[go: up one dir, main page]

KR950033487A - 용량식 센서장치 - Google Patents

용량식 센서장치 Download PDF

Info

Publication number
KR950033487A
KR950033487A KR1019950012506A KR19950012506A KR950033487A KR 950033487 A KR950033487 A KR 950033487A KR 1019950012506 A KR1019950012506 A KR 1019950012506A KR 19950012506 A KR19950012506 A KR 19950012506A KR 950033487 A KR950033487 A KR 950033487A
Authority
KR
South Korea
Prior art keywords
output voltage
sensor device
capacitive sensor
capacitance
integrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019950012506A
Other languages
English (en)
Inventor
마사히로 마쯔모또
세이꼬우 스즈끼
마사유끼 미끼
마사요시 스즈끼
게이지 한자와
다까오 사사야마
Original Assignee
가나이 쯔도무
가부시끼가이샤 히다찌세이사꾸쇼
도모지 이누이
히다찌 오토모티브 엔지니어링 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가나이 쯔도무, 가부시끼가이샤 히다찌세이사꾸쇼, 도모지 이누이, 히다찌 오토모티브 엔지니어링 가부시끼가이샤 filed Critical 가나이 쯔도무
Publication of KR950033487A publication Critical patent/KR950033487A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Other Air-Conditioning Systems (AREA)

Abstract

(목적) 저응답성이고 또한 소출력전압의 연산증폭기로 구성할 수 있고, 또 샘플홀드회로가 불필요한 용량검출기를 제공함으로서 용량식센서의 회로규모를 작게하는 것이다.
(구성) 본 용량검출기는 센서용량(2)을 충방전시키는 스위치(1,3)와 센서부(2)를 충방시킴으로써 생긴 충전 또는 방전전류를 적분하는 콘덴서(6)와 연산증폭기(7)로 구성되는 적분기와, 연산증폭기(7)의 출력전압을 방전하고, 이 충전전하를 적분기에 피드백하는 스위치(5)와 콘덴서(4)로 구성된다.

Description

용량식 센서장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 용량식 센서장치의 기본회로도, 제2도는 종래의 용량식 센서장치의 기본회로도, 제3도는 제2도의 연산증폭기의 출력파형도.

Claims (10)

  1. 센서부의 정전용량의 변화에 의하여 물리량을 검출하는 용량식센서에 있어서, 상기 정전용량을 충방전시키는 수단과, 상기 정전용량을 충방전시킴으로써 생기는 충전 또는 방전하는 전류를 적분하는 적분수단과, 상기 적분수단의 출력전압을 충전하는 콘덴서와, 상기 콘덴서에 충전된 전하를 상기 적분수단에 피드백하는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
  2. 제1항에 있어서, 상기 적분수단의 출력전압의 직류레벨을 일정하게 유지하는 유지수단을 가지는 것을 특징으로 하는 용량식 센서장치.
  3. 제2항에 있어서, 정전기력에 의하여 상기 센서부에 구성된 콘덴서의 용량치를 변화시킴으로써, 출력전압을 변화시키는 수단을 가지고, 그 수단에 의하여 변화한 출력전압이 상기 유지수단에 의하여 일정하게 되돌리기 위한 시간으로 부터 고정의 여부를 판단하는 것을 특징으로 하는 용량식 센서장치.
  4. 제2항에 있어서, 기동시에 상기 출력전압의 직류레벨을 전원기동시에 단시간으로 일정치에 도달시키는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
  5. 제1항에 있어서, 상기 출력전압을 적분하는 수단과 상기 용량검출기의 출력전압을 적분하는 수단의 출력에 따라 옵셋전압을 변화시키는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
  6. 제5항에 있어서, 상기 출력전압을 적부하는 수단의 적분정수를 변화시키는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
  7. 제1항 내지 제6항중 어느 한 항에 있어서, 상기 물리량은 가속도인 것을 특징으로 하는 용량식 가속도 센서장치.
  8. 제1항 내지 제6항중 어느 한 항에 있어서, 상기 물리량은 압력인 것을 특징으로 하는 용량식 압력센서장치.
  9. 센서부에 구성된 콘덴서의 정전용량의 변화에 의하여 물리량을 교류성분의 검출에 의하여 구하는 용량식 센서장치에 있어서, 상기 콘덴서의 용량치가 미리 결정된 용량치로부터 벗어났을 때 출력 전압을 전원전압 또는 접지전압에 접속하는 수단을 가지는 것을 특징으로 하는 용량식 센서장치.
  10. 제9항에 있어서, 상기 전원전압 또는 접지전압에 접속하는 수단에 의하여 상기 출력전압이 전원전압 또는 접지전압에 접속되었을 때 고정이라고 판단하는 수단을 구비한 것을 특징으로 하는 용량식 센서장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950012506A 1994-05-31 1995-05-19 용량식 센서장치 Withdrawn KR950033487A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-117913 1994-05-31
JP11791394A JP3216955B2 (ja) 1994-05-31 1994-05-31 容量式センサ装置

Publications (1)

Publication Number Publication Date
KR950033487A true KR950033487A (ko) 1995-12-26

Family

ID=14723282

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950012506A Withdrawn KR950033487A (ko) 1994-05-31 1995-05-19 용량식 센서장치

Country Status (4)

Country Link
US (1) US5659254A (ko)
JP (1) JP3216955B2 (ko)
KR (1) KR950033487A (ko)
DE (1) DE19520049C2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030008832A (ko) * 2001-07-20 2003-01-29 에스브이 주식회사 가속도센서용 정전형 전하증폭기

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5754056A (en) * 1996-04-23 1998-05-19 David Sarnoff Research Center, Inc. Charge detector with long integration time
JP3264884B2 (ja) * 1998-05-11 2002-03-11 三菱電機株式会社 容量検出回路
JP2000065664A (ja) * 1998-08-26 2000-03-03 Hitachi Ltd 静電容量式力学量センサ
KR100404887B1 (ko) 1999-01-20 2003-11-10 주식회사 엘지화학 리튬 이차 전지
EP1183555A4 (en) * 1999-03-17 2003-03-05 Input Output Inc hydrophone
WO2001031351A1 (en) * 1999-10-15 2001-05-03 Microsensors, Inc. Highly configurable capacitive transducer interface circuit
WO2001063771A1 (de) * 2000-02-25 2001-08-30 Sensirion Ag Sensor und sigma-delta-konverter
TW449973B (en) * 2000-03-17 2001-08-11 Novatek Microelectronics Corp Circuit for detecting the middle point of pulse
JP4553084B2 (ja) * 2000-12-11 2010-09-29 株式会社豊田中央研究所 物理量検出回路
JP4336066B2 (ja) * 2001-07-11 2009-09-30 株式会社豊田中央研究所 静電容量型センサ装置
DE10134680A1 (de) * 2001-07-20 2003-02-06 Endress & Hauser Gmbh & Co Kg Schaltungsanrdnung für einen kapazitiven Sensor
SG104277A1 (en) * 2001-09-24 2004-06-21 Inst Of Microelectronics Circuit for measuring changes in capacitor gap using a switched capacitor technique
US7129714B2 (en) * 2002-07-02 2006-10-31 Baxter Larry K Capacitive measurement system
US20040004488A1 (en) * 2002-07-02 2004-01-08 Baxter Larry K. Capacitive sensor circuit with good noise rejection
AU2002344117A1 (en) * 2002-10-22 2004-05-13 Hokuto Electronics, Inc. Potential fixing device, potential fixing method, and capacitance mearuing instrument
FR2856475B1 (fr) * 2003-06-20 2005-10-14 Commissariat Energie Atomique Capteur capacitif de mesure et procede de mesure associe
US6970126B1 (en) * 2004-06-25 2005-11-29 Analog Devices, Inc. Variable capacitance switched capacitor input system and method
JP4455201B2 (ja) * 2004-07-20 2010-04-21 富士通マイクロエレクトロニクス株式会社 検出回路
EP1677084A1 (fr) * 2004-12-22 2006-07-05 Roxer Industries S.A. Capteur de niveau d'un liquide et méthode d'estimation.
DE102005038875A1 (de) * 2005-05-25 2006-11-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kapazitätsmessschaltung
US7301350B2 (en) * 2005-06-03 2007-11-27 Synaptics Incorporated Methods and systems for detecting a capacitance using sigma-delta measurement techniques
US7902842B2 (en) * 2005-06-03 2011-03-08 Synaptics Incorporated Methods and systems for switched charge transfer capacitance measuring using shared components
KR101340860B1 (ko) * 2005-06-03 2013-12-13 시냅틱스, 인코포레이티드 시그마 델타 측정 기술들을 사용하여 캐패시턴스를검출하기 위한 방법들 및 시스템
US7449895B2 (en) * 2005-06-03 2008-11-11 Synaptics Incorporated Methods and systems for detecting a capacitance using switched charge transfer techniques
US7288946B2 (en) * 2005-06-03 2007-10-30 Synaptics Incorporated Methods and systems for detecting a capacitance using sigma-delta measurement techniques
US7777501B2 (en) * 2005-06-03 2010-08-17 Synaptics Incorporated Methods and systems for sigma delta capacitance measuring using shared component
KR20080063358A (ko) * 2005-10-26 2008-07-03 이너지 오토모티브 시스템즈 리서치 (소시에떼 아노님) 용량 게이지
FR2892509B1 (fr) * 2005-10-26 2007-12-21 Inergy Automotive Systems Res Jauge capacitive pour reservoir a carburant
JP2008008688A (ja) * 2006-06-27 2008-01-17 Yamatake Corp 容量式圧力センサ
US7786738B2 (en) * 2007-09-19 2010-08-31 Robert Bosch Gmbh Cancelling low frequency errors in MEMS systems
US20110169768A1 (en) * 2008-07-08 2011-07-14 Kenichi Matsushima Electrostatic detection device, information apparatus, and electrostatic detection method
TWI361280B (en) * 2008-07-18 2012-04-01 Raydium Semiconductor Corp Evaluation circuit for capacitance and method thereof
US9395850B2 (en) 2008-10-06 2016-07-19 Japan Display Inc. Coordinate input device and display device with the same
TWI381173B (zh) * 2008-10-29 2013-01-01 Raydium Semiconductor Corp 電容量測電路及其電容量測方法
TWI425402B (zh) * 2009-05-25 2014-02-01 Elan Microelectronics Corp Sensing method and circuit for capacitive touch panel
JP2010160789A (ja) * 2009-01-09 2010-07-22 Elan Microelectronics Corp 静電容量式タッチパネルの検出回路及び検出方法
CN102609160B (zh) * 2009-01-22 2015-03-18 义隆电子股份有限公司 电容式触控板的检测方法
US8125231B2 (en) * 2009-01-28 2012-02-28 Freescale Semiconductor, Inc. Capacitance-to-voltage interface circuit, and related operating methods
CN101907962B (zh) * 2009-06-03 2014-09-24 义隆电子股份有限公司 用于电容式触控板的感测方法及电路
US8258797B2 (en) 2009-06-24 2012-09-04 Synaptics Incorporated Capacitive sensor interference determination
TWI528250B (zh) * 2009-06-25 2016-04-01 Elan Microelectronics Corp Object Detector and Method for Capacitive Touchpad
CN101996010B (zh) * 2009-08-14 2015-05-27 义隆电子股份有限公司 电容式触控板的感测电路及方法
TWI410849B (zh) * 2009-10-19 2013-10-01 Orise Technology Co Ltd 電容式觸控面板的感測電路
JP5218385B2 (ja) * 2009-12-17 2013-06-26 三菱電機株式会社 容量型物理量検出装置及び容量型物理量検出方法
US20110163768A1 (en) * 2010-01-05 2011-07-07 Sain Infocom Touch screen device, capacitance measuring circuit thereof, and method of measuring capacitance
JP2011179822A (ja) * 2010-02-26 2011-09-15 Hitachi Automotive Systems Ltd 物理量センサ
JP5287785B2 (ja) * 2010-04-07 2013-09-11 株式会社デンソー 静電容量式物理量センサ回路
US8688393B2 (en) * 2010-07-29 2014-04-01 Medtronic, Inc. Techniques for approximating a difference between two capacitances
JP2012093113A (ja) * 2010-10-25 2012-05-17 Panasonic Corp 静電容量式加速度センサ
US9762234B2 (en) 2011-02-10 2017-09-12 Synaptics Incorporated Input device interference determination
US9482633B2 (en) * 2011-12-30 2016-11-01 Lexmark International, Inc. Capacitive measurement multiplexing circuit and method
US8933712B2 (en) 2012-01-31 2015-01-13 Medtronic, Inc. Servo techniques for approximation of differential capacitance of a sensor
US9274643B2 (en) 2012-03-30 2016-03-01 Synaptics Incorporated Capacitive charge measurement
US9238249B2 (en) 2012-08-21 2016-01-19 Texas Instruments Incorporated Ultrasound transmitter
WO2015037550A1 (ja) * 2013-09-13 2015-03-19 アルプス電気株式会社 静電容量-電圧変換装置
JP6515477B2 (ja) * 2014-10-06 2019-05-22 大日本印刷株式会社 力学量センサおよび力学量測定装置
JP6466140B2 (ja) * 2014-11-06 2019-02-06 日本航空電子工業株式会社 加速度計、加速度計出力フィルタ回路
ITUA20164739A1 (it) * 2016-06-29 2017-12-29 St Microelectronics Srl Circuito di test di uno stadio circuitale a lunga costante di tempo e relativo metodo di test
WO2020090374A1 (ja) * 2018-10-30 2020-05-07 日本たばこ産業株式会社 エアロゾル生成装置の電源ユニット、エアロゾル生成装置の電源ユニットの制御方法、およびエアロゾル生成装置の電源ユニット用プログラム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886447A (en) * 1972-05-17 1975-05-27 Iwatsu Electric Co Ltd Capacitance-voltage converter
US4644304A (en) * 1981-08-17 1987-02-17 The Regents Of The University Of Calif. Switched-capacitor pseudo-n-path filter
US4543546A (en) * 1983-04-20 1985-09-24 Magnavox Government And Industrial Electronics Company Switched capacitor circuit with minimized switched capacitance
US4531106A (en) * 1983-10-04 1985-07-23 At&T Technologies, Inc. Switched capacitor circuits
US5166630A (en) * 1989-05-24 1992-11-24 Motorola, Inc. Low current switched capacitor circuit
DE4142101A1 (de) 1991-11-28 1993-06-03 Lueder Ernst Prof Dr Ing Druckmessanordnung mit hoher linearitaet
JP3162149B2 (ja) * 1992-02-12 2001-04-25 株式会社日立製作所 静電容量式センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030008832A (ko) * 2001-07-20 2003-01-29 에스브이 주식회사 가속도센서용 정전형 전하증폭기

Also Published As

Publication number Publication date
US5659254A (en) 1997-08-19
JPH0815306A (ja) 1996-01-19
DE19520049C2 (de) 1997-08-28
DE19520049A1 (de) 1995-12-07
JP3216955B2 (ja) 2001-10-09

Similar Documents

Publication Publication Date Title
KR950033487A (ko) 용량식 센서장치
KR910001399A (ko) 에너지 용량 측정 회로
US4347740A (en) Capacitive level sensing device
KR950030486A (ko) 파워 온 리세트 회로
EP0819531A3 (en) Liquid discharging head, head cartridge and liquid discharge apparatus
KR960037430A (ko) 콘덴서 용량진단회로
KR950003829A (ko) 용량 센서 회로 및 전기 장치
CA1061016A (en) Smoke sensing fire alarm
AU2003281085A1 (en) System for detecting the level of liquid in a tank
DE60215827D1 (de) Impedanzmessschaltung und kapazitätsmessschaltung
US9461635B2 (en) Signal processing circuit
JPS5651674A (en) Level detecting circuit
KR830009480A (ko) 리액턴스 측정회로
US7071709B2 (en) Circuit for detecting capacitance change in variable capacitance
NO20011439D0 (no) Elektrostatisk armeringsanordning for et eksplosivt prosjektil
WO2003036235A3 (en) Dryness measurement device
US5625305A (en) Load detection apparatus
KR840005557A (ko) 아나로그 신호적분 · 디지탈 신호 변환 회로
KR910005065A (ko) 절연저항 측정장치
KR980006703A (ko) 3레벌 전력 변환기의 콘덴서 용량 판정장치
KR100230769B1 (ko) 게이트 신호 발생 안정화회로
FI73549B (fi) Kopplingsanordning foer att aostadkomma en av en vaexelspaenning beroende styrlikspaenning.
JPS55151273A (en) Battery capacity display unit
JP2769911B2 (ja) 感圧回路
KR890016446A (ko) 마이크로 프로세서 초기 설정 보장 시스템

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19950519

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid