KR960025280U - 박막 형성장치 - Google Patents
박막 형성장치Info
- Publication number
- KR960025280U KR960025280U KR2019940036648U KR19940036648U KR960025280U KR 960025280 U KR960025280 U KR 960025280U KR 2019940036648 U KR2019940036648 U KR 2019940036648U KR 19940036648 U KR19940036648 U KR 19940036648U KR 960025280 U KR960025280 U KR 960025280U
- Authority
- KR
- South Korea
- Prior art keywords
- thin film
- film forming
- forming device
- thin
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940036648U KR200160726Y1 (en) | 1994-12-28 | 1994-12-28 | Device for forming a thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940036648U KR200160726Y1 (en) | 1994-12-28 | 1994-12-28 | Device for forming a thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR960025280U true KR960025280U (ko) | 1996-07-22 |
| KR200160726Y1 KR200160726Y1 (en) | 1999-11-15 |
Family
ID=19403413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019940036648U Expired - Lifetime KR200160726Y1 (en) | 1994-12-28 | 1994-12-28 | Device for forming a thin film |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200160726Y1 (ko) |
-
1994
- 1994-12-28 KR KR2019940036648U patent/KR200160726Y1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR200160726Y1 (en) | 1999-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UA0108 | Application for utility model registration |
Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19941228 |
|
| N231 | Notification of change of applicant | ||
| UN2301 | Change of applicant |
Comment text: Notification of Change of Applicant Patent event code: UN23011R01D Patent event date: 19960214 |
|
| UG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| UA0201 | Request for examination |
Patent event date: 19970228 Patent event code: UA02012R01D Comment text: Request for Examination of Application Patent event date: 19941228 Patent event code: UA02011R01I Comment text: Application for Utility Model Registration |
|
| E701 | Decision to grant or registration of patent right | ||
| UE0701 | Decision of registration |
Patent event date: 19990528 Comment text: Decision to Grant Registration Patent event code: UE07011S01D |
|
| REGI | Registration of establishment | ||
| UR0701 | Registration of establishment |
Patent event date: 19990819 Patent event code: UR07011E01D Comment text: Registration of Establishment |
|
| UR1002 | Payment of registration fee |
Start annual number: 1 End annual number: 3 Payment date: 19990820 |
|
| UG1601 | Publication of registration | ||
| LAPS | Lapse due to unpaid annual fee |