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KR980005297U - 정전기 제거장치 - Google Patents

정전기 제거장치

Info

Publication number
KR980005297U
KR980005297U KR2019960017969U KR19960017969U KR980005297U KR 980005297 U KR980005297 U KR 980005297U KR 2019960017969 U KR2019960017969 U KR 2019960017969U KR 19960017969 U KR19960017969 U KR 19960017969U KR 980005297 U KR980005297 U KR 980005297U
Authority
KR
South Korea
Prior art keywords
static electricity
elimination device
electricity elimination
static
elimination
Prior art date
Application number
KR2019960017969U
Other languages
English (en)
Other versions
KR200151780Y1 (ko
Inventor
이재승
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019960017969U priority Critical patent/KR200151780Y1/ko
Publication of KR980005297U publication Critical patent/KR980005297U/ko
Application granted granted Critical
Publication of KR200151780Y1 publication Critical patent/KR200151780Y1/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Elimination Of Static Electricity (AREA)
KR2019960017969U 1996-06-27 1996-06-27 정전기 제거장치 KR200151780Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960017969U KR200151780Y1 (ko) 1996-06-27 1996-06-27 정전기 제거장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960017969U KR200151780Y1 (ko) 1996-06-27 1996-06-27 정전기 제거장치

Publications (2)

Publication Number Publication Date
KR980005297U true KR980005297U (ko) 1998-03-30
KR200151780Y1 KR200151780Y1 (ko) 1999-07-15

Family

ID=19459799

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960017969U KR200151780Y1 (ko) 1996-06-27 1996-06-27 정전기 제거장치

Country Status (1)

Country Link
KR (1) KR200151780Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101659438B1 (ko) 2015-02-25 2016-09-30 주식회사 이에스지케이 정전기 제거부스

Also Published As

Publication number Publication date
KR200151780Y1 (ko) 1999-07-15

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UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

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