KR940021330U - Vacuum shutoff valves for semiconductor equipment - Google Patents
Vacuum shutoff valves for semiconductor equipmentInfo
- Publication number
- KR940021330U KR940021330U KR2019930001541U KR930001541U KR940021330U KR 940021330 U KR940021330 U KR 940021330U KR 2019930001541 U KR2019930001541 U KR 2019930001541U KR 930001541 U KR930001541 U KR 930001541U KR 940021330 U KR940021330 U KR 940021330U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor equipment
- shutoff valves
- vacuum shutoff
- vacuum
- valves
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019930001541U KR950007914Y1 (en) | 1993-02-06 | 1993-02-06 | Vacuum shutoff valves for semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019930001541U KR950007914Y1 (en) | 1993-02-06 | 1993-02-06 | Vacuum shutoff valves for semiconductor equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940021330U true KR940021330U (en) | 1994-09-24 |
| KR950007914Y1 KR950007914Y1 (en) | 1995-09-25 |
Family
ID=19350413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019930001541U KR950007914Y1 (en) | 1993-02-06 | 1993-02-06 | Vacuum shutoff valves for semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR950007914Y1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101023728B1 (en) * | 2004-06-29 | 2011-03-25 | 엘지디스플레이 주식회사 | Rod part of sputter |
-
1993
- 1993-02-06 KR KR2019930001541U patent/KR950007914Y1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101023728B1 (en) * | 2004-06-29 | 2011-03-25 | 엘지디스플레이 주식회사 | Rod part of sputter |
Also Published As
| Publication number | Publication date |
|---|---|
| KR950007914Y1 (en) | 1995-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| UA0108 | Application for utility model registration |
Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19930206 |
|
| UA0201 | Request for examination |
Patent event date: 19930206 Patent event code: UA02012R01D Comment text: Request for Examination of Application |
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| UG1501 | Laying open of application | ||
| UG1604 | Publication of application |
Patent event code: UG16041S01I Comment text: Decision on Publication of Application Patent event date: 19950831 |
|
| E701 | Decision to grant or registration of patent right | ||
| UE0701 | Decision of registration |
Patent event date: 19951223 Comment text: Decision to Grant Registration Patent event code: UE07011S01D |
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| REGI | Registration of establishment | ||
| UR0701 | Registration of establishment |
Patent event date: 19960322 Patent event code: UR07011E01D Comment text: Registration of Establishment |
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| UR1002 | Payment of registration fee |
Start annual number: 1 End annual number: 3 Payment date: 19960322 |
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| UR1001 | Payment of annual fee |
Payment date: 19980901 Start annual number: 4 End annual number: 4 |
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| UR1001 | Payment of annual fee |
Payment date: 19990817 Start annual number: 5 End annual number: 5 |
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| UR1001 | Payment of annual fee |
Payment date: 20000818 Start annual number: 6 End annual number: 6 |
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| UR1001 | Payment of annual fee |
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| UR1001 | Payment of annual fee |
Payment date: 20020820 Start annual number: 8 End annual number: 8 |
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| UR1001 | Payment of annual fee |
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| UR1001 | Payment of annual fee |
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| UR1001 | Payment of annual fee |
Payment date: 20050822 Start annual number: 11 End annual number: 11 |
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| UR1001 | Payment of annual fee |
Payment date: 20060818 Start annual number: 12 End annual number: 12 |
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| FPAY | Annual fee payment |
Payment date: 20070827 Year of fee payment: 13 |
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| UR1001 | Payment of annual fee |
Payment date: 20070827 Start annual number: 13 End annual number: 13 |
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| EXPY | Expiration of term | ||
| UC1801 | Expiration of term |
Termination category: Expiration of duration Termination date: 20081110 |