KR970046760U - Semiconductor device manufacturing apparatus having a vacuum system - Google Patents
Semiconductor device manufacturing apparatus having a vacuum systemInfo
- Publication number
- KR970046760U KR970046760U KR2019950038406U KR19950038406U KR970046760U KR 970046760 U KR970046760 U KR 970046760U KR 2019950038406 U KR2019950038406 U KR 2019950038406U KR 19950038406 U KR19950038406 U KR 19950038406U KR 970046760 U KR970046760 U KR 970046760U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- manufacturing apparatus
- device manufacturing
- vacuum system
- vacuum
- Prior art date
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950038406U KR970046760U (en) | 1995-12-05 | 1995-12-05 | Semiconductor device manufacturing apparatus having a vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950038406U KR970046760U (en) | 1995-12-05 | 1995-12-05 | Semiconductor device manufacturing apparatus having a vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970046760U true KR970046760U (en) | 1997-07-31 |
Family
ID=60877318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019950038406U KR970046760U (en) | 1995-12-05 | 1995-12-05 | Semiconductor device manufacturing apparatus having a vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970046760U (en) |
-
1995
- 1995-12-05 KR KR2019950038406U patent/KR970046760U/en not_active Application Discontinuation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UA0108 | Application for utility model registration |
Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19951205 |
|
| UG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| UA0201 | Request for examination |
Patent event date: 19981123 Patent event code: UA02012R01D Comment text: Request for Examination of Application Patent event date: 19951205 Patent event code: UA02011R01I Comment text: Application for Utility Model Registration |
|
| E902 | Notification of reason for refusal | ||
| UE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event code: UE09021S01D Patent event date: 20000828 |
|
| E601 | Decision to refuse application | ||
| UE0601 | Decision on rejection of utility model registration |
Comment text: Decision to Refuse Application Patent event code: UE06011S01D Patent event date: 20001030 |