[go: up one dir, main page]

LT2965852T - Lazerinio pluošto formuotuvas - Google Patents

Lazerinio pluošto formuotuvas

Info

Publication number
LT2965852T
LT2965852T LTEP15176241.6T LT15176241T LT2965852T LT 2965852 T LT2965852 T LT 2965852T LT 15176241 T LT15176241 T LT 15176241T LT 2965852 T LT2965852 T LT 2965852T
Authority
LT
Lithuania
Prior art keywords
laser beam
beam shaping
optical arrangement
optical
arrangement
Prior art date
Application number
LTEP15176241.6T
Other languages
English (en)
Inventor
Titas GERTUS
Andrejus MICHAILOVAS
Original Assignee
Uab Altechna R&D
Uab "Ekspla"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uab Altechna R&D, Uab "Ekspla" filed Critical Uab Altechna R&D
Publication of LT2965852T publication Critical patent/LT2965852T/lt

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0944Diffractive optical elements, e.g. gratings, holograms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3083Birefringent or phase retarding elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308Amplifier arrangements, e.g. MOPA

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Polarising Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lasers (AREA)
LTEP15176241.6T 2014-07-10 2015-07-10 Lazerinio pluošto formuotuvas LT2965852T (lt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2014090A LT6250B (lt) 2014-07-10 2014-07-10 Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas

Publications (1)

Publication Number Publication Date
LT2965852T true LT2965852T (lt) 2017-06-26

Family

ID=53610778

Family Applications (2)

Application Number Title Priority Date Filing Date
LT2014090A LT6250B (lt) 2014-07-10 2014-07-10 Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas
LTEP15176241.6T LT2965852T (lt) 2014-07-10 2015-07-10 Lazerinio pluošto formuotuvas

Family Applications Before (1)

Application Number Title Priority Date Filing Date
LT2014090A LT6250B (lt) 2014-07-10 2014-07-10 Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas

Country Status (2)

Country Link
EP (1) EP2965852B1 (lt)
LT (2) LT6250B (lt)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11892292B2 (en) 2017-06-06 2024-02-06 RD Synergy Ltd. Methods and systems of holographic interferometry
CN110679045B (zh) * 2017-07-13 2022-08-16 极光先进雷射株式会社 激光系统
JP6674422B2 (ja) * 2017-09-14 2020-04-01 フタバ産業株式会社 レーザ溶接装置、及び、部材の製造方法
DE102017126453A1 (de) 2017-11-10 2019-05-16 Amphos GmbH Verfahren zur Laserverstärkung
CN108489931A (zh) * 2018-05-29 2018-09-04 天津大学 一种提高太赫兹参量振荡源测量稳定性的装置及方法
CN112969899B (zh) * 2018-10-30 2023-03-10 Rd 辛纳基有限公司 全息干涉法的系统和方法
CN109541736B (zh) * 2018-11-27 2021-01-05 河海大学 一种基于多层梯度折射率透膜的布儒斯特角起偏器
WO2020188861A1 (ja) * 2019-03-19 2020-09-24 株式会社村田製作所 光学装置
LT6781B (lt) 2019-03-20 2020-11-25 Uab "Ekspla" Depoliarizacijos kompensatorius
CN110385521B (zh) * 2019-08-29 2021-03-16 西安交通大学 一种用于碳化硅快速深刻蚀的飞秒激光加工装置及方法
CN111221132B (zh) * 2019-11-20 2021-10-26 中国科学院光电技术研究所 一种扇形子孔径微透镜阵列测量涡旋光束拓扑荷数的方法和装置
CN111240012B (zh) * 2020-01-17 2021-11-16 中国工程物理研究院激光聚变研究中心 一种基于导模共振亚波长光栅编码的光束近场整形方法
DE102020204123A1 (de) * 2020-03-30 2021-09-30 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Herstellen einer Lichtablenkungsstruktur, Verwendung eines Substrats mit einer solchen Lichtablenkungsstruktur, und Lichtablenkeinheit mit einer solchen Lichtablenkungsstruktur
CN111736423A (zh) * 2020-07-16 2020-10-02 南京诚芯集成电路技术研究院有限公司 一种基于模型仿真的激光直写光学邻近效应校正方法
CN113231750B (zh) * 2021-03-18 2022-07-19 武汉大学 一种脉冲激光打孔系统及打孔方法
CN113960826B (zh) * 2021-06-10 2023-12-22 北京航空航天大学 一种抽运激光的光束整形方法及装置
DE102021122754A1 (de) 2021-09-02 2023-03-02 Trumpf Laser Gmbh Vorrichtung zum Bearbeiten eines Materials
CN114077066B (zh) * 2021-10-13 2023-09-29 深圳朗光科技有限公司 扩束准直器
IL294523A (en) * 2022-07-04 2025-01-01 Elbit Systems Electro Optics Elop Ltd Systems, definitions, units and methods for profiling a change fund
CN116068775B (zh) * 2023-01-31 2024-04-26 西安交通大学 一种多波长异形光束的整形装置及方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476463A (en) 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
US3486808A (en) 1966-03-14 1969-12-30 Bausch & Lomb Gradient refractive index optical lenses
US3558208A (en) 1967-10-11 1971-01-26 Rca Corp Optical compensating filter with selective radial absorption distribution
US3977772A (en) 1974-06-21 1976-08-31 Itek Corporation Apodized optical system
US3990786A (en) 1974-10-09 1976-11-09 Kms Fusion, Inc. Apodizer aperture for lasers
US4017164A (en) 1974-10-09 1977-04-12 Kms Fusion, Inc. High power laser apodizer
US4410237A (en) 1980-09-26 1983-10-18 Massachusetts Institute Of Technology Method and apparatus for shaping electromagnetic beams
US4679911A (en) 1985-04-01 1987-07-14 The University Of Rochester Optical apparatus using liquid crystals for shaping the spatial intensity of optical beams having designated wavelengths
JP3531014B2 (ja) 1994-06-22 2004-05-24 株式会社トプコン レーザ照準装置
DE19535392A1 (de) 1995-09-23 1997-03-27 Zeiss Carl Fa Radial polarisationsdrehende optische Anordnung und Mikrolithographie-Projektionsbelichtungsanlage damit
US6259055B1 (en) 1998-10-26 2001-07-10 Lsp Technologies, Inc. Apodizers for laser peening systems
US6975458B1 (en) 2001-07-13 2005-12-13 Kurt Kanzler Method and apparatus for transformation of a gaussian laser beam to a far field diffraction pattern
US7019434B2 (en) 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
CN101793993B (zh) 2004-01-16 2013-04-03 卡尔蔡司Smt有限责任公司 光学元件、光学布置及系统
US6943964B1 (en) 2004-06-01 2005-09-13 Southeastern Univ. Research Assn. Single element laser beam shaper
US20070115551A1 (en) 2005-04-01 2007-05-24 Alexis Spilman Space-variant waveplate for polarization conversion, methods and applications
KR101459157B1 (ko) 2005-10-04 2014-11-07 칼 짜이스 에스엠티 게엠베하 광학 시스템 내의, 특히 마이크로리소그래피용 투영 노광 장치 내의 편광 분포에 영향을 주기 위한 장치 및 방법
US8292441B2 (en) 2009-02-10 2012-10-23 Optical Physics Company Deformable mirror
US20110037962A1 (en) 2009-08-17 2011-02-17 Nikon Corporation Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method
GB2490502A (en) 2011-05-03 2012-11-07 Univ Southampton Space variant polarization converter
US10175476B2 (en) 2012-07-16 2019-01-08 Trustees Of Boston University Solid immersion microscopy system with deformable mirror for correction of aberrations

Also Published As

Publication number Publication date
EP2965852A1 (en) 2016-01-13
LT6250B (lt) 2016-02-25
LT2014090A (lt) 2016-01-11
EP2965852B1 (en) 2017-03-08

Similar Documents

Publication Publication Date Title
LT2965852T (lt) Lazerinio pluošto formuotuvas
IL254757B (en) Laser projection unit
IL261489B (en) Optical piezograms for lidar vibrometry
EP3020502A4 (en) LASER WELDING
PL3325314T3 (pl) Belka zderzaka
GB201413500D0 (en) Airy beam light sheet
BR112017007644A2 (pt) scanner de feixe óptico
EP3099378A4 (en) Multiple beam laser treatment device
HUE050188T2 (hu) Kezdeti távolságfelvétel lézeres megmunkálásához
EP3180823A4 (en) Multibeam fiber laser system
LT3202001T (lt) Impulsinis lazeris
EP3210063A4 (en) Optical fiber assembly with beam shaping component
EP3211734A4 (en) Laser module
SG10201701160VA (en) Device for shaping laser radiation
GB201418637D0 (en) Laser
HUE047967T2 (hu) Tartógerenda
EP3108992A4 (en) Laser beam machine
GB2526199B (en) Construction beam
SG11201606160RA (en) Beam homogenizer for laser annealing
GB2552406B (en) Laser processing
LT3081972T (lt) Atspindintis spindulio formuotuvas
GB2527553B (en) Laser processing
GB201414984D0 (en) Improved laser structure
PT3047936T (pt) Processo para a blindagem de uma fonte de feixe de laser
GB201515666D0 (en) Scanning beam collinator