KR950033487A - 용량식 센서장치 - Google Patents
용량식 센서장치 Download PDFInfo
- Publication number
- KR950033487A KR950033487A KR1019950012506A KR19950012506A KR950033487A KR 950033487 A KR950033487 A KR 950033487A KR 1019950012506 A KR1019950012506 A KR 1019950012506A KR 19950012506 A KR19950012506 A KR 19950012506A KR 950033487 A KR950033487 A KR 950033487A
- Authority
- KR
- South Korea
- Prior art keywords
- output voltage
- sensor device
- capacitive sensor
- capacitance
- integrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000003990 capacitor Substances 0.000 claims abstract 6
- 238000007599 discharging Methods 0.000 claims abstract 4
- 230000001133 acceleration Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000010354 integration Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Other Air-Conditioning Systems (AREA)
Abstract
(목적) 저응답성이고 또한 소출력전압의 연산증폭기로 구성할 수 있고, 또 샘플홀드회로가 불필요한 용량검출기를 제공함으로서 용량식센서의 회로규모를 작게하는 것이다.
(구성) 본 용량검출기는 센서용량(2)을 충방전시키는 스위치(1,3)와 센서부(2)를 충방시킴으로써 생긴 충전 또는 방전전류를 적분하는 콘덴서(6)와 연산증폭기(7)로 구성되는 적분기와, 연산증폭기(7)의 출력전압을 방전하고, 이 충전전하를 적분기에 피드백하는 스위치(5)와 콘덴서(4)로 구성된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 용량식 센서장치의 기본회로도, 제2도는 종래의 용량식 센서장치의 기본회로도, 제3도는 제2도의 연산증폭기의 출력파형도.
Claims (10)
- 센서부의 정전용량의 변화에 의하여 물리량을 검출하는 용량식센서에 있어서, 상기 정전용량을 충방전시키는 수단과, 상기 정전용량을 충방전시킴으로써 생기는 충전 또는 방전하는 전류를 적분하는 적분수단과, 상기 적분수단의 출력전압을 충전하는 콘덴서와, 상기 콘덴서에 충전된 전하를 상기 적분수단에 피드백하는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
- 제1항에 있어서, 상기 적분수단의 출력전압의 직류레벨을 일정하게 유지하는 유지수단을 가지는 것을 특징으로 하는 용량식 센서장치.
- 제2항에 있어서, 정전기력에 의하여 상기 센서부에 구성된 콘덴서의 용량치를 변화시킴으로써, 출력전압을 변화시키는 수단을 가지고, 그 수단에 의하여 변화한 출력전압이 상기 유지수단에 의하여 일정하게 되돌리기 위한 시간으로 부터 고정의 여부를 판단하는 것을 특징으로 하는 용량식 센서장치.
- 제2항에 있어서, 기동시에 상기 출력전압의 직류레벨을 전원기동시에 단시간으로 일정치에 도달시키는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
- 제1항에 있어서, 상기 출력전압을 적분하는 수단과 상기 용량검출기의 출력전압을 적분하는 수단의 출력에 따라 옵셋전압을 변화시키는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
- 제5항에 있어서, 상기 출력전압을 적부하는 수단의 적분정수를 변화시키는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
- 제1항 내지 제6항중 어느 한 항에 있어서, 상기 물리량은 가속도인 것을 특징으로 하는 용량식 가속도 센서장치.
- 제1항 내지 제6항중 어느 한 항에 있어서, 상기 물리량은 압력인 것을 특징으로 하는 용량식 압력센서장치.
- 센서부에 구성된 콘덴서의 정전용량의 변화에 의하여 물리량을 교류성분의 검출에 의하여 구하는 용량식 센서장치에 있어서, 상기 콘덴서의 용량치가 미리 결정된 용량치로부터 벗어났을 때 출력 전압을 전원전압 또는 접지전압에 접속하는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
- 제9항에 있어서, 상기 전원전압 또는 접지전압에 접속하는 수단에 의하여 상기 출력전압이 전원전압 또는 접지전압에 접속되었을 때 고정이라고 판단하는 수단을 구비한 것을 특징으로 하는 용량식 센서장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP94-117913 | 1994-05-31 | ||
JP11791394A JP3216955B2 (ja) | 1994-05-31 | 1994-05-31 | 容量式センサ装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950033487A true KR950033487A (ko) | 1995-12-26 |
Family
ID=14723282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950012506A Withdrawn KR950033487A (ko) | 1994-05-31 | 1995-05-19 | 용량식 센서장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5659254A (ko) |
JP (1) | JP3216955B2 (ko) |
KR (1) | KR950033487A (ko) |
DE (1) | DE19520049C2 (ko) |
Cited By (1)
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---|---|---|---|---|
KR20030008832A (ko) * | 2001-07-20 | 2003-01-29 | 에스브이 주식회사 | 가속도센서용 정전형 전하증폭기 |
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US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
US5754056A (en) * | 1996-04-23 | 1998-05-19 | David Sarnoff Research Center, Inc. | Charge detector with long integration time |
JP3264884B2 (ja) * | 1998-05-11 | 2002-03-11 | 三菱電機株式会社 | 容量検出回路 |
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US8933712B2 (en) | 2012-01-31 | 2015-01-13 | Medtronic, Inc. | Servo techniques for approximation of differential capacitance of a sensor |
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WO2015037550A1 (ja) * | 2013-09-13 | 2015-03-19 | アルプス電気株式会社 | 静電容量-電圧変換装置 |
JP6515477B2 (ja) * | 2014-10-06 | 2019-05-22 | 大日本印刷株式会社 | 力学量センサおよび力学量測定装置 |
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-
1994
- 1994-05-31 JP JP11791394A patent/JP3216955B2/ja not_active Expired - Fee Related
-
1995
- 1995-05-19 KR KR1019950012506A patent/KR950033487A/ko not_active Withdrawn
- 1995-05-31 US US08/455,712 patent/US5659254A/en not_active Expired - Lifetime
- 1995-05-31 DE DE19520049A patent/DE19520049C2/de not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030008832A (ko) * | 2001-07-20 | 2003-01-29 | 에스브이 주식회사 | 가속도센서용 정전형 전하증폭기 |
Also Published As
Publication number | Publication date |
---|---|
US5659254A (en) | 1997-08-19 |
JPH0815306A (ja) | 1996-01-19 |
DE19520049C2 (de) | 1997-08-28 |
DE19520049A1 (de) | 1995-12-07 |
JP3216955B2 (ja) | 2001-10-09 |
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Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19950519 |
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