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KR960040114A - A test result output device, a test result output method, and a substrate test system using the test result output device and a substrate test method using the test result output method - Google Patents

A test result output device, a test result output method, and a substrate test system using the test result output device and a substrate test method using the test result output method Download PDF

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KR960040114A
KR960040114A KR1019960011705A KR19960011705A KR960040114A KR 960040114 A KR960040114 A KR 960040114A KR 1019960011705 A KR1019960011705 A KR 1019960011705A KR 19960011705 A KR19960011705 A KR 19960011705A KR 960040114 A KR960040114 A KR 960040114A
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defective
layout diagram
component mounting
substrate
area
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KR100205733B1 (en
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이시바 마사토
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다페이시 요시오
오무론 가부시끼가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/888—Marking defects

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

〔목적〕〔purpose〕

기판의 불량부위의 수정작업 및 부품실장 부위의 품질관리를 효율적으로 행하는 것.To efficiently perform repair work on the defective portion of the substrate and quality control of the component mounting portion.

〔구성〕〔Configuration〕

투광부(1)에 의하여 피검사기판(14)에 빛을 조사하고, 이 반사광상으로부터 촬상부(2)에 의해서 촬상하여 얻어진 컬러화상신호에 근거하여, 기판상의 부품실장 부위의 검사를 행하고, 이 검사결과 데이터에 근거하여, 레이아웃도 작성부(11)에 의해서 불량내용에 따라 형상이 다른 불량부위 식별마크로서 불량부위를 나타낸 부품실장 부위의 레이아웃도를 작성하며, 이 레이아웃도를 검사결과 출력파일작성부(12)를 통해 출력부(10)로서 출력하는 구성.The component mounting portion on the substrate is inspected based on the color image signal obtained by irradiating light to the substrate 14 to be inspected by the transparent portion 1 and picking up the image by the imaging portion 2 from the reflected light image, Based on the inspection result data, the layout diagram generation unit 11 creates a layout diagram of the component mounting area showing the defective area as a defective area identification mark having a different shape according to the defective content, And outputs it as an output unit (10) through the file creation unit (12).

Description

검사결과 출력장치 및 검사결과 출력방법, 및 이 검사결과 출력장치를 이용한 기판검사시스템 및 이 검사결과 출력방법을 이용한 기판검사방법.An output device of the inspection result, an output method of the inspection result, and a substrate inspection system using the output device, and a substrate inspection method using the inspection result output method.

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명의 검사결과 출력장치의 제1실시예를 나타내는 개략구성도.FIG. 1 is a schematic configuration diagram showing a first embodiment of an inspection result output device of the present invention; FIG.

Claims (25)

기판을 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장부위의 검사를 행하고, 이 검사결과에 근거하여 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치에 있어서, 불량내용에 따라서 다른 형상을 가지는 불량부위 식별마크에 의해서 불량부위를 나타낸 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A component mounting region on the substrate is inspected based on the light receiving data obtained by receiving the reflected light from the substrate and the position of the component mounting region indicated by the defective portion identification mark on the basis of the inspection result And a layout drawing means for creating the layout drawing showing the defective portion by a defective portion identification mark having a different shape in accordance with the defective content in the inspection result output device for producing the layout diagram and outputting the layout diagram And outputting the inspection result. 제1항에 있어서, 상기 불량부위 식별마크의 형상을 적절히 변경할 수 있는 것을 특징으로 하는 검사결과 출력장치.The inspection result output apparatus according to claim 1, wherein the shape of the defective-portion identification mark can be appropriately changed. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장부위의 검사를 행하고, 이 검사결과에 근거하여 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장부위의 레이아웃도를 작성하며, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 상기 레이아웃도의 지정된 영역의 확대도를 표시하는 동시에, 이 확대도에 나타낸 영역의 위치를 표시한 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A component mounting area on the substrate is inspected based on the light receiving data obtained by receiving the reflected light and the position of the component mounting area indicating the position of the defective area by the defective area identification mark based on the inspection result A test result output device for producing a layout diagram and outputting the layout diagram, comprising: a layout for displaying an enlarged view of a specified area of the layout diagram and for creating the layout diagram showing the position of the area shown in the enlarged view; Wherein the inspection result outputting means outputs the inspection result. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하고, 이 검사결과에 근거하여 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하며, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 지정된 불량부위의 불량내용을 문자표시하는 동시에, 이 문자표시와 지정된 불량부위에 대응하는 불량부위 식별마크를 인출선으로서 관련지은 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A component mounting area on the substrate is inspected based on the light receiving data obtained by receiving the reflected light and the position of the component mounting area indicating the position of the defective area by the defective area identification mark based on the inspection result A test result output device for producing a layout diagram and outputting the layout diagram, characterized in that the content of a defective portion of a designated defective portion is displayed as a character and the defective portion identification mark corresponding to the designated defective portion is associated as a lead line And a layout drawing means for creating the layout drawing. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하며, 이 검사결과에 근거하여 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 각 부품실장 부위에서의 불량발생 이력을 표시한 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A component mounting region on the substrate is inspected based on the light receiving data obtained by receiving the reflected light from the substrate and the position of the defective portion is indicated by the defective portion identification mark based on the inspection result, A test result output device for producing a layout diagram and outputting the layout diagram, comprising layout diagram generating means for generating the layout diagram showing a failure occurrence history at each component mounting site Device. 기판검사장치에 의한 기판의 부품실장 부위의 검사결과에 의거하고 불량부위 식별마크에 의해서 불량부위의 위치를 냐타낸 부품실장 부위의 레이아웃도를 작성하며, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 불량내용에 따라서 형성이 다른 불량부위 식별마크에 의해서 불량부위를 나타낸 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A test result output apparatus for producing a layout diagram of a component mounting region based on a result of inspection of a component mounting region of a substrate by a substrate inspection apparatus and indicating a position of a defective region by a defective region identification mark And layout layout creating means for creating the layout layout showing a defective portion by a defective portion identification mark having a different formation according to the defective contents. 제6항에 있어서, 상기 불량부위 식별마크의 형상을 적절히 변경할 수 있는 것을 특징으로 하는 검사결과 출력장치.The inspection result output apparatus according to claim 6, wherein the shape of the defective-portion identification mark can be appropriately changed. 기판검사장치에 의한 기판의 부품실장 부위의 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 상기 레이아웃도의 지정된 영역의 확대도를 표시하는 동시에, 이 확대도에 나타난 영역의 위치를 표시한 상기 레이아웃도를 작성사는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A test result output device for producing a layout diagram of a component mounting area indicating a position of a defective part by a defective area identification mark on the basis of the inspection result of the component mounting area of the substrate by the substrate inspection apparatus and outputting the layout diagram And a layout diagram generating means for generating the layout diagram in which the enlarged view of the area designated by the layout diagram is displayed and the position of the area indicated by the enlarged view is displayed. 기판검사장치에 의한 기판의 부품실장 부위의 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 지정된 불량부위의 불량내용을 문자표시하는 동시에, 이 문자표시와 지정된 불량부위에 대응하는 불량부위 식별마크를 인출선에 의해서 관련지은 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A test result output device for producing a layout diagram of a component mounting area indicating a position of a defective part by a defective area identification mark on the basis of the inspection result of the component mounting area of the substrate by the substrate inspection apparatus and outputting the layout diagram And a layout drawing means for displaying the content of the defective portion of the designated defective portion in a character and creating the layout diagram in which the defective portion identification mark corresponding to the designated defective portion is associated with the outgoing line A test result output device. 기판검사장치에 의한 기판의 부품실장 부위의 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 각 부품실장 부위에서의 불량발생이력을 표시한 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치.A test result output device for producing a layout diagram of a component mounting area indicating a position of a defective part by a defective area identification mark on the basis of the inspection result of the component mounting area of the substrate by the substrate inspection apparatus and outputting the layout diagram And layout diagram generating means for generating the layout diagram showing a failure occurrence history at each component mounting site. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하는 기판검사장치와, 이 기판검사장치에 의한 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 불량내용에 따라서 형상이 다른 불량부위 식별마크에 의해서 불량부위를 나타낸 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치로서 구성되는 기판검사시스템.A substrate inspection apparatus for inspecting a component mounting site on a substrate based on light reception data obtained by irradiating the substrate with light and receiving the reflected light, and a defect inspection apparatus A layout diagram of a component mounting area showing a position of a defective part is created and a layout diagram showing a defective area by a defective area identification mark having a different shape according to the defective content is created And a layout diagram generating means for generating a layout layout of the inspection result output device. 제11항에 있어서, 상기 불량부위 식별마크의 형상을 적절히 변경할 수 있는 것을 특징으로 하는 기판검사시스템.The substrate inspection system according to claim 11, wherein the shape of the defective-portion identification mark can be appropriately changed. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하는 기판검사장치와, 이 기판검사장치에 의한 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 상기 레이아웃도의 지정된 영역의 확대도를 표시하는 동시에, 이 확대도에 나타난 영역의 위치를 표시한 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치로서 구성되는 기판검사시스템.A substrate inspection apparatus for inspecting a component mounting site on a substrate based on light receiving data obtained by irradiating the substrate with light and receiving the reflected light, and a defect inspection apparatus A test result output apparatus for producing a layout diagram of a component mounting region indicating a position of a defective portion and outputting the layout diagram, the apparatus comprising: display means for displaying an enlarged view of a designated region of the layout diagram, And a layout diagram generation unit configured to generate the layout diagram in which the layout table is displayed. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수요데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하는 기판검사장치와, 이 기판검사장치에 의한 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 지정된 불량부위의 불량내용을 문자표시하는 동시에, 이 문자표시와 지정된 불량부위에 대응하는 불량부위 식별마크를 인출선에 의해서 관련지은 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치로서 구성되는 기판검사시스템.A substrate inspection apparatus for inspecting a component mounting site on a substrate on the basis of demand data obtained by irradiating the substrate with light and receiving the reflected light, and a defect inspection apparatus A test result output apparatus for producing a layout diagram of a component mounting site showing a position of a defective portion and outputting the layout diagram, characterized by comprising: character display means for displaying a content of a defective portion of a designated defective portion; And a layout diagram creating means for creating the layout diagram in which the defective-portion identification mark is associated with the lead-out line. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하는 기판검사장치와, 이 기판검사장치에 의한 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 검사결과 출력장치로서, 각 부품실장 부위에서의 불량발생 이력을 표시한 상기 레이아웃도를 작성하는 레이아웃도 작성수단을 구비하는 것을 특징으로 하는 검사결과 출력장치로서 구성되는 기판검사시스템.A substrate inspection apparatus for inspecting a component mounting site on a substrate based on light receiving data obtained by irradiating the substrate with light and receiving the reflected light, and a defect inspection apparatus A test result output apparatus for producing a layout diagram of a component mounting region indicating a position of a defective portion and outputting the layout diagram, comprising layout diagram generating means for generating the layout diagram showing a failure occurrence history at each component mounting site And the inspection result output device is configured as a test result output device. 기판의 부품실장 부위의 검사결과에 근거하여, 불량내용에 따라서 다른 형상을 갖는 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력하는 것을 특징으로 하는 검사결과 출력방법.A layout diagram of the component mounting region indicating the position of the defective portion by the defective-portion identification mark having the different shape according to the defective content is created on the basis of the inspection result of the component mounting region of the substrate, Of the test results. 제16항에 있어서, 상기 불량부위 식별마크의 형상을 적절히 변경할 수 있는 것을 특징으로 하는 검사결과 출력방법.The test result output method according to claim 16, wherein the shape of the defective-portion identification mark can be appropriately changed. 기판의 부품실장 부위의 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도에, 지정된 영역의 확대도를 표시하는 동시에, 이 확대도에 나타난 영역의 위치를 표시하고, 이 확대도에 나타낸 영역의 위치를 표시한 레이아웃도를 출력하는 것을 특징으로 하는 검사결과 출력방법.A layout view of a component mounting area indicating the position of a defective area by a defective area identification mark is created on the basis of the result of inspection of the component mounting area of the substrate and an enlarged view of the area designated in this layout view is displayed, Wherein the position of the area shown in the enlarged view is displayed and a layout diagram showing the position of the area shown in the enlarged view is outputted. 기판의 부품실장 부위의 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도상에 지시된 불량부위의 불량내용을 문자표시하는 동시에 이 문자표시와 지시된 불량부위에 대응하는 불량부위 식별마크를 인출선에 의해서 관련짓고, 이 불량내용과 불량부위 식별마크를 인출선에 의해서 관련지은 레이아웃도를 출력하는 것을 특징으로 하는 검사결과 출력방법.A layout diagram of the component mounting region indicating the position of the defective region by the defective region identification mark is created based on the inspection result of the component mounting region of the substrate and the defective content of the defective region indicated by the layout map is displayed Wherein the character display and the defective area identification mark corresponding to the designated defective area are associated with each other by a lead line and a layout diagram in which the defective content and the defective area identification mark are associated by the lead line is output. Way. 기판의 부품실장 부위의 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도상에, 각 부품실장 부위에서의 불량발생 이력을 표시하고, 이 불량발생 이력을 표시한 레이아웃도를 출력하는 것을 특징으로 하는 검사결과 출력방법.A layout diagram of a component mounting area indicating the position of a defective area by a defective area identification mark is created on the basis of the inspection result of the component mounting area of the substrate, And outputs a layout diagram showing the failure occurrence history. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하고, 이 검사결과에 근거하여, 불량내용에 따라서 다른 형상을 가지는 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도를 출력한는 것을 특징으로 하는 기판검사방법.The inspection of the component mounting site on the substrate is performed based on the light receiving data obtained by receiving the reflected light from the substrate, and based on the inspection result, the defective area identification mark having a different shape in accordance with the defective content A layout view of a component mounting area indicating a position of a part is created, and the layout view is outputted. 제21항에 있어서, 상기 불량부위 식별마크의 형상을 적절히 변경할 수 있는 것을 특징으로 하는 기판검사방법.The substrate inspection method according to claim 21, wherein the shape of the defective-portion identification mark can be appropriately changed. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하고, 이 검사결과에 근거하여 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도상에, 지정된 영역의 확대도를 표시하는 동시에, 이 확대도에 나타난 영역의 위치를 표시하고, 이 확대도에 나타난 영역의 위치를 표시한 레이아웃도를 출력하는 것을 특징으로 하는 기판검사방법.A component mounting area on the substrate is inspected based on the light reception data obtained by receiving the reflected light and the position of the component mounting area indicating the position of the defective area by the defective area identification mark based on the inspection result A layout diagram is created, an enlarged view of the designated area is displayed on the layout map, a position of the area shown in the enlarged view is displayed, and a layout diagram showing the position of the area shown in the enlarged view is output Wherein the substrate is inspected. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하고, 이 검사결과에 근거하여, 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하며, 이 레이아웃도상에 지시된 불량부위의 불량내용을 문자표시하는 동시에 이 문자표시와 지시된 불량부위에 대응하는 불량부위 식별마크를 인출선에 의해서 관련짓고, 이 불량내용과 불량부위 식별마크를 인출선에 의해서 관련지은 레이아웃도를 출력하는 것을 특징으로 하는 기판검사방법.The component mounting area on the substrate is inspected based on the light receiving data obtained by receiving the reflected light from the substrate, and based on the inspection result, the component mounting area indicating the position of the defective area by the defective area identification mark And the defective portion of the defective portion indicated by the layout icon is displayed as a character. At the same time, the character display and the defective portion identification mark corresponding to the designated defective portion are associated with the outline, And outputs a layout diagram in which the defective-portion identification mark is associated with the lead-out line. 기판에 빛을 조사하고, 이 반사광을 수광하여 얻어지는 수광데이터에 근거하여 기판상의 부품실장 부위의 검사를 행하고, 이 검사결과에 근거하여 불량부위 식별마크에 의해서 불량부위의 위치를 나타낸 부품실장 부위의 레이아웃도를 작성하고, 이 레이아웃도상에, 각 부품실장 부위에서의 불량발생 이력을 표시하고, 이 불량발생 이력을 표시한 레이아웃도를 출력하는 것을 특징으로 하는 기판검사방법.A component mounting area on the substrate is inspected based on the light receiving data obtained by receiving the reflected light and the position of the component mounting area indicating the position of the defective area by the defective area identification mark based on the inspection result A layout diagram is created, a defect occurrence history at each component mounting site is displayed on the layout layout, and a layout diagram showing the defect occurrence history is output. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960011705A 1995-04-20 1996-04-18 Inspection result output device and inspection result output method, and substrate inspection system using this inspection result output device and substrate inspection method using this inspection result output method KR100205733B1 (en)

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