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KR200160726Y1 - Device for forming a thin film - Google Patents

Device for forming a thin film Download PDF

Info

Publication number
KR200160726Y1
KR200160726Y1 KR2019940036648U KR19940036648U KR200160726Y1 KR 200160726 Y1 KR200160726 Y1 KR 200160726Y1 KR 2019940036648 U KR2019940036648 U KR 2019940036648U KR 19940036648 U KR19940036648 U KR 19940036648U KR 200160726 Y1 KR200160726 Y1 KR 200160726Y1
Authority
KR
South Korea
Prior art keywords
forming
thin film
thin
film
Prior art date
Application number
KR2019940036648U
Other languages
Korean (ko)
Other versions
KR960025280U (en
Inventor
Kyung Wha Cho
Jeon Hoe Ku
Tae Gyun Jeong
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority to KR2019940036648U priority Critical patent/KR200160726Y1/en
Publication of KR960025280U publication Critical patent/KR960025280U/en
Application granted granted Critical
Publication of KR200160726Y1 publication Critical patent/KR200160726Y1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019940036648U 1994-12-28 1994-12-28 Device for forming a thin film KR200160726Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940036648U KR200160726Y1 (en) 1994-12-28 1994-12-28 Device for forming a thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940036648U KR200160726Y1 (en) 1994-12-28 1994-12-28 Device for forming a thin film

Publications (2)

Publication Number Publication Date
KR960025280U KR960025280U (en) 1996-07-22
KR200160726Y1 true KR200160726Y1 (en) 1999-11-15

Family

ID=19403413

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940036648U KR200160726Y1 (en) 1994-12-28 1994-12-28 Device for forming a thin film

Country Status (1)

Country Link
KR (1) KR200160726Y1 (en)

Also Published As

Publication number Publication date
KR960025280U (en) 1996-07-22

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19941228

N231 Notification of change of applicant
UN2301 Change of applicant

Comment text: Notification of Change of Applicant

Patent event code: UN23011R01D

Patent event date: 19960214

UG1501 Laying open of application
A201 Request for examination
UA0201 Request for examination

Patent event date: 19970228

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19941228

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19990528

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19990819

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19990820

UG1601 Publication of registration
LAPS Lapse due to unpaid annual fee