company	Photolithographic method using a two-layer photoresist and photobleachable film

1985
- 1985-01-16 US US06/691,829 patent/US4623611A/en not_active Expired - Lifetime
- 1985-07-22 IE IE1836/85A patent/IE56848B1/en not_active IP Right Cessation
1986
- 1986-01-09 DE DE8686100219T patent/DE3676715D1/de not_active Expired - Fee Related
- 1986-01-09 EP EP86100219A patent/EP0188230B1/en not_active Expired - Lifetime
- 1986-01-15 KR KR1019860000193A patent/KR940001554B1/ko not_active IP Right Cessation
- 1986-01-16 MX MX1248A patent/MX165044B/es unknown
- 1986-01-16 JP JP61005144A patent/JPS61198237A/ja active Granted

Also Published As

Publication number	Publication date
JPH0524497B2 (es)	1993-04-08
DE3676715D1 (de)	1991-02-14
KR860006051A (ko)	1986-08-16
EP0188230B1 (en)	1991-01-09
IE851836L (en)	1986-07-16
EP0188230A2 (en)	1986-07-23
JPS61198237A (ja)	1986-09-02
EP0188230A3 (en)	1987-01-07
US4623611A (en)	1986-11-18
KR940001554B1 (ko)	1994-02-24
IE56848B1 (en)	1992-01-01

Publication	Publication Date	Title
DE3661492D1 (de)	1989-02-02	Decropping apparatus
BR8600081A (pt)	1986-09-23	Conjunto de cabrestante
ATA267786A (de)	1991-12-15	Reifen
ATA207986A (de)	1991-07-15	Luftreifen
BR8507156A (pt)	1987-07-14	Estojo de ligacao
BR8600694A (pt)	1987-01-13	Conjunto alternador-compressor
MX165044B (es)	1992-10-20	Metodo de desprendimiento fotolitografico
BR8600340A (pt)	1986-10-14	Arranjo de centragem
DK443586D0 (da)	1986-09-16	Vandrensningsproces
IT1204325B (it)	1989-03-01	Apparecchio estrusore-turbomescolatore
KR880700092A (ko)	1988-02-15	정련 방법
IT1204324B (it)	1989-03-01	Apparecchio estrusore-turbomescolatore
AT386160B (de)	1988-07-11	Luftreifen
DK634086A (da)	1987-07-01	Stroemningsreaktor-system
RO93260A2 (ro)	1987-12-31	Metoda de sutura cutanata
ES284441Y (es)	1986-04-01	Somier de laminas-lamas desmontable
RO90915A2 (ro)	1987-01-30	Furaj pentru reproducatorii de pastrav curcubeu(salmo gaidneri)
RO90104A2 (ro)	1986-07-30	Metoda pentru termoanaliza
RO92367A2 (ro)	1987-08-31	Procedeu de purificare a p-xilenului
SE8500983D0 (sv)	1985-02-28	Vermeisolerande rullgardin
RO93304A2 (ro)	1988-03-30	Diafragma termoizolanta pentru stupi
SE8500598D0 (sv)	1985-02-11	Saxfella for mullvadar
BR8500114A (pt)	1986-08-19	Conjunto de helice
IT8528952V0 (it)	1985-05-03	Manichi policromo per sporte
ES284795Y (es)	1988-07-01	Estufa-quemador de gallinaza