KR970025797U - Semiconductor device manufacturing apparatus with vacuum system - Google Patents
Semiconductor device manufacturing apparatus with vacuum systemInfo
- Publication number
- KR970025797U KR970025797U KR2019950034646U KR19950034646U KR970025797U KR 970025797 U KR970025797 U KR 970025797U KR 2019950034646 U KR2019950034646 U KR 2019950034646U KR 19950034646 U KR19950034646 U KR 19950034646U KR 970025797 U KR970025797 U KR 970025797U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- manufacturing apparatus
- device manufacturing
- vacuum system
- vacuum
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950034646U KR200205334Y1 (en) | 1995-11-21 | 1995-11-21 | Semiconductor device manufacturing apparatus with vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950034646U KR200205334Y1 (en) | 1995-11-21 | 1995-11-21 | Semiconductor device manufacturing apparatus with vacuum system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970025797U true KR970025797U (en) | 1997-06-20 |
| KR200205334Y1 KR200205334Y1 (en) | 2000-12-01 |
Family
ID=19429680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019950034646U KR200205334Y1 (en) | 1995-11-21 | 1995-11-21 | Semiconductor device manufacturing apparatus with vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200205334Y1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100939207B1 (en) * | 2002-11-19 | 2010-01-28 | 엘지디스플레이 주식회사 | Pressure reducing device |
-
1995
- 1995-11-21 KR KR2019950034646U patent/KR200205334Y1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR200205334Y1 (en) | 2000-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UA0108 | Application for utility model registration |
Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19951121 |
|
| UG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| UA0201 | Request for examination |
Patent event date: 19981121 Patent event code: UA02012R01D Comment text: Request for Examination of Application Patent event date: 19951121 Patent event code: UA02011R01I Comment text: Application for Utility Model Registration |
|
| E701 | Decision to grant or registration of patent right | ||
| UE0701 | Decision of registration |
Patent event date: 20000822 Comment text: Decision to Grant Registration Patent event code: UE07011S01D |
|
| REGI | Registration of establishment | ||
| UR0701 | Registration of establishment |
Patent event date: 20000923 Patent event code: UR07011E01D Comment text: Registration of Establishment |
|
| UR1002 | Payment of registration fee |
Start annual number: 1 End annual number: 3 Payment date: 20000925 |
|
| UG1601 | Publication of registration | ||
| UR1001 | Payment of annual fee |
Payment date: 20030808 Start annual number: 4 End annual number: 4 |
|
| UR1001 | Payment of annual fee |
Payment date: 20040331 Start annual number: 5 End annual number: 5 |
|
| UR1001 | Payment of annual fee |
Payment date: 20050802 Start annual number: 6 End annual number: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20060830 Year of fee payment: 7 |
|
| UR1001 | Payment of annual fee |
Payment date: 20060830 Start annual number: 7 End annual number: 7 |
|
| LAPS | Lapse due to unpaid annual fee |